

SUSTAINABILITY | ASML Annual Report 2024 | 3 |
Our technology drives faster, more powerful and energy- efficient microchips that help society tackle important challenges. This continuous innovation can only be achieved through the strong partnerships we build with our various stakeholders, working together to create solutions for a more sustainable future for everyone. | |||||||||
Powering technology forward | |||||||||
with local communities | |||||||||
with customers | with our people | with suppliers | with partners | ||||||
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1. Strategic report | ||||||
Forward-looking statements | Our business strategy | |||||
At a glance | Our business model | |||||
In conversation with our CEO | Engaged stakeholders | |||||
![]() | Performance and risk | |||||
Message from our CFO | ||||||
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Our business | ||||||
Our holistic approach to lithography | ||||||
Our products and services | Financial performance | |||||
Supporting our customers | Risk | |||||
Driving innovation | Corporate conduct | |||||
Our marketplace | ||||||
2. Corporate governance | |||||
Corporate governance | Meetings and attendance | ||||
Board of Management | Supervisory Board committees | ||||
Supervisory Board | Financial statements and profit allocation | ||||
Other Board-related matters | |||||
AGM and share capital | Remuneration report | ||||
Financial reporting and audit | Message from the Chair of the Remuneration Committee | ||||
Compliance with corporate governance requirements | |||||
Remuneration at a glance | |||||
Supervisory Board report | Remuneration Committee | ||||
An interview with our Chair of the Supervisory Board | Board of Management remuneration | ||||
Supervisory Board remuneration | |||||
Supervisory Board focus in 2024 | Other information | ||||
3. Sustainability statements | |||||
Limited assurance report of the independent auditor on the Sustainability statements | Environmental | ||||
Energy efficiency and climate action | |||||
General disclosures | Circular economy | ||||
Basis for preparation | EU Taxonomy | ||||
ESG sustainability governance | Social | ||||
ESG sustainability at a glance | Attractive workplace for all | ||||
Our value chain overview | Responsible value chain | ||||
Impact, risk and opportunity management | Innovation ecosystem | ||||
Valued partner in our communities | |||||
Contributing to the UN's SDGs | Governance | ||||
Metrics | ESG integrated governance | ||||
Reference table | |||||
4. Financial statements | |||||
Consolidated financial statements | Consolidated statements of cash flows | ||||
Report of independent registered public accounting firm | |||||
Notes to the Consolidated financial statements | |||||
Consolidated statements of operations | |||||
Consolidated statements of comprehensive income | Other appendices | ||||
Definitions | |||||
Consolidated balance sheets | Exhibit index | ||||
Consolidated statements of shareholders’ equity | |||||
A definition or explanation of abbreviations, technical terms and other terms used throughout this Annual Report can be found in the Definitions section. In some cases, numbers have been rounded for readers’ convenience. This report comprises regulated information within the meaning of articles 1:1 and 5:25c of the Dutch Financial Markets Supervision Act (Wet op het Financieel Toezicht). The sections Strategic report, Corporate governance, Supervisory Board report and Sustainability statements (except for the Limited assurance report of the independent auditor on the Sustainability statements) together form the Management Report. | In this report the name ‘ASML’ is sometimes used for convenience in contexts where reference is made to ASML Holding NV and/or any of its subsidiaries, as the context may require. References to our website and/or video presentations in this Annual Report are for reference only and none nor any portion thereof are incorporated by reference in this report. © 2024, ASML Holding NV. All Rights Reserved. |

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SUSTAINABILITY | ASML Annual Report 2024 | 6 |
Why we exist – our purpose | What we try to achieve – our vision | What we uniquely do – our mission | ||||||||||||||||||
As one of the leading innovators in the semiconductor industry, ASML has been helping chipmakers push technology to new limits and solve some of society’s toughest challenges since 1984. Together, our hardware, software and services provide a holistic lithography approach to mass- producing the patterns of microchips. We design and integrate lithography systems with computational tools, metrology and inspection systems, and process control software solutions – helping chipmakers achieve their highest yields and best performance. | ||||||||||||||||||||
Unlocking the potential of people and society by pushing technology to new limits. | We enable groundbreaking technology to solve some of humanity’s toughest challenges. | Together with our partners, we provide leading patterning solutions that drive the advancement of microchips. | ||||||||||||||||||
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We live by our values to drive success | ||||||||||||||||||||
We challenge | We collaborate | We care | ||||||||||||||||||
By questioning the status quo and pushing boundaries, keeping technology moving forward. | By tapping into the collective potential of our ecosystem of customers, suppliers, partners and stakeholders, creating better solutions. | By acting with integrity and respect, and providing a safe, inclusive and trusting environment where our people can learn and grow. | ||||||||||||||||||

SUSTAINABILITY | ASML Annual Report 2024 | 7 |
€28.3bn |
Total net sales |
€22.4bn Asia €4.5bn US €1.3bn EMEA |
583 |
Net system sales (in units) |
5,150 |
Total suppliers |
1,600 in the Netherlands 750 in EMEA (excl. NL) 1,400 in North America 1,400 in Asia |
€4.3bn |
R&D costs |
We innovate across our entire product portfolio through strong investment in R&D |
32.8 kt |
Scope 1 and 2 CO2e emissions |
12.0 Mt |
Scope 3 CO2e emissions |
88% |
Reuse rate of parts returned from field and factory |
51.3% |
Gross margin |
60+ |
Locations |
3 |
Continents |
148 |
Nationalities |
21% | |
Women in entire workforce (headcount) | |
€1,084 |
Amount invested per employee, including employee giving |

SUSTAINABILITY | ASML Annual Report 2024 | 8 |
We are committed to powering people and technology forward with you.” | |
Christophe Fouquet | |
President, Chief Executive Officer and Chair of the Board of Management |
At the 2024 AGM, Christophe Fouquet was appointed President, Chief Executive Officer and Chair of the Board of Management of ASML, succeeding Peter Wennink and Martin van den Brink. In this Q&A session, Christophe outlines the key achievements of the last 12 months, his priorities as the company continues to grow rapidly, and his expectations for the years ahead. | ||||
Q | Looking back at the year, what were the standout moments? | In 2024, we celebrated the 40th anniversary of ASML, and while this was a moment for us to come together to reflect on the past, it was also an opportunity to look ahead. ASML was once a small, obscure company that nobody had heard of, but its role in our industry and in society has changed dramatically over the last four decades. Driven by our strong relationships with our customers, who are always our top priority, we have grown to become an undeniably important global company – but of course, ASML cannot and will not stand still. There is always more that can and must be done. As we expected, 2024 was a year of transition – not only in terms of the leadership team, but also from a market point of view. The business again performed very well, as we explain in detail elsewhere in this report, growing sales to €28.3 billion, up by 2.6% over 2023. Our gross margin was 51.3%, similar to last year and we paid dividends totaling €2.5 billion, while our backlog stands at around a healthy €36 billion. | ||
There were many! This was a period when we installed the industry’s first High NA extreme ultraviolet (EUV) lithography system, achieved financial performance in line with expectations, delivered on our environmental, social and governance (ESG) commitments and continued to lay down plans that will ensure that ASML maintains and extends its standing as one of the world’s great technology companies. As many stakeholders have told me, the transition from Peter and Martin to me was as smooth as a Formula One pit stop, and I thank them both for their support. Great credit is due for their astonishing legacy of innovation which is helping the world rise to its biggest challenges, from climate change and the energy transition to unleashing the full benefits of artificial intelligence (AI). | ||||
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Celebrating the 40th anniversary of ASML | ||||

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Q | What were the major innovations that helped ASML push technology forward? |
Innovation is the heartbeat of our company, and in 2024 it was very pleasing to finalize the first installation of our High NA EUV system (TWINSCAN EXE:5000) at one of our major customers. Ten years in the making, High NA EUV (EUV 0.55 NA) has been a huge investment for ASML and demanded seamless collaboration with partners and customers who have invested in the next generation of tools. We are very happy that High NA EUV is now operational and playing its part in moving Moore’s Law forward. | |
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We’ll continue to enable many of the solutions that are transforming our planet.” | |
Christophe Fouquet | |
President, Chief Executive Officer and Chair of the Board of Management | |
However, serving customers well requires more than just the latest and greatest products – it also means focusing on all the other essential yet less newsworthy innovations that are so important to our customers. It gave us real satisfaction to ship the first TWINSCAN NXE:3800E, increasing productivity by more than 35% as compared to its predecessor, the TWINSCAN NXE:3600D, and also to take a major step in deep ultraviolet (DUV) with the shipment of the first TWINSCAN NXT:870B, which delivers major progress on productivity, overlay and cost per exposure compared to its predecessor, the TWINSCAN NXT:870. There are many other examples of how our innovations are continuing to deliver demonstrable improvements for our customers – in areas from immersion lithography systems to metrology, control solutions and multibeam technology. | ||||
Q | Where do you see future growth coming from? | |||
As we shared at the 2024 Investor Day, during the last 12 months AI has come to life and proved itself to be a major force. It is going to drive new applications and growth in the next five to ten years – there’s no doubt about this, and a lot of our peers in the industry have also expressed similarly bullish views about the opportunity ahead. Today, its impact is mainly evident in the sales of very advanced servers and high-power computing. But we expect that there is a lot more to come – we don’t know exactly in what form, or when and how, but it will for sure be a very important factor for our industry, with transformational and positive consequences for ASML and for society. | ||||
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The more diverse the people we welcome to ASML, the more opportunities we have to enrich what we do every day.” | |
Christophe Fouquet | |
President, Chief Executive Officer and Chair of the Board of Management | |
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If I look at the future growth of ASML, then of course lithography remains one of the key drivers of Moore’s Law, and we believe this will continue to be true for many, many years. At the same time, as we realized several years ago, 2D shrink is becoming more and more difficult. This is not necessarily because of limitations in lithography, but because we have almost reached the limitations of the transistors that our Logic and Memory customers are using. In order to continue to make progress on 2D shrink, we need architecture and device innovation. That means 3D front-end integration, which will in turn present a growth opportunity for us – because 3D integration depends on bonding and this requires holistic lithography. I think that 3D integration is set to be an increasingly important complementary technology, or set of technologies, to 2D shrink. | ||||
Q | Stakeholders are integral to ASML’s success. How do you engage and collaborate with them? | |||
Our stakeholder relationships – with customers, employees, suppliers, shareholders and society – are incredibly important to us and we work hard to create and maintain strong relationships with them. Trust is an essential part of partnership, and while we’ve successfully focused on building trust with our customers, we are now striving to extend that notion to all of our stakeholders. That means sharing our future vision, being transparent about what comes next and how a particular stakeholder can play a role. | ||||
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Regular customer engagement helps us to understand our customers’ needs and can shape our technology development to meet them – fostering collaboration that not only enhances customer satisfaction but also supports our market position. We could not meet customer needs without the support of our suppliers, who provide essential components and materials, and help us maintain the high quality and reliability of our products. Strong partnerships with suppliers also promote innovation, enabling us to develop cutting-edge solutions together. Ultimately, the success of our customers and the strength of our supply chain are intertwined, making both groups absolutely central to our business strategy. | |
Engagement with broader society, including local communities and governments in the regions around the world we operate in, is equally important. For example, we are engaging and investing proactively in the region around our Veldhoven headquarters, working hand in hand with the community. In fact, there has been a significant discussion this year about strengthening the industry in the Brainport Eindhoven region and the Netherlands, through partnerships and funding from authorities and industry that are designed to create societal solutions and fuel future economic growth in a responsible way. By collaborating with the Brainport Eindhoven community, we can build a future that works for ASML as well as for the broader society. We also want to partner with the government in order to address some of the complex geopolitical questions that we face. As a global company that is also a Dutch and European champion, we need to work alongside our government to help us move forward, to ensure our interests are represented and to shape an outcome that is good for Europe, for the Netherlands and for ASML. | |||
SUSTAINABILITY | ASML Annual Report 2024 | 11 |
Q | Sustainability is an important topic for all stakeholders. How is ASML performing? | |||
The technology sector can fundamentally support other industries and society to achieve critical ESG targets. For example, the industry will require major innovation to reduce cost and energy consumption related to AI – this will drive collaborative advancements that benefit the entire ecosystem. We have the chance to contribute in ways beyond what we do here at ASML. Some of these ways are showcased in case studies throughout this report, and they are a real source of pride and motivation for a lot of our people. I’m pleased with the progress we have made on scope 1, 2 and 3 emissions. I believe our environmental programs are strong and meaningful, and put us and our industry well ahead of many other industries. For the first time, we shipped a DUV system and a metrology system via sea instead of air in 2024. This is a relatively minor example of how we’re addressing ESG, but it shows how wide we cast the net when looking for ways to make a difference. For us, ESG has never been a fad or a fleeting fashion. It is simply the right thing to do – not only for ASML, but for everybody else too. As you can see from the extensive Sustainability statements section in this Annual Report, the ASML team has done a tremendous job preparing for the newly announced ESRS (European Sustainability Reporting Standards) reporting requirements. We are reporting as of this year in accordance with those ESRS requirements – an extraordinary achievement. | ||||
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The technology sector can fundamentally support other industries and society to achieve critical ESG targets.” | |
Christophe Fouquet | |
President, Chief Executive Officer and Chair of the Board of Management | |

Q | What are your top priorities for 2025 and beyond? |
A key priority is to continue to align with our customers’ roadmaps. Our customers face a lot of difficult choices in the next few years – and they have to make sure that the technology they choose can deliver the outcomes they need. We’re aware that the move to the next technology in our lithography systems could potentially come with very high costs for our customers. Our task – and our opportunity – is to understand how we can help them, and to develop products and services that will enable them to achieve their quality goals at the lowest possible risk and the lowest possible cost. For me this is crucial, and it is a key priority on the technology side. As always, we focus on our people, and specifically on how we can help them to take ASML to new levels. In recent months, I’ve stressed the importance of everybody at ASML taking ownership of what they do. I’ve also explained that to enable people to own their actions, we need greater simplification. | |

These two threads have become a crusade that will be increasingly evident in the months ahead. The combination of ownership and simplification is a powerful engine that will help our people innovate better and more. Another important mission is to make sure that everybody feels that ASML is a place where they can realize their full potential. This has been a challenge in the last few years due to our rapid growth and the huge increases in headcount. But now we’re redoubling our efforts – we’re committed to making sure that ASML is somewhere that talented people have space to be creative, where they can collaborate with highly skilled colleagues and take us to the next level of innovation. | ||||
Q | How can the ASML culture support you in achieving those aims? | |||
Without doubt, it has a major role to play. A lot has changed over the last 40 years. The industry has moved on, customer expectations have ramped up, and the opportunities for technology have exploded. And while our culture and diverse workforce has been instrumental in getting us to where we are today, we need to constantly raise the bar and make sure it is totally aligned with the task ahead. | ||||

SUSTAINABILITY | ASML Annual Report 2024 | 12 |
Over the next few pages we share how we’re powering technology |
forward. |

Q | What’s the business outlook for 2025? | |||
Looking at the big picture, the long-term outlook for our industry is very strong despite the continuing geopolitical tensions, with semiconductors playing a major role as mission-critical enablers of multiple megatrends in society. Although the rest of the market is recovering more slowly than anticipated, the emergence of AI is a significant opportunity. We expect that global semiconductor sales will grow by 9% compound annual growth rate over the period 2025 to 2030 and passing the $1 trillion mark in 2030. The industry will require major innovations to address the need to improve cost and energy consumption on AI, and this will require further boosting the industry roadmap. | ||||

SUSTAINABILITY | ASML Annual Report 2024 | 13 |
We’ve transformed our business to get closer to our customers – increasing their voice throughout the business, creating a cross-functional team empowered to make decisions quickly in the field, and improving the performance of our installed base. Read more about what we hope to achieve – and how we’re balancing innovation with delivering quality – in this Q&A with Jim Koonmen, Executive Vice President and Chief Customer Officer at ASML. | |
Read now | |

SUSTAINABILITY | ASML Annual Report 2024 | 14 |
with | |||||
With the semiconductor industry projected to grow to $1 trillion in sales by 2030, ASML will need to grow to meet customer and market demand – and our new people strategy sets out how we’ll do that. Read more about how we’re setting ourselves up for future success – without losing the essence of what made us the company we are today – in this Q&A with Cristina Monteiro, Head of Human Resources & Organization at ASML. | |||||
Read now | |||||

SUSTAINABILITY | ASML Annual Report 2024 | 15 |
Our systems comprise thousands of parts, most of which come from our suppliers – they are an essential part of our innovation ecosystem. Read more about how we’re better aligning with our suppliers – ensuring they can keep pace with our growth trajectory, while supporting their own – in this Q&A with Wayne Allan, Executive Vice President and Chief Strategic Sourcing & Procurement Officer at ASML. | |
Read now | |

SUSTAINABILITY | ASML Annual Report 2024 | 16 |
In 2024, imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, and ASML opened the High NA EUV Lithography Lab in Veldhoven, the Netherlands, which is jointly run by ASML and imec. It marks a milestone in preparing High NA EUV lithography for accelerated adoption in mass manufacturing. | |
Read now | |

SUSTAINABILITY | ASML Annual Report 2024 | 17 |
We value the support and contribution of the communities we’re part of, and we feel a responsibility and a desire to give back to them. True to our mantra – Small acts. Big impact. Thrive together – ASML employees worldwide are playing a vital role in making an impact. Watch how we’re providing technical training for people with refugee backgrounds in the Netherlands, supporting food banks in Taiwan, and mentoring young people in the US. | |
Watch now | |

SUSTAINABILITY | ASML Annual Report 2024 | 18 |

SUSTAINABILITY | ASML Annual Report 2024 | 19 |
What is edge placement error (EPE)? | ||
Creating a microchip involves the patterning of tiny features in precise locations. EPE is the difference between the intended and the printed features of the layout of a microchip. Take, for example, a line with right and left edges – on a microchip, this line and its edges must be precise and placed in exact locations. Any deviation, no matter how slight, can result in misalignment, or an EPE. If one or more EPE issues crop up in the microchip production flow, the device is subject to shorts, which could cause the entire chip to fail. |

SUSTAINABILITY | ASML Annual Report 2024 | 20 |
Creating value in our customers’ fabs | ||
Because lithography is a critical step in the chip manufacturing process where the wafer is processed die by die – and therefore has a greater impact on performance than any other – ASML’s technology is pivotal in our customers’ semiconductor fabrication plants (or ‘fabs’). Our holistic approach helps increase lithography systems’ availability, reduce overall costs, and optimize yield for our customers. | ||
Steps in the microchip manufacturing process: | ||
1.Deposition – The first step is typically to deposit different materials – such as metals/conductors, insulation films and semiconductors – onto a silicon wafer. 2.Photoresist coating – The wafer is then coated with a light-sensitive layer called a photoresist. 3.Lithography – Light is projected onto the wafer through a reticle. Optics shrink and focus the reticle pattern. This pattern is then printed onto the wafer when the resist layer is exposed to light. 4.Baking, developing and etching – The wafer is baked and developed to make the pattern permanent, with a pattern of open spaces. Reactive gases are used to etch away material from the open spaces, leaving a 3D version of the pattern. 5.Ion implantation – The wafer may be bombarded with positive or negative ions to tune the semiconductor properties. 6.Removing photoresist – After the layer is etched or ionized, the remainder of the photoresist coating that was protecting areas not to be etched is removed. The entire microchip manufacturing process – from start to tested and packaged device, ready for shipment – can take half a year, depending on the complexity of the microchip. | ||

SUSTAINABILITY | ASML Annual Report 2024 | 21 |
Maximizing the process window | ||
Our holistic approach to lithography integrates a set of products – enabling chipmakers to develop, optimize and control the semiconductor production process. | ||
Lithography and all other stages in the microchip manufacturing process must be closely aligned for an optimal result. Within lithography, the process window is the collection of acceptable variations of process parameters that allow a microchip to be manufactured and to operate under desired specifications. By incorporating computational lithography, metrology and inspection, ASML’s holistic lithography portfolio enables customers to maximize the process window – keeping lithography systems stable in a high-volume manufacturing setting, which leads to a higher yield with more good wafers per day. Lithography is the only step in the microchip manufacturing process in which in-line adjustments can be made to optimize performance. It would be impossible for our lithography systems to manufacture chips at such increasingly small dimensions without the software we develop. Our system and process control software products enable automated control loops to maintain optimal operation of lithography processes and therefore maximize yield. As a result, our lithography systems are a hybrid of high-tech hardware and advanced software. Our development teams work across a range of coding practices, providing innovative solutions to the intricate problems affecting the chipmaking systems at the heart of the semiconductor industry. | ||

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Extreme ultraviolet (EUV) lithography systems |

New for 2024: Our new NXE:3800E system boosts productivity and reduces error | ||
In 2024, we installed the first TWINSCAN NXE:3800E systems. This system is the successor to the TWINSCAN NXE:3600D and includes a higher-power light source, a new wafer handler and faster wafer stages. | It increases productivity by more than 35% – up to 220 wafers per hour (wph), compared to 160 wph using the NXE:3600D – while driving consistent overlay accuracy across different tools (matched machine overlay) down to 0.9 nm, compared to 1.1 nm with the NXE:3600D. | |
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Extreme ultraviolet (EUV) lithography systems |


New for 2024: High NA EUV success with our TWINSCAN EXE:5000 |

SUSTAINABILITY | ASML Annual Report 2024 | 24 |
Deep ultraviolet (DUV) lithography systems |
New in 2024 |

SUSTAINABILITY | ASML Annual Report 2024 | 25 |
Deep ultraviolet (DUV) lithography systems |
New in 2024 |
Refurbished systems |
New in 2024: NXT refurbishment | ||
In 2023, after years of refurbishing PAS and XT systems, we expanded our refurbished systems portfolio by adding NXT systems. We shipped the first refurbished NXT 1980Di system from our TWINSCAN factory to a customer in 2024, addressing a specific market segment that requires it. While we continue to produce new NXT systems, the NXT 1980Di refurbishment represents an impressive enhancement to our portfolio, utilizing a new industrialized approach for volume, efficiency, quality and cost. |

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Metrology and inspection systems |
New in 2024 |

SUSTAINABILITY | ASML Annual Report 2024 | 27 |
Metrology and inspection systems |
New in 2024 |
SUSTAINABILITY | ASML Annual Report 2024 | 28 |
System and process control software |
Computational lithography |
Managing our installed base system |
New in 2024 | ||
Computational lithography is advancing rapidly, focusing on enhancing the performance of lithography processes used in semiconductor manufacturing. Recent developments include improved algorithms for optical proximity correction (OPC) and source-mask optimization (SMO), which enhance pattern fidelity and resolution. Machine-learning techniques are increasingly being applied to predict and mitigate manufacturing variations, leading to better yield and efficiency. | ||

SUSTAINABILITY | ASML Annual Report 2024 | 29 |
Where we operate – more than 60 locations across 3 continents | ||||||
![]() | Asia | |||||
China Japan Malaysia Singapore South Korea Taiwan | ||||||
![]() | North America | |||||
Arizona California Colorado Connecticut Idaho Massachusetts | New Mexico New York Oregon Texas Utah Virginia | |||||
![]() | EMEA | |||||
Belgium France Germany Ireland Israel Italy Netherlands United Kingdom | ||||||

SUSTAINABILITY | ASML Annual Report 2024 | 30 |
Using the Rayleigh criterion to drive innovation | ||||||
At ASML, we optimize the Rayleigh criterion equation to reduce the critical dimension so our lithography systems can print ever-smaller features. | ||||||
Wavelength (lambda, λ) | Numerical aperture (NA) | k1 factor | ||||
Over the years, ASML’s lithography systems have used shorter wavelengths of light to shrink chip features. We started with i-line systems using 365 nm ultraviolet (UV) light and added deep ultraviolet (DUV) systems with 248 nm light (KrF) and, later, 193 nm light (ArF). With the addition of our extreme ultraviolet (EUV) systems that use light with a wavelength of 13.5 nm – almost x-ray range – we enabled a significant leap in resolution. | One way that we increase NA – and therefore shrink chip features – is by using larger lenses and mirrors in our lithography systems. Another way is by using a technique called immersion. Our ArF immersion systems (DUV) leverage water’s higher refractive index by maintaining a thin layer of water between the last lens element and the wafer to increase the system’s NA. | Together with our computational lithography and patterning control software solutions, we provide the control loops for our customers to optimize their mask designs and illumination conditions. | ||||
Over the past 40 years, we’ve improved the resolution (critical dimension) of our systems by two orders of magnitude by making improvements to wavelength, NA and k1. | ||||||
Moore’s Law | ||||||
Why are we so focused on using the Rayleigh criterion to shrink chip features? In 1965, Intel co- founder Gordon Moore predicted that the number of transistors in an integrated circuit (IC) would double every year for the next decade. In 1975, he revised the prediction to every two years. His prediction has proved to be true – or, as some argue, a self-fulfilling prophecy. In the years that followed, this exponential growth led to significant increases in computing power and reductions in cost, driving rapid advances in technology and innovation in the semiconductor industry. Today, although physical limitations are making it more challenging to shrink transistors further, the semiconductor industry continues to boost performance using what Moore called ‘circuit and device cleverness’. Innovative chip designs, new materials, advanced packaging and complex 3D structures are sustaining the industry’s progress. ASML's lithography products play a crucial role in the affordable mass production of these advanced designs that are ensuring the continuation of Moore's Law and enabling future technological innovations. | ||||||
Rayleigh criterion |
The resolution of our lithography systems is crucial for shrinking the size of transistors on microchips. To be able to print sharper, finer details, we live by the Rayleigh criterion – the resolution equation that determines just how small the features that can be printed on a chip are. |
SUSTAINABILITY | ASML Annual Report 2024 | 31 |


SUSTAINABILITY | ASML Annual Report 2024 | 32 |
Filling the innovation funnel | |||||||||
We encourage our researchers to build wide networks in the broader technology space. This supports the constant stream of new ideas into the technology pipeline that flows through what we call our ‘innovation funnel’. Based on our fundamental understanding of our markets and the needs of our customers, we select new ideas with the potential to advance our products and their customer application. | |||||||||
Research teams | Development and engineering teams | ||||||||
Our research teams focus on generating and exploring exciting new ideas and demonstrating their feasibility. They scout for new ideas, which are then taken through the proof-of-concept stage. Those that pass the feasibility assessment and have a favorable value proposition are transferred to our development and engineering teams. | Guided by our product generation process, our engineers create new components, subsystems and applications, integrating them into a functional system, while ensuring we innovate with a strong focus on time to market. | ||||||||
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This starts with a holistic lithography solutions roadmap, which maps out the entire lithography product and services solutions space for the future. This in turn is broken down into product modules or technical building blocks, as well as service needs. For some of the building blocks, we need to pursue a technology feasibility study to ensure that the technology addresses our customers’ demands in terms of performance, cost and timing. | ||
ASML Fellowship Program | ||
We recognize and honor our technical experts because we know that our company’s success is built on technology leadership. One of the ways we do this is through the ASML Fellowship Program, which awards employees who make an outstanding technical contribution to ASML and are recognized both inside and outside the company as a top technical authority. In 2024, three new ASML Fellows were appointed and one of our current Fellows was promoted to the title of Senior Fellow. Former Chief Technology Officer Martin van den Brink was appointed Honorary Fellow, a special award honoring 40 years of his technical leadership. | ||
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SUSTAINABILITY | ASML Annual Report 2024 | 33 |
How we innovated in 2024 | ||
Our strategy is to give customers the products and capabilities they need to deliver on technology’s potential to make a positive contribution to society. As well as creating some of the most advanced machines in the world, this includes an increased focus on sustainability through parts commonality and reuse, and improvements in the performance and energy efficiency of our products to reduce costs and waste. A number of innovation achievements over the last 12 months include significant improvements in metrology solutions, enhancing the accuracy and speed of measurements with reference to currently available metrology solutions (YieldStar). We are further increasing the EUV source power in order to accommodate our customers’ dose requirements, while improving the conversion efficiency (energy used per photon output) and creating various options to increase the robustness and durability of our wafer tables. | ||
High NA EUV lithography: Inspired by the film industry | ||||
The anamorphic optics in our High NA EUV (0.55 NA) lithography systems are a unique solution to an intriguing problem: delivering the highest-resolution imaging without compromising on productivity. In lithography, light first hits a reticle with the blueprint of a chip layer. Projection optics then focus that light, now with the blueprint encoded in it, onto a photosensitive silicon wafer. Our High NA EUV lithography system requires larger mirrors to achieve its 8 nm resolution – but the size of the mirrors was initially causing imaging issues. Increasing the image's demagnification from 4x to 8x could have solved the problem, but would have required chipmakers to switch to larger reticles if they wanted to avoid slowing down production. | Instead, we teamed up with our long-time strategic partner ZEISS Semiconductor Manufacturing Technology to find a way to minimize High NA EUV’s impact on the semiconductor ecosystem. And we found our answer in the film industry. In cinematography, anamorphic cameras squeeze recorded images in one direction, so they can capture widescreen images at full resolution on standard-sized film. Anamorphic projectors then stretch the image to display it properly on movie screens. Using this approach as inspiration, together with ZEISS we developed anamorphic optics for lithography – giving chipmakers fast, High NA EUV imaging while still using the industry-standard reticle size. | |||

SUSTAINABILITY | ASML Annual Report 2024 | 34 |
We work closely with private partners to develop and deliver research and innovation projects subsidized by the EU and its member states. | |

SUSTAINABILITY | ASML Annual Report 2024 | 35 |
Globally: the major election year 2024 did see easing inflation and the real GDP growth was above 3%*. A strong US GDP growth was partly offset by lower growth in Europe and Japan. Geopolitical tensions continued to be high, while AI dominated the headlines in the semiconductor ecosystem. | |||||
The semiconductor market recovered from the 2023 downturn, but significant differences emerged among end markets and product groups. While the Memory market rebounded, industrial and automotive semiconductors faced corrections in 2024 and high inventory levels. The lithography market remained strong, with lower demand from key customers offset by increased shipments to China, supported by a high backlog built over previous years. After fulfilling this backlog, we anticipate a shift to more normalized sales levels to China moving forward. | We have strong confidence that the semiconductor ecosystem will continue to innovate and grow at a high single-digit compound annual growth rate. Factors that may impact our business – as explained in more detail over the next few pages – include: | ||||
1. | Macroeconomic and geopolitical trends | ||||
2. | Megatrends | ||||
3. | Semiconductor industry market | ||||
*Source: IMF World Economic Outlook, October 2024 | |||||
1. | Macroeconomic and geopolitical trends | ||||||||
Economic outlook | Global geopolitics – technological sovereignty | ||||||||
Description Analysts expect GDP growth to continue to stay above 3% for 2025 and 2026 with a recovery in Europe and Japan and a slight slowdown of growth in the US and China compared to 2024. This typically offers a good foundation for a positive semiconductor market trend. The 2024 market growth was dominated by AI which led to a surge in demand for AI-related Memory – both DDR (double data rate) and HBM (high-bandwidth memory) – and specific advanced Logic chips. This trend is expected to continue in 2025. The PC and smartphone markets are expected to continue to stay on the gradual growth trajectory while industrial and automotive semi markets, which did see a correction in 2024, are expected to pick up in the course of 2025. | What it means for ASML Our EUV business saw shifts in demand timing, predominantly driven by a lack of end-market demand and readiness of fabs. After the inventory correction in 2023, our customers started ramping up fabs again. The digestion of all inventory took longer than initially anticipated, delaying the need for new equipment – and meaning ASML saw a slight shift in demand timing. For DUV, demand was higher than we could deliver, particularly in China and for specific models. We are working closely with our customers and suppliers to optimize our output capability, ride out the uncertainty and manage the risks. | Description With the strategic importance of the semiconductor industry only likely to grow, semiconductors are crucial to the economic and strategic development of countries and regions. Many are pushing for ‘technological sovereignty’ to ensure security of supply, resilience and technological leadership in semiconductor technologies and applications – fueling capital expenditure in new regions. What it means for ASML As governments increasingly see semiconductor manufacturing as strategically significant, chips acts are incentivizing our customers to build manufacturing facilities in the US, Europe and Asia. As well as sharing our views with governments on semiconductor manufacturing, we work closely with our customers to build the semiconductor manufacturing ecosystem in these new regions, while retaining our focus on supporting incumbent regions. External factors such as the timing of subsidies and the risk of restrictions make forecasting market demand less predictable. | |||||||

SUSTAINABILITY | ASML Annual Report 2024 | 36 |
1. | Macroeconomic and geopolitical trends (continued) | |||||||
Global geopolitics – export controls | ||||||||
Description On June 24, 2024, the EU Council adopted the 14th package of restrictive measures against Russia – aiming to maximize the impact of existing sanctions by closing loopholes and emphasizing the EU’s goal to stop dual-use technology flowing to Russia. The regulation entered into force on June 25, 2024, with some measures focused on circumvention of the sanctions as well as the prohibition on transferring intellectual property rights with respect to dual-use goods taking effect on December 26, 2024. ASML is not involved in export to Russia or Belarus but undertakes continuous efforts to strengthen its robust risk assessment and due diligence processes as well as its policies, controls and procedures to mitigate and manage effectively the risks of indirect exportation to Russia and Belarus. On September 6, 2024, the Dutch government published an updated license requirement regarding the export of immersion DUV semiconductor equipment. As a result of the updated license requirements, and in line with US Export Administration Regulation, ASML needs to apply for export licenses with the Dutch government rather than the US government | for shipments of its TWINSCAN NXT:1970i and 1980i DUV immersion lithography systems. The Dutch export license requirement is already in place for the TWINSCAN NXT:2000i and subsequent DUV immersion systems. Sales of ASML’s EUV systems are also subject to license requirements. The updated license requirement published by the Dutch government came into effect from September 7, 2024. The Japanese regulations were also brought in line with the US and Dutch regulations on September 8, 2024. On December 2, 2024, the US authorities published an updated version of the advanced computing and semiconductor manufacturing equipment rule, imposing additional restrictions on suppliers for the export of chip manufacturing technology. These regulations became effective immediately with a delayed compliance date of December 31, 2024 for some of the changes.The updated export control regulations contain additions to the list of restricted technologies including metrology and software. In addition, further fab locations, mainly in China, were added to the US list of restrictions. | What it means for ASML ASML is fully committed to complying with all applicable laws and regulations including export control legislation in the countries in which we operate, while we continue to develop our technology and serve our customers to the best of our ability. ASML will continue to work with its worldwide customers to deliver lithography and metrology systems not impacted by the global export control restrictions and/ or sanctions. We continue to educate governments on the semiconductor manufacturing process and ecosystem to foster understanding of the potential impacts of current and future regulatory measures. | ||||||
2. | Megatrends | ||||||
The world is changing fast and semiconductors are a key enabler to help solve some of society's toughest challenges. In 2024, we have seen a strong growth in artificial intelligence (AI) technology, enabled by leading-edge semiconductor solutions, both in Advanced Logic as well as AI-related DRAM. AI is expected to further stimulate semiconductor solutions to tackle these big challenges and increase overall GDP growth. The continuing convergence of wireless communication, telecoms, media and cloud technology via connected devices is driving demand for advanced semiconductors across the globe. Growing populations, urbanization, the energy transition and electrification to support smart mobility are increasing demand for advanced electronic devices. AI requires leading-edge high- performance processor chips and a significant increase in DRAM memory chips compared to traditional compute architectures. It also stimulates the mainstream market, as AI requires large amounts of data collected via sensors which can be used to further drive robotics and workflow automation. | |||||||
Connected world | |||||||
•Internet of things •Hyperconnectivity •Cloud infrastructure •Edge computing | |||||||
Climate change and resource scarcity | |||||||
•Energy transition •Electrification, smart mobility •Agricultural innovation •Smarter use of limited resources | |||||||
Social and economic shifts | |||||||
•Working, learning remotely •Healthcare medical tech •Technological sovereignty •Automation | |||||||

SUSTAINABILITY | ASML Annual Report 2024 | 37 |
Connected world | |||
With the IoT, smart, connected networks of more energy-efficient devices seamlessly communicate over powerful 5G networks – unleashing the power of unprecedented data volumes better and faster than ever. In combination with AI, this provides people with more innovative functionalities and applications, improves human-to-machine interactions, and enhances data management and analytics. | |||
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2. | Megatrends (continued) |
Internet of things | |
Semiconductors are increasingly present in the world around us. Many of the products with semiconductors are directly or indirectly connected to the internet to maximize the benefits offered with the added silicon. AI further reinforces the value offered by these internet- connected devices as it allows them to capture data and use it to enhance the value of the device itself and also of other internet-connected devices. | |
Hyperconnectivity | |
5G enables a new kind of network designed to connect almost everyone and everything around the world – including machines, objects and devices. Person-to-person, person-to-machine and machine-to- machine communication are fueling large increases in bandwidth demand and changes in communications because of the complexity, diversity and integration of new applications and devices using the network. | |
Cloud infrastructure | |
To enable cloud computing – the on- demand availability of computer system resources, especially data storage and computing power – a cloud infrastructure is required. This includes hardware, software, storage and network resources. | |
Edge computing |
We are moving fast toward edge computing, which focuses on processing data closer to its source rather than in centralized data centers. The current era of mobile computing – where you bring the computer with you – is moving us into an immersive world of ubiquitous computing, with computing power available everywhere, driven by AI. What it means for ASML Moore’s Law is the guiding principle for the semiconductor industry and the motor behind its transition from mobile to ubiquitous computing. This transition continues to expand, driving the three main elements in computing – applications, data and algorithms – that feed each other in a virtuous cycle: applications generate data, which fuels new algorithms, which again leads to new applications that generate new data. The vast amounts of data and insights people can access are expected to fuel semiconductor business growth and the digital transformation. |
Climate change and resource scarcity | |
With an urgent collective response needed to limit global warming to 1.5°C, climate change is a crucial matter for governments, companies and individuals worldwide. | |
Energy transition | |
The shift to renewables is helping deliver the clean, affordable energy the world needs to counter climate change. Semiconductors are harnessing, converting, transferring and storing energy from sources such as solar and wind as electricity – and ensuring national power grids are both responsive and robust. They are at the core of smart (home) devices and play an important role in reducing overall energy consumption. | |
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Electrification and smart mobility |
Automotive is one of the fastest-growing market segments – driven by electrification, autonomy and other megatrends. Integrated automotive systems consist of a full range of scalable, flexible computing solutions that require advanced and mature semiconductor devices. Advanced driver- assistance systems enabled by electronics and semiconductors – considered ‘supercomputers on wheels’ – are also expected to contribute to the growth of the automotive segment in the semiconductor industry. In addition, across the world, people are changing their views about personal transport. Instead of owning expensive and environmentally harmful vehicles, they’re seeking car-sharing, ride-sharing, ride-hailing, micro-mobility (using small, low-speed, human- or electric-powered transportation devices) and micro-transit (on-demand shared private or semi-public transport). The technologies underpinning this move to smart mobility, such as mobile apps, are all enabled by semiconductors. |

SUSTAINABILITY | ASML Annual Report 2024 | 38 |
Climate change and resource scarcity (continued) | |
Agricultural innovation | |
Farmland in remote locations, particularly those with emerging economies, can be vulnerable to climate change. With access to mobile devices increasing, local farmers are using their smartphones in combination with smart sensors to improve agricultural knowledge and decision-making. The results are better crops and greater, more sustainable food security – enabled by smaller, more affordable microchips. | |
Smarter use of limited resources | |
The semiconductor industry can also play an important role by reducing its own climate impacts. The semiconductor manufacturing process consumes large volumes of energy and water, and driving Moore’s Law to enable shrink and improve computing power and storage capacity fuels demand for these vital resources. Innovative architectures and a new way of looking at the entire ecosystem will be required to enhance the industry’s energy and water resource efficiency. |
2. | Megatrends (continued) |
What it means for ASML Semiconductors play an important role in addressing climate change across various sectors. In the automotive industry, a shift toward electric vehicles and autonomous driving is expected to significantly increase the number of semiconductor components in cars. Additionally, the integration of digital technologies to support the energy transition and agricultural innovations relies on semiconductor solutions to enable smart grids and enhance agricultural practices. By advancing our EUV productivity roadmap, we help customers simplify complex multiple-patterning layers into a single exposure, thereby reducing resource consumption in the semiconductor manufacturing process. |
Read more in Sustainability statements – |
Social and economic shifts | |
Digital technologies are driving transformative change. They create new opportunities for a more prosperous future, but at the same time pose new challenges. | |
Working and learning remotely | |
Since the emergence of the COVID-19 pandemic, remote and hybrid working and learning have become increasingly prevalent. | |
Healthcare and medical tech | |
Predictive analysis of health data from multiple sources, combined with machine learning and AI, is being harnessed to improve healthcare services and patient outcomes. Semiconductor technology has allowed the creation of innovative products that can effectively detect, diagnose and treat various medical conditions. | |
Automation |
A new generation of lightweight robots connected to a wide network and fitted with smart sensors enable humans and machines to safely and efficiently work side by side, supported by AI. In addition, smart industry devices use real-time data analytics and machine-to-machine sensors to optimize processes, predict bottlenecks, and prevent errors and injuries. |
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What it means for ASML The ongoing digitalization of various sectors such as healthcare and manufacturing keeps on driving the need for semiconductors. The integration of digital technologies in these industries requires robust semiconductor solutions to enable efficient data processing, real-time analytics and connectivity. |

SUSTAINABILITY | ASML Annual Report 2024 | 39 |
3. | Semiconductor industry market |

SUSTAINABILITY | ASML Annual Report 2024 | 40 |
3. | Semiconductor industry market (continued) | |||||||||||||||||||||||||
Smartphone | Personal computing | Consumer electronics | Automotive | Industrial electronics | Wired and wireless infrastructure | Servers, data centers and storage | ||||||||||||||||||||
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Key driver | ||||||||||||||||||||||||||
Continued refresh of all semiconductor content including image sensors and edge AI processors | High-end compute and Memory, fast conversion to solid-state drive (SSD), edge AI processors | Both low-power and high-bandwidth connectivity, sensors | High-end processors for autonomous driving and power electronics for engine electrification | Connectivity, edge processors, sensors, power (control) electronics for the energy transition, and high- end processing for robotics | Continued innovation to increase bandwidth and reduce latency, requiring high-end processing | AI requiring high-end processing and DRAM, and cloud processing requiring advanced processing, NAND and DRAM | ||||||||||||||||||||
2025 estimated market size ($bn) | Total | |||||||||||||||||||||||||
149 | 92 | 70 | 76 | 84 | 53 | 156 | 679 | |||||||||||||||||||
2030 estimated market size ($bn) | ||||||||||||||||||||||||||
192 | 112 | 83 | 114 | 120 | 70 | 361 | 1,051 | |||||||||||||||||||
Outlook CAGR 2025–2030 (%) | ||||||||||||||||||||||||||
5% | 4% | 3% | 9% | 7% | 6% | 18% | 9% | |||||||||||||||||||
Source: Based on ASML analysis | ||||||||||||||||||||||||||

SUSTAINABILITY | ASML Annual Report 2024 | 41 |
Our business strategy consists of six priorities that will drive long-term growth | ||||||||||
Deepen customer trust | Extend our technology and holistic product leadership | |||||||||
1 | 2 | |||||||||
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•Innovate on our entire portfolio to continue to provide critical, differentiated and cost-effective solutions to our customers •Enable chipmakers in their pursuit of more powerful, smaller, cheaper, more integrated and more energy- efficient chips, with an affordable and holistic lithography roadmap across the entire ASML portfolio •Place cost and energy consumption reduction at the core of value creation for customers by continuing to simplify process flows, ensuring the highest transistor density at all process steps, and promoting technologies that scale improved productivity, lower costs of technology for customers and reduce emissions •Maximize good printed transistors from lithography by: a.Maximizing yield with AI-based process control, metrology and inspection b.Optimizing resolution with our DUV and EUV portfolio c.Enhancing productivity with system throughput and efficiency improvements d.Improving accuracy with solutions for overlay, critical dimension uniformity and EPE e.Support our customers’ front end 3D integration with holistic lithography | ![]() | |||||||||
•Deepen customer trust and satisfaction through increased value creation, focused on innovation, cost, quality, sustainability and response time •Strengthen partnerships with customers based on even deeper understanding and anticipation of their needs and product roadmaps •Increase the bandwidth, responsibility and accountability of our customer teams to deliver on customer requirements and carry the customer voice throughout the entire organization | •Simultaneously optimize total lithography cost by: a.Improving system cost with increased platform commonality b.Increasing system extendibility and improve lifetimes c.Reducing service and utility costs | |||||||||
Our market opportunity | ||
Based on different market scenarios shared during our 2024 Investor Day, we presented an opportunity to achieve the following: | ||
2030 | ||
€44–60bn | ||
Annual revenue | ||
56–60% | ||
Gross margin |

SUSTAINABILITY | ASML Annual Report 2024 | 42 |
3 | Strengthen ecosystem relationships | ||
•Foster even closer relationships with our suppliers and broader ecosystem, based on shared goals and responsibility for cost, quality and sustainability outcomes | |||
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4 | Create an exceptional workplace | ||
•Build a workplace that works for everyone: Fostering inclusion, diversity and belonging •Invest in people effectiveness and development •Strengthen our leadership: Accelerating development and building our future pipeline as of today | |||
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5 | Drive operational excellence | ||
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•Create a learning organization that drives a culture of continuous improvement with fast feedback loops and a sustainable impact on our safety, quality, cost and delivery performance •Drive cross-company business performance improvements to reduce cost, cycle times, improve quality and secure on-time delivery •Optimize our industrial footprint to have market, talent and technology access while protecting our know-how and our business •Secure a successful ERP migration to enable scaling and drive improvements in cost, quality and compliance •Protect and defend ASML interests and reputation by driving a culture of integrity and compliance, including for products, information security, cyber resilience and export controls | |||
Deliver on our ESG sustainability mission and responsibilities | ||||
6 | ||||
Environmental Continue to expand computing power but with minimal waste, energy use and emissions Social Ensure that responsible growth benefits all our stakeholders Governance Act on our responsibilities and aim to fully anchor them in the way we do business through our focus on integrated governance, engaged stakeholders and transparent reporting | ||||
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SUSTAINABILITY | ASML Annual Report 2024 | 43 |
People and culture | Manufacturing facilities | |||||||||
Manufacturing facilities | ||||||||||
![]() | We depend on more than 44,000 talented, dedicated and motivated employees who live our values of challenge, collaborate and care. Every day, our colleagues in R&D, manufacturing, customer support, sourcing and supply chain, and support functions take on the exciting challenge of building and maintaining the most advanced lithography, metrology and inspection systems in the world. | ![]() | We have eight factories in Europe, the US and Asia that provide high-precision, highly controlled environments where we assemble, test and deliver our complex lithography and metrology and inspection portfolio, from prototype to final product. | |||||||
Capital | Innovation | |||||||||
![]() | We have strong capital reserves, underpinned by a robust balance sheet. Total shareholder equity at the end of 2024 amounts to €18.5 billion on a consolidated balance sheet total of €48.6 billion and net cash provided by operating activities of €11.2 billion in 2024. | ![]() | In 2024, we spent a total of €4.3 billion in R&D. But we do not innovate alone – our almost 16,000 R&D employees collaborate closely within an innovation ecosystem of key partners in the value chain. Our lithography solutions are the result of strong partnerships based on trust, respect, and shared risks and incentives to compete and drive innovation. | |||||||


SUSTAINABILITY | ASML Annual Report 2024 | 44 |
Our position as a leading supplier of holistic lithography enables us to create value across the entire value chain. Our holistic lithography portfolio – based on the intelligent integration of lithography systems, computational lithography, metrology and inspection, and process control software solutions – keeps the scaling of microchips affordable for our customers. At ASML the customer always comes first – and our solutions are based on their input. We help our customers generate the greatest value per silicon wafer, creating microchips that are more powerful, faster and more energy-efficient. | ||
Holistic lithography |
Helping our customers generate the greatest value per silicon wafer, creating microchips that are more powerful, faster and more energy-efficient. |

SUSTAINABILITY | ASML Annual Report 2024 | 45 |
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Customers | Employees | Suppliers | Shareholders | Society | |||||||||||||||||||
Our world-leading lithographic systems enable our customers to develop ever-more powerful and energy-efficient chips for new applications and devices. At the same time, we help our customers reduce costs and their environmental footprint. | ASML is a growth business providing employment opportunities around the world. We invest in people’s career development and well-being, and aim to provide a diverse and inclusive environment where they can achieve their full potential. | Our suppliers help deliver our innovations and are critical to our value chain and our ambition to be a sustainable leader in the semiconductor industry. Long- term relationships, close collaboration, transparency and a commitment to sustainability with our suppliers are key to our success. | The effective and disciplined investment of cash flow drives the profitable growth of our company, and delivers solid financial performance and a healthy financial position. This underpins our ability to return cash to shareholders through growing dividends and share buybacks. | We play an active role in the communities where we operate – recognizing that, when the community thrives, so do we. We believe our collaborative ecosystem nurtures innovation and benefits society. For example, we share our expertise with universities and research institutes, support young | tech companies and promote science, technology, engineering and mathematics (STEM) education worldwide. We are also committed to creating sustainable value by reducing our environmental footprint – both from our operations and during the use of our products and services. | ||||||||||||||||||
€28.3bn | 78.9% | 5,150 | €11.2bn | €1,084 | 88% | ||||||||||||||||||
Total net sales | Employee engagement score (three-year rolling average) | Number of suppliers | Net cash provided by operating activities | Amount invested per employee, including employee giving | Reuse rate of parts returned from field and factory | ||||||||||||||||||
583 | 21% | 91% | €6.40 | €18.9m | 32.8 kt | ||||||||||||||||||
Net system sales (in units) | Women in entire workforce (headcount) | Responsible Business Alliance (RBA) self-assessment completed (in %) | Proposed annualized dividend per share | Contribution to EU research projects | Emissions from manufacturing and building (scopes 1 and 2) | ||||||||||||||||||
86% | 3.8% | 100% | €0.5bn | 12.0 Mt | |||||||||||||||||||
Customer satisfaction survey score | Attrition rate | Suppliers with overall high risk evaluated and follow-up agreed (in %) | Share buyback | Indirect emissions from total value chain (scope 3) | |||||||||||||||||||

SUSTAINABILITY | ASML Annual Report 2024 | 46 |
We listen to our stakeholders – customers, employees, suppliers, shareholders and society – and work with them to make the right decisions. | |||
Our stakeholders – and our interaction with them – is fundamental to the long-term success of our business. By regularly engaging with them, we can better understand our impact on them, and their respective needs and expectations. | |||
> | |||

SUSTAINABILITY | ASML Annual Report 2024 | 47 |
Customers | At each stage of the customer relationship we aim to foster trust, advocacy and continuous engagement – with the goal of achieving high customer satisfaction and loyalty. As customer requirements become more complex, it takes longer to align with a shared vision, so we seek to start earlier in the process. By placing our customer relationship at the center of our work, we can leverage our innovations and develop even more sophisticated solutions alongside them. | |
At ASML, we focus on our customers’ needs | ![]() | ||||||
There are thousands of ASML systems installed in customer fabs across the globe. Our customers want to keep these machines running 24 hours a day, seven days a week, 365 days a year. With around 10,000 customer support employees, including service engineers and applications specialists, we work round the clock to make sure our systems in our customers’ fabs are running smoothly. | |||||||
Our customers are why we exist. We collaborate with customers at all levels of the organization – from CEO-to-CEO interaction right through to on-the-ground support at individual fabs – to help them achieve their goals and ensure our solutions perfectly fit their requirements.” | |||||||
86% | |||||||
Jim Koonmen | |||||||
Executive Vice President and Chief Customer Officer | |||||||
Customer satisfaction score | |||||||
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SUSTAINABILITY | ASML Annual Report 2024 | 48 |
Employees | We strive for engaged employees who are proud to work for ASML and committed to our vision and ambitions. Innovation thrives in an environment where everyone is empowered to contribute. By creating an exceptional workplace that fosters inclusivity, we aim to enable everyone to unlock their full potential and drive our collective success. | |
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We have exceptional talent and need an exceptional workplace where our talent can achieve great things, to move ASML to our next success.” | |||
Cristina Monteiro | |||
Head of Human Resources & Organization | |||
87% | 54% | |||
of new colleagues starting in 2024 indicated they had a positive onboarding experience | of our employees have been in the company less than five years | |||
29% | ||||
of our employees today are not nationals of the country they work in | ||||

SUSTAINABILITY | ASML Annual Report 2024 | 49 |
Suppliers | We engage with our suppliers to help deliver our innovations. They are critical to our value chain and our ambition to be a sustainable leader in the semiconductor industry. | |
Working with our suppliers | ![]() | |||
By partnering closely with and supporting our suppliers, we aim to ensure that they’re prepared to work with us for years to come – and to weather the changes that the chip industry is known for, including periods of rapid growth and business-cycle fluctuations. | ||||
Enabling our supply chain to grow with us toward our 2030 targets calls for an evolution in how we work with our suppliers.” | ||||
Wayne Allan | ||||
Executive Vice President and Chief Strategic Sourcing & Procurement Officer | ||||
The top 35 of our 5,150 suppliers make up 80% of our total sourcing spend | ||||
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SUSTAINABILITY | ASML Annual Report 2024 | 50 |
Shareholders | We aim to help shareholders – as well as financial and ESG sustainability analysts – understand our long-term investment strategy. We communicate with them about our financial growth strategies and opportunities, our financial and ESG sustainability performance, our outlook and our shareholder returns. | |
Positioned for significant growth | Our continued investments in technology leadership have created significant shareholder value. | |||
Expected growth in semiconductor end markets and increasing lithography spending on future nodes fuel demand for our products and services. We will continue to invest in our business and expect to return significant amounts of cash to our shareholders through growing dividends and share buybacks. | ||||
€3.0 billion | ||||
Returned to shareholders through dividends and share buybacks. | ||||
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SUSTAINABILITY | ASML Annual Report 2024 | 51 |
Society | We know that our actions and activities have an impact beyond ASML – on the environment, for example, and on the world around us in its broadest sense, which is how we define society. We engage with organizations, communities and other bodies in society on a wide range of issues – from reducing our environmental footprint to regulatory matters and fulfilling our commitment to playing an active role in the communities where we operate. | |
Building community connections | ||||
At our first community conference (ASML Maatschappelijke Conferentie 2024), we strengthened ties with the local community in the Brainport Eindhoven region. | Around 200 representatives from local government and social organizations in the field of education, sports, arts and culture joined us to discuss key issues, such as inequality, labor shortages and housing, as well as the ambition and coherence of our society investment programs. The insights gained will guide our future agenda and approach. | |||
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SUSTAINABILITY | ASML Annual Report 2024 | 52 |

SUSTAINABILITY | ASML Annual Report 2024 | 53 |
A year of transition and preparation, ahead of the upturn to come | ||||||
Message from our Executive Vice President and Chief Financial Officer | ||||||
Roger Dassen | ||||||
We delivered on our expectations in spite of the challenges.” |

SUSTAINABILITY | ASML Annual Report 2024 | 54 |
“ |
We believe that the years ahead will see a significant uptick in the market.” |
Roger Dassen |
Executive Vice President and Chief Financial Officer |
€28.3bn |
Total net sales |
51.3% |
Gross margin |
€3.0bn |
Returned to shareholders |

SUSTAINABILITY | ASML Annual Report 2024 | 55 |
We aim to balance our growth with social responsibility, ensuring that we share our success while addressing the challenges that come with it.” |
Roger Dassen |
Executive Vice President and Chief Financial Officer |

SUSTAINABILITY | ASML Annual Report 2024 | 56 |
Sales | Profitability | Liquidity | ||||||
Total net sales | Gross profit | % of total net sales | Cash and cash equivalents and short-term investments (year end) | |||||
€28.3bn | €14.5bn | 51.3% | €12.7bn | |||||
2023: €27.6bn | 2023: €14.1bn | 2023: 51.3% | 2023: €7.0bn | |||||
Net system sales | Income from operations | Net cash provided by operating activities | ||||||
€21.8bn | €9.0bn | 31.9% | €11.2bn | |||||
2023: €21.9bn | 2023: €9.0bn | 2023: 32.8% | 2023: €5.4bn | |||||
Net service and field option sales | Net income | Free cash flow2 | ||||||
€6.5bn | €7.6bn | 26.8% | €9.1bn | |||||
2023: €5.6bn | 2023: €7.8bn | 2023: 28.4% | 2023: €3.2bn | |||||
Sales of lithography systems (in units)1 | Earnings per share | |||||||
418 | €19.25 | |||||||
2023: 449 | 2023: €19.91 | |||||||
EUV systems recognized (in units) | ||||||||
44 | ||||||||
2023: 53 | 1. | Lithography systems do not include metrology and inspection systems. | ||||||
2. | Free cash flow is a non-GAAP (generally accepted accounting principles) measure and is defined as net cash provided by operating activities (2024: €11,166.2 million and 2023: €5,443.4 million) minus purchase of property, plant and equipment (2024: €2,067.2 million and 2023: €2,155.6 million) and purchase of intangible assets (2024: €15.9 million and 2023: €40.6 million). We believe that free cash flow is an important liquidity metric for our investors, reflecting cash that is available for acquisitions, to repay debt and to return money to our shareholders by means of dividends and share buybacks. Purchase of property, plant and equipment and purchase of intangible assets are deducted from net cash provided by operating activities in calculating free cash flow because these payments are necessary to support the maintenance and investments in our assets to maintain the current asset base. | |||||||
SUSTAINABILITY | ASML Annual Report 2024 | 57 |
Operating results of 2024 compared to 2023 |
Year ended December 31 (€, in millions) | 2023 | %1 | 2024 | %1 | % Change |
Net system sales | 21,938.6 | 79.6 | 21,768.7 | 77.0 | (0.8) |
Net service and field option sales | 5,619.9 | 20.4 | 6,494.2 | 23.0 | 15.6 |
Total net sales | 27,558.5 | 100.0 | 28,262.9 | 100.0 | 2.6 |
Cost of system sales | (10,151.0) | (36.8) | (10,406.9) | (36.8) | 2.5 |
Cost of service and field option sales | (3,271.4) | (11.9) | (3,364.0) | (11.9) | 2.8 |
Total cost of sales | (13,422.4) | (48.7) | (13,770.9) | (48.7) | 2.6 |
Gross profit | 14,136.1 | 51.3 | 14,492.0 | 51.3 | 2.5 |
Research and development (R&D) costs | (3,980.6) | (14.4) | (4,303.7) | (15.2) | 8.1 |
Selling, general and administrative (SG&A) costs | (1,113.2) | (4.0) | (1,165.7) | (4.1) | 4.7 |
Income from operations | 9,042.3 | 32.8 | 9,022.6 | 31.9 | (0.2) |
Interest and other, net | 41.2 | 0.1 | 19.8 | 0.1 | (51.9) |
Income before income taxes | 9,083.5 | 33.0 | 9,042.4 | 32.0 | (0.5) |
Income tax expense | (1,435.8) | (5.2) | (1,680.6) | (5.9) | 17.0 |
Income after income taxes | 7,647.7 | 27.8 | 7,361.8 | 26.0 | (3.7) |
Profit from equity method investments | 191.3 | 0.7 | 209.8 | 0.7 | 9.7 |
Net income | 7,839.0 | 28.4 | 7,571.6 | 26.8 | (3.4) |
For a comparison of ASML’s operating results for the year ended December 31, 2023, with the year ended December 31, 2022, please see Financial performance – Performance KPIs – Operating results of 2023 compared with 2022 of ASML’s Annual Report on Form 20-F for the year ended December 31, 2023. The preparation of our Consolidated financial statements in conformity with US Generally accepted accounting principles (GAAP) requires management to make estimates and assumptions. See Note 1 General information / summary of general accounting policies to the Consolidated financial statements for detailed information on critical accounting estimates. |
Net sales growth |
(in billions) |

2.6% |
Net sales |
(0.8)% |
Net system sales |
15.6% |
Net service and field option sales |
SUSTAINABILITY | ASML Annual Report 2024 | 58 |
Net sales |
(in millions) |

Gross profit and gross margin |
(in millions) |

Research and development costs |
(in millions) |


SUSTAINABILITY | ASML Annual Report 2024 | 59 |
Selling, general and administrative costs |
(in millions) |


Income taxes |
(in millions) |

Net income and earnings per share |
(in millions) |

SUSTAINABILITY | ASML Annual Report 2024 | 60 |
Year ended December 31 (€, in millions) | 2023 | 2024 |
Cash and cash equivalents, beginning of period | 7,268.3 | 7,004.7 |
Net cash provided by (used in) operating activities | 5,443.4 | 11,166.2 |
Net cash provided by (used in) investing activities | (2,689.3) | (2,609.3) |
Net cash provided by (used in) financing activities | (3,003.9) | (2,832.1) |
Effect of changes in exchange rates on cash | (13.8) | 6.4 |
Net increase (decrease) in cash and cash equivalents | (263.6) | 5,731.2 |
Cash and cash equivalents, end of period | 7,004.7 | 12,735.9 |
Short-term investments, end of period | 5.4 | 5.4 |
Cash and cash equivalents and short-term investments | 7,010.1 | 12,741.3 |
Purchases of property, plant and equipment and intangible assets | (2,196.2) | (2,083.1) |
Free cash flow1 | 3,247.2 | 9,083.1 |
SUSTAINABILITY | ASML Annual Report 2024 | 61 |

SUSTAINABILITY | ASML Annual Report 2024 | 62 |
Long-term models as presented at 2024 Investor Day | |||||||
![]() | |||||||
Total sales opportunity (in €bn) | |||||||
2022 Investor Day | 2024 Investor Day | ||||||
Sales 2030 | Sales 2030 | ||||||
High scenario | C M | ||||||
EUV sales | 32 | 32 | |||||
Non-EUV sales (litho and M&I*) | 15 | 15 | |||||
Installed base management** | 13 | 13 | |||||
Total | 60 | 60 | |||||
Moderate scenario | |||||||
EUV sales | Not reported at 2022 Investor Day | 26 | |||||
Non-EUV sales (litho and M&I*) | 14 | ||||||
Installed base management** | 12 | ||||||
Total | 52 | ||||||
Low scenario | 6 | ||||||
EUV sales | 22 | 22 | |||||
Non-EUV sales (litho and M&I*) | 11 | 11 | |||||
Installed base management** | 11 | 11 | |||||
Total | 44 | 44 | |||||
* M&I: Metrology and inspection. ** Installed base management equals our net service and field option sales. | |||||||
SUSTAINABILITY | ASML Annual Report 2024 | 63 |
The purpose of risk management is to maximize the probability of achieving business objectives responsibly. |
Risk management governance structure | |||||||||
Supervisory Board | Audit Committee | ||||||||
![]() | ![]() | ||||||||
Request to investigate specific risk topics | •Bi-annual risk review •Risk topics feedback | •Assertion on control effectiveness •Quarterly progress reporting | |||||||
Board of Management | |||||||||
Compliance, Ethics, Security and Risk Committee (CESR) Risk oversight | Disclosure Committee Internal Control Committee | ||||||||
![]() | ![]() | ||||||||
•Risk appetite •Risk management policy •CESR sub-committees (governance) | •Risk assessment results •Risk response progress •Incidents | •Control effectiveness | |||||||
Risk owners | |||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 64 |
ASML risk universe | |||||||||
Strategy and products | |||||||||
•Industry cycle risk •Geopolitical risk •ESG expectations risk | •Business model risk •Merger and acquisition risk | •Competition risk •Innovation risk •Product stewardship risk | •Product roadmap execution risk •Intellectual property rights risk | ||||||
Finance and reporting | Partners | People | Operations | ||||||
•Business planning risk •Financial risk •Shareholder activism risk •Disclosure/external reporting risk •Tax and customs risk | •Customer dependency risk •Product/service quality risk •Supplier strategy and performance risk •Supply chain disruption risk | •Knowledge management risk •Organizational effectiveness risk •Human resource risk | •Product industrialization risk •Process effectiveness and efficiency risk •Environment, health and safety risk •Continuity of own operation risk •Security risk •Information technology risk •Manufacturing and install risk | ||||||
Legal and compliance | |||||||||
•Contractual liability risk | •Violation of laws and regulations risk | ||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 65 |
Risk assessment | Risk response | |||||||||||
Top-down risk assessment | Coordination and follow-up | |||||||||||
CESR / Risk owners / Emerging risks | Risk owners | |||||||||||
![]() | Risk identification | ![]() | Risk landscape | ![]() | Risk appetite | ![]() | ||||||
![]() | ||||||||||||
Risk analysis | ||||||||||||
Risk evaluation | ![]() | ![]() | Risk treatment | |||||||||
Bottom-up risk assessment | Execution | |||||||||||
Business | Action owners | |||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 66 |
Development | Risk trend | Risk universe reference | Risk response | |||||||||||
Geopolitical tensions | ![]() | •Geopolitical •Competition •Supply chain disruption •Continuity of own operation •Business model | •Violation of laws and regulations •Security •IP rights •Human resource | •Active engagement with authorities and governments •Scenario planning •Collaborate with peers in global advocacy •Optimize industrial footprint •Apply for export licenses •Comply with applicable regulations | ||||||||||
Geopolitical tensions and the strive for technological sovereignty may lead to a decoupled ecosystem. There is a risk that future trade restrictions (e.g. raw materials, technology, systems, investments) further limit our ability to source parts and/or sell systems to, or service them for, certain customers. With the increasing complexity of regulations, ensuring compliance has become more challenging. | ||||||||||||||
Uncertain global economy | ![]() | •Industry cycle •Business model •Financial | •Competition •Supply chain disruption | •Cost control •Maintain flexibility •Scenario planning | ||||||||||
Global economic conditions lead to uncertainty for semiconductor demand and therefore demand for our products. We have experienced order push-outs. The macroeconomic weakness continues and its duration is uncertain. | ||||||||||||||
Pressure on know-how and intellectual property (IP) protection in ecosystem | ![]() | •Security •Supply chain disruption | •Competition •IP rights | •Intellectual property portfolio management •Patents and relevant technical publications monitoring •Substantial investments in security •Awareness and training programs •Cyber defense capabilities | ||||||||||
ASML’s strengths are based on the innovation power in our ecosystem and the ability to protect our IP. There is significant pressure on know-how and IP protection for ASML and its open innovation partners. We and our partners experience cyber- and other security threats. | ||||||||||||||
Growth challenges | ![]() | •Manufacturing and install •Supplier strategy and performance •Human resource | •Product industrialization •Process effectiveness •Product/service quality | •Increase of manufacturing and supply chain capabilities •Remain flexible in our operating model •Drive operational excellence •Strengthen ecosystem relationships •Create an exceptional workplace •Shorten time to knowledge | ||||||||||
Although there is uncertainty and volatility in the industry, we expect substantial growth opportunities in this decade. That brings challenges. We are continuing to increase production capacity in our end-to-end supply chain to meet future demand, but we may still face challenges in increasing capacity. Such challenges can be amplified by supply chain constraints. In addition, hiring, onboarding and retaining our workforce in the competitive market is a long-term challenge. | ||||||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 67 |
The risk factors in this section are classified under these six risk types. Any of these risks and the related events or circumstances described therein may have a material adverse effect on our business, financial condition, results of operations and reputation. These risks are not the only ones that we face. Some risks may not yet be known to us, and certain risks that we do not currently believe to be material could become material in the future. Many risks may be intensified by global events, such as wars and other conflicts, geopolitical tensions, inflation, industry downturn, global measures (including new regulations) taken in response to these events and/or any adverse global business and economic conditions. | 1. Strategy and products | |||||||||
Our future success depends on our ability to respond timely to commercial and technological developments in the semiconductor industry | The success of new product introductions is uncertain and depends on our ability to successfully execute our R&D programs | |||||||||
Risk category: | Risk category: | |||||||||
Business model, Innovation | Product roadmap execution, Innovation | |||||||||
Our success in developing new and enhancing existing technologies, products and services, depends on a variety of factors. These include the success of our and our suppliers’ R&D programs and the timely, cost-effective and successful completion of product development and design relative to competitors. Our business will suffer if the technologies we pursue to assist our customers in producing smaller and more energy-efficient chips are not as effective as, or are more costly than, those developed by competitors. Our business will also suffer if our customers do not adopt technologies that we develop, or if they adopt new technological architectures that are less focused on lithography products. For example, the success of our EUV 0.55 NA (High NA) technology, which we believe is critical for keeping pace with Moore’s Law, depends on continuing technical advances by us and our suppliers. We invest considerable financial resources in developing and introducing new and enhanced technologies, products and service offerings. If we are unsuccessful in developing (or if our customers do not adopt) these technologies, products and service offerings, such as EUV 0.55 NA and multibeam inspection, or if alternative technologies or processes are successfully introduced by others, our competitive position and business may suffer, and we may be unable to recoup some or all of these investments. | In addition, we may incur impairment charges on capitalized technology including prototypes or incur costs related to inventory obsolescence, as a result of technological changes. Such charges and costs may increase as the complexity of technology increases. Also, due to the highly complex nature and costs of our systems, including newer technologies, our customers may purchase existing technology systems rather than new leading-edge systems, or they may delay their investment in new technology systems to the extent that such investment is not economical or required, given their product cycles. Global economic conditions in general and semiconductor market conditions specifically affect our customers’ investment decisions and lead to uncertainties in the timing around the introduction of and demand for new leading-edge systems. This increases the risk of slowing down the overall transition period (or cadence) for the introduction of new nodes and, therefore, new systems. We also depend on our suppliers to maintain their development roadmaps to enable us to introduce new technologies in a timely manner. Delays by suppliers in keeping pace with their roadmaps, whether due to technological factors, lack of financial resources or otherwise, impact our ability to meet our development roadmaps. | As our lithography systems and applications have become increasingly complex, the cost and time to develop new products and technologies have increased, and we expect this trend to continue. In particular, developing new technology, such as EUV 0.55 NA (High NA) and multibeam, requires significant R&D investments by us and our suppliers. Our suppliers may not be able or willing to invest the resources necessary to continue the (co-)development of new technologies to the extent that such investments are necessary. This has resulted and may result in ASML contributing funds to such R&D programs or limiting the R&D investments that we can undertake. Furthermore, if our R&D programs are not successful in developing the desired new technology on time or at all, we may be unsuccessful in introducing new products, services and technologies and unable to recoup our R&D investments. In case of high levels of customer demand, we may prioritize our resources on production over R&D programs. | ||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 68 |
1. Strategy and products (continued) | ||||||||||||
We face intense competition | The semiconductor industry can be cyclical and we may be adversely affected by any downturn | We derive most of our revenues from the sale of a relatively small number of products | ||||||||||
Risk category: | Risk category: | Risk category: | ||||||||||
Competition | Industry cycle risk | Business model | ||||||||||
The semiconductor equipment industry is highly competitive. Our competitiveness depends on our ability to develop new and enhanced lithography equipment, and related applications and services that bring value to our customers and are competitively priced and introduced on a timely basis – as well as our ability to protect and defend our intellectual property, trade secrets or other proprietary information. We compete primarily with Canon and Nikon in respect of DUV systems. Both have substantial financial resources and broad patent portfolios. Each continues to offer products that compete directly with our DUV systems, which may impact our sales or business. In addition, adverse market conditions, long-term overcapacity or a decrease in the value of the Japanese yen in relation to the euro could increase price-based competition, resulting in lower prices and lower sales and margins. We also face competition from new competitors with substantial financial resources, as well as from competitors driven by the ambition of self-sufficiency in the geopolitical context. Furthermore, we face competition from alternative technological solutions or semiconductor manufacturing processes. We also compete with providers of applications that support or enhance complex patterning solutions, such as Applied Materials Inc. and KLA-Tencor Corporation. These applications compete with our applications offering, which is a significant part of our business. | The semiconductor industry has historically been cyclical. As a supplier to the global semiconductor industry, we are subject to the industry’s business cycles. The timing, duration and volatility are difficult to predict and can have a significant impact on semiconductor equipment manufacturers including ASML. Newer entrants to the industry, including Chinese semiconductor manufacturers, could increase the risk of cyclicality in the future. Certain key end-market customers – Logic and Memory – exhibit different levels of cyclicality and different business cycles. Cyclicality may be worsened by the geopolitical situation – for example, if countries increase semiconductor capacity for higher levels of self- sufficiency, thereby creating global overcapacity. Sales of our lithography systems, services and other holistic lithography products depend in large part on the level of capital expenditures by semiconductor manufacturers. These in turn are influenced by industry cycles, the drive for technological sovereignty and a range of competitive and other factors, including semiconductor industry conditions and prospects. The timing and magnitude of capital expenditures of our customers also impact the available production capacity of the industry to produce chips, which can lead to imbalances in the supply and demand of chips. Reductions or delays in capital expenditures by our customers, or incorrect assumptions by us about our customers’ capital expenditures, could adversely impact our business. We make various assumptions about future demand in our financial models and our capital expenditures and planning for production capacity. To the extent that actual results prove to be materially different from our assumptions, we may have overcapacity or may have allocated capital expenditure and resources to make products that are not in demand by customers (at the expense of products that are in demand) and our actual results could differ substantially from those implied by our financial models. | Capital expenditures by our customers may not continue at current levels and may decline. Capital expenditures by some customers have declined recently compared to prior years and we have experienced changes in timing of orders from certain customers, and we are subject to uncertainty in future customer demand. The current global economic environment, including inflation, interest rates and geopolitical events, contributes to this uncertainty. An uncertain global economy frequently leads to reduced consumer and business spending, and could cause our customers to decrease, cancel or delay their orders and we have experienced customers scaling back their capacity additions. High interest rates and volatility in financial markets could make it more difficult for our customers to raise capital, whether debt or equity, to finance their purchases of equipment, including the products we sell. The foregoing could lead to reduced demand, which may adversely affect our product sales and revenues and may harm our business and operating results. As we have significantly increased our organization in terms of employees, infrastructure, manufacturing capacity and other areas, we may not be able to adjust our costs adequately in a timely manner in the event of an industry downturn. If we are unable to adapt appropriately and in a timely manner to changes resulting from macroeconomic conditions, our business, financial conditions or results of operations may be materially and adversely affected. | We derive most of our revenues from the sale of a relatively small number of lithography systems (418 units in 2024, 449 units in 2023 and 345 units in 2022). As a result, the timing of shipments and recognition of system sales for a particular reporting period, as a result of shipment delays or other factors, may have a material impact on our results of operations in that period, and this impact is greater as prices for our systems increase. In recent years, we have used fast shipments for some customers, which allows us to deliver systems more quickly to customers by having some final testing and formal acceptance carried out on customer sites instead of at our own facilities. This typically leads to a delay of revenue recognition for those shipments until formal customer acceptance, which can impact comparability of our results of operations from period to period. In addition, our installed base revenues are impacted by the number of systems we sell and other factors; for example, customers may perform more of these services themselves, find other third-party suppliers to provide them or we may be limited by export control restrictions. | |||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 69 |
1. Strategy and products (continued) | |||||||||||||
Failure to adequately protect intellectual property could harm our business | Defending against intellectual property claims brought by others could harm our business | ||||||||||||
Risk category: | Risk category: | ||||||||||||
Intellectual property rights | Intellectual property rights | ||||||||||||
We rely on intellectual property (IP) rights such as patents, copyrights and trade secrets to protect our proprietary technology. However, we face the risk of such protective measures proving inadequate and we could suffer material harm because, among other matters: 1.IP laws may not sufficiently support our proprietary rights or may change adversely in the future. 2.Our agreements (e.g. confidentiality, licensing) with our customers, employees and technology development partners and others to protect our IP may not be sufficient or may be breached or terminated. 3.Patent rights may not be granted or interpreted as we expect. 4.Patent rights will expire, which may result in key technology becoming widely available, which may harm our competitive position. 5.The steps we take to prevent misappropriation or infringement of our proprietary rights may not be successful. 6.IP rights can be difficult to enforce in countries where the application and enforcement of the laws governing such rights may not have reached the same level compared with other jurisdictions where we operate. 7.Third parties may be able to develop or obtain patents for our own or for similar competing technology. | Legal proceedings may be necessary to enforce our IP rights and the validity and scope may be challenged by others. Any such proceedings may result in substantial costs and diversion of management resources, and, in the event of decisions unfavorable to us in proceedings, could result in significant costs or have a significant impact on our business. We have experienced and may in the future experience misappropriation attacks by third parties or our employees, including theft of IP. Such incidents may result in third parties or others, without authorization, obtaining, copying, using or disclosing our IP, despite our efforts to protect our IP rights. Our suppliers face similar risks which could have a consequential impact on us. | In the course of our business, we have been and may be subject to claims by third parties alleging that our products or processes infringe upon their IP rights. If successful, such claims could limit or prohibit us from developing our technology, and manufacturing and selling our products. Our customers may also be subject to claims of infringement from third parties, including patent holder companies, alleging that our products used by such customers in the manufacturing of semiconductor products and/or the processes relating to the use of our products infringe on one or more patents issued to such third parties. If such claims are successful, we could be required to indemnify our customers for losses incurred by or damages assessed against them as a result of such infringement. | We may incur substantial licensing or settlement costs to settle claims or limit our exposure to the IP claims of third parties. Patent litigation is complex and may extend for a protracted period of time, giving rise to the potential for substantial costs and diverting the attention of key management and technical personnel. Potential adverse outcomes from patent litigation may include payment of significant monetary damages, injunctive relief prohibiting our manufacturing, exporting or selling of products, reputational damage and/or settlement involving significant costs to be paid by us. | ||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 70 |
1. Strategy and products (continued) | ||||||||||||||
We are exposed to economic, geopolitical and other developments in our international operations | We may be unable to make desirable acquisitions or to integrate successfully any businesses we acquire | |||||||||||||
Risk category: | Risk category: | |||||||||||||
Geopolitical | Merger and acquisition | |||||||||||||
Our business is subject to export control restrictions, sanctions, tariffs and, more generally, international trade regulations which impact our ability to deliver our systems, technology and services, and geopolitical tensions have led, and may lead to, an increase in such restrictions and regulations. Our ability to deliver systems and services in certain countries such as China has been the subject of increased export regulations or policies and continues to be impacted by our ability to obtain required licenses and approvals. We are required under Dutch and other applicable regulations and legislation to obtain licenses for the export of certain technologies. As a result of the Dutch regulations, EUV, certain DUV immersion and other products are subject to license requirements. The US government has also enacted trade measures, including license requirements on conducting business with certain Chinese entities, restricting our ability to provide certain products and services to such entities without a license. The list of Chinese entities impacted by export control restrictions has increased over the years, with restrictions including export controls on semiconductor manufacturing items which impose license requirements on the sale/transfer of US origin items as well as on the support by US persons on non-US origin items destined for certain fabs in China working on advanced node ICs. The list of restricted customers and the scope of the restrictions are subject to change and may be expanded to include additional entities. ASML is also subject to export control regulations in countries outside the EU and US. These developments in multilateral and bilateral treaties, national regulation, and trade, national security and investment policies and practices have affected and may further affect our business, and the businesses of our suppliers and customers. For example, the ability to obtain US licenses to authorize employees with foreign nationalities to work in programs that include controlled US items has been reduced over the last couple of years. | Such developments, including the drive for technological sovereignty, could also lead to long-term changes in global trade, competition and technology supply chains, which could adversely affect our business and growth prospects. Customers in China represented 36.1% of our 2024 total net sales. Countries impacted by export control restriction can also introduce measures to counteract the impact of other countries, actions or regulations, which may result in conflicting regulations and legal liabilities. The semiconductor industry makes use of (raw) materials that are controlled by certain countries. In the current geopolitical context, we see an increasing risk that these materials may become unavailable or restricted, which could impact our suppliers, our customers and ASML. Interstate conflicts and/or nationalization of ASML assets can also impact our business. For example, some of our facilities and supply chain and customers are located in Taiwan. Customers in Taiwan represented 15.4% of our 2024 total net sales and 29.3% of our 2023 total net sales. Taiwan has a unique international political status. Changes in relations between Taiwan and China, Taiwanese government policies and other factors affecting Taiwan’s political, economic or social environment could, for example, impact our ability to service our customers in Taiwan. Furthermore, some of our facilities as well as our supply chain and customers are located in South Korea. Customers in South Korea represented 22.7% of our 2024 total net sales and 25.2% of our 2023 total net sales. In addition, there are tensions between South Korea and North Korea. A worsening of relations between those countries or the outbreak of war on the Korean Peninsula could impact our ability to service customers. A small percentage of our suppliers and customers as well as a customer support organization are based in Israel. The tensions in this region have resulted and may continue to result in violence and/or the outbreak of war, which could impact our business. | From time to time, we may acquire businesses or technologies to complement, enhance or expand our current business or products or to seize growth opportunities. Any such acquisitions could fail to achieve our financial or strategic objectives or impact our ability to perform as we plan, or disrupt our ongoing business and adversely impact our results of operations. Our ability to complete any such transactions may be hindered by a number of factors, including potential difficulties in obtaining government approvals. Any acquisition could pose risks related to the integration of the new business or technology with our existing business and organization. We may not be able to achieve the benefits we expect from an acquisition. Acquisitions may also strain our managerial and operational resources and the challenge of managing new operations may divert our management from day-to-day operations. Furthermore, we may be unable to retain key personnel from acquired businesses or we may have difficulty integrating employees, business systems and technology. The controls, processes and procedures of acquired businesses also may not adequately ensure compliance with laws and regulations, and we may fail to identify compliance issues or liabilities. | In connection with acquisitions, antitrust and national security regulators have imposed and may in the future impose conditions, including requirements to divest assets or other conditions that could make it difficult for us to integrate the businesses that we acquire. Furthermore, we may have difficulty in obtaining, or be unable to obtain, antitrust and national security clearances, which could inhibit future desired acquisitions. As a result of acquisitions, we have recorded a significant amount of goodwill and a number of intangible assets. Accounting standards require periodic review of these assets for indicators of impairment. If one or more indicators of impairment are found to exist, then valuation of the related asset could change and may incur impairment charges. | |||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 71 |
1. Strategy and products (continued) | ||||||||||||||
We may not be able to achieve our ESG objectives or adapt and respond in a timely manner to emerging ESG expectations and regulations | ||||||||||||||
Risk category: | ||||||||||||||
ESG expectations, Product stewardship | ||||||||||||||
Companies across all industries are facing increasing scrutiny of their ESG policies and practices. Investors, capital providers, shareholder advocacy groups, market participants, customers and other stakeholders are increasingly focused on ESG practices and ESG matters. In particular, within the semiconductor industry, there is a focus on contribution to society and minimizing environmental and social impacts of products throughout all life-cycle stages. Some stakeholders, however, may disagree with our ESG goals and initiatives, and their focus may evolve over time. Stakeholders, including regulators or governments in the various jurisdictions in which we operate, may also have conflicting views on ESG practices. Failure to achieve our ESG objectives, meet the emerging or conflicting ESG expectations of our stakeholders and/ or respond in a timely way to changing or conflicting regulations, laws and reporting and disclosure obligations could negatively affect our brand and reputation and impede our ability to recruit or retain employees, and may ultimately adversely affect our operations. In addition, laws, regulations and standards for calculating and disclosing emissions and other sustainability metrics continue to evolve, which can result in inconsistencies or other changes to data over time, revisions to our strategies and targets, or our ability to achieve them, subjecting us to additional scrutiny. | Climate change contributes to increasing severity and frequency of extreme weather events, rising sea levels and droughts, which can impact continuity of our operations and/or our supply chain. Climate change concerns and the potential environmental impacts of climate change have resulted, and may result, in new laws and regulations that affect us, our suppliers and our customers. Such laws or regulations could cause us to incur additional direct costs for compliance, as well as increased indirect costs from our value chain. Furthermore, the ability to improve our product-related environmental performance (such as energy efficiency) may be affected by the complexity of our technology and products. In order to meet our ESG goals and requirements, we are dependent on our suppliers and their ability to reduce their ecological footprints, and we may be unable to meet our ESG goals if our suppliers do not meet our expectations in this regard. In addition, we are dependent on our customers and/or our customers may not be satisfied with our progress, which could impact demand. | A global trend of transitioning to a lower-carbon economy has resulted in increased regulations that could lead to technology restrictions, modification of product designs, an increase in energy prices and energy or carbon taxes, restrictions on pollution, remediation measures, or other requirements that could impact our business and increase our costs. A variety of regulatory developments have been introduced that focus on restricting or managing carbon and greenhouse gas (GHG) emissions. This could result in a need to redesign products and/or to purchase at higher costs new equipment or materials with lower carbon footprints. We publish disclosures on ESG matters relating to our business and our partners as required by applicable regulations and guidance and other data which may not be required but which we nonetheless elect to disclose. | Such disclosures include our ESG goals, expectations and assumptions and related statements, including targets, commitments, goals, plans, expectations and forecasts about future circumstances, which may prove to be incorrect or which we may not meet. In addition, our ESG sustainability strategy may not deliver the intended results, and our estimates concerning feasibility, timing and cost of meeting stated goals are subject to risks and uncertainties. In addition, we may use offsets to help us meet some of our emissions targets. We have not undertaken any commitment to purchase offsets, and we do not intend to use offsets in connection with our scope 3 emissions goals. As a result, we may not meet our goals on expected timing or at all. ESG disclosure requirements are increasing and authorities have proposed disclosure requirements on ESG matters which differ from the requirements that we are currently subject to. We face risks in complying with such regulations, including the risk of complying with requirements in different jurisdictions, the costs associated with such compliance and the risk that our ESG disclosures prove incorrect. | |||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 72 |
2. Finance and reporting | ||||||||||||||
We are exposed to financial risks including liquidity risk, interest rate risk, counterparty credit risk, foreign exchange risk and inflation risk | Changes in taxation could affect our future profitability | |||||||||||||
Risk category: | Risk category: | |||||||||||||
Financial | Tax and customs | |||||||||||||
As a global company, we are exposed to a variety of financial risks, including those related to liquidity, interest rates, counterparty credit, currencies and inflation. Liquidity risk Negative developments in our business or global capital markets could affect our ability to meet our financial obligations or to raise or refinance debt in the capital or loan markets. In addition, we might be unable to repatriate cash from a country when needed for use elsewhere due to legal restrictions or required formalities. Currency risk Our Financial statements are expressed in euros. Accordingly, our results of operations are exposed to fluctuations in exchange rates between the euro and other currencies. Changes in currency exchange rates can result in losses in our Financial statements. We are particularly exposed to fluctuations in the exchange rates between the US dollar and the euro, and to a lesser extent to the Japanese yen, the South Korean won, the Taiwanese dollar and the Chinese yuan, in relation to the euro. We incur costs of sales predominantly in euros, with portions also denominated in US and Taiwanese dollars. A small portion of our operating results are driven by movements in currencies other than the euro, US dollar, Japanese yen, South Korean won, Taiwanese dollar or Chinese yuan. Inflation risk We are exposed to increases in costs due to inflation for costs of goods, transportation and wages. We have experienced and experience higher-than-normal inflation, which impacts our costs and margins in case we are not able to pass on increased costs in our prices. | Interest rate risk | We are subject to income taxes in the Netherlands and other countries in which we operate. Our effective tax rate has fluctuated in the past and may fluctuate in the future. Our effective tax rate can be affected by changes in our business environment, changes in tax legislation in the countries where we operate, developments driven by global organizations such as the Organisation for Economic Co-operation and Development (OECD), as well as any change in approach to tax by tax authorities. Initiatives like the BEPS and Global Minimum Tax rules have already resulted in and may result in further increased compliance obligations for ASML. This may result in an increase in our effective tax rate in future years. | Changes in tax legislation may adversely impact our tax position and consequently our net income. Our worldwide effective tax rate is heavily impacted by R&D incentives included in tax laws and regulations in the countries where we operate, such as the so- called innovation box in the Netherlands and the R&D credits we obtain in the US. If relevant jurisdictions alter their tax policies/laws in this respect, it may have an adverse effect on our worldwide effective tax rate. In addition, jurisdictions levy corporate income tax at different rates. The mix of our sales over the various jurisdictions in which we operate may vary from year to year, resulting in a different mix of corporate income tax rates applicable to our profits. This can also affect our worldwide effective tax rate and impact our net income. | |||||||||||
Our Eurobonds bear interest at fixed rates. Our cash, investments, Euro Commercial Paper program and credit facilities bear interest at a floating rate. Failure to effectively hedge this risk could impact our financial condition and results of operation. In addition, we could experience an increase in borrowing costs due to a ratings downgrade (or the expectation of a downgrade), developments in capital and lending markets or developments in our businesses. | ||||||||||||||
Counterparty credit risk | ||||||||||||||
We are exposed to credit risk, particularly with respect to (financial) counterparties with whom we hold our cash and investments as well as our customers. As a result of our limited number of customers, counterparty credit risk on our receivables is concentrated. Our three largest customers (based on total net sales) accounted for €2,641.9 million, or 54.1% of accounts receivable and finance receivables, at December 31, 2024, compared with €3,718.8 million, or 64.4%, at December 31, 2023. Accordingly, business failure or insolvency of one of our main customers could result in significant credit losses. | ||||||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 73 |
3. Partners | ||||||||||||||
Our success is highly dependent on the performance of a limited number of critical suppliers of single-source key components | ||||||||||||||
Risk category: | ||||||||||||||
Supply chain disruption, Supplier strategy and performance | ||||||||||||||
We rely on third-party vendors for components and subassemblies used in our systems, including the design thereof. These components and subassemblies are obtained from a single supplier or a limited number of suppliers. As our business has grown, our dependence on single suppliers or a limited number of suppliers has grown. The highly specialized nature of many of our components, particularly for EUV systems, means it is not economical to source from more than one supplier. In many cases, our sourcing strategy prescribes ‘single sourcing, dual competence’. Our reliance on a limited group of suppliers involves several risks, including a potential inability to obtain an adequate supply of required components or subassemblies in time and at acceptable costs, and reduced control over pricing and quality. Delays in supply of these components and subassemblies could occur due to disruptions experienced by our suppliers for reasons including work stoppages, fire, energy shortages and access issues, pandemic outbreaks, flooding, cyberattacks, blockades, sabotage or other disasters, natural or otherwise. This could lead to delays in delivery of parts, components or subassemblies and therefore delays in delivery of our products to customers, which could impact our business. For example, some of our suppliers have experienced disruptions in their operations as a result of material shortages and cyberattacks. Consistent delays or prolonged inability to obtain adequate deliveries of components or subassemblies, or any other circumstance that requires us to seek alternative sources of supply, could significantly hinder our ability to deliver our products in a timely manner. This could damage relationships with our customers and materially impact our business. | The number of lithography systems we are able to produce is limited by the production capacity of one of our key suppliers, Carl Zeiss SMT, our sole supplier of lenses, mirrors, illuminators, collectors and other critical optical components (which we refer to as optics). We have an exclusive arrangement with Carl Zeiss SMT. If this supplier became unable to maintain and increase production levels, we could be unable to fulfill orders. This could have a material impact on our business and damage relationships with our customers. Furthermore, if Carl Zeiss SMT were to terminate its supply relationship with us or be unable to maintain production of optics over a prolonged period, we would effectively cease to be able to conduct our business. From time to time, we experience supply constraints which can impact our production. We and our suppliers have and are continuing to invest in additional capacity to increase our production capacity. However, we may be unable to meet the full demand of our customers. We also face the risk that demand may decrease or may not be sufficient for full utilization of our increased production capacity, which could result in overcapacity in our and our suppliers’ operations and consequently higher costs and loss of investment in increasing capacity. In addition, most of our key suppliers, including Carl Zeiss SMT, have a limited number of manufacturing facilities, the disruption of which may significantly and adversely affect our production capacity. | Lead times in obtaining components have increased as our products have become more complex. A failure by us to adequately predict demand for our systems, or any delays in the shipment of components, can result in insufficient supply of components. This could lead to delays in delivery of our systems and could limit our ability to react quickly to changing market conditions. Conversely, a failure to predict demand could lead to excess supply of components and obsolete inventory. | We are also dependent on suppliers to develop new models and products to meet our development roadmaps. If our suppliers do not meet our requirements or timetable in product development, our business could suffer. We have historically shipped our systems by airplane, but have recently started to ship some systems by ocean freight. We face risks in connection with using alternative means of transportation (for example delays, defects, damages). | |||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 74 |
3. Partners (continued) | 4. People | |||||||||||
A high percentage of net sales is derived from a few customers | Our business and future success depend on our ability to manage the growth of our organization and attract and retain a sufficient number of adequately educated and skilled employees | |||||||||||
Risk category: | Risk category: | |||||||||||
Customer dependency | Human resources, Knowledge management, Organizational effectiveness | |||||||||||
We sell our lithography systems to a limited number of customers, and therefore the loss of any customer could have a significant impact on our business. Customer concentration, and the risks associated with a limited number of customers, can increase because of continuing consolidation in the semiconductor manufacturing industry. In addition, although the applications part of our holistic lithography solutions constitutes an increasing portion of our revenue, a significant portion of those customers are the same customers as those for our systems. Consequently, while the order of our largest customers may vary from year to year, sales generally remain concentrated among relatively few customers in any particular year. Total net sales to our largest customer amounted to €4,682.4 million, or 16.6% of total net sales in 2024, compared with €8,772.9 million, or 31.8% of total net sales in 2023. In 2024, 30.5% of total net sales were made to our two largest customers. The loss of any significant customer or any significant reduction or delay in orders by such a customer may have a material adverse effect on our business, financial condition and results of operations. | Our business depends significantly on our ability to attract and retain employees in the long term, including a large number of highly qualified professionals. Competition for talent is intense. Continuing to attract sufficient numbers of qualified employees to meet our long-term growing needs remains a challenge. Our business has grown significantly and the risk of not being able to attract, onboard and retain sufficient numbers of qualified personnel increases as our business grows. Our R&D programs require a large number of qualified employees. If we are unable to attract sufficient numbers of such employees, this could affect our ability to conduct R&D effectively and on a timely basis. | As a result of the uniqueness and complexity of our technology, qualified engineers capable of working on our systems are scarce and generally not available from other industries or companies. We invest a significant amount in educating and training our employees to work on our systems, and their retention is a critical success factor for us. The increasing complexity of our products results in a longer learning curve for new and existing employees. Our suppliers face similar risks in attracting and retaining qualified employees, including those in connection with programs that will support our R&D programs and technology developments. If our suppliers are unable to attract and retain qualified employees, this could impact their technology roadmaps and therefore our R&D programs or delivery of components to us. | Our organization has grown significantly in recent years. Our rapid growth driven by strong customer demand has put pressure on our organization and we face challenges in effectively managing, monitoring and controlling our employees, facilities, operations and other resources and complying with applicable laws and regulations. If we are not able to successfully deal with such challenges, this may negatively impact our operations and our reputation as an employer. | |||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 75 |
5. Operations | ||||||||||||||
We may face challenges in managing the industrialization of our products and bringing them to high-volume production | We are dependent on the continued operation of a limited number of manufacturing facilities | |||||||||||||
Risk category: | Risk category: | |||||||||||||
Product industrialization | Continuity of own operations | |||||||||||||
Bringing new products to high-volume production at a value-based price and in a cost-effective manner depends on our ability to manage the industrialization of our products and to manage costs. Customer adoption of new products depends on the performance of our products in the field. As our products become more complex, we face an increasing risk that products may not meet development milestones or specifications and may not perform according to specifications, including quality standards. If our products do not perform according to specifications and performance criteria such as customers’ planned wafer capacity, or if quality or performance issues arise, this may result in reduced demand for our products and additional costs. Transitioning newly developed products to full-scale production requires the expansion of infrastructure, including enhancing manufacturing capabilities, increasing the supply of components and training qualified personnel. It may also require our suppliers to adjust or expand their infrastructure capabilities. If we or our suppliers are unable to adjust or expand infrastructure as necessary, we may be unable to introduce new technologies, products or product enhancements, or to reach high-volume production of newly developed products on a timely basis or at all. | When we are successful in industrializing new products, it can take years to reach profitable margins. New technologies might not have the same margins as existing technologies, and we might not be able to adjust value-based pricing and/or cost in an effective manner. In addition, the introduction of new technologies, products or product enhancements also impacts ASML’s liquidity. New products may have higher cycle times, resulting in increased working capital needs. As our products become more complex, the investments needed before new product introduction and the timing of revenue recognition of these products may have a significant negative effect on our cost structure and margins. The capability, capacity and costs associated with providing the required customer support to cover the increasing number of shipments and service a growing number of EUV systems that are operational in the field could affect the timing of shipments. It could also impact the efficient execution of maintenance, servicing and upgrades, which are key to our systems continuing to achieve the required productivity. | All of our manufacturing activities, including subassembly, final assembly and system testing, take place in (cleanroom) facilities in Veldhoven, Eindhoven, Oirschot (the Netherlands), Berlin (Germany), Wilton, San Diego (US), Pyeongtaek (South Korea) and Linkou and Tainan (Taiwan). These facilities may be subject to disruption for various reasons, including work stoppages, fire, energy shortages and access issues, pandemic outbreaks, flooding, cyberattacks, blockages, sabotage or other disasters, natural or otherwise. Alternative production capacity may not be available if a major disruption were to occur. | We are not able to or otherwise may not fully insure our risk exposure, and not all disasters, other potential disruptions and risks are insurable. As a result, we may be subject to the financial impact of uninsured losses, which could have an adverse impact on our financial condition and results of operations. | |||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 76 |
5. Operations (continued) | ||||||||||||||
We face challenges to meet expected demand | Our operations expose us to health, safety and environment risks | |||||||||||||
Risk category: | Risk category: | |||||||||||||
Manufacturing and install, Human resources, Supplier strategy and performance | Environment, health and safety | |||||||||||||
We are continuing to increase production capacity in our end-to- end supply chain to meet expected demand, but we face challenges in increasing capacity. For example, we depend on our suppliers increasing their capacity and their ability to invest, and it takes time to build the production space and equipment required for expansion. We and our supply chain also need to obtain permits to make expansion possible, and the time it takes for these to be granted may cause delays. | It is a challenge for ASML and its suppliers to hire and retain employees to support expansion. Our processes and systems and those of our supply chain may also not be able to adequately support our growth. If we are not successful in increasing our capacity to meet expected demand, this could impact our relationships with customers and our competitive position. We and our suppliers have invested significantly in increasing capacity, and we face various risks in connection with this, including risks relating to system quality, the risk that we have not accurately predicted demand, and risks associated with maintaining a much larger production infrastructure and supplier ecosystem, including higher costs and challenges in controlling the enlarged production process. We also face the risk that our increase in capacity could result in capacity that exceeds demand (overcapacity). | Hazardous substances are used in the production and operation of our products and systems. Their use subjects us to a variety of governmental regulations relating to environmental protection and employee and product health and safety. This includes the transport, use, storage, discharge, handling, emission, generation and disposal of toxic or other hazardous substances. In addition, operating our systems (which use lasers and other potentially hazardous components) can be dangerous and can result in injury. Failure to comply with regulations could result in harm to people and the environment. Substantial fines could be imposed on us, as well as suspension of production, alteration of our manufacturing and assembly and test processes, damage to our reputation and/or restrictions on our operations or sales, or other adverse consequences. | Additionally, our products have become increasingly complex. This requires us to invest in ongoing risk assessments and development of appropriate preventative and protective measures for health and safety for both our employees (in connection with the production and installation of our systems and field options and performance of our services) and our customers’ employees (in connection with the operation of our systems). Our health and safety practices may not be effective in mitigating all health and safety risks. A failure to comply with applicable regulations, or the failure of our implemented practices to ensure customer and employee health and safety, could expose us to significant liabilities. | |||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 77 |
5. Operations (continued) | ||||||||||||||
Cybersecurity and other security incidents, or disruptions in our processes or information technology systems, could materially adversely affect our business operations | ||||||||||||||
Risk category: | ||||||||||||||
Security, Information technology, Process effectiveness and efficiency | ||||||||||||||
We rely on the accuracy, availability and security of our information technology (IT) systems. Despite the measures that we have implemented, including those related to cybersecurity, our systems could be breached or damaged by malware and systems attacks, natural or man-made incidents, disasters, or unauthorized physical or electronic access. We have experienced some of these incidents in the past. We experience an increasing number of cyberattacks on our IT systems as well as the IT systems of our customers and suppliers and other service providers, which systems we do not control. These attacks include malicious software (malware), attempts and acts to gain unauthorized access to data, and other electronic and physical security breaches of our IT systems, as well as the IT systems of our customers and suppliers and other service providers that have led and could lead to disruptions in critical systems, unauthorized release, misappropriation, corruption, or loss of data or confidential information (including confidential information relating to our customers, employees and suppliers). As technology like AI and quantum computing continues to evolve, these technologies could also be used for sophisticated cyber attempts or bypassing security measures. | We depend on our employees and the employees of our suppliers to appropriately handle confidential and sensitive data and deploy our IT resources in a safe and secure manner. Inadvertent disclosure, actions or malfeasance by our employees, those of our suppliers or other third parties have resulted and may in the future result in a loss or misappropriation of data or a breach or interruption of our IT systems. This could result in competitive harm or violate export controls and other laws and regulations, which could result in fines and penalties, business disruption, reputational harm and additional regulatory scrutiny or export control measures. Any system failure, accident or security breach or any other of the foregoing risks could result in business disruption, theft of our IP or trade secrets, unauthorized access to, or disclosure of, customer, personnel, supplier or other confidential information, corruption of our data or of our systems, reputational damage or litigation and violation of applicable laws. | Furthermore, malware may harm our systems and software and could be inadvertently transmitted to our customers’ systems and operations. This could result in loss of customers, litigation, regulatory investigation and proceedings that could expose us to civil or criminal liabilities and diversion of significant management attention and resources. We may also incur significant costs to protect against or repair the damage caused by these disruptions or security breaches, including, for example, rebuilding internal systems, implementing additional threat protection measures, providing modifications to our products and services, defending against litigation, responding to regulatory inquiries or actions, paying damages or taking other remedial steps with respect to third parties. Further, remediation efforts may not be successful and could result in interruptions, delays or cessation of service, unfavorable publicity, damage to our reputation, customer complaints, possible litigation and loss of existing or potential customers, which may impede our sales or other critical functions. Cybersecurity threats are constantly evolving. We remain potentially vulnerable to additional known or as yet unknown threats, as in some instances, we and our customers, partners and suppliers may be unaware of an incident or its magnitude and effects. | We also face the risk that we could unintentionally expose our customers to cybersecurity attacks through the systems we deliver to them, including in the form of malware or other types of attacks, which could harm our customers. ASML’s visibility and importance for the semiconductor industry continues to increase, which may lead to increased risks of ASML or its employees being targeted in a cybersecurity attack. In addition, processes and systems may not be able to adequately support the growth that we have experienced in recent years and continue to experience. From time to time, we implement updates to our IT systems and software which can disrupt or shut down our IT systems. We may not be able to successfully launch and integrate IT systems as planned without disruption to our operations – for example, our ERP migration. We may not be successful in our AI initiatives and using AI could lead to unintended outcomes. | |||||||||||
Read more in Strategic report – Performance and risk – Risk – | ||||||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 78 |
6. Legal and compliance | 7. Other risk factors | |||||||||||||
We are subject to regulatory and compliance obligations in the various countries where we operate and the complexity of compliance requirements increases | Restrictions on shareholder rights may dilute voting power | We may not declare cash dividends, conduct share buyback programs or cancel shares at all or in any particular amounts in any given year | ||||||||||||
Risk category: | ||||||||||||||
Violation of laws and regulations | ||||||||||||||
We are subject to a variety of laws and regulations across the jurisdictions where we operate, including but not limited to those relating to trade, national security, tax, export controls, reporting, product compliance, anti-corruption, antitrust, ESG, human rights, data protection, AI technologies, spatial planning, environmental matters, securities laws and stock exchange rules. With the significant growth of our business in recent years, ensuring compliance with laws and regulations and our internal policies across our continually expanding organization has become more challenging. We face the risk that, despite our significant efforts and proactive approach to compliance, we may fail to comply with such laws, regulations or policies. We operate in a significant and growing number of countries in the world, and we are therefore subject to numerous and differing, and sometimes conflicting, regulatory frameworks, which can impact how we operate our business. In particular, the regulatory environment regarding export and sanctions has become increasingly restrictive, and as a result, our ability to sell some of our products and services to certain customers is subject to restrictions and requires government authorization, which can lead to delays in or a prohibition on shipments of products to certain customers. | Laws and regulations that impact our business are regularly amended and we are subject to new laws and regulations. We are also subject to the changing interpretations by and positioning of regulators, including in the granting of required licenses to ship products as well as in investigations and enforcement. Additional or amended regulations or changes in policies of governments and regulators could increase compliance costs and risks associated with non-compliance or further limit our ability to sell our products and services in certain jurisdictions. We are subject to investigations, audits and reviews by regulatory authorities in the various jurisdictions where we operate regarding compliance with laws and regulations, including tax laws. These may arise due to misunderstandings, disputes, or suspicions of non-compliance or otherwise, and can be resource-intensive and have reputational and financial implications for us. Despite our efforts and proactive compliance program, we may be found to be non-compliant with applicable regulations. Compliance with existing and new regulations can result in compliance costs, increased risk of non-compliance and limitations on our business which can impact our results of operations. The consequences of non-compliance include fines, penalties and litigation, business disruption, the loss of trade or export privileges, reputational harm, additional regulatory scrutiny measures and the erosion of stakeholder trust, any of which could have a material adverse effect on our business and results of operations. | ASML's Articles of Association provide that it is subject to the provisions of Dutch law applicable to large corporations, called ‘structuurregime’. These provisions concentrate control of certain corporate decisions and transactions in the hands of the Supervisory Board (SB). As a result, holders of ordinary shares may have more difficulty in protecting their interests in the face of actions by members of the SB than if we were not subject to the ‘structuurregime’. Our authorized share capital includes a class of cumulative preference shares. We have granted our preference shares foundation (Stichting Preferente Aandelen ASML) an option to acquire, at the nominal value of €0.09 per share, such cumulative preference shares. Exercise of the preference share option would effectively dilute the voting power of our outstanding ordinary shares by one-half, which may discourage or significantly impede a third party from acquiring a majority of our voting shares. | We aim to pay a quarterly dividend that is growing (on an annualized basis) over time, and we conduct share buybacks from time to time. The dividend proposal, amount of share buybacks and cancellation of shares in any given year are subject to, among other factors, the availability of distributable profits, retained earnings and cash, the BoM's views on our potential future liquidity requirements, including for investments in production capacity and working capital requirements, the funding of our R&D programs and acquisition opportunities that may arise from time to time, and future changes in applicable tax and corporate laws. The BoM may decide not to pay a dividend or to pay a lower dividend than is contemplated by our aim or dividend policy. In addition, we may suspend, adjust the amount of or discontinue share buyback programs, we may not enter into new share buyback programs, and we may otherwise fail to complete buyback programs. | |||||||||||

SUSTAINABILITY | ASML Annual Report 2024 | 79 |

SUSTAINABILITY | ASML Annual Report 2024 | 80 |

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SUSTAINABILITY | ASML Annual Report 2024 | 85 |
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€1.1bn |
Income tax paid 20241 |
(2023: €2.6bn) |
![]() |
18.6% |
Effective tax rate 2024 |
((2023: 15.8%) |

1. Netherlands | €762m |
2. United States1 | €(209)m |
3. Taiwan | €78m |
4. South Korea | €336m |
5. China | €58m |
SUSTAINABILITY | ASML Annual Report 2024 | 86 |
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1 | 2 | |||||||
Stakeholder management | The future of taxation | |||||||
Externally, we communicate on a regular basis with tax authorities, regulators and investors. Internally, we support our business in managing risks, staying in control, remaining efficient in both our administrative procedures and way of working, and working in an integrated way with other experts. | We closely monitor global developments in tax transparency, ESG related taxes, tax technology and continuously translate these into potential requirements or implications for ASML. | |||||||
3 | 4 | 5 | ||||||||
Compliance and control | Tax and customs organization | Projects | ||||||||
We develop, implement and monitor processes or controls for tax risk management and reporting purposes. We strive for the timely and accurate fulfillment of compliance obligations in line with applicable tax laws and regulations, including the timely payment of taxes due. | In a fast-changing world, it’s important to have a diverse team comprising more than just competent tax and customs experts. Communication, digital and project management skills are increasingly important, so we strive to work and develop together in line with ASML’s core values: challenge, collaborate and care. | Our business and the regulatory environments in which we operate change constantly. We are always working on projects to deal with these changes and ensure the solutions implemented are compliant and efficient. Likewise, we continuously strive for simplification and review of existing business models to ensure we remain tax and customs compliant. | ||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 87 |
1 | 2 | |||||||
Competition law compliance risk assessment | Policy review | |||||||
Our Competition Law Compliance Policy demonstrates our commitment to ensuring company-wide compliance. Any act of an employee or business partner contrary to this policy is considered a significant breach of our Code of Conduct, and may lead to disciplinary measures up to and including dismissal. We made a version of the policy publicly available in 2020, which is reviewed periodically, and published an updated version in 2021. | ||||||||
We regularly perform risk assessments of relevant competition law focus areas. These help identify any risks that may be present, improve existing controls, and provide strategies on any remaining risks and measures to mitigate them. | ||||||||
3 | 4 | |||||||
Training and awareness | Reporting/resolving issues, violations or complaints | |||||||
Competition law training is a mix of computer-based and in-person sessions, with the latter provided by the Global Legal Expertise team for Competition & Foreign Direct Investment and tailored to relevant stakeholders. We also promote awareness of competition law through channels such as presentations, intranet articles and email communications. Training topics are based on their relevance to the semiconductor industry, current legal developments and wider trends. | ||||||||
We support every employee or partner who refuses to engage in anticompetitive conduct and reports potential violations as stated in our Speak Up and Non-retaliation Policy. We do not tolerate any form of retaliation against those who adhere to competition law rules or who speak up, even if we lose business as a result. | ||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 88 |



SUSTAINABILITY | ASML Annual Report 2024 | 89 |

SUSTAINABILITY | ASML Annual Report 2024 | 90 |

SUSTAINABILITY | ASML Annual Report 2024 | 91 |
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Patent portfolio trend | |

SUSTAINABILITY | ASML Annual Report 2024 | 93 |


SUSTAINABILITY | ASML Annual Report 2024 | 94 |
Our product safety competencies | ||||||
The role of our development and engineering (D&E) safety competence leads is to provide in-depth knowledge on any background legislation and standards applicable in their area, as well as defining design rules, providing training and acting as consultants to mitigate specific safety hazards in our products. This includes areas such as: | •Working at height: A new area of expertise required during the design of our EXE:5000 – our first EUV 0.55 NA (High NA) system – to guarantee good access to the various system areas and components. •Radiation: Focusing mainly on lasers with intensities that go beyond standard, as well as considering the impacts of standard and special lamps and LEDs. •Functional safety: Our complex machines contain many active protective functions to protect the user against hazards. Examples are sensors which monitor currents, pressure or temperatures and independently put the system into a safe position when needed (e.g. Lockout Tagout procedure). •Safety in procedures: Supporting the creation of written safety procedures for complex operations. •Thermal: The use of tin at high temperatures requires special precautions. •Dangerous gases: The use of gases requires safety systems and procedures to protect machines and people. For example, nitrogen is an asphyxiation hazard and the use of hydrogen in EUV has additional applicable legislations and standards. •Materials and substances: Monitoring worldwide legislation to check the legal status of all materials used in our products and ensuring that we do not use or introduce hazardous materials. | |||||
•Electrical: Making electrical design safe and protecting people from electrical shock. This involves making conductors carrying hazardous voltages inaccessible, ensuring accessible conductors don’t carry hazardous voltages and ensuring inaccessible conductors are sufficiently insulated from accessible ones. •Pressure: Interpreting and explaining local legislation and standards, advising on testing and documentation, and maintaining the manufacturing record book. •Human factor engineering (including ergonomics): Incorporating a human- centered design approach to maintain access for maintenance and servicing by laying down rules for issues such as accessibility, posture, forces and lifting parts. •Mechanical: Keeping track of safety factors and seismic requirements for our machines. •Lifting: Advising on special requirements such as the certification and training of crane operators in countries where we use lifting tools, and when certification is needed. For example, in South Korea, certification is required for weights of 500 kg or more. | ||||||
SUSTAINABILITY | ASML Annual Report 2024 | 95 |
EUV 0.55 NA (High NA) safety compliance | ||
Our latest product, EUV 0.55 NA (High NA), is the next generation of EUV machines. The development of the system presented challenges for product safety due to its larger overall size, height and weight of modules, and more complex accessibility. Having started the third-party safety design review in 2022, we continued with hardware reviews in 2023, leading up to a full review report in 2024. The first shipment to customers conforms to the requirements. | ||

SUSTAINABILITY | ASML Annual Report 2024 | 96 |
Corporate governance | ||
Board of Management | ||
Supervisory Board | ||
Other Board-related matters | ||
AGM and share capital | ||
Financial reporting and audit | ||
Compliance with corporate governance requirements | ||
Supervisory Board report | ||
An interview with our Chair of the Supervisory Board | ||
Supervisory Board focus in 2024 | ||
Meetings and attendance | ||
Supervisory Board committees | ||
Financial statements and profit allocation | ||
Remuneration report | ||
Message from the Chair of the Remuneration Committee | ||
Remuneration at a glance | ||
Remuneration Committee | ||
Board of Management remuneration | ||
Supervisory Board remuneration | ||
Other information |

SUSTAINABILITY | ASML Annual Report 2024 | 97 |
OVERVIEW | ||
These pages provide an overview of and a brief introduction to the Corporate governance section of our Annual Report. |
2024 strategic priorities | |||||
1 | Deepen customer trust | ||||
2 | Extend our technology and holistic product leadership | ||||
3 | Strengthen ecosystem relationships | ||||
4 | Create an exceptional workplace | ||||
5 | Drive operational excellence | ||||
6 | Deliver on our ESG sustainability mission and responsibilities | ||||
Supervisory Board diversity, nationality and tenure |
Supervisory Board attendance | |||||||||||
Supervisory Board | Audit Committee | Remuneration Committee | Selection and Nomination Committee | Technology Committee | ESG Committee | ||||||
95% | 97% | 100% | 100% | 100% | 100% | ||||||
56% | 44% | 4.2 | |||||
Men | Women | Years average tenure | |||||
(2023: 3.2) | |||||||
I am confident that our new management team and continued focus on technological leadership will secure our long-term success.” | |
Nils Andersen | |
Chair of the Supervisory Board |
Dutch | x2 | ||
German | x1 | ||
American | x2 | ||
British | x1 | ||
Danish | x1 | ||
Belgian | x2 | ||

Supervisory Board skills |
International management | 89% | |
Finance/governance | 78% | |
Remuneration | 78% | |
Human resources | 89% | |
IT/digital/cyber | 67% | |
ESG | 100% | |
Semiconductor ecosystem | 67% | |
Technology | 56% | |
Supply chain | 89% | |
Business in Asia | 89% |

Stakeholders |
Read more |
Board of Management remuneration (€’000s) |
Our Board of Management (BoM) remuneration policy is designed to fairly incentivize our BoM to deliver on our business priorities and create sustainable long-term value. |

Christophe D. Fouquet | €5,432 | ||||||
Frederic J.M. Schneider-Maunoury | €4,209 | ||||||
Roger J.M. Dassen | €4,190 | ||||||
Wayne R. Allan | €3,897 | ||||||
James (Jim) P. Koonmen1 | €2,347 | ||||||
Base salary and benefit | STI | LTI | |||||
SUSTAINABILITY | ASML Annual Report 2024 | 98 |
ASML organization | ||||||||||||
Business axis: Customer | Business axis: Product | Technology axis | Execution axis | Enabling axis | ||||||||
ASML corporate governance structure | ||||||||||||||||||||||
Shareholders | ||||||||||||||||||||||
Supervisory Board | ||||||||||||||||||||||
Audit Committee | ESG Committee | Remuneration Committee | Selection and Nomination Committee | Technology Committee | ||||||||||||||||||
Board of Management | ||||||||||||||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 99 |
Our core strategy consists of six priorities | ||||||||
1 | Deepen customer trust | 4 | Create an exceptional workplace | |||||
2 | Extend our technology and holistic product leadership | 5 | Drive operational excellence | |||||
3 | Strengthen ecosystem relationships | 6 | Deliver on our ESG sustainability mission and responsibilities | |||||



SUSTAINABILITY | ASML Annual Report 2024 | 100 |
Roger J.M. Dassen (1965, Dutch) | James (Jim) P. Koonmen (1967, American, Irish) | ||||||||||||||||
Executive Vice President and Chief Financial Officer Term expires 2026 | Executive Vice President and Chief Customer Officer Term expires 2028 | ||||||||||||||||
Roger Dassen joined ASML in June 2018 and was appointed Executive Vice President and CFO and member of the Board of Management at the AGM the same year. He had previously served as Global Vice Chair and member of the Executive Board of Deloitte Touche Tohmatsu Limited, having been CEO of Deloitte Holding BV. Roger holds a master’s in Economics and Business Administration, a post-master’s in Auditing and a PhD in Business Administration, all from the University of Maastricht. He is Professor of Auditing at Vrije Universiteit Amsterdam, and sits on the Supervisory Board of the Dutch National Bank. He is also the Chair of the Supervisory Board of Maastricht University Medical Center+ and serves on the Board of the Stichting Brainport. | Jim Koonmen joined ASML in 2007 through the acquisition of Brion, where he was General Manager from 2008 until 2015. He subsequently served as the CEO of Cymer and then led the Applications business for five years. Before he joined ASML, Jim was Vice President of Marketing and Operations at MEMX, Director of Manufacturing Engineering at Onetta and Director of Operations at Johnson & Johnson. Jim holds a Master of Science in Management from the MIT Sloan School of Management and a Master of Science in Aeronautics and Astronautics from the Massachusetts Institute of Technology. | ||||||||||||||||
Christophe D. Fouquet (1973, French) | Wayne R. Allan (1967, American) | Frédéric J.M. Schneider-Maunoury (1961, French) | |||||||||||||||
President, Chief Executive Officer and Chair of the Board of Management Term expires 2028 | Executive Vice President and Chief Strategic Sourcing & Procurement Officer Term expires 2027 | Executive Vice President and Chief Operations Officer Term expires 2026 | |||||||||||||||
Christophe Fouquet became President and CEO in 2024, having served as Executive Vice President EUV from 2018 until 2022, Executive Vice President and Chief Business Officer from 2022 until 2024 and member of the Board of Management since 2018. Since joining ASML in 2008, he has held several positions, including Senior Director Marketing, Vice President Product Management, and Executive Vice President Applications, a position he held from 2013 until 2018. Prior to joining ASML, he worked for semiconductor equipment peers KLA-Tencor and Applied Materials. Christophe holds a master’s degree in Physics from the Institut Polytechnique de Grenoble. | Wayne Allan was appointed Executive Vice President, Chief Strategic Sourcing & Procurement Officer and member of the Board of Management in 2023. Wayne joined ASML in 2018 as Executive Vice President of Customer Support. Before then, Wayne served as Senior Vice President of Global Manufacturing Operations and as Vice President of Wafer Fabs at Micron Technology, Inc. the company where he began his career in 1987 as a production operator. He continued to move into operations roles of increasing leadership in engineering, planning and production. | Frédéric Schneider-Maunoury has been Executive Vice President and Chief Operations Officer since he joined ASML in 2009. He was appointed to the Board of Management in 2010. Prior to joining ASML, Frédéric was Vice President Thermal Products Manufacturing at power generation and rail transport equipment group Alstom, having previously served as General Manager of its worldwide Hydro Business. Before this, Frédéric had held various positions at the French Ministry of Trade and Industry. He is a graduate of École polytechnique (1985) and École Nationale Supérieure des Mines (1988) in Paris. | |||||||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 101 |

Supervisory Board appointment process | ||||||||||
Stage 1 | Stage 2 | Stage 3 | Stage 4 | Stage 5 | ||||||
Recommendation right of GM and Works Council | Announcement of nomination for appointment by SB | Works Council has the right to determine its position | Formal nomination for appointment by SB | Appointment of SB member by GM | ||||||
SUSTAINABILITY | ASML Annual Report 2024 | 102 |
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Nils S. Andersen (1958, Danish) | Nils Andersen joined the Supervisory Board in 2023, and has been its Chair since. Nils also serves as Chair of the Board of Scan Global Logistics A/S. From 2015 until May 2024, he served as Non-Executive Director of Unilever Plc and was appointed as Chair as per 2019. From 2018 until 2023, he was the Chair of the Supervisory Board of Akzo Nobel NV and, between 2007 and 2016, he was Group Chief Executive of A.P. Møller –Mærsk. From 2001 until 2007, Nils served as President and Chief Executive Officer of Carlsberg and Carlsberg Breweries. | |
Member of the Supervisory Board since 2023 (First term expires in 2027) | ||
Chair of the Supervisory Board, Chair of the Selection and Nomination Committee | ||
Antoinette (Annet) P. Aris (1958, Dutch) | ||
Member of the Supervisory Board since 2015 (Fourth term expires in 2025) | ||
Vice Chair of the Supervisory Board, Member of the Remuneration Committee, the Selection and Nomination Committee, and the Technology Committee | ||
Annet Aris has been a member of the Supervisory Board since 2015. She is Senior Affiliate Professor of Strategy (since 2003) and Academic Director of the Corporate Governance Centre (since 2023) at INSEAD business school, France. From 1994 to 2003, she was a partner at McKinsey & Company in Germany. Annet also sits on the supervisory boards of Jungheinrich AG and Randstad Holding NV. | ||
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Birgit M. Conix (1965, Belgian) | Birgit Conix became a member of the Supervisory Board in 2021. Effective per February 1, 2025, she was appointed as Non-Executive Director of AstraZeneca PLC and resides in the audit committee. Prior to this, she was CFO and a member of the Management Board of Sonova Holding AG from June 2021 until January 31, 2025. From 2018 until January 1, 2021, Birgit was a member of the Executive Board and CFO of TUI AG. She was previously the CFO of the Belgian media, cable and telecommunications company Telenet Group NV. Prior to that, Birgit held various management positions in finance at Johnson & Johnson, Heineken, Tenneco and Reed Elsevier. | |
Member of the Supervisory Board since 2021 (First term expires in 2025) | ||
Chair of the ESG Committee and member of the Audit Committee | ||
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D. Mark Durcan (1961, American) | |
Member of the Supervisory Board since 2020 (Second term expires in 2028) | |
Chair of the Technology Committee, member of the Selection and Nomination Committee | |
Mark Durcan was appointed as a member of the Supervisory Board in 2020. He is a Non- Executive Director at Advanced Micro Devices, Inc., and Board Member and Lead Independent Director at Cencora. He is also a member of the Board of Trustees for Rice University (Texas) and as Director at Natural Intelligence Systems CA, a private AI startup company. From 2012 to 2017, he was CEO of Micron Technology, Inc., having joined the company in 1984 and having held various management positions before being appointed CEO. Furthermore, Mark was a Director at Freescale Semiconductor, MWI Veterinary Supply, Veoneer, Inc. and St Luke’s Health System (Idaho). |
SUSTAINABILITY | ASML Annual Report 2024 | 103 |
D. Warren A. East (1961, British) |
Member of the Supervisory Board since 2020 (Second term expires in 2028) |
Member of the Audit Committee and the Technology Committee |
Warren East became a member of the Supervisory Board in 2020 and is currently a Non-Executive Board member at Tokamak Energy plc. Furthermore, he is also currently the Chair of the Board of Directors of C-Capture Ltd. and NATS Holdings Ltd., the UK’s National Air Traffic Service. Warren was CEO of Rolls-Royce Group Plc from 2015 until December 2022. He spent his early career at Texas Instruments Ltd. from 1985 to 1994 before joining ARM Holdings, Plc, where he held various management positions and was appointed CEO from 2001 to 2013. |
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Alexander F.M. Everke (1963, German) | ||
Member of the Supervisory Board since 2022 (First term expires in 2026) | ||
Member of the ESG Committee and the Remuneration Committee | ||
Alexander Everke joined the Supervisory Board in 2022. He also serves as member of the Board of Aixtron SE, a position he has held since May 2024. He is the former CEO of ams-OSRAM AG, a position he held from March 2016 until March 2023, after having joined ams AG in October 2015. Prior to that, Alexander held a range of positions in the semiconductor industry, including management roles at Siemens and Infineon and various leadership positions at NXP Semiconductors. |
Terri L. Kelly (1961, American) |
Member of the Supervisory Board since 2018 (Second term expires in 2026) |
Chair of the Remuneration Committee, member of the Selection and Nomination Committee |
Terri Kelly has been a member of the Supervisory Board since 2018. Previously, she was President and CEO at W.L. Gore & Associates from 2005 until 2018, having worked at Gore since 1983 in various management roles. She also served on Gore’s Board of Directors through July 2018. Terri is a Trustee of the Alfred I. Dupont Charitable Trust, which provides oversight of the Nemours Foundation. She is the Chair of the Board of the University of Delaware and a member of the Board of Directors of United Rentals, Inc. |
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Jack P. de Kreij (1959, Dutch) | Jack de Kreij joined the Supervisory Board in 2023. Among other roles, he is currently the Vice Chair of the Supervisory Board and Chair of the Audit Committee at TomTom NV and Wolters Kluwer NV. Jack is also a member of the Supervisory Board, Chair of the Audit Committee and member of the ESG Committee at Royal Boskalis Westminster NV. In addition, he is the Chair of the Board of the Dutch Association of Listed Companies (VEUO). From 2003 to 2018, Jack was CFO and a member of the Executive Board of Royal Vopak NV, taking on the role of Vice Chair from 2010 to 2018. Between 1986 and 2003 he worked at PricewaterhouseCoopers, where he held various management positions as (Senior) Partner and was among other roles Managing Partner & Territory Leader of the M&A-focused Transaction Services practice in the Netherlands. Jack started his career in 1980 with the Dutch Ministry of Finance, where he worked until 1986. | |||
Member of the Supervisory Board since 2023 (First term expires in 2027) | ||||
Chair of the Audit Committee and member of the Remuneration Committee | ||||
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An L. Steegen (1971, Belgian) |
Member of the Supervisory Board since 2022 (First term expires in 2026) |
Member of the ESG Committee and the Technology Committee |
An Steegen joined the Supervisory Board in 2022. She is CEO and member of the Board of Directors of Barco NV since September 1, 2024, after having served as a co-CEO and member of the Board of Directors since October 1 , 2021. Prior to that, An was R&D director at IBM Semiconductor and Executive Vice President at the research institute imec in Belgium. Furthermore, An was CTO and Executive Vice President Electronic and Electro-Optical Materials at Umicore. |
SUSTAINABILITY | ASML Annual Report 2024 | 104 |
Supervisory Board | ||||||||
![]() | Dutch | x2 | ||||||
56% | ||||||||
German | x1 | |||||||
American | x2 | |||||||
Male members | ||||||||
British | x1 | |||||||
![]() | Supervisory Board nationality | Danish | x1 | |||||
44% | ||||||||
Belgian | x2 | |||||||
Female members | ||||||||
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At ASML, we believe that innovation thrives in an inclusive environment where diverse perspectives are valued.” | ||
Annet Aris | ||
Vice Chair of the Supervisory Board | ||

SUSTAINABILITY | ASML Annual Report 2024 | 105 |
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We are highly motivated to see more women pursuing careers in engineering and science.” | ||
Christophe Fouquet | ||
President, Chief Executive Officer and Chair of the Board of Management | ||
![]() | ![]() | ![]() | ||||
26% | 12% | 21% | ||||
Gender diversity: % inflow of women | Gender diversity: % representation of women in job grade 13+ | Women in entire workforce 2024 (headcount) | ||||

SUSTAINABILITY | ASML Annual Report 2024 | 106 |

SUSTAINABILITY | ASML Annual Report 2024 | 107 |
SUSTAINABILITY | ASML Annual Report 2024 | 108 |
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A General Meeting (AGM) is held at least once a year and generally takes place in Veldhoven, the Netherlands. In 2024, shareholders had the option to attend the AGM in person in Veldhoven or virtually. The agenda for the AGM typically includes the following topics: | |||
In 2024, we engaged with investors to obtain their perspectives and understand their expectations.” | |||
Item 1 Discussion of the Management Report and the adoption of the Financial statements over the past financial year. Item 2 Discussion of the dividend policy and approval of any proposed dividends. Item 3 Advisory vote on the Remuneration report over the past financial year. Item 4 The discharge from liability of the members of the Board of Management and the Supervisory Board for the performance of their responsibilities in the previous financial year. Item 5 The limited authorization for the Board of Management to issue (rights to) shares in ASML’s capital, and to exclude preemptive rights for such issuances, as well as to repurchase shares and to cancel shares. Item 6 Any other topics proposed by the Board of Management, the Supervisory Board or shareholders in accordance with Dutch law and the Articles of Association. | |||
Nils Andersen | |||
Chair of the Supervisory Board | |||

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SUSTAINABILITY | ASML Annual Report 2024 | 109 |
ASML’s authorized share capital amounts to €126.0 million and is divided into: | |||||||
Type of shares | Number of shares | Nominal value | Votes per share | ||||
Cumulative preference shares | 700,000,000 | €0.09 per share | 1 | ||||
Ordinary shares | 700,000,000 | €0.09 per share | 1 | ||||
The issued and fully paid-up ordinary shares with a nominal value of €0.09 each were as follows: | |||||||
Year ended December 31 | 2022 | 2023 | 2024 | ||||
Issued ordinary shares with nominal value of €0.09 | 394,589,411 | 393,421,721 | 393,283,720 | ||||
Issued ordinary treasury shares with nominal value of €0.09 | 8,548,631 | 6,162,857 | 546,972 | ||||
Total issued ordinary shares with nominal value of €0.09 | 403,138,042 | 399,584,578 | 393,830,692 | ||||
SUSTAINABILITY | ASML Annual Report 2024 | 110 |
SUSTAINABILITY | ASML Annual Report 2024 | 111 |
Shares | % of class4 | |
Capital Research and Management Company1 | 40,615,837 | 10.33% |
BlackRock Inc.2 | 31,259,169 | 7.95% |
Members of ASML’s current Board of Management and Supervisory Board (6 persons)3 | 43,314 | 0.01% |

SUSTAINABILITY | ASML Annual Report 2024 | 112 |
Annual Reports | ||||
We publish, among others, the following annual reports regarding the financial year 2024: •The statutory Annual Report, prepared in accordance with the requirements of Dutch law. The Financial statements included therein are prepared in accordance with Part 9 of Book 2 of the Dutch Civil Code and EU-IFRS, and the Sustainability statements included therein are prepared in accordance with the European Sustainability Reporting Standards (ESRS). •The Annual Report on Form 20-F, prepared in accordance with the requirements of the Exchange Act. The Financial statements included therein are prepared in conformity with US GAAP. Both reports have the same qualitative base and provide the same description of our business, corporate governance, risk factors specific to the semiconductor industry, ASML and our shares. We also provide sensitivity analyses by providing: •A narrative explanation of our Financial statements •The context within which financial information should be analyzed •Information about the quality, and variability, of our earnings and cash flow | ![]() | |||
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SUSTAINABILITY | ASML Annual Report 2024 | 113 |
SUSTAINABILITY | ASML Annual Report 2024 | 114 |
Practices followed by ASML in lieu of Nasdaq rules | |
Quorum | ASML does not follow Nasdaq’s quorum requirements applicable to meetings of ordinary shareholders. In accordance with Dutch law and generally accepted Dutch business practice, ASML’s Articles of Association provide that there are no quorum requirements generally applicable to general meetings of shareholders. |
Solicitation of proxies | ASML does not follow Nasdaq’s requirements regarding the solicitation of proxies and the provision of proxy statements for general meetings of shareholders. ASML does furnish proxy statements and solicit proxies for the General Meeting. Dutch corporate law sets a mandatory (participation and voting) record date for Dutch listed companies at the 28th day prior to the date of the General Meeting. Shareholders registered at such a record date are entitled to attend and exercise their rights as shareholders at the General Meeting, regardless of a sale of shares after the record date. |
Distribution of Annual Report | ASML does not follow Nasdaq’s requirement regarding distribution to shareholders of copies of an annual report containing audited Financial statements prior to our AGM. The distribution of our annual reports to shareholders is not required under Dutch corporate law or Dutch securities laws, or by Euronext Amsterdam. Furthermore, it is generally accepted business practice for Dutch companies not to distribute annual reports. In part, this is because the Dutch system of bearer shares has made it impractical to keep a current list of holders of the bearer shares in order to distribute the annual reports. Instead, we make our Annual Report available at our corporate head office in the Netherlands (and at the offices of our Dutch listing agent, as stated in the convening notice for the meeting) no later than 42 days prior to convocation of the AGM. In addition, we post a copy of our annual reports on our website prior to the AGM. |
Equity compensation arrangements | ASML does not follow Nasdaq’s requirement to obtain shareholder approval of stock option or purchase plans or other equity compensation arrangements available to officers, directors or employees. It is not required under Dutch law or generally accepted practice for Dutch companies to obtain shareholder approval of equity compensation arrangements available to officers, directors or employees. The General Meeting adopts the Remuneration Policy for the Board of Management, approves equity compensation arrangements for the Board of Management and approves the remuneration for the Supervisory Board. The Remuneration Committee evaluates the achievements of individual members of the Board of Management with respect to the short- and long-term quantitative performance, and the full Supervisory Board evaluates the quantitative performance criteria. Equity compensation arrangements for employees are adopted by the Board of Management within limits approved by the General Meeting. |

SUSTAINABILITY | ASML Annual Report 2024 | 115 |
I am confident that with our new Board of Management and continued focus on industry leadership, we are well positioned to continue our long-term success.” |
Nils Andersen |
Chair of the Supervisory Board |
Q | What were the business highlights of the year? | |||
SUSTAINABILITY | ASML Annual Report 2024 | 116 |
Q | How do you reflect on the leadership transition? | |||
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Our values of challenge, collaborate and care express the essence of what makes ASML such a unique company.” | ||
Nils Andersen | ||
Chair of the Supervisory Board | ||

Q | How does the Supervisory Board support the Board of Management? | |||
Q | How do you engage with stakeholders? | |||
SUSTAINABILITY | ASML Annual Report 2024 | 117 |
Q | How does the Supervisory Board help ASML maintain and strengthen its values? | |||
Q | What will be the Supervisory Board’s key focus areas for 2025? | |||
SUSTAINABILITY | ASML Annual Report 2024 | 118 |
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7 | 44% | |||
Supervisory Board meetings | Female members | |||
(2023: 6) | (2023: 44%) | |||
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95% | 4.2 | |||
Attendance rate | Years average tenure | |||
(2023: 98%) | (2023: 3.2) | |||
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Alongside the annual strategy review, the Supervisory Board addressed strategic topics throughout the year via deep dives, which enabled focused, in-depth review.” | ||||
Nils Andersen | ||||
Chair of the Supervisory Board | ||||
Supervisory Board focus in 2024 | |||
Throughout 2024, the Supervisory Board agenda was centered on the strategy and its execution, the CEO and Board of Management transition, financial and operational performance, business developments, risk management, and people and organization. Based on the strategic priorities for ASML as agreed in the annual strategy review, several topics were extensively discussed by means of deep dives, allowing a focused and in- depth review. | |||
Strategy and sustainable long-term value creation | |||
Focus area 2024 | |||
•Annual strategy review •Geopolitical strategy •ASML operating model •Semiconductor and lithography market •High transmission platform •Technology & holistic lithography roadmap | •ERP migration •Global footprint •Deep dive: Cost and flexibility and cash flows •People strategy | ||
SUSTAINABILITY | ASML Annual Report 2024 | 119 |
Strategy and sustainable long-term value creation |
Market and business developments | |||||
Focus area 2024 | |||||
Deep dive: Market and geopolitics | |||||
•Market outlook and demand drivers •Update on business: EUV, DUV, Applications •Transformation projects related to sourcing and supply chain, customers and future operating model | |||||
The Supervisory Board discussed with the Board of Management the short-, medium- and long-term market developments in the semiconductor industry and the related growth opportunities for ASML. Aspects discussed were the key end-market drivers, the future of lithography shrink and the future affordability of lithography solutions, potential opportunities in adjacent technologies and ASML's competitive position. In terms of geopolitics, the Supervisory Board made recommendations as to how to best navigate the current challenges. | |||||
We closely monitored the market and business developments and saw management address the challenges related to macroeconomics, semiconductors and geopolitics with the highest priority. As a technology leader in the semiconductor industry, technological progress is one of ASML’s top priorities. We closely followed the execution of the product and technology roadmap and are pleased to see ASML making good progress on further enhancements to our EUV, DUV and metrology and inspection systems. Another area of focus during 2024 was export controls. We closely followed and discussed with the Board of Management developments in this area and the implications for ASML. We are confident that ASML is well positioned to continue to deliver long-term growth and stakeholder value in a sustainable manner. | |||||
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Deep dive: Operating model | ||
The Supervisory Board paid attention to the operating model and its evolution, taking into consideration the strong growth of the company in the past decade and the anticipated future growth. Aspects discussed with the Board of Management included how ASML can further improve its ability to respond to market demand with increased flexibility and agility to maintain our customer trust and technology leadership. | ||
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Risk |
SUSTAINABILITY | ASML Annual Report 2024 | 120 |
Financial and operational performance | |||||||
Focus area 2024 | Attention was paid to free cash flow, given the challenging economic climate, as well as because ASML decided to support customers and suppliers in navigating this situation. Another area of focus during 2024 was cost and flexibility. While our outlook for future growth remains strong, short-term volatility will occur and in 2023 and 2024 we saw a downturn in the semiconductor industry. The Supervisory Board focused on the challenges related to addressing the downcycle while at the same time preparing for the upcycle when it occurs, and stressed the importance of flexibility and cost efficiency in order to ultimately support our customers with cost- effective solutions. | Deep dive: ESG sustainability strategy | |||||
•2023 Annual Results and Annual Report •2023 external audit report •Final dividend 2023 •External auditor rotation •Legal matters report •2024 statutory interim report •Cash return including dividend policy, interim dividend and share buyback program •ERP migration •Focus on cost and flexibility and cash flows | |||||||
As a Supervisory Board we consider ESG sustainability to be an increasingly important topic. While the Supervisory Board keeps the overall oversight of ESG sustainability, various ESG sustainability aspects are discussed at committee level – for example, reporting in the Audit Committee, diversity in the Selection and Nomination Committee, ESG sustainability as part of the Board of Management's incentive scheme in the Remuneration Committee, and product and technology aspects in the Technology Committee. In 2024, we discussed updates to ASML’s ESG sustainability strategy with the Board of Management. The Climate Transition Plan was also brought to the plenary Supervisory Board, after review by the ESG Committee. The Supervisory Board also reassessed how the ESG oversight activities had been allocated to the Supervisory Board and its committees and some minor changes were agreed-upon. | |||||||
We reviewed the annual and interim Financial statements, including non-financial information, the quarterly results and accompanying press releases, as well as the year-end audits of the US GAAP and EU-IFRS Financial statements. As part of the financial updates, the Supervisory Board, assisted by the Audit Committee, reviewed ASML’s financing and cash return policies. The Supervisory Board approved the Board of Management’s proposals for the final and interim dividends paid in 2024. Furthermore, we monitored the execution of the 2023–2025 share buyback program. | |||||||
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People and organization |
SUSTAINABILITY | ASML Annual Report 2024 | 121 |
People and organization |
Governance and stakeholders |
SUSTAINABILITY | ASML Annual Report 2024 | 122 |
Meetings of the Supervisory Board | ||||
Most Supervisory Board and Committee meetings held in 2024 were in person, but the Supervisory Board also met virtually on some occasions. In addition to plenary discussions, break-out sessions in smaller groups were organized for discussing key strategic topics to optimize interaction. We also used preview videos for meeting preparation in addition to written meeting documents, to allow as much time as possible for discussion. | ||||
Supervisory Board meeting attendance overview1 | ||||||||||||
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95% | ||||||||||||
Attendance rate | ||||||||||||
Name | Supervisory Board | Audit Committee | Remuneration Committee | Selection and Nomination Committee | Technology Committee | ESG Committee | ||||||
Nils Andersen (Chair) | 7/7 | 8/8 | n/a | 5/5 | n/a | n/a | ||||||
Annet Aris | 7/7 | n/a | 5/5 | 5/5 | 5/5 | n/a | ||||||
Birgit Conix | 7/7 | 8/8 | n/a | n/a | n/a | 4/4 | ||||||
Mark Durcan | 7/7 | n/a | n/a | 5/5 | 5/5 | n/a | ||||||
Warren East | 6/7 | 7/8 | n/a | n/a | 5/5 | n/a | ||||||
Alexander Everke | 7/7 | n/a | 5/5 | n/a | n/a | 4/4 | ||||||
Terri Kelly | 6/7 | n/a | 5/5 | 5/5 | n/a | n/a | ||||||
Jack de Kreij | 7/7 | 8/8 | 5/5 | n/a | n/a | n/a | ||||||
An Steegen | 6/7 | n/a | n/a | n/a | 5/5 | 4/4 | ||||||
1.This overview contains the attendance data as of the formal date of appointment until the formal end date of the appointment. | ||||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 123 |
Supervisory Board skills | |||||||||||||||||||||||||||||||||
Board member | General skills | ASML skills | |||||||||||||||||||||||||||||||
Nils Andersen (Chair) | • | • | • | • | • | • | • | ||||||||||||||||||||||||||
Annet Aris | • | • | • | • | • | • | • | • | |||||||||||||||||||||||||
Birgit Conix | • | • | • | • | • | • | |||||||||||||||||||||||||||
Marc Durcan | • | • | • | • | • | • | • | • | • | ||||||||||||||||||||||||
Warren East | • | • | • | • | • | • | • | • | • | • | |||||||||||||||||||||||
Alexander Everke | • | • | • | • | • | • | • | • | • | • | |||||||||||||||||||||||
Terri Kelly | • | • | • | • | • | • | |||||||||||||||||||||||||||
Jack de Kreij | • | • | • | • | • | • | • | • | |||||||||||||||||||||||||
An Steegen | • | • | • | • | • | • | • | • | |||||||||||||||||||||||||
(Former) Executive Board member of (listed) international company | Finance / governance | Remuneration | Human resources / employee relations | IT / digital / cyber | ESG | Semiconductor ecosystem | Deep understanding of semiconductor technology | High-tech manufacturing / integrated supply chain management | Business in Asia | ||||||||||||||||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 124 |




SUSTAINABILITY | ASML Annual Report 2024 | 125 |
Evaluation process 2024 | ||||||||||||||
1. Self-assessment | 2. Self-assessment process | 3. Interviews with external adviser | 4. Feedback | 5. Recommendations actions | ||||||||||
Supervisory Board and Selection and Nomination Committee agree the scope, approach and broad nature of the review. | Evaluation topics: • Interaction Supervisory Board with Board of Management • Composition of Board and committees • Oversight of strategy • Stakeholder oversight • Risk management • Succession planning • Meeting quality | The Supervisory Board and Board of Management members, the Company secretary, the Head of HR&O and the External Auditor are interviewed by the external advisor and complete an online survey. | The Supervisory Board and Board of Management consider the outcome of the evaluation in separate sessions as well as jointly and assess the effectiveness of its ways of working. | New initiatives to improve the Supervisory Board's effectiveness are identified and actioned, and will form part of next year's evaluation process. | ||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 126 |

Aspects addressed by the BoM: | ||
Strategic focus | ||
Stakeholder involvement | ||
People and organization | ||
Board dynamics | ||
Board Management organization | ||

SUSTAINABILITY | ASML Annual Report 2024 | 127 |
Supervisory Board | ||||||||||||||||||||||||
Audit Committee | ESG Committee | Remuneration Committee | Selection and Nomination Committee | Technology Committee | ||||||||||||||||||||
Assisting in overseeing the integrity and quality of our financial reporting and the effectiveness of risk management and controls | Overseeing the ESG sustainability strategy and performance aimed at sustainable, long- term value creation | Overseeing the development and implementation of the remuneration policies, in cooperation with the Audit and Technology Committee | Assisting with the preparation of the selection criteria and appointment procedures for the Supervisory Board and Board of Management | Providing advice with respect to our technology plans required to execute the business strategy | ||||||||||||||||||||
4 | 3 | 4 | 4 | 4 | ||||||||||||||||||||
Members | Members | Members | Members | Members | ||||||||||||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 128 |
Audit Committee | |||||
![]() | The Audit Committee assists the Supervisory Board in overseeing the integrity and quality of our financial reporting and the effectiveness of the internal risk management and internal control systems. | ||||
![]() | Members | ||||
Jack de Kreij (Chair) | |||||
A key area of focus for the Audit Committee in 2024 was how to navigate macroeconomic and semiconductor industry cycles while investing in future growth.” | Nils Andersen | ||||
Birgit Conix | |||||
Warren East | |||||
The members of the Audit Committee are all independent members of the Supervisory Board. The Supervisory Board has determined that both Jack de Kreij and Birgit Conix qualify as Audit Committee financial experts pursuant to section 407 of the Sarbanes-Oxley Act and Dutch statutory rules, taking into consideration their extensive financial backgrounds and experience. | |||||
Jack de Kreij | |||||
Chair of the Audit Committee | |||||
SUSTAINABILITY | ASML Annual Report 2024 | 129 |
Spotlight: Sustainability reporting | ||||
Q&A with An Lommers | ||||
Head of Risk & Business Assurance and Corporate Chief Accountant | ||||
Q: | How did you take the Audit Committee along on the implementation of the ESRS? | |||
An Lommers: We kept the Audit Committee up-to- date throughout 2024 regarding our journey to implement the ESRS both during the regular meetings and during specific deep dive sessions planned for this purpose. Part of the sessions were held jointly with the ESG Committee, given the relevance of this topic for both committees and since we wanted to ensure efficiency in our ESG oversight activities. | ||||
Q: | Which subjects did you address in relation to sustainability reporting? | |||
An Lommers: A key area of focus was compliance with the new requirements. We reported on the outcome of the gap analysis and on the progress made in addressing and closing these gaps. Much attention was also paid to the double materiality assessment (DMA) and special deep dives were performed on the approach to and process of the DMA as well as the outcome of the DMA performed in 2024. | ||||

SUSTAINABILITY | ASML Annual Report 2024 | 130 |
The overview below provides a number of topics discussed during Audit Committee meetings in 2024, in addition to the recurring agenda topics. | ||||||||
Q1 | Q3 | |||||||
•2023 Annual Report and Financial statements US GAAP and EU-IFRS •Accounting deep dive: Balance sheet review •2023 external audit report •Annual reporting process •Cash return, including interim dividend Q1 2024 and final dividend 2023 •Fraud-risk assessment •Results of the external auditor evaluation 2023 •Results of the Audit Committee self-evaluation •Annual plan of Internal Audit •External evaluation of Internal Audit | •Statutory Interim Report 2024 •Cash return, including interim dividend Q3 2024 •Compliance deep dive: Finance •Audit Committee responsibilities in the area of ESG •Code of Conduct review •Balance sheet review •Deep dive: Security | |||||||
Q2 | Q4 | |||||||
•2023 SOX plan incl. materiality and scoping •External audit plan 2024 •Audit on expense reporting by the Board of Management and Supervisory Board 2023 •Update Internal Audit Charter •Deep dive: ESRS | •Financing •Cash return including Q4 2024 interim dividend •2024 Annual Report process •Long-term financial plan •Annual Plan 2025 •Investor Day messaging •Appointment new Head of Internal Audit •Internal Audit Plan 2025 •Compliance, incl. Fraud Risk Assessment •External audit update on 'hard close' procedures •External auditor transition •Review of Rules of Procedure Audit Committee | |||||||
SUSTAINABILITY | ASML Annual Report 2024 | 131 |
ESG Committee | |||||
![]() | The ESG Committee advises the Supervisory Board in carrying out its governance and oversight responsibilities with regard to sustainability, environmental, social and governance matters. | ||||
![]() | Members | ||||
Birgit Conix (Chair) | |||||
During 2024, the ESG Committee performed various deep dive reviews of topics that are part of the ESG sustainability strategy of ASML.” | Alexander Everke | ||||
An Steegen | |||||
The ESG Committee may be supported by external experts as well as experts from within ASML who act as advisers on the subjects reviewed and discussed. | |||||
Birgit Conix | |||||
Chair of the ESG Committee | |||||
SUSTAINABILITY | ASML Annual Report 2024 | 132 |
Spotlight: Scope 3 emissions in our supply chain | ||||
Q&A with Wayne Allan | ||||
Chief Strategic Sourcing & Procurement Officer | ||||
Q: | Why was it important to discuss scope 3 emissions in our supply chain with the ESG Committee? | |||
Wayne Allan: ASML’s ambition is to become greenhouse gas neutral for scope 3 upstream supply chain emissions by 2030. Our aim was for the ESG Committee to understand and support the plan and actions defined by ASML’s Strategic Sourcing & Procurement team, also because a performance target related to this topic was introduced as an LTI metric in 2024. | ||||
Q: | Can you provide more color to what was discussed with the ESG Committee? | |||
Wayne Allan: We explained how we plan to obtain emission reduction commitments from our tier 1 suppliers and to identify key decarbonization levers beyond these tier 1 suppliers. We also focused on opportunities for cross-company and cross-industry collaboration. In this context, the initiatives related to supplier data sharing and collection were also reported on. | ||||
Supervisory activities in the area of ESG sustainability | ||||||||||||||||
Supervisory Board | ||||||||||||||||
Oversight over overall company strategy aimed at sustainable long-term value creation and company performance, including ESG aspects | ||||||||||||||||
Audit Committee | ESG Committee | Remuneration Committee | Selection and Nomination Committee | Technology Committee | ||||||||||||
Non-financial reporting, ESG internal controls and assurance | Oversight over ESG strategy (execution) & performance | ESG metrics as part of executive remuneration | Corporate governance leadership development & succession including diversity | Product & technology roadmap-related ESG matters/ programs (e.g. EUV energy efficiency) | ||||||||||||

SUSTAINABILITY | ASML Annual Report 2024 | 133 |
The overview below provides details on the topics discussed during ESG Committee meetings in 2024. | ||||||||
Q1 | Q3 | |||||||
•Performance on ESG LTI targets and ESG LTI metrics and targets 2024–2026, and recommendation to the Remuneration Committee •Progress on ESG sustainability KPIs •Feedback on ESG benchmarks •ESG compliance: update on ESRS •Deep dive: Supply chain emissions (scope 3 upstream) | •Progress on ESG sustainability KPIs •Performance on LTI targets •Double Materiality Assessment 2024 •Feedback from ESG benchmarks •Update on laws and regulations •Climate roadmap •Deep dive: Community Partnership Program | |||||||
Q2 | Q4 | |||||||
•No meetings | •ESG strategy update •Progress on ESG sustainability KPIs •Performance on ESG LTI targets •Proposal new ESG LTI metrics and targets for 2025–2027 •Feedback from relevant benchmarks and update on selection of benchmarks •ESG compliance: update on ESRS •Deep dive: Climate Transition Plan | |||||||

SUSTAINABILITY | ASML Annual Report 2024 | 134 |
Selection and Nomination Committee | |||||
![]() | The Selection and Nomination Committee assists the Supervisory Board in relation to its responsibilities over the composition and functioning of the Supervisory Board and the Board of Management and the monitoring of corporate governance developments. | ||||
![]() | Members | ||||
Nils Andersen (Chair) | |||||
In 2024, the Selection and Nomination Committee's key area of focus was ASML's leadership transition.” | Annet Aris | ||||
Mark Durcan | |||||
Terri Kelly | |||||
Each member is an independent member of our Supervisory Board, in accordance with the Nasdaq Listing Rules. | |||||
Nils Andersen | |||||
Chair of the Selection and Nomination Committee | |||||
SUSTAINABILITY | ASML Annual Report 2024 | 135 |
Spotlight: Leadership transition | ||||
Q&A with Annet Aris | ||||
Vice Chair Supervisory Board and member of Selection and Nomination Committee | ||||
Q: | How do you look back on the leadership transition that took place in 2024? | |||
Annet Aris: The Selection and Nomination Committee spent significant time and effort preparing for the leadership change in close collaboration with the outgoing leadership and the new Board of Management. The transition itself was a smooth process that took place in the spirit of ASML's values challenge, collaborate and care. The new leadership team has been well received by our stakeholders, including our ASML employees. | ||||
Q: | How are you supporting the new Board of Management? | |||
Annet Aris: As a Supervisory Board, we continue to stay in close contact with the Board of Management to act as their sounding board and provide advice if and when needed. We do this not only during the formal meeting of the Supervisory Board, but also during informal interactions with the members of the Board of Management throughout the year. The Supervisory Board continues to be convinced that with the new leadership team, ASML is well positioned to continue our long-term success. | ||||

SUSTAINABILITY | ASML Annual Report 2024 | 136 |
The overview below provides details on the topics discussed during Selection and Nomination Committee meetings in 2024. | ||||||||
H1 | H2 | |||||||
•Board of Management composition, succession and leadership transition •Board of Management performance review •Profile and composition of Supervisory Board and composition of its committees •Outcome 2023 Supervisory Board evaluation and its committees and follow-up •ASML leadership succession potential, incl. diversity aspects •Corporate governance developments •Update to Rules of Procedure Supervisory Board and Board of Management •Update of the Supervisory Board profile •Composition of the Board of Directors of the ASML Preference Shares Foundation | •Composition of the Board of Management •Composition of Supervisory Board, including succession •Process Supervisory Board evaluation 2024 •Process Board of Management evaluation 2024 •Corporate governance developments | |||||||
SUSTAINABILITY | ASML Annual Report 2024 | 137 |
Technology Committee | |||||
![]() | The Technology Committee advises the Supervisory Board with respect to the technology plans required to execute our business strategy. | ||||
![]() | Members | ||||
Mark Durcan (Chair) | |||||
In Q4 2024, the Technology Committee visited ASML's facility in Berlin, Germany.” | Annet Aris | ||||
Warren East | |||||
An Steegen | |||||
The Technology Committee is supported by external experts as well as experts from within ASML who act as advisers on the subjects reviewed and discussed. External experts may include representatives of customers, suppliers and partners to increase the Committee’s understanding of the technology and research required to develop our leading-edge systems. | |||||
Mark Durcan | |||||
Chair of the Technology Committee | |||||
SUSTAINABILITY | ASML Annual Report 2024 | 138 |
The overview below provides details on the topics discussed during Technology Committee meetings in 2024. | ||||||||
Q1 | Q3 | |||||||
•Review of Applications •Technology Leadership Index performance review 2023 and 2021–2023 and target-setting for 2024 and 2024–2026 •Applications overview •E-beam metrology •Computational lithography •Optical metrology including soft x-ray •Data management •Innovation process •System engineering •Development and engineering •Succession planning | •Technology Index Update •0.33 NA – business, product and program •0.55 NA – business, product and program •Common EUV platform and potential products including positioning and rationale, optics roadmap and technology common platform •Profile and potential Technology Committee external advisers | |||||||
Q2 | Q4 | |||||||
•Innovation process including role of research, System engineering and D&E •Research •System engineering •Development and engineering •Succession planning Technology organization | •Review of DUV business •Device roadmap and holistic lithography solutions •Profile and potential Technology Committee external advisors •Visit to ASML's facility in Berlin, Germany | |||||||
Spotlight: Visit to ASML Berlin GmbH | ||||
Q&A with Markus Matthes | ||||
Chair ASML Berlin GmbH Management Team | ||||
Q: | What was the key objective of the ASML Berlin GmbH leadership team for the Technology Committee visit? | |||
Markus Matthes: Our aim was to provide the Technology Committee with information about the organization and key activities of ASML Berlin GmbH and their contribution to ASML as a whole. | ||||
Q: | What topics did you discuss with the Technology Committee? | |||
Markus Matthes: We gave an overview of the people, products and processes and updated the Technology Committee about campus development. On the product side, we focused on the key components that are developed and produced in Berlin, including wafer tables and clamps, reticle chucks and mirror blocks. | ||||
Q: | How do you look back on the Technology Committee visit to ASML Berlin GmbH? | |||
Markus Matthes: It was very valuable to interact with the Technology Committee during their visit to ASML Berlin GmbH and to exchange perspectives on the important work that we are doing and on how ASML Berlin GmbH contributes to ASML's overall technology and manufacturing network. | ||||

SUSTAINABILITY | ASML Annual Report 2024 | 139 |


SUSTAINABILITY | ASML Annual Report 2024 | 140 |
We aim for ASML’s remuneration policies to be externally competitive and internally fair.” | |
Terri Kelly | |
Chair of the Remuneration Committee |
SUSTAINABILITY | ASML Annual Report 2024 | 141 |
Outlook | |

SUSTAINABILITY | ASML Annual Report 2024 | 142 |
Our remuneration principles for performance support long-term success and sustainable value | |||
Competitiveness | Our remuneration structure and levels intend to be competitive in the relevant labor market, while at the same time taking into account societal trends and perceptions. | ||
Alignment | Our Remuneration Policy is aligned with the short-term and long- term incentive policies for ASML senior management and other ASML employees and takes into account internal relativities. | ||
Long-term orientation | Our policy and incentives focus on sustainable and long-term value creation. | ||
Compliance | We adopt the highest standards of good corporate governance. | ||
Simplicity and transparency | Our policy and its execution are as simple as possible and easily understandable to all stakeholders. | ||
Linking remuneration to purpose and strategy | ||||||||||
Purpose | Strategy | Incentive measures | Pay for performance | |||||||
Unlocking the potential of people and society by pushing technology to new limits | Deepen customer trust | Strategic value drivers | Remuneration outcomes | |||||||
Extend our technology and holistic product leadership | ||||||||||
Financial measures | ||||||||||
Strengthen ecosystem relationships | ||||||||||
Customer orientation | ||||||||||
Create an exceptional workplace | ||||||||||
Technology leadership | ||||||||||
Drive operational excellence | ||||||||||
Leadership in ESG sustainability | ||||||||||
Deliver on our ESG sustainability mission and responsibilities | ||||||||||
How we performed in 2024 | ||||||||
Financial (based on US GAAP) | Non-financial | |||||||
€28.3bn | €14.5bn | €9.0bn | 8.0 | |||||
Total sales | Gross profit | Income from operations | Technology Leadership Index score | |||||
(2023: €27.6bn) | (2023: €14.1bn) | (2023: €9.0bn) | (2023: 7.8) | |||||
€11.2bn | €19.25 | €12.7bn | 78.9% | |||||
Net cash provided by operating activities | Earnings per share | Cash and cash equivalents and short- term investments | Employee engagement score (three-year rolling average) | |||||
(2023: €5.4bn) | (2023: €19.91) | (2023: €7.0bn) | (2023: 78.7%) | |||||

SUSTAINABILITY | ASML Annual Report 2024 | 143 |
We aim to align the total remuneration for our Board of Management to our business strategy through a combination of fixed pay and short- and long- term incentives, underpinned by stretching performance targets. | |||
€20.1m | |||
Total remuneration1 | |||
136.1% | |||
Achieved of STI target | |||
132.3% | |||
Achieved of LTI target | |||
40:1 | |||
CEO vs. average per FTE | |||
Board of Management1 | |
Christophe D. Fouquet2 | |
Total remuneration 2024 (€’000s) | |
€5,432 | |
Frédéric J.M. Schneider-Maunoury | |
Total remuneration 2024 (€’000s) | |
€4,209 | |
Roger J.M. Dassen | |
Total remuneration 2024 (€’000s) | |
€4,190 | |
Wayne R. Allan | |
Total remuneration 2024 (€’000s) | |
€3,897 | |
James (Jim) P. Koonmen3 | |
Total remuneration 2024 (€’000s) | |
€2,347 | |
Remuneration summary (€’000s) |





Base salary and benefit | STI | LTI | ||||||||||
Stakeholder engagement in 2024 | |||
During 2024, we consulted with our large shareholders and other stakeholders, as well as with our Board of Management. Engagements took place prior to the 2024 AGM and in Q3 and Q4 2024. | |||
Shareholders | |||
Number of organizations met | 9 | ||
Number of meetings | 18 | ||
Percentage of issued share capital owned4 | 23% | ||
Shareholders representatives and proxy advisers | |||
Number of organizations met | 3 | ||
Number of meetings | 9 | ||
Works Council | |||
Number of organizations met | 1 | ||
Number of meetings | >5 | ||
SUSTAINABILITY | ASML Annual Report 2024 | 144 |
Remuneration Committee | |||||
![]() | The Remuneration Committee advises the Supervisory Board and prepares the Supervisory Board’s resolutions with respect to the remuneration of the Board of Management and the Supervisory Board. | ||||
![]() | Members | ||||
Terri Kelly (Chair) | |||||
During 2024, the Committee continued looking at what the optimal incentive measures are to drive sustainable long-term value creation.” | Annet Aris | ||||
Alexander Everke | |||||
Jack de Kreij | |||||
Each member is an independent, non-executive member of our Supervisory Board in accordance with the Nasdaq Listing Rules. Ms. Kelly is neither a former member of our Board of Management, nor a member of the management board of another company. Currently, no member of the Remuneration Committee is a member of the management board of another Dutch listed company. | |||||
Terri Kelly | |||||
Chair of the Remuneration Committee | |||||
SUSTAINABILITY | ASML Annual Report 2024 | 145 |
SUSTAINABILITY | ASML Annual Report 2024 | 146 |
The below overview provides details on the topics discussed during Remuneration Committee meetings in 2024. | ||||||||
Q1 | Q3 | |||||||
•Total Board of Management remuneration 2024, including base salary 2024, and STI and LTI at- target levels •Short-Term Incentive Plan: Performance 2023, pay- out 2023 and targets 2024 •Long-Term Incentive Plan: Performance evaluation and share vesting performance period 2021–2023, and conditional grant and targets performance period 2024–2026 •Compliance with share ownership requirements •Remuneration Report 2023 •Self-evaluation of Remuneration Committee •Kick-off Board of Management Remuneration Policy review | •Progress STI 2024 and running LTI plans •Proposed changes to the Board of Management Remuneration Policy •Latest AGM voting trends •Board of Management peer group and benchmarking review •Double taxation compensation Wayne Allan •Supervisory Board Remuneration Policy benchmark | |||||||
Q2 | Q4 | |||||||
•Board of Management contracts •Update on AGM •Board of Management Remuneration Policy review | •Progress STI and LTI targets •Board of Management remuneration 2025, including base salary, at-target levels for STI and LTI, selection of STI and LTI metrics, and target levels •Supervisory Board remuneration benchmark and resulting proposal for change •Engagement of external auditor for agreed-upon procedures on remuneration •Draft Remuneration Report 2024 •Share planning for the period AGM 2025–2026 •Compliance of Board of Management members with share ownership requirements | |||||||

SUSTAINABILITY | ASML Annual Report 2024 | 147 |
SUSTAINABILITY | ASML Annual Report 2024 | 148 |
Current reference group composition | |||
European companies with focus on long-term technology/industrial engineering/R&D | Semiconductor manufacturing companies | Semiconductor equipment companies | |
ABB | Broadcom | Applied Materials | |
Airbus | Intel | Lam Research | |
Dassault Systèmes | Qualcomm | ||
Infineon Technologies | |||
Linde | |||
Medtronic | |||
Novartis | |||
NXP Semiconductors | |||
Philips | |||
Roche | |||
SAP | |||
Schneider Electric | |||
Shell | |||
Siemens | |||
Siemens Healthineers | |||
SUSTAINABILITY | ASML Annual Report 2024 | 149 |
Performance-driven scenarios | |
Retains high proportion of performance related by: | |

2024 levels for maximum performance | |||
President | |||
Other members | |||

% Variable | 85% | |
% Variable | 84% | |
2024 levels for on target performance | |||
President | |||
Other members | |||

% Variable | 76% | ||
% Variable | 74% | ||
2024 levels for threshold performance | |||
President | |||
Other members | |||

% Variable | 59% | ||
% Variable | 56% | ||
Below threshold performance | |||
President | |||
Other members | |||

% Variable | 0% | ||
% Variable | 0% | 0 % | |
n | Base salary | |
n | STI | |
n | LTI | |
SUSTAINABILITY | ASML Annual Report 2024 | 150 |
Base salary | + | STI cash bonus | + | LTI share-based incentive | + | Pension and other benefits | = | Total remuneration |
Fixed remuneration (base salary) | |||||
Link to strategy/rationale | 2022 policy | ||||
Attract, motivate and retain qualified industry professionals for the Board of Management in order to define and achieve strategic goals. | Benchmark | ||||
•Consisting of 20 most-relevant technology and R&D-oriented companies, including our talent competitors, business peers and (indirect) customers •Composition of companies in the reference group takes into account our geographic location – weighted toward European companies (75% weighting), with some US companies (25% weighting) | |||||
STI (cash bonus) | |||||
Link to strategy/rationale | 2022 policy | ||||
Ensure a balanced focus on both the (financial) performance of ASML in the short term, and our sustained future in terms of technological advancement and customer satisfaction, fueling long-term success. | •Maximum target STI: 120% of base salary for the President and CEO and 100% for the other BoM members •Implementation 2024 target STI: 120% of base salary for the President and CEO and 100% for the other BoM members | ||||
The weight of the individual STI performance metrics is as follows: | |||||
•60% Financial •20% Technology Leadership Index •20% Customer Orientation | |||||
LTI (share-based incentive) | |||||
Link to strategy/rationale | 2022 policy | ||||
Contribute to our strategy, long-term interests and sustainability using performance measures which balance the direct interest of our investors, the long-term financial success of ASML, the long-term continuation of technological advancement and the environmental and social dimensions of sustainability. | •Maximum target LTI: capped at 200% of base salary •Implementation 2024 target LTI: 200% of base salary for the President and CEO and 180% of base salary for the other BoM members | ||||
The weight of the individual LTI performance metrics is as follows: | |||||
•30% Relative TSR •20–30% ESG measures; 2024 weight: 20% •20–30% Technology Leadership Index; 2024 weight: 20% •20–30% Strategic value drivers; 2024 weight: 30% | |||||
Other elements of fixed remuneration (pension and other benefits) | |||||
Link to strategy/rationale | 2022 policy | ||||
Contribute to the competitiveness of the overall remuneration package and create alignment with market practice. | •Pension arrangement based on the ‘excedent’ (supplementary) arrangement for employees in the Netherlands – a defined contribution plan •Expense reimbursements, such as company car costs, travel expenses, representation allowances, housing costs (gross amount before taxes), social security costs and health and disability insurance costs | ||||
Share ownership guidelines | |||||
Link to strategy/rationale | 2022 policy | ||||
Requirement for a minimum share ownership by members of the Board of Management. Ensure alignment between the interests of the Board of Management members and our long-term value creation. | •President and CEO three times annual base salary, other BoM members two times annual base salary •Five-year period to comply •Supervisory Board has discretion to allow a temporary deviation in extraordinary circumstances •Any shortfall will be remediated through the next vesting of shares | ||||
SUSTAINABILITY | ASML Annual Report 2024 | 151 |

Annual plan 2024 | Performance metrics selected | EBIT % Customer orientation Technology leadership | Performance assessment by SB |
SUSTAINABILITY | ASML Annual Report 2024 | 152 |
Performance metric | Weight | Performance targets1 | Actual performance | Pay-out2 % of target | ||
Threshold | Target | Stretch | ||||
EBIT Margin (%) (Non-GAAP measure) | 60% | 27.0% | 29.5% | 32.0% | 31.9% | 148.5% |
Customer Orientation | 20% | 110.2% | ||||
Consisting of the following weighted sub-targets: | ||||||
Applications: Adoption of Multi Beam | 2.5% | * | 125.0% | |||
DUV Cost and Competitiveness | 2.5% | * | 110.0% | |||
EUV Low NA Maturity | 2.5% | * | 97.6% | |||
EUV High NA Performance | 2.5% | * | 77.0% | |||
ASML Customer Trust Survey | 10% | * | 118.1% | |||
Technology Leadership Index | 20% | 4 | 6 | 10 | 8.0 | 125.0% |
Total | 100% | 136.1% | ||||
Performance metric | Weight |
EBIT Margin (%) (Non-GAAP measure) | 60% |
Customer Orientation | 20% |
Consisting of the following weighted sub-targets: | |
Applications: Adoption of Multi Beam | 2.5% |
DUV Cost and Competitiveness | 2.5% |
EUV Low NA maturity | 2.5% |
EUV High NA insertion | 2.5% |
ASML Customer Trust Survey | 10% |
Strategic Orientation | 20% |
Consisting of the following weighted sub-targets: | |
ERP | 5% |
High Productivity Platform | 5% |
New Product Quality | 5% |
Global Supply Chain Development | 5% |
Total | 100% |
SUSTAINABILITY | ASML Annual Report 2024 | 153 |
Target-setting process | |||||||
Review company strategy in line with financial plan | Determine business priorities for upcoming three-year performance period | Determine LTI performance measures for three-year performance period | Finalize long-term financial plan | ||||
Step 1 | Step 2 | Step 3 | Step 4 | ||||

SUSTAINABILITY | ASML Annual Report 2024 | 154 |
Performance metric | Performance targets | |||
Weight | Threshold | Target | Maximum | |
Relative TSR | 30% | As per remuneration policy | ||
ROAIC (2024–2026)1 | 30% | 45% | 70% | 90% |
ESG Measures | 20% | |||
Consisting of equally weighted sub-metrics: | ||||
Employee engagement (Relative benchmark target vs. top 25% performing companies (three-year rolling)) | 6.7% | -4 | -2 | 0 |
Gender diversity: | 6.7% | |||
• % Inflow of women all JG and JG 9+ | 24% | 26% | 28% | |
• % Representation of women in JG 13+ | 12% | 14% | 16% | |
Commitment of the top 80% of suppliers (based on CO2e emissions) to reduce their CO2e footprint by 2030 | 6.7% | 65% | 75% | 85% |
Technology Leadership Index | 20% | 4 | 6 | 10 |
Total | 100% | |||
Vesting of shares process | ||||||||||||||||
Grant date | Vesting period within three years | Vesting date | Holding period two years | End of transfer restrictions | ||||||||||||
•In the period between the grant date and the vesting date, performance shares are conditional | •Performance shares are delivered to the participant. However, transfer restrictions apply: acquired performance shares cannot be transferred during the holding period •Participant is allowed to sell sufficient performance shares to cover tax obligations | |||||||||||||||

SUSTAINABILITY | ASML Annual Report 2024 | 155 |
Performance targets | Actual performance | Pay-out %2 % of target | |||||
Performance metric | Weight | Threshold | Target | Stretch | |||
Relative TSR | 30% | 87.5% | 121.6% | 138.0% | 92.7% | 36.5% | |
Normalized three-year average cash conversion rate %1 | 30% | 80% | 90% | 95% | 96.3% | 200.0% | |
Technology Leadership Index | 20% | 4 | 6 | 10 | 8.2 | 154.2% | |
ESG Measures | 20% | 152.5% | |||||
Consisting of the following sub-measures: | |||||||
EUV energy use per wafer pass (kWh per wafer pass) | 6.7% | 7.0 | 6.5 | 6.0 | 5.9 | 200.0% | |
Employee engagement (Relative benchmark target vs. top 25% performing companies (3 year rolling)) | 6.7% | -4% | -3% | 0% | -2.1% | 129.8% | |
% Representation of women in JG 13+ | 6.7% | 10% | 12% | 14% | 12.6% | 127.6% | |
Total | 100% | 132.3% | 3 | ||||
Performance targets | ||||
Performance metric | Weight | Threshold | Target | Maximum |
Relative TSR | 25% | As per remuneration policy | ||
ROAIC (2025–2027)1 | 35% | 35% | 50% | 65% |
ESG measures2 | 20% | |||
Consisting of the following sub-measures: | ||||
Gender diversity: | 6.7% | |||
• % Inflow of women JG 9+ (external and internal inflow) | 23.0% | 25.0% | 27.0% | |
• % Representation of women in JG 13+ | 14.0% | 15.0% | 16.0% | |
Engagement and inclusion: | 6.7% | |||
• Employee engagement (Relative benchmark target vs. top 25% performing companies (3 year rolling)) | —4p.p. | —2 p.p. | 0 p.p. | |
• Inclusion score (Relative benchmark target vs. top 25% performing companies (3 year rolling)) | —4p.p. | —2 p.p. | 0 p.p. | |
EUV energy use per wafer pass (kWh per wafer pass) | 6.7% | 5.0 | 4.7 | 4.5 |
Technology Leadership Index | 20% | 4 | 6 | 10 |
Total | 100% | |||
SUSTAINABILITY | ASML Annual Report 2024 | 156 |
Board of Management | Ownership guidelines | 2024 base salary (in € thousands) | Number of outstanding vested shares | Ownership ratio1 |
C.D. Fouquet | 3x base | 1,082 | 7,174 | 4.50 |
F.J.M. Schneider-Maunoury | 2x base | 754 | 19,800 | 17.82 |
R.J.M. Dassen | 2x base | 754 | 4,777 | 4.30 |
W.R. Allan | 2x base | 754 | 3,207 | 2.89 |
J.P. Koonmen2 | 2x base | 752 | 7,117 | 6.42 |
SUSTAINABILITY | ASML Annual Report 2024 | 157 |
Board of Management member | Financial year | Base salary | Pension | Other benefits | Total fixed | % Fixed | STI | LTI | Total variable | % Variable | Ratio fixed/variable | Total remuneration | ||
C.D. Fouquet1 | 2024 | 979 | 111 | 63 | 1,153 | 21.2% | 1,532 | 2,747 | 4,279 | 78.8% | 0.27 | 5,432 | ||
2023 | 725 | 82 | 56 | 863 | 24.5% | 883 | 1,773 | 2,656 | 75.5% | 0.32 | 3,519 | |||
2022 | 694 | 78 | 53 | 825 | 29.5% | 619 | 1,354 | 1,973 | 70.5% | 0.42 | 2,798 | |||
F.J.M. Schneider-Maunoury | 2024 | 754 | 161 | 51 | 966 | 23.0% | 1,026 | 2,217 | 3,243 | 77.0% | 0.30 | 4,209 | ||
2023 | 725 | 148 | 45 | 918 | 25.7% | 883 | 1,773 | 2,656 | 74.3% | 0.35 | 3,574 | |||
2022 | 694 | 141 | 36 | 871 | 30.6% | 619 | 1,354 | 1,973 | 69.4% | 0.44 | 2,844 | |||
R.J.M. Dassen | 2024 | 754 | 133 | 60 | 947 | 22.6% | 1,026 | 2,217 | 3,243 | 77.4% | 0.29 | 4,190 | ||
2023 | 725 | 121 | 56 | 902 | 25.4% | 883 | 1,773 | 2,656 | 74.6% | 0.34 | 3,558 | |||
2022 | 694 | 116 | 51 | 861 | 30.4% | 619 | 1,354 | 1,973 | 69.6% | 0.44 | 2,834 | |||
W.R. Allan2 | 2024 | 754 | 133 | 163 | 6 | 1,050 | 26.9% | 1,026 | 1,821 | 3 | 2,847 | 73.1% | 0.37 | 3,897 |
2023 | 492 | 82 | 38 | 612 | 29.6% | 599 | 860 | 1,459 | 70.4% | 0.42 | 2,071 | |||
J.P. Koonmen4,5 | 2024 | 516 | 8 | 206 | 6 | 730 | 31.1% | 702 | 915 | 1,617 | 68.9% | 0.45 | 2,347 | |
Total Board of Management | 2024 | 3,757 | 546 | 543 | 4,846 | 24.1% | 5,312 | 9,917 | 15,229 | 75.9% | 0.32 | 20,075 | ||
2023 | 2,667 | 433 | 195 | 3,295 | 25.9% | 3,248 | 6,179 | 9,427 | 74.1% | 0.35 | 12,722 | |||
2022 | 2,082 | 335 | 140 | 2,557 | 30.2% | 1,857 | 4,062 | 5,919 | 69.8% | 0.43 | 8,476 |
SUSTAINABILITY | ASML Annual Report 2024 | 158 |
Former Board of Management member | Financial year | Base salary | Pension | Other benefits | Total fixed | % Fixed | STI | LTI | Total variable | % Variable | Ratio fixed/variable | Total remuneration | ||
P.T.F.M. Wennink1 | 2024 | 345 | 82 | 119 | 2 | 546 | 10.9% | 494 | 3 | 3,953 | 4,447 | 89.1% | 0.12 | 4,993 |
2023 | 1,040 | 248 | 61 | 1,349 | 22.7% | 1,400 | 3,192 | 4,592 | 77.3% | 0.29 | 5,941 | |||
2022 | 1,020 | 206 | 58 | 1,284 | 30.0% | 961 | 2,035 | 2,996 | 70.0% | 0.43 | 4,280 | |||
M.A. van den Brink1 | 2024 | 345 | 82 | 111 | 2 | 538 | 10.8% | 494 | 3 | 3,953 | 4,447 | 89.2% | 0.12 | 4,985 |
2023 | 1,040 | 248 | 59 | 1,347 | 22.7% | 1,400 | 3,192 | 4,592 | 77.3% | 0.29 | 5,939 | |||
2022 | 1,020 | 206 | 57 | 1,283 | 30.0% | 961 | 2,035 | 2,996 | 70.0% | 0.43 | 4,279 | |||
Total former Board of Management | 2024 | 690 | 164 | 230 | 1,084 | 10.9% | 988 | 7,906 | 8,894 | 89.1% | 0.12 | 9,978 | ||
2023 | 2,080 | 496 | 120 | 2,696 | 22.7% | 2,800 | 6,384 | 9,184 | 77.3% | 0.29 | 11,880 | |||
2022 | 2,040 | 412 | 115 | 2,567 | 30.0% | 1,922 | 4,070 | 5,992 | 70.0% | 0.43 | 8,559 |
SUSTAINABILITY | ASML Annual Report 2024 | 159 |
Of market-based element | Of non-market-based elements | ||||||||||||
Board of Management member | Grant date | Status | Full control | Number of shares at target | Fair value at grant date | Number of shares at target | Fair value at grant date | Total number of shares at target | Total number of shares at maximum (200%) | Vesting date | Number of vested shares on publication date | Year-end closing share price in year of vesting | End of lock-up date |
C.D. Fouquet1 | 1/23/24 | Conditional | No | 1,065 | 939.9 | 2,485 | 692.7 | 3,550 | 7,100 | 1/1/27 | n/a | n/a | 1/1/29 |
1/27/23 | Conditional | No | 731 | 901.9 | 1,706 | 603.4 | 2,437 | 4,874 | 1/1/26 | n/a | n/a | 1/1/28 | |
4/29/22 | Conditional2 | No | 483 | 596.0 | 1,126 | 533.5 | 1,609 | 3,217 | 1/1/25 | 2,128 | 678.7 | 1/1/27 | |
1/22/21 | Unconditional | No | 717 | 635.6 | 1,670 | 454.9 | 2,387 | 4,774 | 1/1/24 | 3,763 | 681.7 | 1/1/26 | |
1/24/20 | Unconditional | No | 858 | 286.9 | 2,001 | 263.7 | 2,859 | 5,718 | 1/1/23 | 5,208 | 503.8 | 1/1/25 | |
F.J.M. Schneider-Maunoury | 1/23/24 | Conditional | No | 668 | 939.9 | 1,559 | 692.7 | 2,227 | 4,453 | 1/1/27 | n/a | n/a | 1/1/29 |
1/27/23 | Conditional | No | 731 | 901.9 | 1,706 | 603.4 | 2,437 | 4,874 | 1/1/26 | n/a | n/a | 1/1/28 | |
4/29/22 | Conditional2 | No | 483 | 596.0 | 1,126 | 533.5 | 1,609 | 3,217 | 1/1/25 | 2,128 | 678.7 | 1/1/27 | |
1/22/21 | Unconditional | No | 717 | 635.6 | 1,670 | 454.9 | 2,387 | 4,774 | 1/1/24 | 3,763 | 681.7 | 1/1/26 | |
1/24/20 | Unconditional | No | 858 | 286.9 | 2,001 | 263.7 | 2,859 | 5,718 | 1/1/23 | 5,208 | 503.8 | 1/1/25 | |
R.J.M. Dassen | 1/23/24 | Conditional | No | 668 | 939.9 | 1,559 | 692.7 | 2,227 | 4,453 | 1/1/27 | n/a | n/a | 1/1/29 |
1/27/23 | Conditional | No | 731 | 901.9 | 1,706 | 603.4 | 2,437 | 4,874 | 1/1/26 | n/a | n/a | 1/1/28 | |
4/29/22 | Conditional2 | No | 483 | 596.0 | 1,126 | 533.5 | 1,609 | 3,217 | 1/1/25 | 2,128 | 678.7 | 1/1/27 | |
1/22/21 | Unconditional | No | 717 | 635.6 | 1,670 | 454.9 | 2,387 | 4,774 | 1/1/24 | 3,763 | 681.7 | 1/1/26 | |
1/24/20 | Unconditional | No | 858 | 286.9 | 2,001 | 263.7 | 2,859 | 5,718 | 1/1/23 | 5,208 | 503.8 | 1/1/25 | |
W.R. Allan3 | 1/23/24 | Conditional | No | 668 | 939.9 | 1,559 | 692.7 | 2,227 | 4,453 | 1/1/27 | n/a | n/a | 1/1/29 |
1/27/23 | Conditional | No | 731 | 901.9 | 1,706 | 603.4 | 2,437 | 4,874 | 1/1/26 | n/a | n/a | 1/1/28 | |
J.P. Koonmen4,5 | 1/23/24 | Conditional | No | 676 | 939.9 | 1,578 | 692.7 | 2,255 | 4,509 | 1/1/27 | n/a | n/a | 1/1/29 |
SUSTAINABILITY | ASML Annual Report 2024 | 160 |
Of market-based element | Of non-market-based elements | ||||||||||||
Former Board of Management member | Grant date | Status | Full control | Number of shares at target | Fair value at grant date | Number of shares at target | Fair value at grant date | Total number of shares at target | Total number of shares at maximum (200%) | Vesting date | Number of vested shares on publication date | Year-end closing share price in year of vesting | End of lock-up date |
P.T.F.M. Wennink1 | 1/23/24 | Conditional | No | 316 | 939.9 | 738 | 692.7 | 1,054 | 2,109 | 1/1/27 | n/a | n/a | 1/1/29 |
1/27/23 | Conditional | No | 1,049 | 901.9 | 2,447 | 603.4 | 3,496 | 6,991 | 1/1/26 | n/a | n/a | 1/1/28 | |
4/29/22 | Conditional2 | No | 709 | 596.0 | 1,655 | 533.5 | 2,364 | 4,727 | 1/1/25 | 3,126 | 678.7 | 1/1/27 | |
1/22/21 | Unconditional | No | 1,053 | 635.6 | 2,455 | 454.9 | 3,508 | 7,016 | 1/1/24 | 5,531 | 681.7 | 1/1/26 | |
1/24/20 | Unconditional | No | 1,387 | 286.9 | 3,235 | 263.7 | 4,622 | 9,245 | 1/1/23 | 8,420 | 503.8 | 1/1/25 | |
M.A. van den Brink1 | 1/23/24 | Conditional | No | 316 | 939.9 | 738 | 692.7 | 1,054 | 2,109 | 1/1/27 | n/a | n/a | 1/1/29 |
1/27/23 | Conditional | No | 1,049 | 901.9 | 2,447 | 603.4 | 3,496 | 6,991 | 1/1/26 | n/a | n/a | 1/1/28 | |
4/29/22 | Conditional2 | No | 709 | 596.0 | 1,655 | 533.5 | 2,364 | 4,727 | 1/1/25 | 3,126 | 678.7 | 1/1/27 | |
1/22/21 | Unconditional | No | 1,053 | 635.6 | 2,455 | 454.9 | 3,508 | 7,016 | 1/1/24 | 5,531 | 681.7 | 1/1/26 | |
1/24/20 | Unconditional | No | 1,387 | 286.9 | 3,235 | 263.7 | 4,622 | 9,245 | 1/1/23 | 8,420 | 503.8 | 1/1/25 | |
Instrument | Performance shares | |
Grant | Conditional grant on an annual basis based on maximum achievable opportunity. The number of performance shares to be conditionally awarded is calculated using the volume-weighted average share price during the last quarter of the year preceding the conditional award. | |
Grant date | Date on which the performance shares are conditionally granted. | |
Performance period | Period of three years over which the achievement of the predefined performance targets is measured. | |
Vesting | The shares will become unconditional after the end of the performance period, depending on the level of achievement of the predetermined performance targets. | |
Holding period | The minimum holding period is two years after the vesting date. | |
Upon termination of contract, the transfer restrictions will remain in place during the holding period except in case of decease. | ||
In case a tax payment is due by the members of the Board of Management over the retrieved variable income, performance shares may be partially sold at vesting (‘sell to cover’) in accordance with the law and internal regulations. |
SUSTAINABILITY | ASML Annual Report 2024 | 161 |
For the year ended December 31 (€, in thousands) | 2020 | 2021 | Change (in %) | 2022 | Change (in %) | 2023 | Change (in %) | 2024 | Change (in %) |
Net sales | 13,978,452 | 18,610,994 | 33.1 | 21,173,448 | 13.8 | 27,558,506 | 30.2 | 28,262,877 | 2.6 |
Net income based on US GAAP | 3,553,670 | 5,883,177 | 65.6 | 5,624,209 | (4.4) | 7,838,994 | 39.4 | 7,571,563 | (3.4) |
Net income based on EU-IFRS | 3,696,813 | 6,134,595 | 65.9 | 6,395,775 | 4.3 | 8,115,168 | 26.9 | 8,348,971 | 2.9 |
ASML share price (closing price on Euronext Amsterdam in €) | 397.6 | 706.7 | 77.7 | 503.8 | (28.7) | 681.7 | 35.3 | 678.7 | (0.4) |
Average number of payroll employees in FTEs | 24,727 | 28,223 | 14.1 | 33,071 | 17.2 | 38,805 | 17.3 | 41,697 | 7.5 |
Employee engagement score | n/a | 78.0% | n/a | 77.9% | (0.1) | 80.3% | 3.1 | 78.4% | (2.4) |
Remuneration C.D. Fouquet (CEO)1 | 2,975 | 3,137 | 5.4 | 2,798 | (10.8) | 3,519 | 25.8 | 5,432 | 54.4 |
Remuneration P.T.F.M. Wennink (former CEO)2 | 4,564 | 4,820 | 5.6 | 4,280 | (11.2) | 5,941 | 38.8 | 4,993 | (16.0) |
Remuneration M.A. van den Brink (former CEO) | 4,564 | 4,819 | 5.6 | 4,279 | (11.2) | 5,939 | 38.8 | 4,985 | (16.1) |
Remuneration F.J.M. Schneider-Maunoury | 2,927 | 3,158 | 7.9 | 2,844 | (9.9) | 3,574 | 25.7 | 4,209 | 17.8 |
Remuneration R.J.M. Dassen | 3,804 | 3,800 | (0.1) | 2,834 | (25.4) | 3,558 | 25.5 | 4,190 | 17.8 |
Remuneration W.R. Allan3 | n/a | n/a | n/a | n/a | n/a | 2,071 | n/a | 3,897 | 88.2 |
Remuneration J.P. Koonmen4 | n/a | n/a | n/a | n/a | n/a | n/a | n/a | 2,347 | n/a |
Average remuneration per FTE based on US GAAP | 120 | 122 | 1.7 | 125 | 2.5 | 138 | 10.4 | 145 | 5.1 |
Average remuneration per FTE based on EU-IFRS | 120 | 122 | 1.7 | 118 | (3.3) | 143 | 21.2 | 145 | 1.4 |
Internal pay ratio (CEO versus employee remuneration based on US GAAP)5 | 38 | 40 | 5.3 | 34 | (15.0) | 43 | 26.5 | 40 | (7.0) |
Internal pay ratio (CEO versus employee remuneration based on EU-IFRS)5 | 38 | 40 | 5.3 | 36 | (10.0) | 42 | 16.7 | 40 | (4.8) |
SUSTAINABILITY | ASML Annual Report 2024 | 162 |
SUSTAINABILITY | ASML Annual Report 2024 | 163 |
SUSTAINABILITY | ASML Annual Report 2024 | 164 |
Fixed remuneration | |||||||
Description in 2023 Remuneration Policy | 2023 | 2024 | |||||
Fixed remuneration paid in cash including a base membership fee, committee fees and additional compensation contingent on Supervisory Board members' activities and responsibilities. | Chair of Supervisory Board | €140,000 | €140,000 | ||||
Vice Chair of Supervisory Board | €100,000 | €100,000 | |||||
Member of Supervisory Board | €80,000 | €80,000 | |||||
Chair Audit Committee | €27,000 | €27,000 | |||||
Member Audit Committee | €18,000 | €18,000 | |||||
Chair of other committees | €22,000 | €22,000 | |||||
Member of other committees | €16,000 | €16,000 | |||||
Extra allowance for intercontinental meetings | |||||||
Description in 2023 Remuneration Policy | 2023 | 2024 | |||||
Extra, fixed allowance paid in connection with additional time commitment for intercontinental travel. | For each meeting that involves intercontinental travel. | €5,000 | €5,000 | ||||
Expenses | |||||||
Description in 2023 Remuneration Policy | 2023 | 2024 | |||||
Expenses incurred in relation to meeting attendance are reimbursed. In addition, a fixed net cost allowance is paid, covering certain pre- defined out-of-pocket expenses. | Fixed net cost allowance | ||||||
Chair of Supervisory Board | €1,980 | €1,980 | |||||
Member of Supervisory Board | €1,380 | €1,380 | |||||
Remuneration in special circumstances | |||||||
The Supervisory Board may, upon recommendation of the Remuneration Committee, grant additional remuneration in special circumstances. This may concern granting increased Supervisory Board and/or committee fees, depending on the character of the circumstances – for instance, if there were a significant increase in time investment by its members. | The additional annual remuneration per member will be capped at one time the amount of the annual Supervisory Board membership fee payable to such member. The Supervisory Board considers an increase of at least 25% a significant increase in time investment. | ||||||
Loans and guarantees | ||||||
Description | Value | |||||
No (personal) loans or guarantees or the like will be granted. | Not applicable | |||||
Shares and share ownership | ||||||
Description | Value | |||||
No (rights to) shares are granted by way of remuneration. Any holding of ASML shares is for the purpose of long-term investment. Any trading activity is subject to our Insider Trading Rules. | Not applicable | |||||
Other arrangements | ||||||
Description | Value | |||||
(Re)appointment based on Dutch law and our Articles of Association. No clawback, severance or change in control arrangements is in place. | Not applicable | |||||
SUSTAINABILITY | ASML Annual Report 2024 | 165 |
Supervisory Board member | Membership fees 2024 | Committee fees 2024 | Allowances 20241 | Ratio fixed/variable 2024 | Total remuneration 2024 | Total remuneration 2023 | Total remuneration 2022 | Total remuneration 2021 | Total remuneration 2020 |
T.L. Kelly | 80 | 38 | 11 | 1.0 | 129 | 137 | 126 | 107 | 88 |
A.P. Aris | 100 | 48 | 6 | 1.0 | 154 | 152 | 144 | 127 | 95 |
B.M. Conix | 80 | 40 | 6 | 1.0 | 126 | 109 | 99 | 63 | n/a |
D.M. Durcan | 80 | 38 | 26 | 1.0 | 144 | 137 | 126 | 112 | 57 |
D.W.A. East | 80 | 34 | 6 | 1.0 | 120 | 119 | 99 | 93 | 59 |
N.S. Andersen | 140 | 40 | 7 | 1.0 | 187 | 123 | n/a | n/a | n/a |
J.P. de Kreij | 80 | 43 | 6 | 1.0 | 129 | 85 | n/a | n/a | n/a |
A.F.M. Everke | 80 | 32 | 6 | 1.0 | 118 | 104 | 66 | n/a | n/a |
A.L. Steegen | 80 | 32 | 6 | 1.0 | 118 | 109 | 66 | n/a | n/a |
Total | 800 | 345 | 80 | 1.0 | 1,225 | 1,075 | 726 | 502 | 299 |
Former Supervisory Board member | Total remuneration 2024 | Total remuneration 2023 | Total remuneration 2022 |
G.J. Kleisterlee | n/a | 61 | 190 |
R.D. Schwalb | n/a | 37 | 116 |
J.M.C. Stork | n/a | n/a | 40 |
Total | n/a | 98 | 346 |
SUSTAINABILITY | ASML Annual Report 2024 | 166 |

SUSTAINABILITY | ASML Annual Report 2024 | 167 |
Limited assurance report of the independent auditor on the Sustainability statements | ||
General disclosures | ||
Basis for preparation | ||
ESG sustainability governance | ||
ESG sustainability at a glance | ||
Our value chain overview | ||
Impact, risk and opportunity management | ||
Contributing to the UN's SDGs | ||
Metrics | ||
Reference table | ||
Environmental | ||
Energy efficiency and climate action | ||
Circular economy | ||
EU Taxonomy | ||
Social | ||
Attractive workplace for all | ||
Responsible value chain | ||
Innovation ecosystem | ||
Valued partner in our communities | ||
Governance | ||
ESG integrated governance | ||
SUSTAINABILITY | ASML Annual Report 2024 | 168 |
SUSTAINABILITY | ASML Annual Report 2024 | 169 |
SUSTAINABILITY | ASML Annual Report 2024 | 170 |

SUSTAINABILITY | ASML Annual Report 2024 | 171 |

SUSTAINABILITY | ASML Annual Report 2024 | 172 |
SUSTAINABILITY | ASML Annual Report 2024 | 173 |
Our environmental, social and governance (ESG) sustainability governance model | |||||||||||||||||||||||||||
Supervisory Board | |||||||||||||||||||||||||||
•Supervises, monitors and advises the Board of Management on ESG sustainability aspects •Identifies principal risks and opportunities | |||||||||||||||||||||||||||
Board of Management | |||||||||||||||||||||||||||
•Sets and oversees ESG sustainability strategy •Oversees execution | |||||||||||||||||||||||||||
ESG Sustainability team | |||||||||||||||||||||||||||
•Supports the Board of Management on ESG sustainability aspects | |||||||||||||||||||||||||||
a l | Cross-functional table meetings | ||||||||||||||||||||||||||
Energy efficiency and climate action | Circular economy | Attractive workplace for all | Responsible value chain | Innovation ecosystem | Valued partner in our communities | ESG integrated governance | Engaged stakeholders | Transparent reporting | |||||||||||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 174 |

SUSTAINABILITY | ASML Annual Report 2024 | 175 |

SUSTAINABILITY | ASML Annual Report 2024 | 176 |
Our vision is to enable groundbreaking technology to solve some of humanity’s toughest challenges |
1 | Deepen customer trust | 2 | Extend our technology and holistic product leadership | 3 | Strengthen ecosystem relationships | |||||
Create an exceptional workplace | ||||||||||
4 | 5 | Drive operational excellence | 6 | Deliver on our ESG sustainability mission and responsibilities | ||||||
Environmental | Social | Governance | |||
We want to help expand computing power while minimizing waste, energy use and emissions. Our focus on energy efficiency and climate action, and on the circular economy, is fundamental to achieving this goal. | We want to deliver responsible growth that benefits all our stakeholders – providing an attractive workplace for all, building a responsible value chain, fueling innovation in our ecosystem and being a valued partner to communities. | We aim to act on our responsibilities and anchor them across our entire business through integrated governance, engaged stakeholders and transparent reporting. |
Energy efficiency and climate action | Circular economy | Attractive workplace for all | Responsible value chain | ESG integrated governance | Engaged stakeholders | |||
Innovation ecosystem | Valued partner in our communities | Transparent reporting | ||||||
Our ESG sustainability strategy is tracked by targets which are detailed across the theme pages |

SUSTAINABILITY | ASML Annual Report 2024 | 177 |
SUSTAINABILITY | ASML Annual Report 2024 | 178 |
SUSTAINABILITY | ASML Annual Report 2024 | 179 |
How we identified our material topics | ||||||||||||||||||||
Step 1: Understanding context | Step 2: Determining potentially relevant sustainability matters | Step 3: Identifying impacts, risks and opportunities | Step 4: Assessing the materiality of impacts | Step 5: Assessing the materiality of risks and opportunities | Step 6: Deciding on thresholds for materiality | Step 7: Assessing strategic implications | ||||||||||||||
Stakeholders that are or could be affected by ASML, and stakeholders that affect or could affect ASML, are central to the materiality assessment process. To understand the topics of interest of our five stakeholder groups – customers, employees, suppliers (including contractors), shareholders and society – and how their interests may be impacted, we continuously engage with them. This includes regular meetings, surveys, supplier days and investor dialogue. In addition, we take into account business relationships, relevant legal and regulatory developments, industry studies, knowledge from internal and external subject matter experts and ESG benchmarks. These support the identification of impacts, risks and opportunities that are considered in the materiality assessment – as well as the collection of insights for improvement actions and feedback on strategy, performance and progress. | We monitor the sustainability context of our activities and business relationships by reviewing relevant sources of information about our industry and peers, international standards and (upcoming) legislation, media and selected ESG rating agencies. Based on these analyses, insights from stakeholder engagement, and internal impact and risk assessments, an initial list of potential material sustainability matters is drafted. | We define impacts, risks and opportunities related to each of the potential material sustainability matters identified. Impacts include positive and negative, actual and potential, and short-, medium- and long-term impacts from our activities on the environment, society and the economy (based on our strategy and business model), our business relations, geographies and across our value chain. To identify risks and opportunities related to the potential material sustainability matters, we aligned with our ASML risk universe and engaged with internal stakeholders and experts. Risks and opportunities relate to our ability to continue to use or obtain the resources needed in our business processes, assets and other relevant activities across our value chain, and our ability to rely on relationships needed in business processes on acceptable terms. They may pertain to financial capital, manufactured capital, intellectual capital, human capital, social and relationship capital, and natural capital. In the identification process of material climate- related impacts, we considered our current and locked-in greenhouse gas (GHG) emissions as well as the potential future GHG emissions in our own operations and across the value chain. For the identification of material climate- related risks and opportunities, we considered the outcomes of our climate resilience analysis. | We assess the materiality of negative impacts based on scale, scope, irremediable character (also referred to as severity) and, in case of potential impacts, likelihood. Similarly, the materiality of positive impacts is assessed based on scale, scope and likelihood. For potential negative human-rights-related impacts, severity takes precedence over likelihood. The assessment of the impacts has been done by the ESG Sustainability team and has been reviewed and validated with relevant internal stakeholders, finance and risk departments, before finalization and adaptation by the BoM. | We assess the anticipated financial effect of each risk and opportunity based on magnitude and likelihood. Magnitude considers effects on the ability to continue to use resources, including access, availability and prices, and our ability to continue to rely on relationships – taking into account reputational effects and potential actions by stakeholders in the short, medium and long term. Likelihood reflects the probability that a risk or opportunity event will occur. In this DMA only sustainability-related risks and opportunities have been taken into consideration. The assessment of the risks and opportunities has been done by the ESG Sustainability team and has been reviewed and validated with relevant internal stakeholders, finance and risk departments, before finalization and adaptation by the BoM. | The assessment results in a materiality ranging score (low, medium or high) for each impact, risk and opportunity, and we use these scores to apply thresholds for materiality. Thresholds are determined separately for negative impacts, positive impacts, risks and opportunities. Only impacts, risks and opportunities with an assessed score of medium or high are considered to be material. To provide an overview of material sustainability matters, impacts, risks and opportunities are clustered into material sustainability matters. Sustainability matters may be material from the impact perspective, the financial perspective or both. | The outcomes of the materiality assessment have been presented to and approved by our BoM and serve as the basis for the ESG sustainability strategy. Material ESG sustainability matters are linked to themes in the ESG sustainability strategy and the relevant value drivers for each. If new material matters are identified, they are added to the ESG sustainability strategy. If new risks are identified, they are also included in our risk inventory and managed in line with our ERM framework. We define measures to manage the related impacts, risks and opportunities for each material ESG sustainability matter, including policies, action plans, metrics and targets. All are disclosed under the respective environmental, social and governance sections – where we describe our policies on how we manage the impacts, risks and opportunities, which actions we take to address them, and the related targets and metrics. | ||||||||||||||
Read more in Strategic report – Our | ||||||||||||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 180 |
ESRS topics | Value chain | Our impacts | Time frame | Impact | Value chain | Our risks and opportunities | Time frame | Direction | How we are responding | ||||||||||||
Climate change | Own operations | Energy use and GHG emissions from manufacturing and buildings (scope 1 and 2) | ![]() | Own operations | Physical climate change risks to ASML (Climate resilience analysis) | ![]() | Read more in Energy efficiency and climate action | ||||||||||||||
Own operations | Impact on grid and energy availability through our manufacturing and buildings (scope 1 and 2) | ![]() | Customers | Physical climate change risks to our customers (Climate resilience analysis) | ![]() | ![]() | |||||||||||||||
Customers | Energy use and GHG emissions from product use (scope 3) | ![]() | Downstream beyond customers | Increased market demand for low-carbon technologies (Climate resilience analysis) | ![]() | ||||||||||||||||
Upstream and suppliers | Energy use and GHG emissions from purchased goods, services and logistics emissions (scope 3) | ![]() | Across value chain | Technology risk due to transition to low-carbon technologies (Climate resilience analysis) | ![]() | ||||||||||||||||
Own operations | Energy use and GHG emissions from business travel and commuting (scope 3) | ![]() | Across value chain | Climate-related regulation and carbon taxes (Climate resilience analysis) | ![]() | ||||||||||||||||
Downstream beyond customers | Energy use and GHG emissions from use of our customers' products (microchips) in various applications (ICT and society)1 | ![]() | Own operations | Damage to our brand and reputation (Climate resilience analysis) | ![]() | ||||||||||||||||
![]() ![]() | Downstream beyond customers | Reduction of energy use and GHG emissions from use of our customers' products (microchips) in various applications (ICT and society)1 | ![]() | ||||||||||||||||||
Key | ||||||||||
![]() | Environmental topics | ![]() | Positive, actual | Short term | ||||||
![]() | Social topics | ![]() | Positive, potential | Medium term | ||||||
![]() | Governance topics | ![]() | Negative, actual | Long term | ||||||
![]() | Negative, potential | |||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 181 |
ESRS topics | Value chain | Our impacts | Time frame | Impact | Value chain | Our risks and opportunities | Time frame | Direction | How we are responding | ||||||||||||
Resource use and circular economy | Own operations and suppliers | Resource inflows in the production process (Systems, parts and tools including packaging and transport tools)2 | ![]() | Own operations and suppliers | Disruption to the supply chain caused by unavailability of materials and parts (Systems, parts and tools including packaging and transport tools)2 | ![]() | Read more in Circular economy | ||||||||||||||
Own operations and customers | Impact of our resource outflows at customers’ sites (Systems, parts and tools including packaging and transport tools)2 | ![]() | Own operations and customers | Loss of market share and dissatisfied customers through not meeting agreed circular economy standards (Systems, parts and tools including packaging and transport tools)2 | ![]() | ![]() | |||||||||||||||
Own operations | Waste produced from our operations (Systems, parts and tools including packaging and transport tools, non-product-related (NPR) waste and Real estate) | ![]() | Own operations and customers | Inability to meet changing customer demands for more circular products (Systems, parts and tools including packaging and transport tools) | ![]() | ||||||||||||||||
Downstream beyond customers | Use of our customers' products enabling the transition to a circular economy in various applications | ![]() | |||||||||||||||||||
![]() ![]() | Downstream beyond customers | Use of our customers' products hindering the transition to a circular economy in various applications | ![]() | ||||||||||||||||||
Own workforce | Own operations | Impact on employees through fair labor conditions (Labor conditions) | ![]() | Own operations | Failure to provide fair labor conditions could result in unavailability of personnel, disengaged employees, retention and recruitment challenges (Talent attraction, employee engagement and retention, and Labor conditions) | ![]() | Read more in Attractive workplace for all | ||||||||||||||
Own operations | Impact on employees by facilitating professional growth, knowledge and skills development, contributing to continued employability (Learning and development) | ![]() | Own operations | Failure to foster an equal opportunity environment could result in unavailability of personnel, disengaged employees, and retention and recruitment challenges (Talent attraction, employee engagement and retention, and Diversity and inclusion) | ![]() | ![]() | |||||||||||||||
Own operations | Impact on employees by providing equal treatment and opportunities for all (Diversity and inclusion) | ![]() | Own operations | Failure to comply with health- and safety-related regulations or implement effective health and safety practices could result in liabilities and reputational risk (Occupational health and safety) | ![]() | ||||||||||||||||
Own operations | Failure to effectively manage employees' health and well-being could impact their work–life balance and mental health (Well- being, Occupational health and safety) | ![]() | Own operations | Failure to comply with labor law could lead to sanctions, financial loss or reputational damage (Labor conditions) | ![]() | ||||||||||||||||
![]() ![]() | Own operations | Failure to manage occupational health and safety – for example when employees are working with hazardous substances and systems (Occupational health and safety) | ![]() | ||||||||||||||||||
Key | ||||||||||
![]() | Environmental topics | ![]() | Positive, actual | Short term | ||||||
![]() | Social topics | ![]() | Positive, potential | Medium term | ||||||
![]() | Governance topics | ![]() | Negative, actual | Long term | ||||||
![]() | Negative, potential | |||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 182 |
ESRS topics | Value chain | Our impacts | Time frame | Impact | Value chain | Our risks and opportunities | Time frame | Direction | How we are responding | ||||||||||||
Workers in the value chain | Upstream and suppliers | Inadequate or poor working conditions in our supply chain (Responsible supply chain) | ![]() | Upstream and suppliers | Failure to comply with rules and regulations regarding conflict minerals (Responsible supply chain) | ![]() | Read more in Responsible value chain | ||||||||||||||
Upstream and suppliers | Lack of access to equal opportunities across our value chain (Responsible supply chain) | ![]() | Upstream and suppliers | Disruption in the supply chain due to unavailability of workers (Responsible supply chain) | ![]() | ![]() | |||||||||||||||
Upstream and suppliers | Forced and child labor in conflict areas (Responsible supply chain) | ![]() | |||||||||||||||||||
![]() ![]() | Customers | Impacts on human rights considering risks inherent to the technology industry (Responsible product use) | ![]() | ||||||||||||||||||
ASML specific topics | Downstream beyond customers | Improved quality of life through access to ICT and digital services (Responsible product use) | ![]() | Downstream beyond customers | Increased demand for microchip-enabled tools and solutions that can help society make progress and address global challenges (Responsible product use) | ![]() | Read more in Responsible value chain | ||||||||||||||
Downstream beyond customers | Impacts from potential misuse of technology (Responsible product use) | ![]() | ![]() | ||||||||||||||||||
![]() | Downstream beyond customers | Society benefiting from support for ESG-focused research, startups, scaleups, platforms and collaboration (ESG innovation) | ![]() | ||||||||||||||||||
Affected communities | Own operations | Pressure on availability of affordable housing in Veldhoven due to demand from employees (Attractive communities) | ![]() | Own operations | Failure to create an attractive community for future employees could impact our ability to attract talent (Attractive communities, Inclusive communities) | ![]() | Read more in Valued partner in our communities | ||||||||||||||
Own operations | Car congestion and pressure on regional infrastructure due to employee commuting (Attractive communities) | ![]() | Own operations | Addressing adverse reactions from local communities could impact our ability to effectively manage our business (Attractive communities) | ![]() | ![]() | |||||||||||||||
Own operations | Pressure on social cohesion in Veldhoven local community due to a more diverse local population including ASML expats (Attractive communities, Inclusive communities) | ![]() | Own operations | Adverse reactions from local communities could impact our ability to grow in Veldhoven (Attractive communities) | ![]() | ||||||||||||||||
![]() ![]() | Own operations | Pressure on Veldhoven's regional talent pipeline impacting local companies due to ASML's demand for talent (Inclusive communities) | ![]() | Own operations | Failure to create an attractive community for future talent could impact our ability to effectively manage our local supply chain output (Attractive communities, Inclusive communities) | ![]() | |||||||||||||||
Key | ||||||||||
![]() | Environmental topics | ![]() | Positive, actual | Short term | ||||||
![]() | Social topics | ![]() | Positive, potential | Medium term | ||||||
![]() | Governance topics | ![]() | Negative, actual | Long term | ||||||
![]() | Negative, potential | |||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 183 |
ESRS topics | Value chain | Our impacts | Time frame | Impact | Value chain | Our risks and opportunities | Time frame | Direction | How we are responding | ||||||||||||
Business conduct | Upstream and suppliers | Impact on people, the environment and the supply chain through the management of relationships with suppliers (Responsible business conduct and compliance (covering compliance with Business ethics and Code of Conduct and Anti-bribery and anti-corruption)) | ![]() | Own operations | Failure to comply with ASML's purpose, vision, mission and values (Purpose, vision, mission and values) | ![]() | Read more in ESG integrated governance | ||||||||||||||
Across entire value chain | Failure to comply with regulations due to increasing complexity as we expand into more countries (Responsible business conduct and compliance (covering compliance with Business ethics and Code of Conduct and Anti-bribery and anti-corruption)) | ![]() | ![]() | ||||||||||||||||||
Upstream and suppliers | Failure to comply with laws and regulations for supply chain due diligence (Responsible business conduct and compliance (covering compliance with Business ethics and Code of Conduct and Anti-bribery and anti-corruption)) | ![]() | |||||||||||||||||||
Customers | Failure to engage customers on environmental and social topics (ESG risk management) | ![]() | |||||||||||||||||||
![]() ![]() | Across entire value chain | Failure to comply with data privacy regulations or breaches of data privacy (Responsible business conduct and compliance (covering compliance with Business ethics and Code of Conduct and Anti-bribery and anti-corruption)) | ![]() | ||||||||||||||||||
Key | ||||||||||
![]() | Environmental topics | ![]() | Positive, actual | Short term | ||||||
![]() | Social topics | ![]() | Positive, potential | Medium term | ||||||
![]() | Governance topics | ![]() | Negative, actual | Long term | ||||||
![]() | Negative, potential | |||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 184 |
Metric | Unit | 2024 |
Total water withdrawal | in 1,000 m3 | 1,432 |
Total ultrapure water withdrawal | in 1,000 m3 | 105 |
Total water recycled and reused | in % | 0.9% |
Water intensity | in m3/€m revenue | 51 |


SUSTAINABILITY | ASML Annual Report 2024 | 185 |
The United Nations’ (UN) 2030 Agenda for Sustainable Development provides a shared blueprint for peace and prosperity for people and planet, now and in the future. Why it matters The UN’s Sustainable Development Goals (SDGs) represent the global sustainable development agenda and inform public policy. As a responsible business, we support the SDGs – and it is critical that we accelerate action to play our part. Our ESG sustainability strategy focuses on the six SDGs where we can contribute most. We are also a signatory to the UN Global Compact. How we’re managing our contribution We contribute to SDG 4 (Quality education) by developing our people and promoting lifelong learning opportunities for the communities where we operate. SDG 8 (Decent work and economic growth) is covered by our commitment to providing an attractive workplace promoting sustained, inclusive growth, full and productive employment, and decent work for all throughout our supply chain, including protecting labor rights and promoting a safe and secure working environment for everyone. Our contribution to SDG 9 (Industry, innovation and infrastructure) is demonstrated by our work to build a resilient ecosystem that fosters innovation while promoting inclusive and sustainable industrialization. We contribute to SDG 11 (Sustainable cities and communities) by working with our community outreach partners to make cities and human settlements inclusive, safe, resilient and sustainable. SDG 12 (Responsible consumption and production) is covered via our circular economy work and our work to achieve environmentally sound management of chemicals and all wastes throughout their life cycles, in accordance with agreed international frameworks. We contribute to SDG 13 (Climate action) by promoting energy efficiency and climate action across our value chain. | ||||||||||
SDG 4 | ![]() | ![]() | SDG 11 | |||||||
Quality education | Sustainable cities and communities | |||||||||
Ensure inclusive and equitable quality education and promote lifelong learning opportunities for all | Make cities and human settlements inclusive, safe, resilient and sustainable | |||||||||
Our contribution | Our contribution | |||||||||
SDG 8 | ![]() | ![]() | SDG 12 | |||||||
Decent work and economic growth | Responsible consumption and production | |||||||||
Promote sustained, inclusive and sustainable economic growth, full and productive employment and decent work for all | Ensure sustainable consumption and production patterns | |||||||||
Our contribution | Our contribution | |||||||||
SDG 9 | ![]() | ![]() | SDG 13 | |||||||
Industry, innovation and infrastructure | Climate action | |||||||||
Build resilient infrastructure, promote inclusive and sustainable industrialization, and foster innovation | Take urgent action to combat climate change and its impacts by regulating emissions and promoting developments in renewable energy | |||||||||
Our contribution | Our contribution | |||||||||

SUSTAINABILITY | ASML Annual Report 2024 | 186 |
SUSTAINABILITY | ASML Annual Report 2024 | 187 |
ESRS number | Section title | Related ESRS disclosure requirements | Reference | Explanation | |
ESRS 2 | General disclosures | BP-1 – General basis for preparation of Sustainability statements | •Sustainability statements – General disclosures – Basis for preparation •Sustainability statements – General disclosures – Impact, risk and opportunity management | ||
ESRS 2 | General disclosures | BP-2 – Disclosures in relation to specific circumstances | •Sustainability statements – General disclosures – Basis for preparation | ||
ESRS 2 | General disclosures | GOV-1 – The role of the administrative, management and supervisory bodies | •Sustainability statements – General disclosures – ESG sustainability governance •Corporate governance – Corporate governance – Supervisory Board •Corporate governance – Corporate governance – Board of Management •Corporate governance – Corporate governance – Other Board-related matters | Includes DR21d Board's gender diversity ratio and DR21e Percentage of independent board members | |
ESRS 2 | General disclosures | GOV-2 – Information provided to and sustainability matters addressed by the undertaking’s administrative, management and supervisory bodies | •Sustainability statements – General disclosures – ESG sustainability governance •Corporate governance – Corporate governance – Supervisory Board | ||
ESRS 2 | General disclosures | GOV-3 – Integration of sustainability-related performance in incentive schemes | •Sustainability statements – General disclosures – ESG sustainability governance •Corporate governance – Corporate governance – Supervisory Board | ||
ESRS 2 | General disclosures | GOV-4 – Statement on due diligence | •Sustainability statements – General disclosures – ESG sustainability governance | Includes DR30 Statement on due diligence | |
ESRS 2 | General disclosures | GOV-5 – Risk management and internal controls over sustainability reporting | •Sustainability statements – General disclosures – ESG sustainability governance | ||
ESRS 2 | General disclosures | SBM-1 – Strategy, business model and value chain | •Strategic report – Our business – Our products and services •Strategic report – Our business – Supporting our customers •Strategic report – Our business – Our business strategy •Strategic report – Our business – Driving innovation •Strategic report – Our business – Our business model •Sustainability statements – Social – Attractive workplace for all •Sustainability statements – Social – Responsible value chain •Sustainability statements – General disclosures – Contributing to the UN's Sustainable Development Goals | DR40di Undertaking is active in fossil fuel (coal, oil and gas) sector, DR40dii Undertaking is active in chemicals production, DR40diii Undertaking is active in controversial weapons and DR40div Undertaking is active in cultivation and production of tobacco not applicable | |
ESRS 2 | General disclosures | SBM-2 – Interests and views of stakeholders | •Strategic report – Our business – Engaged stakeholders •Strategic report – Our business – Our business strategy •Strategic report – Our business – Our marketplace | ||
ESRS 2 | General disclosures | SBM-3 – Material impacts, risks and opportunities, and their interaction with strategy and business model | •Sustainability statements – General disclosures – Impact, risk and opportunity management | Phase-in provision applied for DR48e and AR18 (anticipated financial effects) | |
ESRS 2 | General disclosures | IRO-1 – Description of the process to identify and assess material impacts, risks and opportunities | •Sustainability statements – General disclosures – Impact, risk and opportunity management | ||
ESRS 2 | General disclosures | IRO-2 – Disclosure requirements in ESRS covered by the undertaking’s sustainability statement | •Sustainability statements – General disclosures – Impact, risk and opportunity management | ||
SUSTAINABILITY | ASML Annual Report 2024 | 188 |
ESRS number | Section title | Related ESRS disclosure requirements | Reference | Explanation | |
ESRS 2 | General disclosures | MDR-P – Policies adopted to manage material sustainability matters | •Sustainability statements – Environmental – Energy efficiency and climate action – How we’re managing •Sustainability statements – Environmental – Circular economy – How we’re managing •Sustainability statements – Social – Attractive workplace for all – How we’re managing •Sustainability statements – Social – Responsible value chain – How we’re managing •Sustainability statements – Social – Innovation ecosystem – How we’re managing •Sustainability statements – Social – Valued partner in our communities – How we’re managing •Sustainability statements – Governance – ESG integrated governance – How we’re managing | ||
ESRS 2 | General disclosures | MDR-A – Actions and resources in relation to material sustainability matters | •Sustainability statements – Environmental – Energy efficiency and climate action – Our actions and resources •Sustainability statements – Environmental – Circular economy – Our actions and resources •Sustainability statements – Social – Attractive workplace for all – Our actions and resources •Sustainability statements – Social – Responsible value chain – Our actions and resources •Sustainability statements – Social – Innovation ecosystem – Our actions and resources •Sustainability statements – Social – Valued partner in our communities – Our actions and resources •Sustainability statements – Governance – ESG integrated governance – Our actions and resources | ||
ESRS 2 | General disclosures | MDR-M – Metrics in relation to material sustainability matters | •Sustainability statements – Environmental – Energy efficiency and climate action – Targets and performance •Sustainability statements – Environmental – Circular economy – Targets and performance •Sustainability statements – Social – Attractive workplace for all – Targets and performance •Sustainability statements – Social – Responsible value chain – Targets and performance •Sustainability statements – Social – Innovation ecosystem – Targets and performance •Sustainability statements – Social – Valued partner in our communities – Targets and performance •Sustainability statements – Governance – ESG integrated governance – Targets and performance | ||
SUSTAINABILITY | ASML Annual Report 2024 | 189 |
ESRS number | Section title | Related ESRS disclosure requirements | Reference | Explanation | |
ESRS 2 | General disclosures | MDR-T – Tracking effectiveness of policies and actions through targets | •Sustainability statements – Environmental – Energy efficiency and climate action – Targets and performance •Sustainability statements – Environmental – Circular economy – Targets and performance •Sustainability statements – Social – Attractive workplace for all – Targets and performance •Sustainability statements – Social – Responsible value chain – Targets and performance •Sustainability statements – Social – Innovation ecosystem – Targets and performance •Sustainability statements – Social – Valued partner in our communities – Targets and performance •Sustainability statements – Governance – ESG integrated governance – Targets and performance | ||
ESRS E1 | Climate change | GOV-3 – Integration of sustainability-related performance in incentive schemes | •Corporate governance – Remuneration report – Board of Management remuneration •Sustainability statements – Environmental – Energy efficiency and climate action – Targets and performance | ||
ESRS E1 | Climate change | E1-1 – Transition plan for climate change mitigation | •Strategic report – Performance and risk – Risk – Risk factors – 5. Operations •Sustainability statements – Environmental – Energy efficiency and climate action – Climate Transition Plan | Includes DR14 Disclosure of transition plan for climate change mitigation; DR16g Undertaking is not excluded from EU Paris-aligned benchmarks | |
ESRS E1 | Climate change | SBM-3 – Material impacts, risks and opportunities and their interaction with strategy and business model | •Sustainability statements – Environmental – Energy efficiency and climate action – Climate resilience analysis | ||
ESRS E1 | Climate change | IRO-1 – Description of the processes to identify and assess material climate-related impacts, risks and opportunities | •Sustainability statements – General disclosures – Impact, risk and opportunity management •Sustainability statements – Environmental – Energy efficiency and climate action – Climate resilience analysis | ||
ESRS E1 | Climate change | E1-2 – Policies related to climate change mitigation and adaptation | •Sustainability statements – Environmental – Energy efficiency and climate action – How we’re managing •Strategic report – Performance and risk – Risk – Risk factors – 5. Operations | ||
ESRS E1 | Climate change | E1-3 – Actions and resources in relation to climate change policies | •Sustainability statements – Environmental – Energy efficiency and climate action – Our actions and resources | ||
ESRS E1 | Climate change | E1-4 – Targets related to climate change mitigation and adaptation | •Sustainability statements – Environmental – Energy efficiency and climate action – Climate resilience analysis •Sustainability statements – Environmental – Energy efficiency and climate action – Targets and performance | Includes DR34 GHG emissions reduction targets | |
ESRS E1 | Climate change | E1-5 – Energy consumption and mix | •Sustainability statements – Environmental – Energy efficiency and climate action – Metrics table and Additional disclosures | Includes DR37, DR38, DR40, DR41, DR42, DR43 Energy consumption | |
ESRS E1 | Climate change | E1-6 – Gross Scopes 1, 2, 3 and Total GHG emissions | •Sustainability statements – Environmental – Energy efficiency and climate action – Metrics table and Additional disclosures | Includes DR44 Gross Scope 1, 2, 3 and Total GHG emissions and DR 53–55 GHG emissions intensity | |
SUSTAINABILITY | ASML Annual Report 2024 | 190 |
ESRS number | Section title | Related ESRS disclosure requirements | Reference | Explanation | |
ESRS E1 | Climate change | E1-7 – GHG removals and GHG mitigation projects financed through carbon credits | •Sustainability statements – Environmental – Energy efficiency and climate action – How we’re managing | ||
ESRS E1 | Climate change | E1-8 – Internal carbon pricing | •Sustainability statements – Environmental – Energy efficiency and climate action – How we’re managing | ||
ESRS E1 | Climate change | E1-9 – Anticipated financial effects from material physical and transition risks and potential climate-related opportunities | Not included | Phase-in provision applied | |
ESRS E2 | Pollution | Not a material topic based on the outcome of our DMA | |||
ESRS E3 | Water and marine resources | Not a material topic based on the outcome of our DMA | |||
ESRS E4 | Biodiversity and ecosystems | Not a material topic based on the outcome of our DMA | |||
ESRS E5 | Resource use and circular economy | IRO-1 – Description of the processes to identify and assess material resource use and circular economy-related impacts, risks and opportunities | •Sustainability statements – General disclosures – Impact, risk and opportunity management | ||
ESRS E5 | Resource use and circular economy | E5-1 – Policies related to resource use and circular economy | •Sustainability statements – Environmental – Circular economy – How we're managing | ||
ESRS E5 | Resource use and circular economy | E5-2 – Actions and resources related to resource use and circular economy | •Sustainability statements – Environmental – Circular economy – Our actions and resources | ||
ESRS E5 | Resource use and circular economy | E5-3 – Targets related to resource use and circular economy | •Sustainability statements – Environmental – Circular economy – Targets and performance | ||
ESRS E5 | Resource use and circular economy | E5-4 – Resource inflows | •Sustainability statements – Environmental – Circular economy – Metrics table and Additional disclosures | ||
ESRS E5 | Resource use and circular economy | E5-5 – Resource outflows | •Sustainability statements – Environmental – Circular economy – Metrics table and Additional disclosures | Includes DR37d Non-recycled waste and DR39 Hazardous waste and radioactive waste | |
ESRS E5 | Resource use and circular economy | E5-6 – Anticipated financial effects from resource use and circular economy-related impacts, risks and opportunities | Not included | Phase-in provision applied | |
ESRS S1 | Own workforce | SBM-2 – Interests and views of stakeholders | •Sustainability statements – General disclosures – Impact, risk and opportunity management | ||
ESRS S1 | Own workforce | SBM-3 – Material impacts, risks and opportunities and their interaction with strategy and business model | •Sustainability statements – General disclosures – Impact, risk and opportunity management | Includes DR14f Risk of incidents of forced labor and DR14g Risk of incidents of child labor | |
ESRS S1 | Own workforce | S1-1 – Policies related to own workforce | •Strategic report – Corporate conduct – Respecting human rights •Sustainability statements – General disclosures – ESG sustainability governance •Sustainability statements – Social – Attractive Workplace for all – How we're managing | Includes DR20 Human rights policy commitments; DR21 Due diligence policies on issues addressed by the fundamental International Labor Organization (ILO) Conventions 1 to 8; DR22 Processes and measures for preventing trafficking in human beings and DR23 Workplace accident prevention policy or management system | |
ESRS S1 | Own workforce | S1-2 – Processes for engaging with own workforce and workers’ representatives about impacts | •Sustainability statements – Social – Responsible value chain – How we're managing |
SUSTAINABILITY | ASML Annual Report 2024 | 191 |
ESRS number | Section title | Related ESRS disclosure requirements | Reference | Explanation | |
ESRS S1 | Own workforce | S1-3 – Processes to remediate negative impacts and channels for own workers to workforce to raise concerns | •Sustainability statements – Social – Responsible value chain – How we're managing | Includes DR32c Grievance/complaints handling mechanisms | |
ESRS S1 | Own workforce | S1-4 – Taking action on material impacts on own workforce, and approaches to managing material risks and pursuing material opportunities related to own workforce, and effectiveness of those actions | •Sustainability statements – Social – Attractive workplace for all – Our actions and resources | ||
ESRS S1 | Own workforce | S1-5 – Targets related to managing material negative impacts, advancing positive impacts, and managing material risks and opportunities | •Sustainability statements – Social – Attractive workplace for all – Targets and performance | ||
ESRS S1 | Own workforce | S1-6 – Characteristics of the undertaking’s employees | •Sustainability statements – Social – Attractive workplace for all – Metrics table and Additional disclosures | ||
ESRS S1 | Own workforce | S1-7 – Characteristics of non-employees in the undertaking’s own workforce | Not included | Phase-in provision applied | |
ESRS S1 | Own workforce | S1-8 – Collective bargaining coverage and social dialogue | •Sustainability statements – Social – Attractive workplace for all – Metrics table and Additional disclosures | ||
ESRS S1 | Own workforce | S1-9 – Diversity metrics | •Sustainability statements – Social – Attractive workplace for all – Metrics table and Additional disclosures | ||
ESRS S1 | Own workforce | S1-10 – Adequate wages | •Sustainability statements – Social – Attractive workplace for all – Metrics table and Additional disclosures | ||
ESRS S1 | Own workforce | S1-11 – Social protection | Not included | Phase-in provision applied | |
ESRS S1 | Own workforce | S1-12 – Persons with disabilities | Not included | Phase-in provision applied | |
ESRS S1 | Own workforce | S1-13 – Training and skills development metrics | •Sustainability statements – Social – Attractive workplace for all – Metrics table and Additional disclosures | ||
ESRS S1 | Own workforce | S1-14 – Health and safety metrics | •Sustainability statements – Social – Attractive workplace for all – Metrics table and Additional disclosures | Includes DR88b DR88c Number of fatalities and number and rate of work-related accidents – Phase-in provision applied for non-employees; DR88d Number of cases of recordable work- related ill health; DR88e Number of days lost to injuries, accidents, fatalities or illness. | |
ESRS S1 | Own workforce | S1-15 – Work-life balance metrics | Not included | Phase-in provision applied | |
ESRS S1 | Own workforce | S1-16 – Remuneration metrics (pay gap and total remuneration) | •Sustainability statements – Social – Attractive workplace for all – Metrics table and Additional disclosures | Includes DR97a Unadjusted gender pay gap and DR97b CEO pay ratio | |
ESRS S1 | Own workforce | S1-17 – Incidents, complaints and severe human rights impacts | •Sustainability statements – Governance – ESG integrated governance – Metrics table and Additional disclosures | Includes DR103a Incidents of discrimination and DR104a Non-respect of UN Guiding Principles on Business and Human Rights (UNGPs) and OECD Guidelines | |
ESRS S2 | Workers in the value chain | SBM-2 – Interests and views of stakeholders | •Sustainability statements – General disclosures – Impact, risk and opportunity management |
SUSTAINABILITY | ASML Annual Report 2024 | 192 |
ESRS number | Section title | Related ESRS disclosure requirements | Reference | Explanation | |
ESRS S2 | Workers in the value chain | SBM-3 – Material impacts, risks and opportunities and their interaction with strategy and business model | •Sustainability statements – General disclosures – Impact, risk and opportunity management | Includes DR11b Significant risk of child labor or forced labor in the value chain | |
ESRS S2 | Workers in the value chain | S2-1 – Policies related to value chain workers | •Sustainability statements – Social – Responsible value chain – How we're managing | Includes DR17 Human rights policy commitments; DR18 Policies related to value chain workers; DR19 Non-respect of UNGPs and OECD Guidelines and Due diligence policies on issues addressed by the fundamental ILO conventions 1 to 8 | |
ESRS S2 | Workers in the value chain | S2-2 – Processes for engaging with value chain workers about impacts | •Sustainability statements – Social – Responsible value chain – How we're managing | ||
ESRS S2 | Workers in the value chain | S2-3 – Processes to remediate negative impacts and channels for value chain workers to raise concerns | •Sustainability statements – Social – Responsible value chain – How we're managing | ||
ESRS S2 | Workers in the value chain | S2-4 – Taking action on material impacts on value chain workers, and approaches to managing material risks and pursuing material opportunities related to value chain workers, and effectiveness of those actions | •Sustainability statements – Social – Responsible value chain – Our actions and resources | Includes DR36 Human rights issues and incidents connected to its upstream and downstream value chain | |
ESRS S2 | Workers in the value chain | S2-5 – Targets related to managing material negative impacts, advancing positive impacts, and managing material risks and opportunities | •Sustainability statements – Social – Responsible value chain – Targets and performance | ||
ESRS S3 | Affected communities | SBM-2 – Interests and views of stakeholders | •Sustainability statements – General disclosures – Impact, risk and opportunity management | ||
ESRS S3 | Affected communities | SBM-3 – Material impacts, risks and opportunities and their interaction with strategy and business model | •Sustainability statements – General disclosures – Impact, risk and opportunity management | ||
ESRS S3 | Affected communities | S3-1 – Policies related to affected communities | •Sustainability statements – Social – Valued partner in our communities – How we're managing | Includes DR16 Human rights policy commitments; DR17 Non-respect of UNGPs on Business and Human Rights, ILO principles or OECD Guidelines | |
ESRS S3 | Affected communities | S3-2 – Processes for engaging with affected communities about impacts | •Sustainability statements – Social – Valued partner in our communities – How we're managing | ||
ESRS S3 | Affected communities | S3-3 – Processes to remediate negative impacts and channels for affected communities to raise concerns | •Sustainability statements – Social – Valued partner in our communities – How we're managing | ||
ESRS S3 | Affected communities | S3-4 – Taking action on material impacts on affected communities, and approaches to managing material risks and pursuing material opportunities related to affected communities, and effectiveness of those actions | •Strategic report – Corporate conduct – Respecting human rights •Sustainability statements – General disclosures – ESG sustainability governance •Sustainability statements – Social – Valued partner in our communities – Our actions and resources | Includes DR36 Human rights issues and incidents | |
ESRS S3 | Affected communities | S3-5 – Targets related to managing material negative impacts, advancing positive impacts, and managing material risks and opportunities | •Sustainability statements – Social – Valued partner in our communities – Targets and performance | ||
ESRS S4 | Consumers and end-users | Not a material topic based on the outcome of our DMA |
SUSTAINABILITY | ASML Annual Report 2024 | 193 |
ESRS number | Section title | Related ESRS disclosure requirements | Reference | Explanation | |
ESRS G1 | Business conduct | GOV-1 – The role of the administrative, supervisory and management bodies | •Sustainability statements – Governance – ESG integrated governance | ||
ESRS G1 | Business conduct | IRO-1 – Description of the processes to identify and assess material impacts, risks and opportunities | •Sustainability statements – General disclosures – Impact, risk and opportunity management | ||
ESRS G1 | Business conduct | G1-1 – Business conduct policies and corporate culture | •Sustainability statements – Governance – ESG integrated governance | Includes DR10b United Nations Convention against Corruption; DR10d Protection of whistle- blowers | |
ESRS G1 | Business conduct | G1-2 – Management of relationships with suppliers | Not a material sub-topic based on the outcome of our DMA | ||
ESRS G1 | Business conduct | G1-3 – Prevention and detection of corruption and bribery | •Sustainability statements – Governance – ESG integrated governance | ||
ESRS G1 | Business conduct | G1-4 – Incidents of corruption or bribery | •Sustainability statements – Governance – ESG integrated governance | Includes DR24a Fines for violation of anti- corruption and anti-bribery laws; DR24b Standards of anti-corruption and anti-bribery | |
ESRS G1 | Business conduct | G1-5 – Political influence and lobbying activities | Not a material sub-topic based on the outcome of our DMA | ||
ESRS G1 | Business conduct | G1-6 – Payment practices | Not a material sub-topic based on the outcome of our DMA |

SUSTAINABILITY | ASML Annual Report 2024 | 194 |
Our ambition | ||
We aim to reduce the environmental footprint of our operations and supply chain, as well as the environmental impacts of our products and services. | ||
On the following pages, we set out our approach and progress to date. | ||
Energy efficiency and climate action | ||||||
We aim to reduce our climate impacts, working closely with our partners and peers in the entire semiconductor value chain – in our own operations together with our suppliers, in our customers’ production processes, and through reducing the energy used by semiconductors in operation by enabling scaling. | We’ll do this by focusing on the following sub-topics: | ![]() | ||||
•Manufacturing and buildings •Purchased goods and services •Logistics •Business travel •Employee commuting •Product use •Impact on ICT and society | ||||||
We aim to be greenhouse gas neutral across our value chain by 2040. | ||||||
Circular economy | ||||||
![]() | We aim to minimize resource inflows and waste outflows, to generate business value and avoid negative impacts on the planet. | We’ll do this by focusing on the following sub-topics: | ||||
•Systems •Parts and tools including packaging and transport tools •Non-product-related (NPR) waste (hazardous and non-hazardous) •Real estate (building renovation and construction) | ||||||
We aim for zero waste from operations to landfill and incineration by 2030. | ||||||
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The EU Taxonomy at ASML | ||
In our EU Taxonomy disclosure, we have classified our environmentally sustainable economic activities and investments and report the related economic key performance indicators of turnover, capex and opex. We report on the alignment assessment of our eligible economic activities and on ASML meeting the minimum safeguards constituted chiefly by the OECD Guidelines and UN Guiding Principles. | ||


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Why it matters |

...for the planet | ...for ASML | |
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As the world turns to technology to help solve some of its most pressing challenges, we provide innovative lithography solutions for producing microchips that help society reduce global energy use and mitigate greenhouse gas (GHG) emissions.1 Our goal is to expand the availability of computing power and data storage capability while reducing the environmental impact of our operations, our supply chain and the use of our products. | Growing demand for enhanced chip functionality means the complexity and energy consumption of microchip patterning is increasing. Limiting global warming in line with the Paris Agreement to 1.5°C needs accelerated and increased action; therefore, we are aiming for GHG neutrality across our entire value chain by 2040, while energy demand is increasing. We are also looking at ways to mitigate our negative climate impacts, mainly from our products’ energy consumption and emissions from sourcing and supply chain activities. This complex challenge can only be achieved by working closely with our value chain partners. | |
1. To clearly demarcate the scope of our policy on energy efficiency and climate action, please note that ‘climate action’ is defined as mitigation of GHG emissions. Within our policy, we refer to emissions as GHG emissions – and, of these, CO2 emissions are most material to ASML. | ||
Our 2024 progress: | ||||
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32.8 kt | 12.0 Mt | |||
Scope 1 and 2 CO2e emissions | Scope 3 CO2e emissions | |||
(2025 target: GHG neutral) | (2040 target: GHG neutral) | |||
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0.83 kt | 5.9 kWh | |||
Scope 3 intensity in CO2e (per €m gross profit) | NXE energy use per wafer pass | |||
(2025 target: 0.93 kt) | (NXE:3800E, measured in 2024) (2025 target: 5.1 kWh) | |||
![]() | ||||
9% | ||||
Commitment of top 80% suppliers | ||||
(based on CO2e emissions) to reduce their CO2e footprint by 2030 (2026 target: 75%) | ||||
The transition to a business model that strives to maximize energy efficiency across our value chain – and that combats climate change – is important: | |
...for our customers | |
Our approach contributes to their objectives to reduce emissions resulting from their use of our products and invites them to collaborate. | |
...for our employees | |
ESG sustainability is a key driver of both engagement – our employees feeling engaged and empowered to contribute – and our ability to attract new talent. | |
...for our suppliers | |
Our approach contributes to driving ESG sustainability performance and encourages collaboration to exchange experience and reduce emissions. | |
...for our shareholders | |
Our approach contributes to investors’ objectives – for example, by improving sustainability performance and reducing (climate-related) investment risk. | |
...for society | |
Our approach contributes to societal objectives to reduce energy consumption and emissions – thereby halting the advance of climate change. | |
Read more about our double materiality process and identified impacts, risks and opportunities for management |

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Our objective | |||||||||||||||||||||
We want to reduce our climate impacts, working closely with our partners and peers in the entire semiconductor value chain – in our own operations together with our suppliers, in our customers’ production processes and through reducing the energy used by semiconductors in operation by enabling scaling. We aim to reach our target of GHG neutrality across our value chain by 2040 in stages – across our manufacturing and buildings (scope 1 and 2) and for business travel and commuting (scope 3) by 2025, in our supply chain (scope 3 upstream) by 2030, and from the use of our products and services by customers (scope 3 downstream) by 2040. We are a signatory to the Science Based Targets initiative (SBTi) and we have SBTi- approved near-term gross targets for 2025, in line with the 1.5°C scenario. We aim to obtain SBTi approval for our 2040 gross targets, which implies that we aim to reduce our scope 1 and 2 GHG emissions by 90% and scope 3 GHG emissions intensity per gross profit by 97% compared to our base year 2019. The How we’re managing section reflects our policy on the Energy efficiency and climate action topic, which is made publicly available to our stakeholders via this Annual Report. | |||||||||||||||||||||
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Manufacturing and buildings | Purchased goods and services | Logistics | Business travel | ||||||||||||||||||
We work with our logistics suppliers to improve emission data quality related to transportation and distribution services, and we have started using options to move toward more sustainable modes of transportation. | We focus on reducing our business travel emissions by applying a strict need-to-travel policy, increasingly using the train and electric vehicles for shorter distances and sourcing sustainable aviation fuel for part of our air travel. Beginning in 2025, we plan to compensate for residual CO2e emissions. | ||||||||||||||||||||
Within our manufacturing locations and other buildings, we focus on reducing energy consumption, using renewable energy, and – as of 2025 – compensating for residual CO2e emissions. | Via our Strategic Sourcing and Procurement sustainability program, in cooperation with our suppliers, we're aiming to reduce our carbon footprint to achieve GHG neutrality in our supply chain by 2030. | ||||||||||||||||||||
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Employee commuting | Product use | Customers, ICT and society | |||||||||||||||||||
We focus on improving the data quality of employee commuting emissions worldwide, while also extending emission reduction initiatives from the Netherlands to our other locations globally. Beginning in 2025, we plan to compensate for residual CO2e emissions. | When designing new lithography and metrology and inspection systems, we increasingly focus on reducing their energy consumption. In cooperation with our customers, we're committed to reducing our carbon footprint to achieve GHG neutrality from the use of our products and services by 2040. | Our customers’ products are used in a wide variety of applications, impacting society’s emissions, both positively and negatively. In collaboration with the industry, we aim to have a better understanding of the GHG emissions caused by the use of our customers’ products. | |||||||||||||||||||

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Our approach |

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Introduction |
Levers for action |

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Levers for action |
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Science Based Target initiative (SBTi) | ||
The Corporate Net-Zero Standard of the SBTi is the world’s pre-eminent framework for corporate net-zero target- setting in line with climate science. It includes the guidance, criteria and recommendations companies need to set science-based net-zero targets consistent with limiting global temperature rise to 1.5°C. According to SBTi, companies can set both absolute or emission intensity targets. In absolute terms, the aim for these targets is to roughly halve emissions before 2030, while in the longer term companies must cut all possible emissions – usually more than 90% – before 2050. For long-term emission intensity targets, the required minimum intensity reduction is 97%. We have defined intensity as CO2e emissions per unit of gross profit. | ||

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Our scope |
Why it matters: Impacts, risks and opportunities | |||
For manufacturing and buildings, we have identified the following: | |||
Impacts: | |||
Energy use and GHG emissions from manufacturing and buildings (scope 1 and 2) | |||
Impact on grid and energy availability through our manufacturing and buildings (scope 1 and 2) | |||
Risks and opportunities: | |||
Read more about climate-related risks and opportunities in Strategic report – Performance | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Scope 1 – Direct emissions from fossil fuels in our operations (kt) | kt | 23.5 | GHG neutral | 2025 | On track ò |
Scope 2 – Indirect emissions from energy consumption (kt) (market-based) | kt | 9.3 | GHG neutral | 2025 | On track ò |
Energy savings worldwide through projects (in TJ) – cumulative | TJ | 100 | 100 | 2025 | On track ò |
Renewable electricity (in % total electricity purchased – scope 2) | % | 96% | 100% | 2025 | Work to be done n |
SUSTAINABILITY | ASML Annual Report 2024 | 208 |

Our actions and resources |
Key energy-saving projects in 2024 | ||
In 2024, we saw an acceleration of the energy-saving projects in the master plan. These included: •Installation of solar panels in San Diego (US) leading to 6 TJ per year savings in 2024 •The operationalization of the energy grid and renovation of buildings in the Netherlands leading to an additional 32 TJ per year by the end of 2024 •Energy efficiency and LED lighting projects in Berlin resulting in approximately 6 TJ energy savings per year •Smaller projects completed this year, such as pipe isolation and air flow improvements in Wilton (US), leading to approximately 7 TJ energy savings per year •Cooling water pump replacement and process cooling water optimization in Taiwan resulted in 2 TJ energy savings per year Together with the projects realized as of 2021, we met our target, of saving 100 TJ per year by 2025 ahead of schedule in 2024. | ||
SUSTAINABILITY | ASML Annual Report 2024 | 209 |
Looking ahead |
SUSTAINABILITY | ASML Annual Report 2024 | 210 |
Our scope |
Why it matters: Impacts, risks and opportunities | |||
For purchased goods and services, we have identified the following: | |||
Impacts: | |||
Energy use and GHG emissions from purchased goods, services and logistics emissions (scope 3) | |||
Read more in Sustainability statements – Environmental – Energy efficiency and climate action – Logistics | |||
Risks and opportunities: | |||
Read more about climate-related risks and opportunities in Strategic report – Performance | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Commitment from our top 80% suppliers to reduce their CO2e footprint by 2030 | % | 9% | 75% commitment | 2026 | Work to be done n |
Scope 3 emissions related to purchased goods and services (including capital goods) | kt | 5,032 | GHG neutral | 2030 | Work to be done n |
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Our actions and resources |
Looking ahead |
SUSTAINABILITY | ASML Annual Report 2024 | 212 |
Our scope |
Why it matters: Impacts, risks and opportunities | |||
For logistics, we have identified the following: | |||
Impacts: | |||
Energy use and GHG emissions from purchased goods, services and logistics emissions (scope 3) | |||
Read more in Sustainability statements – Environmental – Energy efficiency and climate action – Purchased goods and services | |||
Risks and opportunities: | |||
Read more about climate-related risks and opportunities in Strategic report – Performance | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Scope 3 emissions related to upstream transportation and distribution | kt | 322 | GHG neutrality | 2030 | Work to be done n |
Our actions and resources |
SUSTAINABILITY | ASML Annual Report 2024 | 213 |
Looking ahead |
SUSTAINABILITY | ASML Annual Report 2024 | 214 |
Our scope |
Why it matters: Impacts, risks and opportunities | |||
For business travel, we have identified the following: | |||
Impacts: | |||
Energy use and GHG emissions from business travel and commuting (scope 3) | |||
Risks and opportunities: | |||
Read more about climate-related risks and opportunities in Strategic report – Performance | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Scope 3 emissions related to business travel | kt | 65 | GHG neutrality | 2025 | Work to be done n |
Our actions and resources |
Looking ahead |
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Our scope |
Why it matters: Impacts, risks and opportunities | |||
For employee commuting, we have identified the following: | |||
Impacts: | |||
Energy use and GHG emissions from business travel and commuting (scope 3) | |||
Risks and opportunities: | |||
Read more about climate-related risks and opportunities in Strategic report – Performance | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Scope 3 emissions related to employee commuting | kt | 36 | GHG neutrality | 2025 | Work to be done n |
Our actions and resources |
Looking ahead |
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Our scope |
Why it matters: Impacts, risks and opportunities | |||
For product use, we have identified the following: | |||
Impacts: | |||
Energy use and GHG emissions from product use (scope 3) | |||
Risks and opportunities: | |||
Read more about climate-related risks and opportunities in Strategic report – Performance | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Power consumption (NXE) (reduction in % of baseline 2018 1.44 MW) | % | (9)% | (10)% | 2025 | On track ò |
Energy use per wafer pass (NXE) | kWh | 5.9 | 5.1 | 2025 | Off track p |
Energy use per wafer pass (NXE) (reduction in % of baseline 2018 12.8 kWh) | % | (54)% | (60)% |

SUSTAINABILITY | ASML Annual Report 2024 | 217 |
Our actions and resources |
SUSTAINABILITY | ASML Annual Report 2024 | 218 |
Looking ahead |
Semiconductor Climate Consortium (SCC) | ||
We are a founding member of the SCC. Established in November 2022, the SCC aims to address the challenges of climate change and speed up the industry’s efforts to reduce GHG emissions throughout the value chain. The consortium’s members are committed to working toward the following pillars and objectives: •Transparency – Publicly report progress and scope 1, 2 and 3 emissions annually •Ambition – Set near- and long-term decarbonization targets with the aim of reaching GHG neutrality by 2040 •Collaboration – Align on common approaches, technology innovations and communication channels to continuously reduce GHG emissions The SCC is ultimately responsible for monitoring and reviewing progress toward these ambitions. In 2023, the SCC published an in-depth analysis of the semiconductor value chain’s carbon footprint and priority-ranked carbon emission sources for the industry. This acts as the baseline for value chain emissions. We are one of the leading industry forces addressing climate change and speeding up efforts to reduce GHG emissions throughout the entire value chain. We are co-leading the BAR (Baselining, Ambition-Setting and Roadmapping) consortium working group and are actively participating in other working groups by sharing data and information and facilitating sessions. | ||
Customers, ICT and society | ||
While we measure and aim to reduce the impacts of our operations, supply chain and product use, ASML’s climate impacts extend far beyond these areas to include the benefits and risks that our technology brings to society. The technology pioneered by our R&D teams and partners sits at the heart of global digitalization and has the potential to transform how we all live and work. We enable our customers to innovate the semiconductor technologies that can help humanity manage its challenges and seize opportunities by facilitating sustainable living and e-mobility, accessible healthcare, food security and the transition to renewable energy. On the other hand, we acknowledge the effects of digital technologies that increase energy demand, such as artificial intelligence (AI), internet of things (IoT), blockchain and cryptocurrency mining. In collaboration with the industry, we aim to have a better understanding of the GHG emissions caused by the use of our customers’ products. We do this, for example, via the SCC, where we actively engage with our customers on climate- related matters. We don't measure emissions downstream beyond our customers and have no targets on these, because this is outside the scope of our GHG reporting boundary. | ||

SUSTAINABILITY | ASML Annual Report 2024 | 219 |
Retrospective | Milestones and target years | ||||||||||
Topic | Description | Unit | Base year 2019 | 2024 | Target year 2025 | Target year 2030 | Target year 2040 | ||||
Scope 1 GHG emissions | Gross scope 1 GHG emissions | ktCO2e | 22.4 | 23.5 | |||||||
Scope 1 GHG emissions from regulated emissions trading schemes | % | N/A | |||||||||
Scope 2 GHG emissions | Gross location-based scope 2 GHG emissions | ktCO2e | 145.0 | 228.2 | |||||||
Gross market-based scope 2 GHG emissions | ktCO2e | 37.8 | 9.3 | ||||||||
Subtotal of gross scope 1 and market-based scope 2 GHG emissions | ktCO2e | 60.2 | 32.8 | 45.0 | 15.0 | 6.0 | |||||
Significant scope 3 GHG emissions | Total gross indirect (scope 3) GHG emissions | ktCO2e | 7,578.0 | 12,038.8 | 15,700.0 | 19,500.0 | 2,300.0 | ||||
1 Purchased goods and services | ktCO2e | 2,545.8 | 4,414.6 | ||||||||
2 Capital goods | ktCO2e | 294.9 | 617.6 | ||||||||
3 Fuel and energy-related activities (not included in scope 1 or scope 2) | ktCO2e | 10.3 | 13.4 | ||||||||
4 Upstream transportation and distribution | ktCO2e | 213.1 | 321.9 | ||||||||
5 Waste generated in operations | ktCO2e | 0.8 | 1.6 | ||||||||
6 Business traveling | ktCO2e | 96.7 | 65.1 | ||||||||
7 Employee commuting | ktCO2e | 42.2 | 35.6 | ||||||||
11 Use of sold products | ktCO2e | 4374.1 | 6,568.8 | ||||||||
12 End-of-life treatment of sold products | ktCO2e | 0.1 | 0.2 | ||||||||
Scope 3 GHG emissions calculated using primary data | % | 2.5% | |||||||||
Total GHG emissions | Total GHG emissions (location-based) | ktCO2e | 12,290.5 | ||||||||
Total GHG emissions (market-based) | ktCO2e | 12,071.6 | |||||||||

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Topic | Description | Unit | 2024 | ||
Energy consumption | (1) Fuel consumption from coal and coal products | MWh | 0 | ||
(2) Fuel consumption from crude oil and petroleum products | MWh | 690 | |||
(3) Fuel consumption from natural gas | MWh | 102,815 | |||
(4) Fuel consumption from other fossil sources | MWh | 0 | |||
(5) Consumption of purchased or acquired electricity, heat, steam and cooling from fossil sources | MWh | 17,517 | |||
(6) Total fossil energy consumption (calculated as the sum of lines 1–5) | MWh | 121,022 | |||
Share of fossil sources in total energy consumption | % | 20.8% | |||
(7) Consumption from nuclear sources | MWh | 3,094 | |||
Share of consumption from nuclear sources in total energy consumption | % | 0.5% | |||
(8) Fuel consumption for renewable sources, including biomass (also comprising industrial and municipal waste of biological origin, biogas, renewable hydrogen, etc.) | MWh | 0 | |||
(9) Consumption of purchased or acquired electricity, heat, steam and cooling from renewable sources | MWh | 457,368 | |||
(10) The consumption of self-generated non-fuel renewable energy | MWh | 760 | |||
(11) Total renewable energy consumption (calculated as the sum of lines 8–10) | MWh | 458,128 | |||
Share of renewable sources in total energy consumption | % | 78.7% | |||
Total energy consumption (calculated as the sum of lines 6, 7 and 11) | MWh | 582,244 |
Topic | Description | Unit | 2024 | ||
Energy intensity per net revenue1 | Total energy consumption from activities in high climate impact sectors per net revenue from activities in high climate impact sectors | (MWh/€m revenue) | 20.6 |
Topic | Description | Unit | 2024 | ||
GHG intensity (total GHG emissions from scope 1, 2 and 3) per net revenue1 | Total GHG emissions (location-based) per net revenue | (tCOeq/ (€m revenue) | 435 | ||
Total GHG emissions (market-based) per net revenue | (tCOeq/ (€m revenue) | 427 |
Topic | Description | Unit | 2024 | ||
Energy attribute certificates | Guarantees of Origin (GOs) | MWh | 313,250 | ||
Renewable energy certificates (RECs) | MWh | 110,501 | |||
International renewable energy certificates (I-RECs) | MWh | 3,786 | |||
Taiwan renewable energy certificates (T-RECs) | MWh | 20,463 | |||
Korea renewable energy certificates (K-RECs) | MWh | 8,000 | |||
Total energy attribute certificates | MWh | 456,000 |

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Platform | DUV immersion | ||||||
System type | NXT:1980Di | NXT:2050i | NXT:1980Ei | NXT:1960Bi + PEP-B | NXT:2100i | NXT:1980Fi | NXT:2150 |
Year of energy measurement | 2015 | 2020 | 2021 | 2021 | 2022 | 2023 | 2024 |
Power consumption (in MW) | 0.16 | 0.16 | 0.16 | 0.15 | 0.16 | 0.17 | 0.17 |
ATP throughput (in wph) | 275 | 295 | 295 | 250 | 295 | 330 | 310 |
Energy use per wafer pass (in kWh) | 0.59 | 0.54 | 0.56 | 0.60 | 0.55 | 0.52 | 0.55 |
Platform | DUV dry | ||||||
System type | XT:1460 | NXT:1470 | XT:860N | NXT:870 | XT:400M | ||
Year of energy measurement | 2020 | 2020 | 2022 | 2022 | 2023 | ||
Power consumption (in MW) | 0.07 | 0.13 | 0.07 | 0.13 | 0.07 | ||
ATP throughput (in wph) | 209 | 277 | 260 | 330 | 250 | ||
Energy use per wafer pass (in kWh) | 0.34 | 0.47 | 0.27 | 0.38 | 0.30 | ||
Platform | YieldStar | HMI | |||||
System type | YS375F | YS380 | YS385 | YS500 | eScan1100 | eP5XLE | eP6 |
Year of energy measurement | 2019 | 2020 | 2023 | 2024 | 2023 | 2024 | 2024 |
Power consumption (in MW) | 0.01 | 0.01 | 0.01 | 0.01 | 0.06 | 0.02 | 0.01 |
ATP throughput (in wph) | n/a | n/a | n/a | n/a | n/a | n/a | n/a |
Energy use per wafer pass (in kWh) | n/a | n/a | n/a | n/a | n/a | n/a | n/a |
Platform | EUV 30 mJ/cm2 dose | ||||||
System type | NXE:3400B | NXE:3400C | NXE:3600D | NXE:3600D | NXE:3800E | ||
Year of energy measurement | 2018 | 2020 | 2021 | 2023 | 2024 | ||
Power consumption (in MW) | 1.44 | 1.31 | 1.32 | 1.23 | 1.31 | ||
ATP throughput (in wph) | 112 | 136 | 160 | 160 | 220 | ||
Energy use per wafer pass (in kWh) | 12.8 | 9.6 | 8.3 | 7.7 | 5.9 | ||

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Methodology on targets |

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Methodology on metrics |

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Category | Rationale | Methodology description | Reporting boundaries | |||
Category 1 – Purchased goods and services | Material to ASML. Multiple modules, parts and services are purchased to produce. | We use the spend-based method to estimate emissions for purchased goods and services. We collect data on the economic value of goods and services purchased each quarter and then multiply them by the relevant secondary (for example industry average) emission factors (for example average emissions per monetary value of goods). In order to identify the relevant secondary emission factors, we use the industry codes declared on the purchase order. These industry codes are linked to the emission factors via the Standard Industry Classification (SIC) codes used in the emission factors of DEFRA version 2011. These emission factors are updated on a yearly basis using the average inflation from the Bank of England. | All upstream (cradle-to-gate) emissions of purchased goods and services. | |||
Category 2 – Capital goods | Material to ASML. Multiple physical assets are purchased in order to produce. | We apply the spend-based method to estimate the emissions of our purchased capital goods. We collect data on the economic value of capital goods and multiply them by relevant secondary (for example industry average) emission factors (for example average emissions per monetary value of goods). Capital goods have been defined following our financial accounting principles, and are not double counted in category 1. The industry codes are linked to the emission factors via the Standard Industry Classification (SIC) codes used in the emission factors of DEFRA version 2011. These emission factors are updated on a yearly basis using the average inflation from the Bank of England. | All upstream (cradle-to-gate) emissions of purchased capital goods. | |||
Category 3 – Fuel- and energy-related activities | Material to ASML. Fuels and energy are purchased to operate. | Using the average-data method, we estimate emissions by using secondary emission factors. In this category we take into account: • Upstream emissions of purchased fuel • Upstream emissions of purchased electricity • Transmission and distribution losses The IEA Life Cycle Upstream Emission Factors (2023), DEFRA (2024) and the National Renewable Energy Laboratory Life Cycle Greenhouse Gas Emissions from Electricity Generation Update (2021) emission factor databases are used. | All upstream (cradle-to-gate) emissions of purchased fuels and electricity (from raw material extraction up to the point of, but excluding, combustion). | |||
Category 4 – Upstream transportation and distribution | Material to ASML. Transportation and distribution services are purchased to operate. | We include all third-party transportation and distribution services purchased. This includes inbound, outbound and third-party transportation and distribution between a company’s own facilities. Around 90% of the emissions are reported by the forwarders (Tier 1 logistic suppliers). We directly receive the emissions report from our major logistics suppliers. To calculate the emissions, the suppliers use EcotransitIT, where emissions are estimated using the distance-based method. The report includes: air transport, road transport, marine transport and storage of purchased products in warehouses and distribution centers. For each shipment the factors considered are based on transportation type (e.g. airplane type) and route. We have not included the multiplier effect of air travel on radiative forcing. The remaining emissions are estimated by taking the average ASML freight emissions. | Emissions of transportation and distribution providers that occur during use of vehicles and facilities. |

SUSTAINABILITY | ASML Annual Report 2024 | 226 |
Category | Rationale | Methodology description | Reporting boundaries | |||
Category 5 – Waste generated in operations | Material to ASML. Waste is generated as part of our operations. | Using the waste-type-specific method, we use emission factors per waste type and treatment method. We differentiate the following treatment activities for each waste type: • Landfill • Incineration • Recycling Waste types are reported as part of our Circular Economy metrics. Waste treatment type is provided by the waste haulers contracted. The emission factors from Ecoinvent v.3.11 and DEFRA (2024) are used. | Emissions that occur during the disposal or treatment of our waste at suppliers. | |||
Category 6 – Business travel | Material to ASML. Business travel is conducted for sales, customer support purposes and operation activities. | Air travel: gross emissions are estimated by using two calculation methods. Around 50% of our flights’ emissions are reported to us directly from our main travel supplier. The rest is estimated using the distance-based method, which involves determining the distance and travel class of the flight and then applying the appropriate emission factor (Well-To-Wheel) considering direct climate change effects only, therefore we have not included the multiplier effect of air travel on radiative forcing. Hotel stay: We take hotel nights stayed and apply emission factors for the average energy use per hotel night in different countries. Car rental: We use the distance-based method. We receive the number of rental days from the rental car company and assume an average distance (100 km/day) and multiply this by the corresponding emission factor (distance-based). Taxi and public transportation: We apply the spend-based method, which involves determining the spend on transport and applying secondary (spend-based) emission factors. The DEFRA emission database (2024) is used for air travel, hotel and car. Public transport and taxi spend-based emission factors come from the DEFRA version 2011. This emission factors are updated on a yearly basis using the average inflation from the Bank of England. | Emissions of transportation carriers that occur during use of any transport mode used. Emissions caused by the stay at hotels during business travels. | |||
Category 7 – Employee commuting | Material to ASML. Our employees commute to our offices and manufacturing locations. | We use the distance-based method, which involves collecting data on: •Average amount of employees present at the office based on badge swipe numbers •Mode of transport: We differentiate between seven transport modes including bike, car, carpooling, motorcycle, public transport, scooter and shuttle bus •Fuel: Depending on the transport mode, we differentiate in electric, diesel, petrol and hybrid. We report at a country level (Netherlands, Taiwan, South Korea, China, Germany and the United States) and include smaller locations as 'others'. The total emissions are obtained by withdrawing the emissions from leased cars calculated in scope 1 and 2. The emissions factors are obtained from CO2emissiefactoren.nl, Milieucentraal, DEFRA (2024) and the IEA database. In case the emission factor is not found, we use the IEA database to extrapolate the emission factor using cross multiplication (only applicable for electric vehicles). | Emissions that occur during use of vehicles or other transport modes when commuting. | |||
Category 8 – Upstream leased assets | No leased assets are operated outside what is reported in scope 1 and 2. | N/A | N/A |

SUSTAINABILITY | ASML Annual Report 2024 | 227 |
Category | Rationale | Methodology description | Reporting boundaries | |||
Category 9 – Downstream transportation and distribution | Category 4 (upstream) already includes all inbound and outbound logistic emissions. | N/A | N/A | |||
Category 10 – Processing of sold products | Our products do not require intermediate processing. | N/A | N/A | |||
Category 11 – Use of sold products | Material to ASML. Our products consume large amounts of energy to operate. | We estimate the direct use-phase emissions by measuring the energy use of our products and calculating the GHGs emitted during use. We apply a lifetime of 20 years for each system. We estimate the annual energy consumption of each product based on the common production and idle time percentages, obtained by customer survey data and verified and evaluated every two years by our development and engineering department. The figure obtained is then multiplied by a lifetime of 20 years. Lastly, we differentiate the products sold to our top five customers (based on 2022 revenue). For those we multiply the energy consumption by the customer emission factor (obtained from CDP) to obtain the total emissions. This emission factor is general per customer and does not differentiate between countries. For the products sold to other customers, we apply country-based emission factors from the IEA (2024) database to convert energy consumption into emissions. Some of our products also consume CO2 during their use; this amount consumed is calculated over the lifetime of 20 years and added to obtain the total emissions. | The direct use-phase emissions of sold products over their expected lifetime at our customers' sites. | |||
Category 12 – End-of-life treatment of sold products | Material to ASML. End-of-life products would require treatment after they are no longer in service. | We apply the waste-type-specific method, on the basis of a high-level estimation of the material composition of our products. We differentiate between metal and non-metal components and estimate the mass fraction for each system on a family level (for example NXE, NXT and XT). We apply emission factors for specific waste types and waste treatment methods. The Ecoinvent v.3.11 (cutoff) database is used. | Emissions that occur during the end- of-life treatment of sold products. | |||
Category 13 – Downstream leased assets | Assets are not leased to other entities. | N/A | N/A | |||
Category 14 – Franchises | ASML does not operate franchises. | N/A | N/A | |||
Category 15 – Investments | ASML does not have investments as referred to in the GHG Protocol. All emissions from subsidiaries are included in ASML’s GHG emissions. Emissions from associates that are part of ASML's value chain are included in the respective scope 3 category. | N/A | N/A |

SUSTAINABILITY | ASML Annual Report 2024 | 228 |
Why it matters: Impacts, risks and opportunities | |||
There are several climate-related risks identified in our double materiality assessment (DMA): | |||
Physical climate change risks to ASML | |||
Physical climate change risks to our customers | |||
Technology risk due to transition to low- carbon technologies (transition risk) | |||
Climate-related regulation and carbon taxes (transition risk) | |||
Damage to our brand and reputation (transition risk) | |||
There is also an opportunity: | |||
Increased market demand for low-carbon technologies | |||

SUSTAINABILITY | ASML Annual Report 2024 | 229 |
Transition risk: 1.5°C scenario | Physical risk: 4.0°C scenario | ||
Scenario | International Energy Agency (IEA) Net Zero Emissions by 2050 Scenario | Intergovernmental Panel on Climate Change (IPCC) RCP 8.5 Scenario | |
Description | A 1.5°C scenario would only occur if society managed swift decarbonization in the coming decades, resulting in more pronounced transition risks. This scenario looks at the following risk categories: policy and legal, market and economic, technology and reputation. The impact on both our assets and business activities is taken into consideration. | A 4°C scenario would occur if society fails to decarbonize, resulting in more pronounced physical risks. The data model covers the relevant hazard categories for ASML and aligns with the guidance provided by ESRS (temperature-related, wind-related, water-related and solid mass-related hazards). The likelihood, magnitude and duration of the hazards are taken into consideration within this data model. | |
Time horizon | For the 1.5°C scenario, this assessment considers a time horizon until 2030 (medium term). This is in line with ASML’s overall strategy and risk time horizon. | In our assessment, we consider the climate change effects as projected in 2030 (medium term) and 2050 (long term). The 2050 time horizon is included for this scenario since physical risks could pose a greater threat in the long term if the world fails to decarbonize. | |
Policy levers | •Carbon pricing will play a significant role •Strong investment/subsidy schemes for technology innovation in energy efficiency and renewables | •Includes a world with little to no policy interventions •High climate adaptation focus | |
Market levers | •Primary energy demand falls by 17% between 2019 and 2030 •By 2035, overall net zero emissions electricity in advanced economies •By 2050, almost 90% of electricity generation comes from renewable sources, with wind and solar photovoltaic (PV) together accounting for almost 70% | •Electricity: share of final energy demand increase by the year 2100 to 30% •Fossil fuels continue to dominate the primary energy portfolio over the entire time horizon | |
Technology levers | •Global rate of energy efficiency improvements (~4% a year by 2030) •Development of low-carbon solutions in all sectors •Includes reliance on carbon capture solutions (up to 7.6 Gt CO2 by 2050) | •Wind and solar PV remain to play limited role in energy production •Scarcity in fossil fuels during the second part of the century will result in a ‘last-minute’ shift to highly expensive alternative technologies and nuclear or hydro-energy | |
Climatic effects | •Effects of physical climate risk limited, but visible | •Global mean sea level rise of 0.84 m by 2100 •Frequency and intensity of extreme weather events largely increased with increasing CO2 concentrations | |
Opportunities | In both scenarios we have looked at opportunities for ASML, in the following categories: Resource efficiency / Energy source / Products and services / Markets / Resilience | ||

SUSTAINABILITY | ASML Annual Report 2024 | 230 |
High risk: high financial impact on ASML’s gross margin and/or market share | High opportunity: high financial impact on ASML’s gross margin and/or market share | |||||
Medium risk: medium financial impact on ASML’s gross margin and/or market share | Medium opportunity: medium financial impact on ASML’s gross margin and/or market share | |||||
Low risk: limited to no financial impact on ASML’s gross margin and/or market share | Low opportunity: limited to no financial impact on ASML’s gross margin and/or market share |

SUSTAINABILITY | ASML Annual Report 2024 | 231 |
Risk level | Value chain | Risk description | Mitigating measures | Anticipated financial effects | ||||
Physical risks 4°C scenario medium and long term | Acute and chronic climate change effects | Customers ![]() | The increased frequency and severity of climate change effects will impact our key customers, particularly in the long term (2050). Extreme weather events are predicted to be more severe and the manufacturing facilities of our key customers are especially exposed to effects of water stress, droughts, storms and typhoons. These events can potentially disrupt the operations of key customers in such an extreme scenario. These customers are particularly sensitive to water stress and drought due to the heavy reliance on water for the semiconductor manufacturing processes. | Our customers are implementing mitigating measures themselves, such as retrofitting of facilities to increase water efficiency, conducting risk assessments and engagement with their supply chain to mitigate climate risks. Alongside this, we are working on technical solutions to reduce the water needed for cooling EUV machines to contribute to a lower dependency on water. | Lost revenue In a 4°C scenario our key customers could experience the increased effects from water stress and drought which can lead to increased operational and capital expenditures and revenue loss. Consequently, the demand for our products could decrease as customers lose financial power. Our dependence on a concentrated number of customers could have a material adverse effect on our revenue and financial condition. Increased capital expenditures Our customers could demand more water-efficient machines, which would require the redesign of our products. There will be increased or prioritized R&D investments to be able to adapt ASML’s systems to be more water efficient. | |||
Acute and chronic climate change effects | Own operations ![]() | The frequency and severity of climate change effects increase, particularly after 2050. Tropical cyclones, heat stress and floods caused by increased precipitation are predicted to be more severe in specific regions, potentially damaging and disrupting our operations in those regions. Additionally, droughts could result in the disruption of production due to water-dependent processes. | We have several key measures in place to mitigate the potential effects of physical risks, including but not limited to robust building designs, fire suppression systems in critical areas, stormwater control mechanisms, water reserve controls, maintenance management, power backup for safety/emergency systems and business continuity strategies. | Lost revenue Extreme weather events can disrupt production processes or transportation, resulting in late deliveries. This can have a material adverse effect on our revenue and financial condition. Operational costs Temperature increases can increase operational costs, due to the necessity of additional air conditioning to ensure consistent climate conditions for our production processes and the productivity of the workforce. Also, it is likely that insurance costs will increase due to increased frequency and severity of extreme weather events in a 4°C scenario. Increased capital expenditures In some cases, more investments will be needed to make our factories increasingly resistant to the effects of climate change, including droughts, tropical cyclones, heat stress, precipitation stress, floods and fire weather stress. |

SUSTAINABILITY | ASML Annual Report 2024 | 232 |
Risk level | Value chain | Risk description | Mitigating measures | Anticipated financial effects | ||||
Transition risks 1.5°C scenario Medium term | Policy and legal | Across value chain ![]() | The climate-related regulation landscape is expected to change in many regions. This could lead to stricter regulation on sectors such as energy, industry and transportation, but also on the technology sector. ESG reporting will also have to become more extensive and carbon-pricing regulations can be introduced. Climate regulation will have a strong effect on the medium term (2030) because the world will have to act soon to limit global warming. These regulations may impact ASML directly in relation to its own manufacturing processes or indirectly via the cost of input materials through suppliers or customer requirements for carbon efficiency. | We monitor climate-related regulations and policies to understand the potential effect to our business and stakeholders on a global level. We deploy our carbon footprint strategy, with which we aim to achieve greenhouse gas (GHG) neutrality for scope 1 and 2, business travel and employee commuting by 2025, for our supply chain emissions by 2030 and for product use emissions by 2040. The objective of our supply chain collaboration programs and our product energy efficiency roadmaps is to reduce emissions from the products we purchase, to reduce the carbon footprint of our products, and to enable low-carbon technology and products across our entire value chain. | Increased cost of input materials The price of our input materials is likely to increase in a 1.5°C scenario due to climate-related regulations and carbon taxes. Increased operating costs Increased operating costs due to a price on carbon in a 1.5°C scenario. Increased capital expenditures In a 1.5°C scenario, there will be increased capital expenditures, as investments are needed to make production processes more energy efficient or to change the energy source. This is most relevant for facilities in Taiwan and South Korea, where the costs of moving to renewable energy are already very high. Additionally, increased or prioritized R&D investments will be needed to support our customers in meeting their carbon-reduction requirements. | |||
Market and economic | Suppliers ![]() | The availability of some input materials is expected to be impacted, since demand for these products will become higher in a low-carbon economy (e.g. raw materials used in our equipment like steel, aluminum and rare earth elements). The increased demand and decreased availability of such input materials and required changes to production processes at our suppliers could result in higher purchase prices for ASML. | To mitigate the effects of higher-input material prices, purchase agreements are signed with suppliers. We have developed dedicated supply chain programs to monitor the availability of raw materials and economic development as well as a scarcity program to monitor scarce commodities. | Increased capital expenditures Both ASML and its suppliers need to increase R&D investments to be able to adapt our systems to be more energy efficient and reduce the carbon footprint of the supply chain. Increased operating costs Increased operating costs due to the potential increase of raw materials prices, caused by limited availability and changes in supplier production processes. | ||||
Technology | Across value chain ![]() | Investments in new technology are required to mitigate carbon emissions, and these transition costs could be very high. ASML is highly dependent on its suppliers and customers to reach its climate ambitions. Some of our manufacturing processes require fossil-fueled technologies for which no alternatives are industrialized yet (e.g. steel), while there is currently a limited availability of renewable energy in some regions where our products are operated. | We develop our products and technology roadmaps in close collaboration with suppliers and customers and we actively work to reduce the energy consumption of our products. We are gathering more insights on material inflows to find solutions to reuse materials and reduce the carbon footprint of materials used in the production process. We expect that the deployment of our Climate Transition Plan will support our transition to achieve GHG neutrality for scope 1, 2 and 3 by 2040. | Increased capital expenditures ASML and value chain partners need to increase R&D investments to reduce the carbon emissions of our lithography systems and applications. |

SUSTAINABILITY | ASML Annual Report 2024 | 233 |
Risk level | Value chain | Risk description | Mitigating measures | Anticipated financial effects | ||||
Transition risks 1.5°C scenario Medium term | Reputation | Own operations ![]() | There will be more scrutiny on the semiconductor sector, as it consumes large volumes of energy and water resources. Failure to decarbonize and mitigate negative impacts on the environment can result in brand and reputational risk for ASML. This could negatively affect employee attraction and retention and could result in a reduction in available capital sources. | We have developed our ESG sustainability strategy to mitigate our negative impacts and increase our positive impacts on ESG-related topics. Part of this strategy is our Climate Transition Plan which we expect will help us to reduce our carbon emissions. By continuously engaging with our relevant stakeholders, we seek to ensure that our ESG sustainability strategy covers all our material impacts, risks and opportunities. The Climate Transition Plan, its related strategic KPIs and its actions and progress are monitored by the Board of Management (BoM). | Lost revenue Reputational damage can lead to a decrease in demand from customers for our products. Similarly, failure to manage climate impact can negatively impact employee attraction and retention and indirectly lead to revenue loss. Increased capital and operational expenditures Increased capital and operational expenditures as investments are needed to execute our ESG sustainability strategy. |
Opportunity level | Value chain | Opportunity description | Anticipated financial effects | |||
1.5°C & 4°C opportunities Medium to long term | Development and/or expansion of (new) products and services | Own operations ![]() | The increased demand for low-carbon technologies will impact the demand for semiconductors. When looking at the scenario of a low-carbon economy, semiconductors play a multifaceted role in mitigating carbon emissions. Semiconductors are needed for the generation and use of low-carbon energy sources and are necessary for, among others, wind turbines, solar panels and electric vehicles. Moreover, semiconductors are necessary in all smart technologies that help improve energy efficiency, such as smart grids, while power semiconductors can be key in reducing energy use. As demand for semiconductors may surge, the need for our lithography systems is also highly likely to increase. | Increased revenue As demand for semiconductors surges, the need for lithography systems will likely increase. We will likely be able to serve this need if we continue to follow our vision of producing microchips that are constantly becoming more energy efficient. Therefore, the increase in demand for semiconductors will be highly likely to lead to increased revenues. |

SUSTAINABILITY | ASML Annual Report 2024 | 234 |
SUSTAINABILITY | ASML Annual Report 2024 | 235 |

Why it matters |
...for the planet | ...for ASML | |
![]() | ![]() | |
The predominant linear model of the global economy – in which products are produced, used and then thrown away as waste – is unsustainable. It adds immense pressure to our planet’s limited resources, increases GHG emissions and generates waste and pollution. A circular economy approach enables sustainable economic growth by creating business loops, ensuring efficient use of resources and driving an innovative business model. | By applying a circular economy strategy, we aim to ensure our products and services create and retain as much value as possible for us, our customers, our suppliers and other partners across our value chain. A successful transition toward a circular economy means improved designs, operational resilience, minimal environmental impact and reduced costs. | |
The transition to a circular business model is important: | |
...for our customers | |
It contributes to their circular economy objectives, systems and parts availability, while lowering their total costs of ownership. | |
...for our employees | |
It contributes to their goals to improve social and environmental impacts. | |
...for our suppliers | |
It contributes to business opportunities due to the reuse of materials which contributes to avoiding the use of new materials therefore reducing costs. | |
...for our shareholders | |
It contributes to their objective to maximize long-term shareholder value and minimize business costs while improving sustainability performance. | |
...for society | |
It contributes to societal objectives reducing waste, costs, and environmental footprint. | |
Read more about our double materiality process and identified impacts, risks and opportunities for management |
Our 2024 progress: | ||||
![]() | ![]() | |||
95% | 88% | |||
Systems sold in the past 30 years still active in the field | Reuse rate of parts returned from field and factory (2025 target: 90%) | |||
![]() | ![]() | |||
12,118 t | 429 kg | |||
Total waste from operations | Waste generated per €m revenue | |||
(excl. construction) | (2025 target: 295 kg) | |||
![]() | ||||
63% | ||||
Recycling rate | ||||
(excl. construction) (2025 target: 65%) | ||||

SUSTAINABILITY | ASML Annual Report 2024 | 236 |
Our objective | |||||||||||||||||||||
We want to transition from a linear to a circular business model – something we believe is vital for our future success and competitiveness. The circular economy model aims to keep resources in use for as long as possible, minimizing the use of virgin materials and eliminating waste by closing the loop to create a more sustainable and resilient economy. We contribute to this by maintaining, repairing, upgrading, refurbishing, remanufacturing, repurposing and/or recycling our systems, parts, packaging, assets and non-product- related (NPR) goods as we aim to minimize the social and environmental impact of our operations. | |||||||||||||||||||||
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Systems | Parts and tools including packaging and transport tools | ||||||||||||||||||||
We aim to maintain systems in use for as long as economically and environmentally possible, focusing on service, upgrades and refurbishment. | We aim to maximize the use of materials by focusing on parts and packaging availability, cost reduction and reuse of already available resources through repair and test actions – avoiding the need for new materials for new parts. | ||||||||||||||||||||
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NPR waste | Real estate | ||||||||||||||||||||
We aim to minimize our waste and increase our recycling rate by improving the quality of our waste data, analyzing the waste data and using insights from waste data to define and implement onsite initiatives. | We adopt green building standards and use strict certification methods, aiming to ensure most of our new and existing office and warehouse buildings (owned buildings) are as sustainable as possible. | ||||||||||||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 237 |
Our approach |
Our different types of waste | ||
We measure our impact in tonnes of waste, by category (non-hazardous and hazardous) and by material type (such as plastics, paper, wood and hazardous liquids). We include data on the CO2e impact of processing our waste in our scope 3 emissions. Within our operations, we divide our waste into three categories: •Non-hazardous waste, such as packaging material, waste from parts resulting from upgrades or defects, and general waste. This category also includes construction waste from building activities, which tends to fluctuate over the years. •Hazardous waste, such as the chemicals we use in our manufacturing processes. This can include everything from lamps, batteries and liquids to cleaning wipes and filters. Most of our hazardous waste is in the form of liquids, including acetone and piranha acid. •Radioactive waste originates from small amounts of radioactive material in our products. | ||


SUSTAINABILITY | ASML Annual Report 2024 | 238 |
Levers for action |
Why it matters: Impacts, risks and opportunities | |||
For circular economy, we have identified the following impacts across our value chain that are downstream beyond our customers: | |||
Impacts: | |||
Use of our customers' products enabling the transition to a circular economy in various applications | |||
Use of our customers' products hindering the transition to a circular economy in various applications | |||
The strategy for these impacts including targets, actions and resources is in development, and we will report on this in the coming years. | |||
SUSTAINABILITY | ASML Annual Report 2024 | 239 |
Our scope |
Why it matters: Impacts, risks and opportunities | |||
For systems we have identified the following: | |||
Impacts: | |||
Resource inflows in the production process | |||
Impact of our resource outflows at customers’ sites | |||
Waste produced from our operations | |||
Risks and opportunities: | |||
Disruption to the supply chain caused by unavailability of materials and parts | |||
Loss of market share and dissatisfied customers through not meeting agreed circular economy standards | |||
Inability to meet changing customer demands for more circular products | |||
Read more in Strategic report – Performance and risk – Risk | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
% of lithography systems sold in the past 30 years still active in the field | % | 95% | N/A | N/A | N/A |
Our actions and resources |
SUSTAINABILITY | ASML Annual Report 2024 | 240 |
Looking ahead |
SUSTAINABILITY | ASML Annual Report 2024 | 241 |
Our scope |
Why it matters: Impacts, risks and opportunities | |||
For parts and tools including packaging and transport tools we have identified the following: | |||
Impacts: | |||
Resource inflows in the production process | |||
Impact of our resource outflows at customers’ sites | |||
Waste produced from our operations | |||
Risks and opportunities: | |||
Disruption to the supply chain caused by unavailability of materials and parts | |||
Loss of market share and dissatisfied customers through not meeting agreed circular economy standards | |||
Inability to meet changing customer demands for more circular products | |||
Read more in Strategic report – Performance and risk – Risk | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Reuse rate of parts returned from field and factory | % | 88% | 90% | 2025 | On track ò |
Our actions and resources |
SUSTAINABILITY | ASML Annual Report 2024 | 242 |
Improving availability of materials through reuse | ||
With increased demand for all our systems, it has become more challenging to have the right materials in the right place at the right time to build, upgrade or repair our products. One solution to improve availability of materials is to reuse them from existing systems that have been returned from the field. In 2024, we introduced a systematic approach to dismounting and reusing NXT systems, with the ambition of using the same process with other systems in the future. Through a scalable process, almost all modules can be disassembled and fed back into the supply chain as separate parts. This approach provides greater availability of materials, reduced cost and lower lead times, particularly for lenses in high demand. We have also completed a pilot to include XT main bodies in this process. | ||
Looking ahead |
SUSTAINABILITY | ASML Annual Report 2024 | 243 |
Our scope |
Why it matters: Impacts, risks and opportunities | |||
For NPR waste (hazardous and non- hazardous) we have identified the following: | |||
Impacts | |||
Waste produced from our operations | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Total waste from operations (excl. construction) normalized to revenue | kg/€m | 429 | 295 | 2025 | Work to be done n |
Recycling rate (excl. construction) | % | 63% | 65% | 2025 | Work to be done n |
Our actions and resources |
SUSTAINABILITY | ASML Annual Report 2024 | 244 |
Looking ahead |
SUSTAINABILITY | ASML Annual Report 2024 | 245 |
Our scope |
Why it matters: Impacts, risks and opportunities | |||
For real estate, we have identified the following: | |||
Impacts: | |||
Waste produced from our operations | |||
Targets and performance |
Our actions and resources |
Looking ahead |

SUSTAINABILITY | ASML Annual Report 2024 | 246 |
Topic | Description | Unit | 2024 | ||
Resource inflows | Biological materials used in manufacturing that are sustainably sourced | % | —% | ||
Biological materials used to manufacture products and services that are sustainably sourced | tonnes | 800 | |||
Products and technical and biological materials used | tonnes | — | |||
Secondary reused or recycled components, secondary intermediary products and secondary materials used in manufacturing (including packaging) | % | —% | |||
Secondary reused components, secondary intermediary products and secondary materials used to manufacture products and services (including packaging) | tonnes | 10,963 | |||
Secondary recycled components used to manufacture products and services (including packaging) | tonnes | — |
Topic | Description | Unit | 2024 | ||
Resource outflows | Recyclable content in products and their packaging | % | 80.2% | ||
Recyclable content in products and their packaging | tonnes | — |
Topic | Description | Unit | 2024 | ||
Waste generated by waste type | Non-hazardous waste | tonnes | 12,513 | ||
Hazardous waste | tonnes | 1,024 | |||
Radioactive waste | tonnes | 0.1 | |||
Total amount of waste generated by waste type | tonnes | 13,537 | |||
Topic | Description | Unit | 2024 | ||
Waste diverted from disposal by recovery operation type – Non- hazardous waste | Preparation for reuse | tonnes | 129 | ||
Recycling | tonnes | 8,087 | |||
Other recovery operations | tonnes | 0 | |||
Amount of waste diverted from disposal by recovery operation type – Non-hazardous waste | tonnes | 8,216 | |||
Topic | Description | Unit | 2024 | ||
Waste diverted from disposal by recovery operation type – Hazardous waste | Preparation for reuse | tonnes | 37 | ||
Recycling | tonnes | 757 | |||
Other recovery operations | tonnes | 0 | |||
Amount of waste diverted from disposal by recovery operation type – Hazardous waste | tonnes | 794 | |||

SUSTAINABILITY | ASML Annual Report 2024 | 247 |
Topic | Description | Unit | 2024 | ||
Waste diverted from disposal by recovery operation type – Radioactive | Preparation for reuse | tonnes | 0.0 | ||
Recycling | tonnes | 0.0 | |||
Other recovery operations | tonnes | 0.0 | |||
Amount of waste diverted from disposal by recovery operation type – Radioactive | tonnes | 0.0 | |||
Topic | Description | Unit | 2024 | ||
Waste directed to disposal by treatment type – Non-hazardous waste | Incineration | tonnes | 3,730 | ||
Landfill | tonnes | 567 | |||
Other disposal operations | tonnes | 0 | |||
Amount of waste directed to disposal by treatment type – Non-hazardous waste | tonnes | 4,297 | |||
Topic | Description | Unit | 2024 | ||
Waste directed to disposal by treatment type – Hazardous waste | Incineration | tonnes | 212 | ||
Landfill | tonnes | 18 | |||
Other disposal operations | tonnes | 0 | |||
Amount of waste directed to disposal by treatment type – Hazardous waste | tonnes | 230 | |||
Topic | Description | Unit | 2024 | ||
Amount of waste directed to disposal by treatment type – Radioactive | Incineration | tonnes | 0.0 | ||
Landfill | tonnes | 0.1 | |||
Other disposal operations | tonnes | 0.0 | |||
Amount of waste directed to disposal by treatment type – Radioactive | tonnes | 0.1 | |||
Topic | Description | Unit | 2024 | ||
Non-recycled | Preparation for reuse | tonnes | 166 | ||
Non-recycled waste (including preparation for reuse) | tonnes | 4,693 | |||
Non-recycled waste (including preparation for reuse) | % | 34.7% |

SUSTAINABILITY | ASML Annual Report 2024 | 248 |
Topic | Description | Unit | 2024 | ||
Non-hazardous waste | General waste | tonnes | 3,295 | ||
Waste wood | tonnes | 2,611 | |||
Construction waste | tonnes | 1,419 | |||
Metals | tonnes | 1,377 | |||
Paper and cardboard | tonnes | 1,079 | |||
Plastic | tonnes | 729 | |||
Organic waste | tonnes | 334 | |||
Electronics | tonnes | 346 | |||
Glass | tonnes | 16 | |||
Other non-hazardous waste | tonnes | 1,307 | |||
Total non-hazardous waste | tonnes | 12,513 | |||
Topic | Description | Unit | 2024 | ||
Hazardous waste | Hazardous liquids | tonnes | 852 | ||
Filters | tonnes | 62 | |||
Empty packaging | tonnes | 35 | |||
Cleaning wipes | tonnes | 8 | |||
Lamps | tonnes | 1 | |||
Batteries | tonnes | 1 | |||
Other hazardous waste | tonnes | 65 | |||
Total hazardous waste | tonnes | 1,024 |

SUSTAINABILITY | ASML Annual Report 2024 | 249 |
Methodology on targets | |
Construction waste | ||
Construction waste is excluded from the calculation of our targets because it does not result from our daily operations. The amount tends to fluctuate over the years and can therefore make the trend of the indicator unclear. However, construction waste is included in our actuals. | ||
Methodology on metrics | |

SUSTAINABILITY | ASML Annual Report 2024 | 250 |
Overview | |
The EU Taxonomy Regulation (EU 2020/852) aims to create a common language and methodology for reporting on sustainability by providing appropriate criteria for determining which economic activities can be considered environmentally sustainable. The EU Taxonomy requires companies to report to what extent their economic activities are Taxonomy–eligible and aligned. |
Summary | ||||
FY 2024 | % | FY 2023 | % | |
Turnover | 28,262.9 | 100% | 27,558.5 | 100% |
Taxonomy-aligned turnover | 0.0 | 0% | 0.0 | 0% |
Taxonomy-eligible turnover | 27,669.8 | 98% | 26,668.5 | 97% |
CE 1.2 Manufacturing of electrical equipment | 23,402.2 | 83% | 23,903.0 | 87% |
CE 5.1 Repair, refurbishment and remanufacturing | 3,595.3 | 13% | 2,404.0 | 9% |
CE 5.2 Sale of spare parts | 42.1 | 0% | 45.5 | 0% |
CE 5.4 Sale of second-hand goods | 630.2 | 2% | 316.0 | 1% |
Taxonomy-non-eligible turnover | 593.1 | 2% | 890.0 | 3% |
Capital expenditure | 3,315.0 | 100% | 3,394.2 | 100% |
Taxonomy-aligned capex | 74.1 | 2% | 0.0 | 0% |
CCM 7.7 Acquisition and ownership of buildings | 74.1 | 2% | 0.0 | 0% |
Taxonomy-eligible capex | 2,768.7 | 84% | 1,614.2 | 48% |
CE 1.2 Manufacturing of electrical equipment | 1,879.2 | 57% | 945.4 | 28% |
CCM 4.1 Electricity generation using solar photovoltaic technology | 2.2 | 0% | 0.0 | 0% |
CCM 4.9 Transmission and distribution of electricity | 25.2 | 1% | 0.0 | 0% |
CCM 7.2 Renovation of existing buildings | 252.2 | 8% | 35.1 | 1% |
CCM 7.7 Acquisition and ownership of buildings | 609.9 | 18% | 633.7 | 19% |
Taxonomy-non-eligible capex | 472.2 | 14% | 1,780.0 | 52% |
Operational expenditure | 3,181.0 | 100% | 3,035.2 | 100% |
Taxonomy-aligned opex | 0.0 | 0% | 0.0 | 0% |
Taxonomy-eligible opex | 3,181.0 | 100% | 3,035.2 | 100% |
CE 1.2 Manufacturing of electrical equipment | 3,181.0 | 100% | 3,035.2 | 100% |
Taxonomy-non-eligible opex | 0.0 | 0% | 0.0 | 0% |
1 | Climate change mitigation (CCM) |
2 | Climate change adaptation (CCA) |
3 | Sustainable use and protection of water and marine resources (WTR) |
4 | Transition to a circular economy (CE) |
5 | Pollution prevention and control (PPC) |
6 | Protection and restoration of biodiversity and ecosystems (BIO) |
Turnover |
Capital expenditure |
Operational expenditure |

SUSTAINABILITY | ASML Annual Report 2024 | 251 |

SUSTAINABILITY | ASML Annual Report 2024 | 252 |
Environmental objective | Taxonomy-eligible activity | Related KPI |
Circular economy (CE) | 1.2 Manufacture of electrical and electronic equipment | Turnover, opex, capex |
Climate change mitigation (CCM) | 4.1 Electricity generation using solar photovoltaic technology | Capex |
Climate change mitigation (CCM) | 4.9 Transmission and distribution of electricity | Capex |
Circular economy (CE) | 5.1 Repair, refurbishment and remanufacturing | Turnover |
Circular economy (CE) | 5.2 Sale of spare parts | Turnover |
Circular economy (CE) | 5.4 Sale of second-hand goods | Turnover |
Climate change mitigation (CCM) | 7.2 Renovation of existing buildings | Capex |
Climate change mitigation (CCM) | 7.7 Acquisition and ownership of buildings | Capex |
We apply a five-step approach to our EU Taxonomy assessment |
1. Identification of eligible activities | 2. Substantial contribution | 3. Do no significant harm | 4. Compliance with minimum safeguards | 5. KPI | |||||
Eligibility | Compliance with technical screening criteria | Compliance with minimum safeguards | Alignment with Taxonomy | ||||||
Manufacture of electrical and electronic equipment (CE 1.2) | Technical screening criteria are not met FY 2024 | We are compliant with minimum safeguards FY 2024. | Turnover 98% eligible – not aligned 0% eligible – aligned 2% not eligible | |||||
Electricity generation using solar photovoltaic technology (CCM 4.1) | Technical screening criteria are not met FY 2024 | |||||||
Transmission & distribution of electricity (CCM 4.9) | Technical screening criteria are not met FY 2024 | Capital expenditure 84% eligible – not aligned 2% eligible – aligned 14% not eligible | ||||||
Repair, refurbishment and remanufacturing (CE 5.1) | Technical screening criteria are not met FY 2024 | |||||||
Sale of spare parts (CE 5.2) | Technical screening criteria are not met FY 2024 | |||||||
Sale of second-hand goods (CE 5.4) | Technical screening criteria are not met FY 2024 | Operational expenditure 100% eligible – not aligned 0% eligible – aligned 0% not eligible | ||||||
Renovation of existing buildings (CE 7.2) | Technical screening criteria are not met FY 2024 | |||||||
Acquisition and ownership of buildings (CE 7.7) | Technical screening criteria are met FY 2024 |
SUSTAINABILITY | ASML Annual Report 2024 | 253 |
Turnover | |

< | Not eligible | 2% | |
< | Eligible – Not aligned (A.2) | 98% | |
< | Eligible – Aligned (A.1) | 0% | |
Capital expenditure | |

< | Not eligible | 14% | |
< | Eligible – Not aligned (A.2) | 84% | |
< | Eligible – Aligned (A.1) | 2% | |
SUSTAINABILITY | ASML Annual Report 2024 | 254 |
The EU Taxonomy requires companies to report to what extent their economic activities are Taxonomy-eligible and aligned. |
Operational expenditure | |

< | Not eligible | 0% | |
< | Eligible – Not aligned (A.2) | 100% | |
< | Eligible – Aligned (A.1) | 0% | |
Nuclear energy related activities | ||
1 | The undertaking carries out, funds or has exposures to research, development, demonstration and deployment of innovative electricity generation facilities that produce energy from nuclear processes with minimal waste from the fuel cycle. | No |
2 | The undertaking carries out, funds or has exposures to construction and safe operation of new nuclear installations to produce electricity or process heat, including for the purposes of district heating or industrial processes such as hydrogen production, as well as their safety upgrades, using best available technologies. | No |
3 | The undertaking carries out, funds or has exposures to safe operation of existing nuclear installations that produce electricity or process heat, including for the purposes of district heating or industrial processes such as hydrogen production from nuclear energy, as well as their safety upgrades. | No |
Fossil gas related activities | ||
4 | The undertaking carries out, funds or has exposures to construction or operation of electricity generation facilities that produce electricity using fossil gaseous fuels. | No |
5 | The undertaking carries out, funds or has exposures to construction, refurbishment and operation of combined heat/cool and power generation facilities using fossil gaseous fuels. | No |
6 | The undertaking carries out, funds or has exposures to construction, refurbishment and operation of heat generation facilities that produce heat/cool using fossil gaseous fuels. | No |
SUSTAINABILITY | ASML Annual Report 2024 | 255 |
Financial year 2024 | Substantial contribution criteria | DNSH criteria | |||||||||||||||||
Economic activities (1) | Code (2) | Turnover (3) | Proportion of turnover (4) | Climate change mitigation (5) | Climate change adaptation (6) | Water (7) | Pollution (8) | Circular economy (9) | Bio- diversity (10) | Climate change mitigation (11) | Climate change adaptation (12) | Water (13) | Pollution (14) | Circular economy (15) | Bio- diversity (16) | Minimum safeguards (17) | Proportion of Taxonomy- aligned (A.1) or eligible (A.2) Turnover, year N-1 (18) | Category (enabling activity) (19) | Category (transitional activity) (20) |
€, in millions | % | Y; N; N/EL | Y; N; N/EL | Y; N; N/EL | Y; N; N/EL | Y; N; N/EL | Y; N; N/EL | Y; N | Y; N | Y; N | Y; N | Y; N | Y; N | Y; N | % | E | T | ||
A. Taxonomy-eligible activities | |||||||||||||||||||
A.1 Environmentally sustainable activities (Taxonomy-aligned) | |||||||||||||||||||
capex of environmentally sustainable activities (Taxonomy-aligned) (A.1) | 0.0 | 0% | 0% | 0% | 0% | 0% | 0% | 0% | |||||||||||
Of which, enabling | 0.0 | 0% | 0% | 0% | 0% | 0% | 0% | 0% | E | ||||||||||
Of which, transitional | 0.0 | 0% | 0% | T | |||||||||||||||
A.2 Taxonomy-eligible but not environmentally sustainable activities | |||||||||||||||||||
EL; N/EL1 | EL; N/EL1 | EL; N/EL1 | EL; N/EL1 | EL; N/EL1 | EL; N/EL1 | ||||||||||||||
Manufacturing of electrical equipment | CE 1.2 | 23,402.2 | 83% | N/EL | N/EL | N/EL | N/EL | EL | N/EL | 87% | |||||||||
Repair, refurbishment and remanufacturing | CE 5.1 | 3,595.3 | 13% | N/EL | N/EL | N/EL | N/EL | EL | N/EL | 9% | |||||||||
Sale of spare parts | CE 5.2 | 42.1 | 0% | N/EL | N/EL | N/EL | N/EL | EL | N/EL | 0% | |||||||||
Sale of second-hand goods | CE 5.4 | 630.2 | 2% | N/EL | N/EL | N/EL | N/EL | EL | N/EL | 1% | |||||||||
Turnover of Taxonomy-eligible but not environmentally sustainable activities (not Taxonomy-aligned activities) (A.2) | 27,669.8 | 98% | 0% | 0% | 0% | 0% | 98% | 0% | 97% | ||||||||||
A. Turnover of Taxonomy-eligible activities (A.1+A.2) | 27,669.8 | 98% | 0% | 0% | 0% | 0% | 98% | 0% | 97% | ||||||||||
B. Taxonomy-non-eligible activities | |||||||||||||||||||
Turnover of Taxonomy-non-eligible activities | 593.1 | 2% | |||||||||||||||||
Total | 28,262.9 | 100% | |||||||||||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 256 |
STRATEGIC REPORT | CORPORATE GOVERNANCE | SUSTAINABILITY | FINANCIALS | ASML Annual Report 2024 | 257 |
Financial year 2024 | Substantial contribution criteria | DNSH criteria | |||||||||||||||||
Economic activities (1) | Code (2) | Capex (3) | Proportion of capex (4) | Climate change mitigation (5) | Climate change adaptation (6) | Water (7) | Pollution (8) | Circular economy (9) | Bio diversity (10) | Climate change mitigation (11) | Climate change adaptation (12) | Water (13) | Pollution (14) | Circular economy (15) | Bio diversity (16) | Minimum safeguards (17) | Proportion of Taxonomy aligned (A.1) or eligible (A.2) capex, year N-1 (18) | Category (enabling activity) (19) | Category (transitional activity) (20) |
€, in millions | % | Y; N; N/EL | Y; N; N/EL | Y; N; N/EL | Y; N; N/EL | Y; N; N/EL | Y; N; N/EL | Y; N | Y; N | Y; N | Y; N | Y; N | Y; N | Y; N | % | E | T | ||
A. Taxonomy-eligible activities | |||||||||||||||||||
A.1 Environmentally sustainable activities (Taxonomy-aligned) | |||||||||||||||||||
Acquisition and ownership of buildings | CCM 7.7 | 74.1 | 2% | Y | N | N/EL | N/EL | N/EL | N/EL | Y | Y | Y | Y | Y | Y | 0% | E | ||
Capex of environmentally sustainable activities (Taxonomy- aligned) (A.1) | 74.1 | 2% | 2% | 0% | 0% | 0% | 0% | 0% | 0% | ||||||||||
Of which, enabling | 74.1 | 2% | 2% | 0% | 0% | 0% | 0% | 0% | 0% | E | |||||||||
Of which, transitional | 0.0 | 0% | 0% | 0% | T | ||||||||||||||
A.2 Taxonomy-eligible but not environmentally sustainable (not Taxonomy-aligned activities) | |||||||||||||||||||
EL; N/EL1 | EL; N/EL1 | EL; N/EL1 | EL; N/EL1 | EL; N/EL1 | EL; N/EL1 | ||||||||||||||
Manufacturing of electrical equipment | CE 1.2 | 1,879.2 | 57% | N/EL | N/EL | N/EL | N/EL | EL | N/EL | 59% | |||||||||
Electricity generation using solar photovoltaic technology | CCM 4.1 | 2.2 | 0% | EL | N/EL | N/EL | N/EL | N/EL | N/EL | 0% | |||||||||
Transmission & distribution of electricity | CCM 4.9 | 25.2 | 1% | EL | N/EL | N/EL | N/EL | N/EL | N/EL | 0% | |||||||||
Renovation of existing buildings | CCM 7.2 CCA 7.2 CE 3.2 | 252.2 | 8% | EL | EL | N/EL | N/EL | EL | N/EL | 1% | |||||||||
Acquisition and ownership of buildings | CCM 7.7 CCA 7.7 | 609.9 | 18% | EL | EL | N/EL | N/EL | N/EL | N/EL | 19% | |||||||||
Capex of Taxonomy-eligible but not environmentally sustainable activities (not Taxonomy-aligned activities) (A.2) | 2,768.7 | 84% | 27% | 0% | 0% | 0% | 57% | 0% | 79% | ||||||||||
A. Capex of Taxonomy-eligible activities (A.1+A.2) | 2,842.8 | 86% | 29% | 0% | 0% | 0% | 57% | 0% | 79% | ||||||||||
B. Taxonomy-non-eligible activities | |||||||||||||||||||
Capex of Taxonomy-non-eligible activities | 472.2 | 14% | |||||||||||||||||
Total | 3,315.0 | 100% | |||||||||||||||||
Proportion of capex / total capex | ||
Taxonomy-aligned per objective | Taxonomy-eligible per objective | |
Climate change mitigation (CCM) | 2% | 27% |
Climate change adaption (CCA) | 0% | 26% |
Water (WTR) | 0% | 0% |
Circular economy (CE) | 0% | 65% |
Pollution (PPT) | 0% | 0% |
Bio diversity (BIO) | 0% | 0% |
SUSTAINABILITY | ASML Annual Report 2024 | 258 |
Financial year 2024 | Substantial contribution criteria | DNSH criteria | |||||||||||||||||
Economic activities (1) | Code (2) | Opex (3) | Proportion of opex (4) | Climate change mitigation (5) | Climate change adaptation (6) | Water (7) | Pollution (8) | Circular economy (9) | Bio- diversity (10) | Climate change mitigation (11) | Climate change adaptation (12) | Water (13) | Pollution (14) | Circular economy (15) | Bio- diversity (16) | Minimum safeguards (17) | Proportion of Taxonomy- aligned (A.1) or eligible (A.2) opex, year N-1 (18) | Category (enabling activity) (19) | Category (transitional activity) (20) |
€, in millions | % | Y; N; N/EL | Y; N; N/EL | Y; N; N/EL | Y; N; N/EL | Y; N; N/EL | Y; N; N/EL | Y; N | Y; N | Y; N | Y; N | Y; N | Y; N | Y; N | % | E | T | ||
A. Taxonomy-eligible activities | |||||||||||||||||||
A.1 Environmentally sustainable activities (Taxonomy-aligned) | |||||||||||||||||||
Opex of environmentally sustainable activities (Taxonomy-aligned) (A.1) | 0.0 | 0% | 0% | 0% | 0% | 0% | 0% | 0% | |||||||||||
Of which, enabling | 0.0 | 0% | 0% | 0% | 0% | 0% | 0% | 0% | E | ||||||||||
Of which, transitional | 0.0 | 0% | T | ||||||||||||||||
A.2 Taxonomy-eligible but not environmentally sustainable (not Taxonomy- aligned activities) | |||||||||||||||||||
EL; N/EL1 | EL; N/EL1 | EL; N/EL1 | EL; N/EL1 | EL; N/EL1 | EL; N/EL1 | ||||||||||||||
Manufacturing of electrical equipment | CE 1.2 | 3,181.0 | 100% | N/EL | N/EL | N/EL | N/EL | EL | N/EL | 100% | |||||||||
Opex of Taxonomy-eligible but not environmentally sustainable activities (not Taxonomy-aligned activities) (A.2) | 3,181.0 | 100% | 0% | 0% | 0% | 0% | 100% | 0% | 100% | ||||||||||
A. Opex of Taxonomy-eligible activities (A.1+A.2) | 3,181.0 | 100% | 0% | 0% | 0% | 0% | 100% | 0% | 100% | ||||||||||
B. Taxonomy-non-eligible activities | |||||||||||||||||||
Opex of Taxonomy-non-eligible activities | 0.0 | 0% | |||||||||||||||||
Total | 3,181.0 | 100% | |||||||||||||||||

SUSTAINABILITY | ASML Annual Report 2024 | 259 |
Our ambition | |||
We aim to have a positive social impact by providing an attractive workplace, ensuring a responsible value chain, supporting an innovation ecosystem and being a valued partner in our communities. | |||
On the following pages, we set out our approach and progress to date. | |||



Attractive workplace for all | ||
We aim to attract and retain a healthy, diverse and engaged workforce – one that is proud to be part of ASML and that can deliver on our vision and ambitions. We aim to attract and retain a healthy, diverse and engaged workforce. | ||
We’ll do this by focusing on the following sub-topics: | ||
•Talent attraction, employee engagement and retention •Learning and development •Diversity and inclusion •Occupational health and safety •Labor conditions •Well-being | ||
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![]() | ||
Innovation ecosystem | ||
We aim to collaborate with partners to build a thriving, multi-regional innovation ecosystem that helps solve some of humanity’s toughest challenges. A thriving, multi-regional innovation ecosystem that helps solve some of humanity’s toughest challenges. | ||
We’ll do this by focusing on the following sub-topics: | ||
•ESG innovation •STEM education to feed the STEM pipeline for ASML | ||

Responsible value chain | ||||
We aim to work with value chain partners that are aligned with our values and committed to upholding international human rights and environmental standards. We aim to prevent, mitigate and manage adverse environmental and human rights impacts in our value chain. | We’ll do this by focusing on the following sub-topics: | |||
•Responsible product design •Responsible supply chain •Responsible product use | ||||
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Valued partner in our communities | ||||
We aim for our communities to benefit from our presence as we benefit from theirs – supporting each other’s development by playing an active role locally, everywhere we operate. ASML and communities benefit from each other’s presence and support each other’s development. | ![]() | |||
We’ll do this by focusing on the following sub-topics: | ||||
•Attractive communities •Inclusive communities •Investing in STEM education | ||||

SUSTAINABILITY | ASML Annual Report 2024 | 260 |

Our 2024 progress: | ||||
![]() | ![]() | |||
78.9% | 26% | |||
Employee engagement score (three-year rolling average) | Gender diversity: % inflow of women | |||
(2025 target: >-2.0% vs. top 25% performing companies. Employee engagement score against benchmark 2024 -2.1%) | (2025 target: 24%) | |||
![]() | ![]() | |||
3.8% | 30% | |||
Attrition rate | Gender diversity: % inflow of women to job grade 9+ | |||
(2025 target: <7%) | (2025 target: 24%) | |||
![]() | ![]() | |||
12% | 18% | |||
Gender diversity: % representation of women in job grade 13+ | Gender diversity: % inflow of women to job grade 13+ | |||
(2024 target: 12%) | (2024 target: 20%) | |||
Why it matters |
...for the planet | ...for ASML | |
![]() | ![]() | |
As an employer we have a responsibility to provide a working environment where people can develop their talents, feel respected and safe, and be healthy and thrive. This includes creating an inclusive culture where people are supported in their learning, leadership, advancement and well-being. We want to foster an exceptional workplace for our exceptional talent. By prioritizing employee development and well-being, we empower employees to contribute meaningfully to their communities. | As a key partner in the semiconductor ecosystem, we have a responsibility to deliver the technology our customers need to drive innovation. To maintain our fast pace of innovation, we need to attract and retain the best talent. By investing in our people, we help them reach their full potential and enable us to keep driving technology forward. We expect a significant growth in number of employees by 2030 – strong leadership, people development, and inclusion will be crucial for this and for our future success. | |
Creating a safe and inclusive culture where people are supported in their learning, leadership and advancement, and well-being is important: | |
...for our customers | |
Our diverse and highly skilled people are key to meeting the needs of our customers through quality innovation and support. | |
...for our employees | |
Creating a fair working environment where people can grow to their full potential, feel respected and safe is key to attracting and retaining the best talent. | |
...for our suppliers | |
Our people approach is closely aligned with our values which extend to our value chain partners and aligned to upholding international human rights. | |
...for our shareholders | |
Engaged, diverse and highly skilled people are key to our fast pace of innovation and long-term success. | |
...for society | |
By upholding international human rights and providing for fair and secure employment opportunities, we enhance the quality of life of many members of the community who we call our employees and whose causes we support in giving back to society. | |
Read more about our double materiality process and identified impacts, risks and opportunities for management |

SUSTAINABILITY | ASML Annual Report 2024 | 261 |
Our objective | ||||||||||||||||
We strive to empower our workforce to deliver on our vision by ensuring people are proud to be part of ASML and are engaged with our ambitions. Healthy, diverse, engaged and highly skilled people are key to our performance and long- term success. We aim to create an exceptional workplace for our exceptional talent. | ||||||||||||||||
![]() | ![]() | ![]() | ||||||||||||||
Talent attraction, employee engagement and retention | Learning and development | Diversity and inclusion | ||||||||||||||
Foster inclusion, diversity and belonging in a safe environment for all ASML workers, where everyone is valued, respected and can fully contribute. | ||||||||||||||||
Enable an exceptional workplace allowing ASML to attract, engage and retain exceptional talent to support the growth of the company. | Provide employees with the right knowledge, expertise, skills and competencies to maintain technological leadership and empower them to take responsibility for their personal development and career ambitions. | |||||||||||||||
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Occupational health and safety | Labor conditions | Well-being | ||||||||||||||
Provide fair labor conditions and social protection for all workers, regardless of their location and whether they are on fixed or temporary contracts. | Support employees in maintaining a healthy, productive and balanced life by integrating well-being into everyone’s day-to-day work. | |||||||||||||||
Provide injury-free and healthy working conditions for everyone on our premises by eliminating hazards, reducing safety risks and preventing occupational ill health. | ||||||||||||||||
Specific roles and responsibilities for this topic | ||
The following sub-committees support the operational execution of the people strategy: Our Global Diversity and Inclusion Council (GDIC) consists of senior leaders who act on our behalf to provide thought leadership. The Council, chaired by the Chief Executive Officer, proposes the diversity and inclusion (D&I) strategy to the Board of Management (BoM), sets, promotes and monitors D&I initiatives and leads company-wide accountability for our goals. The D&I team is responsible for driving initiatives across ASML. There is also a US D&I Council with a similar make-up of business leaders across the US. Our Environment, Health and Safety (EHS) and Business Continuity Committee, chaired by the Chief Operations Officer, oversees and approves the EHS strategy. Line managers are responsible for day-to-day EHS management and performance. The EHS Competence Center (EHS Experts) brings together best practices, defines our EHS standards and supports managers to implement these standards in the workplace. | ||
Read more about roles and responsibilities in | ||
SUSTAINABILITY | ASML Annual Report 2024 | 262 |
Our approach |
ASML people strategy |


Develop a scalable and sustainable organization | Build a workplace that works for everyone | |||
Exceptional talent, exceptional workplace | ||||
Invest in people effectiveness and development | Strengthen our leadership | |||
Human rights | ||
We support the guidelines laid down in the UN Guiding Principles on Business and Human Rights (UNGPs) and are committed to the International Bill of Human Rights. The provisions of our Human Rights Policy are derived from key international human rights standards including the ILO Declaration on Fundamental Principles and Rights at Work and the UN Declaration of Human Rights, the UN Global Compact, the principles specified in the OECD Guidelines for Multinational Enterprises, and other relevant standards such as the UN Women’s Empowerment Principles, UNICEF’s Children’s Rights and Business Principles and the UN International Convention on the Protection of the Rights of All Migrant Workers and Members of Their Families. Our Human Rights Policy is a cornerstone of the ESG strategy; and sets out ASML’s roadmap and initiatives toward effectively and responsibly managing areas of human rights impacts in the ecosystem where ASML operates. | ||

SUSTAINABILITY | ASML Annual Report 2024 | 263 |

SUSTAINABILITY | ASML Annual Report 2024 | 264 |

SUSTAINABILITY | ASML Annual Report 2024 | 265 |
SUSTAINABILITY | ASML Annual Report 2024 | 266 |
Process for engaging |
Process for remediation |
SUSTAINABILITY | ASML Annual Report 2024 | 267 |
Our scope |
Why it matters: Impacts, risks and opportunities | |||
For talent attraction, employee engagement and retention, we have identified the following: | |||
Risks and opportunities: | |||
Failure to provide fair labor conditions could result in unavailability of personnel, disengaged employees, retention and recruitment challenges | |||
Failure to foster an equal opportunity environment could result in unavailability of personnel, disengaged employees, and retention and recruitment challenges | |||
Read more in Strategic report – Performance and risk – Risk | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Attractiveness to talent (employer brand score) | # ranking | NL 1 US 140 China 109 Taiwan n/a | NL top 5 US top 75 China top 100 Taiwan top 5 | 2025 | Work to be done n |
Employee engagement score (three-year rolling average) | % | 78.9% | Within a 2% range of the benchmark of top 25% performing companies | 2025 | On track ò |
% | -2.1% | ||||
Attrition rate1 | % | 3.8% | < 7% | 2025 | On track ò |
SUSTAINABILITY | ASML Annual Report 2024 | 268 |
Our actions and resources |
SUSTAINABILITY | ASML Annual Report 2024 | 269 |
Looking ahead |
SUSTAINABILITY | ASML Annual Report 2024 | 270 |
Our scope |
Why it matters: Impacts, risks and opportunities | |||
For learning and development, we have identified the following: | |||
Impacts: | |||
Impact on employees by facilitating professional growth, knowledge and skills development, contributing to continued employability | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Employees with at least one development item in their development plan | % | 81% | 80% | 2025 | On track ò |
Our actions and resources |
SUSTAINABILITY | ASML Annual Report 2024 | 271 |
Setting up new starters for success | ||
Properly onboarding new employees is critical for our long-term success. In 2024, we implemented an ASML-wide onboarding approach to ensure a uniform quality in the onboarding experience and to reduce time-to-competence, as well as deploying an ASML-wide knowledge transition solution to ensure critical knowledge does not leave the company when employees move on. We also launched a new intranet – a personalized digital hub with access to information and services, where all employees can connect, communicate and find knowledge. | ||
Looking ahead |
SUSTAINABILITY | ASML Annual Report 2024 | 272 |
Our scope |
Why it matters: Impacts, risks and opportunities | |||
For D&I we have identified the following: | |||
Impacts: | |||
Impact on employees by providing equal treatment and opportunities for all | |||
Risks & opportunities: | |||
Failure to foster an equal opportunity environment could result in unavailability of personnel, disengaged employees, and retention and recruitment challenges | |||
Read more in Strategic report – Performance and risk – Risk | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Gender diversity – % inflow of women | % | 26% | 24% | 2025 | On track ò |
Gender diversity – % inflow of women to job grade 9+ | % | 30% | 24% | 2025 | On track ò |
Gender diversity – % inflow of women to job grade 13+ | % | 18% | 20% | 2024 | Off track p |
Gender diversity – % representation of women in job grade 13+ | % | 12% | 12% | 2024 | On track ò |
Inclusion score (three-year rolling average) | % | 82.4% | Within a 3% range of the top 25% of performing companies | 2024 | On track ò |
% | 0.0% |
SUSTAINABILITY | ASML Annual Report 2024 | 273 |
Our actions and resources |
Looking ahead |
SUSTAINABILITY | ASML Annual Report 2024 | 274 |
Our scope |
Why it matters: Impacts, risks and opportunities | |||
For occupational health and safety, we have identified the following: | |||
Impacts: | |||
Failure to manage occupational health and safety – for example, when employees are working with hazardous substances and systems | |||
Failure to effectively manage employees’ health and well-being could impact their work-life balance and mental health | |||
Risks and opportunities: | |||
Failure to comply with health and safety-related regulations or implement effective health and safety practices could result in liabilities and reputational risk | |||
Read more in Strategic report – Performance and risk – Risk | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Recordable incident rate1 | 0.19 | 0.16 | 2025 | Work to be done n |
Our actions and resources |
Looking ahead |
SUSTAINABILITY | ASML Annual Report 2024 | 275 |
Our scope | |
Why it matters: Impacts, risks and opportunities | |||
For labor conditions we have identified the following: | |||
Impacts: | |||
Impact on employees through fair labor conditions | |||
Risks and opportunities: | |||
Failure to provide fair labor conditions could result in unavailability of personnel, disengaged employees, retention and recruitment challenges | |||
Failure to comply with labor law could lead to sanctions, financial loss or reputational damage | |||
Read more in Strategic report – Performance and risk – Risk | |||
Targets and performance | |
Our actions and resources |
Looking ahead | |
SUSTAINABILITY | ASML Annual Report 2024 | 276 |
Our scope | |
Why it matters: Impacts, risks and opportunities | |||
For well-being we have identified the following: | |||
Impacts: | |||
Failure to effectively manage employees' health and well-being could impact their work–life balance and mental health | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Well-being score | % | 81% | 81% | 2024 | On track ò |
Our actions and resources |
SUSTAINABILITY | ASML Annual Report 2024 | 277 |
Additional well-being activities: •Employee sports clubs •Volunteering •Gift matching •Employee networks •Coaching •Mentoring | ||
Looking ahead | |

SUSTAINABILITY | ASML Annual Report 2024 | 278 |
Topic | Description | Unit | 2024 | ||
Total number of employees – headcount by gender | Male | Headcount | 34,454 | ||
Female | Headcount | 8,899 | |||
Other | Headcount | 38 | |||
Not reported | Headcount | 4 | |||
Total employees | Headcount | 43,395 |
Topic | Description | Unit | 2024 | ||
Total number of employees – headcount by significant employment country | The Netherlands | Headcount | 23,194 | ||
Taiwan | Headcount | 4,572 | |||
United States | Headcount | 8,310 |
Topic | Description | Female | Male | Other | Not disclosed | Total 2024 | ||
Total number of permanent and temporary employees by gender (headcount as of December 31, 2024) | Permanent employees | 8,212 | 32,216 | 32 | 4 | 40,464 | ||
Temporary employees | 687 | 2,238 | 6 | 0 | 2,931 | |||
Total employees | 8,899 | 34,454 | 38 | 4 | 43,395 |
Topic | Description | Unit | 2024 | ||
Reconciliation of the total number of employees per ESRS to number of employees reported in the Consolidated financial statements (as of December 31, 2024) | Total number of payroll and temporary employees reported in the Consolidated financial statements (Note 18) | FTE | 44,027 | ||
Less: Temporary employees reported in the Consolidated financial statements (Note 18) (non-employees as defined by ESRS) | FTE | 1,241 | |||
Total number of payroll employees reported in the Consolidated financial statements (Note 18) | FTE | 42,786 | |||
Total number of payroll employees reported in the Consolidated financial statements - converted to headcount unit of measure | Headcount | 43,395 | |||
Number of employees as defined by ESRS | Headcount | 43,395 |
Topic | Description | Unit | 2024 | ||
Employee turnover (For the period January 1, 2024, to December 31, 2024) | Employee turnover | Headcount | 1,478 | ||
Employee turnover rate | Percentage | 3.5% |

SUSTAINABILITY | ASML Annual Report 2024 | 279 |
Topic | Description | Unit | 2024 | ||
Percentage of total employees covered by collective bargaining agreements | Employees covered by collective bargaining agreements | Percentage | 61% |
The percentage of its total employees within significant countries within the EEA or significant regions outside the EEA, covered by collective bargaining agreements and/or workers, representatives (as of December 31, 2024) | 2024 | |||||
Collective bargaining coverage | Social dialogue | |||||
Employees – EEA (for countries with >50 empl. representing >10% total empl.) | Employees – non- EEA (for regions with >50 empl. representing >10% total empl.)1 | Workplace representation (EEA only) (for countries with >50 empl. representing >10% total empl.) | ||||
Coverage rate | ||||||
0–19% | ||||||
20–39% | Asia | |||||
40–59% | ||||||
60–79% | ||||||
80–100% | The Netherlands | The Netherlands | ||||

SUSTAINABILITY | ASML Annual Report 2024 | 280 |
Topic | Description | Unit | 2024 | ||
Gender distribution at top management level | Male | Headcount | 318 | ||
Female | Headcount | 44 | |||
Other | Headcount | 1 | |||
Not reported | Headcount | 0 | |||
Total employees at top management level | Headcount | 363 |
Topic | Description | Unit | 2024 | ||
Gender distribution at top management level | Male | Percentage | 88% | ||
Female | Percentage | 12% | |||
Other | Percentage | —% | |||
Not reported | Percentage | —% |
Topic | Description | Unit | 2024 | ||
Age distribution of employees | under 30 years old | Headcount | 8,130 | ||
30–50 years old | Headcount | 28,072 | |||
over 50 years old | Headcount | 7,193 | |||
Total employees | Headcount | 43,395 |

SUSTAINABILITY | ASML Annual Report 2024 | 281 |
Topic | Description | Unit | 2024 | ||
Percentage of employees that completed an annual performance and career development review against the total number of employees by gender | Male | Percentage | 94% | ||
Female | Percentage | 93% | |||
Other | Percentage | 76% | |||
Not reported | Percentage | 100% | |||
Total | Percentage | 94% |
Topic | Description | Unit | 2024 | ||
Percentage of employees that completed an annual performance and career development review against the total number of employees eligible for a review by gender | Male | Percentage | 96% | ||
Female | Percentage | 96% | |||
Other | Percentage | 97% | |||
Not reported | Percentage | 100% | |||
Total | Percentage | 96% |
Topic | Description | Unit | 2024 | ||
Average number of training hours per employee | Average number of training hours per employee | Hours | 41 | ||
Topic | Description | Unit | 2024 | ||
Average number of training hours per employee by gender | Male | Hours | 42 | ||
Female | Hours | 35 | |||
Other | Hours | 9 | |||
Not reported | Hours | 60 |

SUSTAINABILITY | ASML Annual Report 2024 | 282 |
Topic | Description | Unit | 2024 | ||
Percentage of employees covered by our health and safety management system | Employees covered by our health and safety management system | Percentage | 100% |
Topic | Description | Unit | 2024 | ||
Number of work-related fatalities as a result of injuries | Employee fatalities as a result of work-related injuries | Count | 0 | ||
Non-employee fatalities as a result of work-related injuries | Count | 0 | |||
Other worker fatalities onsite as a result of work-related injuries | Count | 0 |
Topic | Description | Unit | 2024 | ||
Total number and rate of employee recordable work-related accidents | Employee recordable work-related accidents | Count | 77 | ||
Employee recordable work-related accidents | Rate | 1.11 |

SUSTAINABILITY | ASML Annual Report 2024 | 283 |
Topic | Description | Unit | 2024 | ||
Gender pay gap | Gender pay gap | Percentage | 10% |
Topic | Description | Unit | 2024 | ||
Annual total remuneration ratio | Annual total remuneration ratio | Ratio | 43 |

SUSTAINABILITY | ASML Annual Report 2024 | 284 |
Methodology on targets | |

SUSTAINABILITY | ASML Annual Report 2024 | 285 |

SUSTAINABILITY | ASML Annual Report 2024 | 286 |
Methodology on metrics | |

SUSTAINABILITY | ASML Annual Report 2024 | 287 |
SUSTAINABILITY | ASML Annual Report 2024 | 288 |


...for the planet | ...for ASML | |
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A responsible value chain is a transparent one in which human rights and the environment are respected and negative impacts are prevented and addressed. By working with value chain partners that are aligned with our values and committed to upholding international human rights and environmental standards, we can make a positive contribution to society and the planet. | Identifying, preventing, mitigating and managing impacts and risks across our value chain is not something we can do alone. Collaboration with our value chain partners is essential. Only then can we successfully identify, prevent, mitigate and manage the impacts and risks that occur across our value chain. This includes both human rights and environmental impacts – ultimately increasing our value chain resilience. | |
Our continuous improvement efforts toward a responsible value chain are important: | |
...for our customers | |
Our approach contributes to their environmental due diligence and human rights objectives. Our supply chain is their supply chain. | |
...for our employees | |
Our approach aligns with their expectations regarding responsible business conduct. | |
...for our suppliers | |
Our approach contributes to risk mitigation for their workers, supply chains and businesses. | |
...for our shareholders | |
Our approach contributes to investors’ objectives to improve long-term sustainability performance and minimize business costs. | |
...for society | |
Our approach contributes to societal objectives for respecting the environment and human rights. | |
Read more about our double materiality process and identified impacts, risks and opportunities for management |
Our 2024 progress: | ||
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5,150 | ||
Total suppliers | ||
(The Netherlands: 1,600 | EMEA (excl. NL): 750 North America: 1,400 | Asia: 1,400) | ||
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91% | ||
Responsible Business Alliance (RBA) self- assessment completed (in %) (2025 target: 90%) | ||
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100% | ||
Suppliers with overall high risk evaluated and follow-up agreed (in %) (2025 target: 100%) | ||
Why it matters |

SUSTAINABILITY | ASML Annual Report 2024 | 289 |
Our objective | |||||||||||||||||||||
The goods and services we purchase, the design choices we make and the products we sell are potentially linked to impacts on the environment and human rights across our value chain. We strive to identify and manage adverse impacts to the environment and people occurring in our value chain, to prevent potential impacts and to mitigate and remediate actual impacts when they occur. We set out our commitments, principles and governance for managing environmental and human rights matters across our value chain – also referred to as environmental and human rights due diligence. This includes how we manage environmental and human rights matters in relationships with our customers, suppliers and other business partners, and how we manage environmental and human rights matters in decision choices. | |||||||||||||||||||||
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Responsible product design | Responsible supply chain | ||||||||||||||||||||
Whoever uses materials and designs a product takes responsibility for managing the environmental and human rights impacts from the choices made throughout all stages of its life cycle – from extraction of raw materials to end-of-life management. | A transparent supply chain in which human rights and the environment are respected, positive contributions are made to society and the environment, and negative impacts are prevented and addressed. | ||||||||||||||||||||
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Responsible product use | |||||||||||||||||||||
The environment and human rights are respected in product use, positive contributions are made to the environment and society, and actors across our value chain participate in a common effort toward preventing and addressing impacts related to their products and services. | |||||||||||||||||||||

SUSTAINABILITY | ASML Annual Report 2024 | 290 |
Our approach | |
Our environmental and human rights due diligence framework | |||||||||||||||||||||||||||||||
We manage our impacts across the value chain through implementing our six steps for action: | |||||||||||||||||||||||||||||||
Raw material extraction and processing | Tier n supply chain | Tier 1 supply chain | Chip makers | Device makers | ICT industry | Society | End of life | ||||||||||||||||||||||||
Use of digital technology | Impact of digital technology | Waste | |||||||||||||||||||||||||||||
Raw material to parts and services | Parts and services to ASML | Semiconductor production | Production of digital devices | ||||||||||||||||||||||||||||
Extraction to raw material | |||||||||||||||||||||||||||||||
Potential impacts | |||||||||||||||||||||||||||||||
Potential negative impacts on workers in 3TG (conflict) minerals supply chains – including exposure to violence, human trafficking, forced labor and child labor linked to the extraction and processing of 3TG minerals in conflict-affected and high-risk areas. | Potential negative impacts on supply chain workers, considering inherent human rights risks in the countries and sectors in which our tier-n suppliers operate – including long working hours, inadequate wages, lack of freedom of association, limitations to collective bargaining, risks to health and safety, human trafficking, forced and child labor. | Potential negative impacts on workers in our downstream value chain, considering inherent human rights risks in the technology industry – including long working hours, inadequate wages, lack of freedom of association, limitations to collective bargaining, risks to health and safety, human trafficking, forced and child labor. | Potential negative impacts on people’s quality of life linked to the use of microchip-enabled technology – including risks resulting from the misuse of technology. | Positive impacts on people’s quality of life by enabling our customers and other actors across our value chain to deliver on the potential of technology to positively contribute to society – for example, by facilitating accessible healthcare and food security. | |||||||||||||||||||||||||||

SUSTAINABILITY | ASML Annual Report 2024 | 291 |
Levers for action |

SUSTAINABILITY | ASML Annual Report 2024 | 292 |
Levers for action |
Why it matters: Impacts, risks and opportunities | |||
For responsible product use we have identified the following: | |||
Impacts: | |||
Impacts on human rights considering risks inherent to the technology industry | |||
Improved quality of life through access to ICT and digital services | |||
Impacts from potential misuse of technology | |||
Risks and opportunities: | |||
Increased demand for microchip- enabled tools and solutions that can help society make progress and address global challenges | |||
Read more in Strategic report – Performance and risk – Risk | |||

SUSTAINABILITY | ASML Annual Report 2024 | 293 |
Our scope | |
Why it matters: Impacts, risks and opportunities | |||
For responsible supply chain, we have identified the following: | |||
Impacts: | |||
Inadequate or poor working conditions in our supply chain | |||
Lack of access to equal opportunities across our value chain | |||
Forced and child labor in conflict areas | |||
Risks and opportunities: | |||
Failure to comply with rules and regulations regarding conflict minerals | |||
Disruption in the supply chain due to unavailability of workers | |||
Read more in Strategic report – Performance and risk – Risk | |||
ASML suppliers |

5,150 Suppliers |
€16.0bn Total spend |
Business-critical, strategically important suppliers by percent spend |
Supplier base geographic split by percent spend |
SUSTAINABILITY | ASML Annual Report 2024 | 294 |
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
RBA self-assessment completed (in %) | % | 91% | 90% | 2025 | On track ò |
Suppliers with overall high risk evaluated and follow-up agreed (in %) | % | 100% | 100% | 2025 | On track ò |
Elements from RBA SAQ | |
Element | RBA commitment |
Labor | To uphold the human rights of all workers (direct and indirect), and to treat them with dignity and respect as understood by the international community, including the ILO's eight fundamental conventions. |
Health and safety | To minimize the incidence of work-related injury and illness and to ensure a safe and healthy working environment. Communication and education are essential to identifying and solving health and safety issues in the workplace. |
Environment | Environmental responsibility is integral to producing world-class products and services. Adverse effects on the environment, natural resources and community are to be minimized while safeguarding the health and safety of the public. |
Ethics | To meet social responsibilities and to achieve success in the industry, the highest standards of ethics should be upheld, including but not limited to business integrity, anti-bribery and corruption, antitrust and competition, protecting privacy. |
Members and participants are committed to establishing a management system to ensure: | |
•Compliance with applicable laws, regulations and customer requirements •Conformance with the code standards •Identification and mitigation of operational risks •Facilitation of continuous improvement | |
SUSTAINABILITY | ASML Annual Report 2024 | 295 |
Tracking our performance | ||
We track our performance on our responsible supply chain targets by engaging with suppliers via email, meetings and dedicated engagement sessions to communicate our actions and drive progress. We collect feedback from suppliers about the potential roadblocks or improvements related to these initiatives, and we share our experience with them. | ||
We currently do not engage directly with workers, consumers and end-users or affected communities across the value chain. As part of the Human Rights Saliency Assessment, we conducted stakeholder engagement in 2024 with legitimate representatives and with credible proxies of these stakeholder groups. | ||
Conflict minerals | ||
Our products contain minerals and metals necessary to the functionality or production of our products. Such minerals and metals include tantalum, tungsten, tin and gold. These are 3TG minerals, or so-called ‘conflict minerals’. While we do not use a significant amount of these in the manufacturing of our products, certain 3TG minerals are necessary. Gold, for example, is used in coating critical electronic connectors and tin is used for welding electronic components and creating EUV light. In our Human Rights Policy we have a section on conflict minerals, for responsible sourcing of materials in our supply chain. We support international efforts to ensure the mining and trading of 3TG minerals from high-risk locations does not contribute to conditions of armed conflict and/or serious human rights abuses. We have adopted a series of compliance measures based on the legal requirements and guidelines of the five-step framework set out by the OECD Due Diligence Guidance for Responsible Supply Chains of Minerals from Conflict-Affected and High-Risk Areas. As part of our responsible sourcing program, we implement conflict minerals due diligence, focusing on five areas: a robust management system; risk identification; risk mitigation; industry collaboration with the Responsible Minerals Initiative (RMI); and public reporting. Despite our continuous efforts, we are unable to determine the precise origin of the 3TG minerals included in all our products. This is due to several reasons: 3TG supply chain complexity, the number of tiers of suppliers to trace the source, and the limited number of certified conflict-free smelters for all conflict minerals. Obtaining correct data from our supply chain is a challenge, and we continue to encourage our suppliers to trace the origins of the 3TG minerals within their supply chain in accordance with applicable conflict minerals rules and regulations. We also request our suppliers to report smelters who are not listed or identified on the RMI smelters list to the Responsible Minerals Assurance Process (RMAP). In 2023, we increased the supplier scope and emphasis on the importance of delivering complete and accurate information. Out of 329 in-scope suppliers, 46 suppliers did not provide us with information sufficient to work with. From the remaining 283 suppliers, 58 indicated that there were no 3TG minerals in the products that they supplied to ASML. The remaining in-scope suppliers provided a complete set of information that we used to determine the unique smelters in the supply chain (excluding duplicates). We identified 482 unique smelters in 2023, of which 236 are RMAP conformant (as of May 2024). Read more in our Conflict Minerals Report available at asml.com | ||
Our actions and resources | |
Looking ahead | |

SUSTAINABILITY | ASML Annual Report 2024 | 296 |
Methodology on targets | |
SUSTAINABILITY | ASML Annual Report 2024 | 297 |
Our 2024 progress: | ||
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€4.3bn | ||
R&D costs | ||
(2025 target: >€4.0bn) | ||
![]() | ||
€1.3m | ||
Value startups and scaleups in-kind support | ||
Our focus on collaboration and innovation is important: | |
...for our customers | |
We develop our technology in close collaboration with our customers to ensure we build today what they need tomorrow. | |
...for our employees | |
To maintain our fast pace of innovation and ensure long-term success as a company, we need to attract and retain the best talent. | |
...for our suppliers | |
We do not innovate in isolation – we see ourselves as architects and integrators. We trust our supply chain to innovate with us and manufacture most system parts and modules. | |
...for our shareholders | |
Innovation drives our technological leadership, long-term success and value creation. | |
...for society | |
Digital technologies are some of the most important tools to help society make progress and address global ESG challenges – for example, related to the United Nations Sustainable Development Goals (UN SDGs). | |
Read more about our double materiality process and identified impacts, risks and opportunities for management |

...for the planet | ...for ASML | |
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Sharing our knowledge and expertise helps strengthen our regional high-tech ecosystems, particularly around our headquarters in Veldhoven, the Netherlands. The Brainport Eindhoven region surrounding Veldhoven has a competitive edge globally, and we aim to maintain this leadership position. Building a strong regional foundation benefits our partners and other companies and organizations in the region. The ESG-focused research, startups and scaleups we support, as well as the STEM education we promote, help increase the technical talent pool society requires to solve some of its key challenges. | As the markets for artificial intelligence (AI), 5G connectivity, augmented reality and the internet of things (IoT) expand, consumers across the world are using ever more powerful and sophisticated devices that are increasingly interconnected. These developments drive demand for microchips, which in turn drives demand for the chipmaking systems that produce smaller, faster, cheaper, more powerful and more energy-efficient microchips. We can only meet this demand by consistently and continuously advancing our technology through innovation. |
Why it matters |

SUSTAINABILITY | ASML Annual Report 2024 | 298 |
Our objective | ||||||
Our primary objective is to foster innovation through collaboration and partnerships – where trust serves as the foundation for long- term cooperation – to create technological solutions that benefit society as a whole. | ||||||
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ESG innovation | ||||||
We aim to have a positive impact on local communities and society through R&D, innovation, knowledge management and initiatives that support innovative ideas to solve key ESG challenges. | ||||||
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STEM education to feed the STEM pipeline for ASML | ||||||
Through global university partnership programs, hybrid teaching, guest lectures, curriculum development, work study programs and scholarships, we help to grow our talent pipeline, on both vocational and academic levels. | ||||||

SUSTAINABILITY | ASML Annual Report 2024 | 299 |
Our approach |
Levers for action | ||
Collaborating on ESG-focused innovation In the context of innovation related to ESG topics, we contribute to the development of a sustainable innovation ecosystem through: •ESG-focused research projects •Supporting regional deep-tech scaleups and startups selected for their ambition to contribute to a better, more sustainable world •ESG-focused platforms and collaborations with local, industry and global platforms to jointly tackle ESG challenges Promoting STEM opportunities to feed our STEM talent pipeline We believe all children should be aware of the applications of STEM in their daily lives and have access to technical education in order to be prepared for an increasingly digital future and reach their full potential. That is why we invest in promoting STEM education. We work to build relationships with universities and potential talent by offering students work exposure and, internships, hosting student events, teaching assignments for ASML staff, participating in career days and joint curriculum development. | ||
SUSTAINABILITY | ASML Annual Report 2024 | 300 |
Our scope | |
Strategic support platforms for startups and scaleups | ||||
Make Next Platform We founded the Make Next Platform (MNP) in 2016 to support young, innovative, high-tech scaleups, together with Huisman, Vanderlande and the non-profit Stichting Technology Rating (STR). Thales NL joined as a co-founder in 2019. MNP supports emerging high-tech ventures that have moved beyond the startup phase and are ready to expand. Through the exchange of best practices, business experience and coaching from senior corporate experts, MNP partners support scaleup companies to become global players by giving them access to their internal and external networks. | HighTechXL ASML is one of the main shareholders of HighTechXL, together with other tech-minded partners such as Philips, research institute TNO, Brabantse Ontwikkelings Maatschappij and High Tech Campus Eindhoven. Through HighTechXL, we build and accelerate impactful startups by combining high-tech entrepreneurial talent and relevant technologies from reputable tech partners such as ESA, CERN, Fraunhofer, imec and TNO, with the goal of solving major global societal challenges. ASML talents join selected startups for 30% of their time for a period of three months. They define their learning goals and benefit from the development of enriched skills and mindsets through this unique entrepreneurial experience. DeepTechXL In 2022, we became a strategic investor and co-initiator in DeepTechXL Fund I, a new Dutch deep-tech fund of €85 million as a follow-up to HighTechXL. Together with other strategic investors and co-initiators – Philips, Brabantse Ontwikkelings Maatschappij, TNO, PME Pension Fund and Invest-NL – the fund provides deep-tech startups and scaleups with access to knowledge, network, technology, licenses and business development support. | |||
Why it matters: Impacts, risks and opportunities | |||
For ESG innovation we have identified the following: | |||
Impacts: | |||
Society benefiting from support for ESG-focused research, startups, scaleups, platforms and collaboration | |||
SUSTAINABILITY | ASML Annual Report 2024 | 301 |
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Number of ESG-focused scaleup companies supported (cumulative in numbers) | # | 13 | 14 | 2025 | On track ò |
ESG-focused startups reached star level from total startups (in %) | % | 14% | >20% | 2025 | Off track p |
R&D investments (costs) | € billion | €4.3bn | >€4 billion | 2025 | On track ò |
Our actions and resources | |
SUSTAINABILITY | ASML Annual Report 2024 | 302 |
ASML Young Makers Award | ||||||
ASML challenges the startup ecosystem with a contest called the ASML Young Makers Award (AYMA). It supports ambitious students or young entrepreneurs who have already started their own businesses and are working to make them more successful. We initiated this award because we too started out as a startup in 1984 and know from our own experience that support is more than welcome in such an initial phase. The AYMA is given to a promising young startup that has integrated innovation and sustainability in both product development and business operations. Young entrepreneurs are given the opportunity to present their company and entrepreneurial vision at an ASML pitch event, where a professional jury (consisting of among others ASML and Brainport Eindhoven representatives) assesses the finalists of the AYMA and questions them on – among other things – their passion, vision, perseverance and flexibility, as well as the viability and sustainability of their innovative product. From all finalists, the best three candidates were selected to pitch on stage during the Brainport entrepreneurs award ('Brainport Ondernemings Prijs, or BOP), an event sponsored by ASML. Held in May 2024, this event brought together representatives of the innovative and sustainable entrepreneurial community in the Brainport Eindhoven region. | The AYMA is an honorable recognition, a prestigious award that serves as a powerful appreciation for innovative development, in which sustainability is considered a self-evident prerequisite. From the three finalists that pitched during the 2024 BOP event, the public selected a winner that will receive a coaching program and guidance from ASML specialists. The three finalists were: •FononTech – Developed a 3D-printing technology that is quite unique and provides a lot of benefits for companies that work with microchips, especially in the final assembly stage. | •Senergetics – Developed a method that can prevent problems such as leaks in factory pipelines and wasted energy that cannot be detected in time using traditional methods. •TracXon – Developed an advanced and sustainable technology for printing electronics on foil that strongly reduces recycling waste as compared to traditional printed circuit board technology. Their method is also very flexible, allowing each print to be unique. During the BOP event, the public selected TracXon as the winner. | ||||
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SUSTAINABILITY | ASML Annual Report 2024 | 303 |
Looking ahead | |
SUSTAINABILITY | ASML Annual Report 2024 | 304 |
Our scope | |
Targets and performance | |
Our actions and resources | |
Looking ahead | |

SUSTAINABILITY | ASML Annual Report 2024 | 305 |
Methodology on targets | |
SUSTAINABILITY | ASML Annual Report 2024 | 306 |

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Our 2024 progress: | |||
![]() | |||
€1,084 | |||
Amount invested per employee, including employee giving | |||
(2025 target: €2,500/employee) | |||
![]() | |||
€3.1m | |||
Total cost of volunteering | |||
Why it matters |
...for the planet | ...for ASML | |
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Our activities have an impact that goes far beyond ASML. We have several locations, especially our headquarters, that have seen significant growth in recent years and are expected to continue to grow. While the impact can be positive and generate jobs, prosperity and innovation, it can also add pressure on housing, infrastructure and essential services in the areas affected. | When our communities thrive, so do we. We believe being a valued partner to the communities around us is critical to our success. We are mindful of how our activities and growth can affect them, and strive to build a partnership that enables us to benefit from each other in the present and work together to support new development in the future. | |
Being a valued and trusted partner in communities is important: | |
...for our customers | |
Increasing customer demand requires effective scaling up by ASML, for which ASML’s license-to-operate and growth in its communities is crucial. | |
...for our employees | |
A large share of ASML’s employees are located in its communities and therefore directly affected by the attractiveness and inclusiveness of the communities. Also, ASML’s employees want to be proud of their company’s impact in its communities. | |
...for our suppliers | |
A large share of ASML’s suppliers are located in its communities and therefore directly affected by the attractiveness and inclusiveness of the communities. | |
...for our shareholders | |
The support of ASML’s communities is crucial for its license-to-operate and growth. When the community thrives, ASML thrives. | |
...for society | |
ASML and communities benefit from each other’s presence and support each other’s development. | |
Read more about our double materiality process and identified impacts, risks and opportunities for management |

SUSTAINABILITY | ASML Annual Report 2024 | 307 |
Our objective | |||||||||||
At ASML, we believe we have a fundamental responsibility to be a positive contributor and valued partner to the communities in which we operate, to society and to the world at large. We aim to share the benefits of our prosperity and create value, while mitigating the challenges of our dynamic growth. | |||||||||||
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Attractive communities | Inclusive communities | ||||||||||
We focus on initiatives to create attractive communities, mitigate the negative impacts of our growth and enhance overall quality of life in the main locations in which we operate. | We aim to unlock people’s potential, help them realize their ambitions and ultimately create equal opportunities for all. | ||||||||||
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Investing in STEM education | Employee giving | ||||||||||
We are committed to boosting STEM education for children through initiatives that provide them with the relevant skills for their future and that aim to expand the STEM talent pool society needs. | Through our global Employee Giving program, we encourage employees to become involved in their local communities by donating their time, skills and resources to charitable organizations. | ||||||||||
Specific roles and responsibilities for this topic | ||
In 2023, we created a Community Partnership Program (CPP) team to oversee our contributions to both society and local communities. The CPP governs all our community investments, ensuring ASML and our communities benefit from each other’s presence and support each other’s development. The Head of Society & Community Engagement (S&CE) is the most senior role involved in community engagement and is the action owner for each of our material sub-topics. Performance against our ongoing targets is monitored at least quarterly. The governing body reviews and approves proposed projects within the areas linked to our material impacts, risks and opportunities, and expenditure in each area is carefully tracked to ensure we are on track to meet our ambitions. The resources devoted to S&CE primarily comprise 24 FTEs. The total estimated cost of €3.4 million relating to FTEs is included within the Consolidated financial statements under Personnel expenses. The financial resources devoted are outlined in each focus area. | ||
Read more about roles and responsibilities in | ||
SUSTAINABILITY | ASML Annual Report 2024 | 308 |
Our approach | |
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Community Partnership Program: Amount invested per employee | €/employee | €922 | 2,000 €/ employee | 2025 | Off track p |
Invested to ensure attractive communities | €/employee | €257 | |||
Invested to ensure inclusive communities | €/employee | €189 | |||
Invested to ensure STEM education | €/employee | €177 | |||
Invested to realize ESG innovation | €/employee | €299 | |||
Employee giving | €/employee | €162 | 500 €/ employee | 2025 | Off track p |
Community Partnership Program: Amount invested per employee, including employee giving | €/employee | €1,084 | 2,500 €/ employee | 2025 | Off track p |

SUSTAINABILITY | ASML Annual Report 2024 | 309 |
Levers for action |

SUSTAINABILITY | ASML Annual Report 2024 | 310 |
Levers for action |
Human rights impacts | ||
We support the guidelines laid down in the UN Guiding Principles on Business and Human Rights and are committed to the International Bill of Human Rights. The provisions of our Human Rights Policy are derived from key international human rights standards including the ILO Declaration on Fundamental Principles and Rights at Work and the UN Declaration of Human Rights, the UN Global Compact, the principles specified in the OECD Guidelines for Multinational Enterprises, as well as other relevant standards such as the UN Women’s Empowerment Principles, UNICEF’s Children’s Rights and Business Principles and the UN International Convention on the Protection of the Rights of all Migrant Workers and Members of Their Families. Our Human Rights Policy is a cornerstone of our ESG strategy; it also sets out ASML’s roadmap and initiatives toward effectively and responsibly managing areas of human rights impacts in the ecosystem where ASML operates. | ||
SUSTAINABILITY | ASML Annual Report 2024 | 311 |
Process for engaging | |
Process for remediation | |

SUSTAINABILITY | ASML Annual Report 2024 | 312 |
Supporting communities through our global employee giving program | |||
Through our global Employee Giving program, we encourage employees to become involved in their local communities by donating their time, skills and resources to charitable organizations. Through employee giving, we contributed €162 per employee against our target of contributing €500 per employee by 2025. 2024 marked the second full year of our Matching Gifts program, which gives our employees a voice in our philanthropic contributions. For eligible employees globally, we matched donations to non- profit organizations up to €10,000 per employee, per calendar year – an increase from 2023, when we matched up to €1,000 per employee. In 2024, we supported more than 2,200 non-profit organizations through matching gifts. Our employees are also entitled to eight hours of volunteering time off per year. Our employees contributed a total of 41,368 volunteering hours (2023: 30,450) to community involvement. The total cost of volunteering – part of employee giving – increased to €3.1m in 2024 (2023: €2.2m). | To celebrate our 40th anniversary, we also renewed our commitment to be a valued partner in our communities by focusing on employee giving. We encouraged everyone to participate in our global volunteering program through our '40 days of volunteering' initiative, during which we aimed to donate 4,000 hours of our time to communities worldwide – and we exceeded this number by reaching more than 5,000 hours through this initiative in 2024. Earlier in 2024, we offered all employees a €37 credit to donate to a non-profit of their choice, and we also ran a double gift- matching campaign for 40 days, which resulted in more than €2 million in total donations to non-profits around the world. In September 2024, CEO Christophe Fouquet visited the office of ASML in San Jose in the US, to experience the partnership with Second Harvest of Silicon Valley, a food bank that provides food to an average of about 500,000 people every month in the Santa Clara and San Mateo counties – including more than 135,000 children and 120,000 senior citizens. ASML has committed to supporting Second Harvest with $1 million a year for five years, which goes toward building a new food distribution facility. We also donate $250,000 a year to their operations, enabling them to provide free, nutritious groceries. | ||
Small acts can create a big impact: that’s the spirit in which thousands of ASML colleagues volunteer their time every year with organizations that make a positive contribution to our communities. |
SUSTAINABILITY | ASML Annual Report 2024 | 313 |
Our scope | |
Why it matters: Impacts, risks and opportunities | |||
For attractive communities we have identified the following: | |||
Impacts: | |||
Pressure on availability of affordable housing in Veldhoven due to demand from employees | |||
Car congestion and pressure on regional infrastructure due to employee commuting | |||
Pressure on social cohesion in Veldhoven local community due to a more diverse local population including ASML expats | |||
Risks and opportunities: | |||
Failure to create an attractive community for future employees, could impact our ability to attract talent | |||
Failure to create an attractive community for future talent, could impact our ability to effectively manage our local supply chain output | |||
Addressing adverse reactions from local communities could impact our ability to effectively manage our business | |||
Adverse reactions from local communities could impact our ability to grow in Veldhoven | |||
Read more in Strategic report – Performance and risk – Risk | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Amount invested to ensure attractive communities | €/employee | €257 | n/a | 2025 | Off track p |
Our actions and resources | |
SUSTAINABILITY | ASML Annual Report 2024 | 314 |
Other activities we’ve been involved in: | ||
ASML Marathon Eindhoven: The 40th edition of the ASML Marathon Eindhoven, with 38,000 runners from around the world. Over 3,300 ASML employees took part in the various races. As the title partner, we covered the entry costs for 500 local residents with limited resources, as well as for all our employee runners. | ||
Van Gogh museum: In Brabant, we increased access to the Van Gogh Village Museum in Nuenen by making entry free for all children under 18. GLOW Light Art Festival: We were a partner and sponsor of the annual GLOW Light Art in Eindhoven, displaying the works of famous national and international light artists throughout the city center. In 2024, around several hundred thousand people visited the festival. Drop of Light exhibit and experience lab: At the 2024 Taiwan Lantern Festival, we presented our ‘Drop of Light’ exhibit, as well as an experience lab to learn more about STEM concepts. The festival, held in Tainan, welcomed around 150,000 visitors. The exhibit, produced by artist Gijs van Bon together with 130 ASML engineers, was inspired by the light source inside our EUV lithography systems. Partnership with PSV: We sponsor PSV Eindhoven football club, together with other regional businesses, jointly promoting 'Brainport Eindhoven' on the players' shirts. In addition, we have enabled access to matches for thousands of underserved local residents through our ASML Community Lounge at the stadium. | ||
SUSTAINABILITY | ASML Annual Report 2024 | 315 |
Looking ahead | |

SUSTAINABILITY | ASML Annual Report 2024 | 316 |
Our scope | |
Why it matters: Impacts, risks and opportunities | |||
For inclusive communities we have identified the following: | |||
Impacts: | |||
Pressure on Veldhoven's regional talent pipeline impacting local companies due to ASML's demand for talent | |||
Pressure on social cohesion in Veldhoven local community due to a more diverse local population including ASML expats | |||
Risks and opportunities: | |||
Failure to create an attractive community for future talent, could impact our ability to effectively manage our local supply chain output | |||
Failure to create an attractive community for future employees, could impact our ability to attract talent | |||
Read more in Strategic report – Performance and risk – Risk | |||
Targets and performance |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Amount invested to ensure inclusive communities | €/employee | €189 | n/a | 2025 | Off track p |
Our actions and resources | |
SUSTAINABILITY | ASML Annual Report 2024 | 317 |
Other activities we’ve been involved in: | ||||
Boys & Girls Clubs (US) In 2023, we expanded our partnership with the Boys & Girls Clubs of Silicon Valley to support their summer enrichment and college readiness programs through 2025. Their summer programs offer lower- income students opportunities to participate in sports, arts and wellness- focused camps, while the college readiness program provides leadership, job readiness and financial literacy skills, encouraging academic and career- oriented goals. Our partnerships in Silicon Valley, San Diego and Bridgeport, Connecticut will also continue to grow with STEM-focused programming and support. ASML School Football Tournament (NL) In collaboration with youth organization Dynamo Jeugdwerk and the FC Eindhoven Foundation, we organized an ASML school football tournament in 2024 for all primary and secondary schools in Eindhoven and the Kempen region. To eliminate financial barriers, participation was free for all youngsters. A total of 335 teams with more than 3,000 participants competed from across the region. As of 2025, we expect to scale and support 4,000 children per year in the Brainport Eindhoven area. | Weekend and after-school programs (NL) Students from disadvantaged backgrounds often face educational and career development challenges due to inequality of opportunity. They may fall behind in school due to a lack of self- confidence, role models or perspective, or limited support and guidance. Our partnership with weekend schools focuses on giving children support and guidance, as well as building their confidence, skills and networks. These programs, which typically start when children are 10 or 11 years old, take place on Sundays or after school. We provide financial support to help scale these proven programs in the region. | |||
Looking ahead | |
SUSTAINABILITY | ASML Annual Report 2024 | 318 |
Our scope | |
Performance indicator | Unit | 2024 | Target | Target date | Status |
Amount invested for STEM education | €/employee | €177 | n/a | 2025 | Off track p |
Why it matters: Impacts, risks and opportunities | |||
For STEM we have identified the following: | |||
Impacts: | |||
Pressure on Veldhoven's regional talent pipeline impacting local companies due to ASML's demand for talent | |||
Risks and opportunities: | |||
Failure to create an attractive community for future talent, impacting our ability to effectively manage our local supply chain output | |||
Read more in Strategic report – Performance and risk – Risk | |||
Targets and performance |
Our actions and resources | |
SUSTAINABILITY | ASML Annual Report 2024 | 319 |
Looking ahead | |


SUSTAINABILITY | ASML Annual Report 2024 | 320 |
Methodology on targets | |

SUSTAINABILITY | ASML Annual Report 2024 | 321 |
Our ambition | ||
Strong governance builds strong corporations. Our aim is to implement policies that maintain the highest standards of integrity, create long-term value for our stakeholders and help build a fairer, more cohesive society. | ||
On the following pages, we set out our approach and progress to date. | ||
![]() | ||
ESG integrated governance | ||
We aim to make sustainability part of all regular day-to-day decision-making, and deliver on our ESG sustainability mission and responsibilities. ESG is part of all regular, day-to-day decision-making. | ||
We’ll do this by focusing on the following sub-topics: | ||
•Responsible business conduct and compliance (covering compliance with Business ethics and Code of Conduct and Anti-bribery and anti-corruption) | ||

Transparent reporting | ||||||
We are open and transparent, driving progress while building trust with our stakeholders. Our commitment to integrated reporting reflects our view that our ESG-related information is as important as our financial information. ‘Open and transparent’ reporting, according to our stakeholders. | ![]() | |||||
We’ll do this by focusing on: | ||||||
•Internal reporting and communications •External reporting and communications | ||||||
Engaged stakeholders | ||||||
![]() | We want to be viewed by our stakeholders as a top performer on ESG sustainability, as we depend on strong, sustainable relationships with them across the value chain. Our stakeholders view ASML as a top performer on ESG sustainability. | We’ll do this by focusing on the following stakeholder groups: | ||||
•Customers •Employees •Suppliers •Shareholders •Society | ||||||
Read more in Strategic report – Our business – | ||||||
SUSTAINABILITY | ASML Annual Report 2024 | 322 |
Why it matters |

Our policies affect different groups of stakeholders: customers, employees, suppliers, shareholders and society at large. Having their trust and collaborating with these groups to inform our wider ESG strategy is important: | |
...for our customers | |
We aim to be a trusted supplier. We have corporate policies and procedures in place detailing our principles and compliance, guiding us in making the right decisions and living up to our values. | |
...for our employees | |
They will only feel empowered to share their views if we foster a culture of transparency and respect – which is why our Integrated Governance Policy is based on our company values, purpose, vision and mission. | |
...for our suppliers | |
We aim to inform our suppliers to ensure we conduct business in a compliant way, compliant with applicable laws and regulations in all countries we operate in. | |
...for our shareholders | |
We aim to report transparently so our shareholders can make well- informed decisions. | |
...for society | |
We aim to be transparent about the economic, environmental and social impact of our activities and our performance goals, metrics and results. | |
Read more about our double materiality process and identified impacts, risks and opportunities for this theme in Sustainability management |
...for the planet | ...for ASML | |
![]() | ![]() | |
Sustainability matters to stakeholders up and down our value chain, and together we are building a shared consensus of the importance of ESG-driven thinking. Integrity, honesty and transparency inform our entire ESG approach, including the decisions we make and disclose about our performance. As part of this, to ensure we can create long-term value for our stakeholders, we want to have good relationships with our stakeholders and support those who are more vulnerable, ensure compliance with data privacy regulations, and have more political engagement with regard to ESG topics. | We aim to act on our responsibilities and anchor ESG sustainability across our entire business. Robust integrated governance policies and an ongoing commitment to responsible business conduct and risk management are essential. Ethics and compliance are a foundation to our sustainability strategy. We aim to foster a fair, transparent and inclusive culture – one where people feel empowered to speak up about the changes needed to make our sustainability transition a success. |

SUSTAINABILITY | ASML Annual Report 2024 | 323 |
Our objective | |
We manage ESG sustainability as an integral part of our corporate strategy and are committed to conducting business in compliance with all applicable laws and regulations in all the countries we operate in. We champion good integrated corporate governance to build a relationship of trust, respect and mutual benefit with our stakeholders. To that end, we aim for ESG to be part of all regular, day-to-day decision- making. | |
![]() | |||
Business ethics and Code of Conduct | |||
We are committed to ethical business practices and adherence to the highest standards of fairness, integrity and compliance in every country where we operate. | |||
![]() | |||
Anti-bribery and anti-corruption | |||
If we are to demand the highest standards of employees, customers, suppliers, contractors and other business partners, we must go above and beyond in embodying the same. We do not tolerate any form of bribery or corruption. | |||
Specific roles and responsibilities for this topic | ||
Our business ethics governance model is built around the following roles and responsibilities: •The Compliance, Ethics, Security and Risk Committee (CESR) is responsible for policymaking and supervision of our compliance with legal and ethical requirements. The CESR receives quarterly updates on the ethics program. •Our CESR Ethics Committee investigates significant notifications of potential breaches of our Code of Conduct worldwide. •Our Ethics & Business Integrity team oversees and implements our Ethics program. All reports of a possible breach of our Code of Conduct are screened by one of the team members and significant reports are discussed with the CESR Ethics Committee. •Our Ethics organization includes employees who act as ethics liaisons in the countries where we operate. They serve as trusted representatives and are the first local point of contact for employees who have questions or concerns. | ||
Read more about roles and responsibilities in | ||
SUSTAINABILITY | ASML Annual Report 2024 | 324 |
Our approach | |

SUSTAINABILITY | ASML Annual Report 2024 | 325 |
Levers for action |
SUSTAINABILITY | ASML Annual Report 2024 | 326 |
Our scope | |
Why it matters: Impacts, risks and opportunities | |||
For Business ethics and Code of Conduct, we have identified the following: | |||
Impacts: | |||
Impact on people, the environment and the supply chain through the management of relationships with suppliers | |||
Risks and opportunities: | |||
Failure to comply with regulations due to increasing complexity as we expand into more countries | |||
F a i l u r e t o c o m p l y w i t h r e g u l a t i o n s d u e t o i n c r e a s i n g c o m p l e x i t y a s w e e x p a n d i n t o m o r e c o u n t r i e s | Failure to comply with laws and regulations for supply chain due diligence | ||
Failure to comply with data privacy regulations or breaches of data privacy | |||
Read more in Strategic report – Performance and risk – Risk | |||
Our targets and performance | |
Our actions and resources | |
SUSTAINABILITY | ASML Annual Report 2024 | 327 |
Looking ahead | |
SUSTAINABILITY | ASML Annual Report 2024 | 328 |
Our scope | |
Why it matters: Impacts, risks and opportunities | |||
For anti-bribery and anti-corruption we have identified the following: | |||
Impacts: | |||
Impact on people, the environment and the supply chain through the management of relationships with suppliers | |||
Risks and opportunities: | |||
Failure to comply with regulations due to increasing complexity as we expand into more countries | |||
F a i l u r e t o c o m p l y w i t h r e g u l a t i o n s d u e t o i n c r e a s i n g c o m p l e x i t y a s w e e x p a n d i n t o m o r e c o u n t r i e s | Failure to comply with laws and regulations for supply chain due diligence | ||
Failure to comply with data privacy regulations or breaches of data privacy | |||
Read more in Strategic report – Performance and risk – Risk | |||
Our targets and performance | |
Our actions and resources | |
Looking ahead | |

SUSTAINABILITY | ASML Annual Report 2024 | 329 |
Topic | Description | Unit | 2024 | ||
Governance | |||||
Number of convictions for violation of anti-corruption and anti-bribery laws | 0 | ||||
Monetary value of fines for violation of anti-corruption and anti-bribery laws | € | 0 | |||
Number of complaints filed through channels for own workforce | 93 | ||||
Number of incidents of discrimination including harassment | 60 | ||||
Monetary value of fines, penalties and compensation for damages as a result of complaints or incidents of discrimination including harassment | € | 0 | |||
Number of severe human rights incidents | 0 | ||||
Monetary value of fines, penalties and compensations for damages as a result of severe human rights incidents | € | 0 |

SUSTAINABILITY | ASML Annual Report 2024 | 330 |
Methodology on metrics | |

SUSTAINABILITY | ASML Annual Report 2024 | 331 |
Consolidated financial statements | ||
Report of independent registered public accounting firm | ||
Consolidated statements of operations | ||
Consolidated statements of comprehensive income | ||
Consolidated balance sheets | ||
Consolidated statements of shareholders’ equity | ||
Consolidated statements of cash flows | ||
Notes to the Consolidated financial statements |
SUSTAINABILITY | ASML Annual Report 2024 | 332 |
SUSTAINABILITY | ASML Annual Report 2024 | 333 |
SUSTAINABILITY | ASML Annual Report 2024 | 334 |
Year ended December 31 (€, in millions, except per share data) | Notes | 2022 | 2023 | 2024 | |
Net system sales | |||||
Net service and field option sales | |||||
Total net sales | 2, 3 | ||||
Cost of system sales | ( | ( | ( | ||
Cost of service and field option sales | ( | ( | ( | ||
Total cost of sales1 | ( | ( | ( | ||
Gross profit | |||||
Research and development (R&D) costs | ( | ( | ( | ||
Selling, general and administrative (SG&A) costs | ( | ( | ( | ||
Income from operations | |||||
Interest and other, net | 16 | ( | |||
Income before income taxes | |||||
Income tax expense | 21 | ( | ( | ( | |
Income after income taxes | |||||
Profit from equity method investments | 9 | ||||
Net income | |||||
Basic net income per ordinary share | 23 | ||||
Diluted net income per ordinary share | 23 | ||||
Number of ordinary shares used in computing per share amounts: | |||||
Basic | 23 | ||||
Diluted | 23 |
SUSTAINABILITY | ASML Annual Report 2024 | 335 |
Year ended December 31 (€, in millions) | Notes | 2022 | 2023 | 2024 | |
Net income | |||||
Other comprehensive income (OCI): | |||||
Proportionate share of OCI from equity method investments | ( | ||||
Foreign currency translation, net of taxes: | |||||
Gain (loss) on foreign currency translation | ( | ||||
Financial instruments, net of taxes: | |||||
Gain (loss) on derivative financial instruments | ( | ||||
Transfers to net income | 25 | ( | ( | ||
Other comprehensive income, net of taxes | ( | ||||
Total comprehensive income, net of taxes | |||||
Attributable to equity holders |
SUSTAINABILITY | ASML Annual Report 2024 | 336 |
As of December 31 (€, in millions, except share and per share data) | Notes | 2023 | 2024 | |
Assets | ||||
Cash and cash equivalents | 4 | |||
Short-term investments | 4 | |||
Accounts receivable, net1 | 5 | |||
Finance receivables, net | 6 | |||
Current tax assets | 21 | |||
Contract assets | 2 | |||
Inventories, net | 7 | |||
Other assets2 | 8 | |||
Total current assets | ||||
Finance receivables, net | 6 | |||
Deferred tax assets | 21 | |||
Loans receivable3 | 26 | |||
Other assets4 | 8 | |||
Equity method investments | 9 | |||
Goodwill | 11 | |||
Other intangible assets, net | 12 | |||
Property, plant and equipment, net | 13 | |||
Right-of-use assets | 14 | |||
Total non-current assets | ||||
Total assets | ||||
As of December 31 (€, in millions, except share and per share data) | Notes | 2023 | 2024 | |
Liabilities and shareholders’ equity | ||||
Accounts payable5 | ||||
Accrued and other liabilities6 | 15 | |||
Current tax liabilities | 21 | |||
Current portion of long-term debt | 16 | |||
Contract liabilities | 2 | |||
Total current liabilities | ||||
Long-term debt | 16 | |||
Deferred and other income tax liabilities | 21 | |||
Contract liabilities | 2 | |||
Accrued and other liabilities | 15 | |||
Total non-current liabilities | ||||
Total liabilities | ||||
Ordinary shares; € | ||||
Issued and outstanding shares | ||||
Share premium | ||||
Treasury shares at cost | ( | ( | ||
Retained earnings | ||||
Accumulated other comprehensive income | ||||
Total shareholders’ equity | 22 | |||
Total liabilities and shareholders’ equity |
SUSTAINABILITY | ASML Annual Report 2024 | 337 |
Notes | Issued and outstanding shares | Share premium | Treasury shares at cost | Retained earnings | OCI1 | Total | |||
(€, in millions) | Number | Amount | |||||||
Balance at January 1, 2022 | ( | ||||||||
Components of comprehensive income: | |||||||||
Net income | — | — | — | — | — | ||||
Proportionate share of OCI from equity method investments | — | — | — | — | — | ||||
Gain (loss) on foreign currency translation | — | — | — | — | — | ||||
Gain (loss) on financial instruments | 25 | — | — | — | — | — | ( | ( | |
Total comprehensive income | — | — | — | — | |||||
Purchase of treasury shares | 22 | ( | — | ( | — | — | ( | ||
Cancellation of treasury shares | 22 | — | ( | — | ( | — | |||
Share-based payments | 20 | — | — | — | — | — | |||
Issuance of shares | 20 | ( | ( | — | |||||
Dividend paid | 22 | — | — | — | — | ( | — | ( | |
Balance at December 31, 2022 | ( | ||||||||
Components of comprehensive income: | |||||||||
Net income | — | — | — | — | — | ||||
Proportionate share of OCI from equity method investments | — | — | — | — | — | ||||
Gain (loss) on foreign currency translation | — | — | — | — | — | ( | ( | ||
Gain (loss) on financial instruments | 25 | — | — | — | — | — | ( | ( | |
Total comprehensive income | — | — | — | — | ( | ||||
Purchase of treasury shares | 22 | ( | — | — | ( | — | — | ( | |
Cancellation of treasury shares | 22 | — | ( | — | ( | — | |||
Share-based payments | 20 | — | — | — | — | — | |||
Issuance of shares | 20 | ( | ( | — | |||||
Dividend paid | 22 | — | — | — | — | ( | — | ( | |
Balance at December 31, 2023 | ( | ||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 338 |
Notes | Issued and outstanding shares | Share premium | Treasury shares at cost | Retained earnings | OCI1 | Total | |||
(€, in millions) | Number | Amount | |||||||
Balance at December 31, 2023 | ( | ||||||||
Components of comprehensive income: | |||||||||
Net income | — | — | — | — | — | ||||
Proportionate share of OCI from equity method investments | — | — | — | — | — | ( | ( | ||
Gain (loss) on foreign currency translation | — | — | — | — | — | ||||
Gain (loss) on financial instruments | 25 | — | — | — | — | — | |||
Total comprehensive income | — | — | — | — | |||||
Purchase of treasury shares | 22 | ( | ( | — | ( | — | — | ( | |
Cancellation of treasury shares | 22 | — | ( | — | ( | — | |||
Share-based payments | 20 | — | — | — | — | — | |||
Issuance of shares | 20 | — | ( | ( | — | ||||
Dividend paid | 22 | — | — | — | — | ( | — | ( | |
Balance at December 31, 2024 | ( | ||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 339 |
Year ended December 31 (€, in millions) | Notes | 2022 | 2023 | 2024 | |
Cash flows from operating activities | |||||
Net income | |||||
Adjustments to reconcile net income to net cash flows from operating activities: | |||||
Depreciation and amortization1 | 12, 13 | ||||
Impairment and loss on disposal | 12, 13 | ||||
Share-based compensation expense | 18, 20 | ||||
Inventory reserves | 7 | ||||
Deferred tax expense (benefit) | 21 | ( | ( | ( | |
Equity method investments2 | 9 | ||||
Changes in assets and liabilities: | |||||
Accounts receivable, net | 5 | ( | ( | ||
Finance receivables, net | 6 | ( | |||
Inventories | 7 | ( | ( | ( | |
Other assets | 8 | ( | ( | ( | |
Accrued and other liabilities | 15 | ||||
Accounts payable | ( | ||||
Current tax assets and liabilities | 21 | ( | |||
Contract assets and liabilities | 2 | ( | |||
Net cash provided by operating activities | |||||
Cash flows from investing activities | |||||
Purchase of property, plant and equipment3 | 13 | ( | ( | ( | |
Purchase of intangible assets | 12 | ( | ( | ( | |
Purchase of short-term investments | 4 | ( | ( | ( | |
Maturity of short-term investments | 4 | ||||
Loans issued and other investments4 | 26 | ( | ( | ( | |
Acquisition of subsidiaries (net of cash acquired) | 10 | ( | |||
Net cash used in investing activities | ( | ( | ( |
Year ended December 31 (€, in millions) | Notes | 2022 | 2023 | 2024 | |
Cash flows from financing activities | |||||
Dividend paid | 22 | ( | ( | ( | |
Purchase of treasury shares | 22 | ( | ( | ( | |
Net proceeds from issuance of shares | 20 | ||||
Net proceeds from issuance of notes, net of issuance costs | 16 | ||||
Repayment of debt and finance lease obligations | 14, 16 | ( | ( | ( | |
Net cash used in financing activities | ( | ( | ( | ||
Net cash flows | ( | ||||
Effect of changes in exchange rates on cash | ( | ( | |||
Net increase (decrease) in cash and cash equivalents | ( | ||||
Cash and cash equivalents at beginning of the year | 4 | ||||
Cash and cash equivalents at end of the year | 4 | ||||
Supplemental disclosures of cash flow information | |||||
Unpaid portion of property, plant and equipment, excluded in investing activities, included in accounts payable | |||||
Interest received | |||||
Interest paid | ( | ( | ( | ||
Income taxes paid, net of refunds | ( | ( | ( |
SUSTAINABILITY | ASML Annual Report 2024 | 340 |
SUSTAINABILITY | ASML Annual Report 2024 | 341 |
SUSTAINABILITY | ASML Annual Report 2024 | 342 |
Goods or services | Nature, timing of satisfying the performance obligations and significant payment terms | |
New systems | New systems sales include i-line, KrF, ArF dry, ArF immersion, NXE and EXE-related systems, along with the related factory options ordered with the base system, as well as metrology and inspection systems. | |
Prior to shipment, the majority of our systems undergo a factory acceptance test (FAT) in our cleanroom facilities, effectively replicating the operating conditions that will be present on the customer’s site, in order to verify whether the system meets its standard specifications and any additional technical and performance criteria agreed with the customer. | ||
A system undergoing FAT is shipped only after all contractual specifications are met or discrepancies from agreed-upon specifications are waived and customer sign-off is received for delivery. Each system’s performance is re-tested through a site acceptance test (SAT) after installation at the customer site. We have never failed to successfully complete installation of a system at a customer’s premises; therefore, acceptance at FAT is considered to be proven for established technologies with a history of successful customer acceptances at SAT (equal or better than FAT). | ||
Transfer of control and recognition of revenue of a system undergoing a FAT, and for which customer acceptance at FAT is proven, will occur upon delivery of the system. | ||
Transfer of control and recognition of revenue of a system not undergoing a FAT, or for which customer acceptance at FAT is not proven, will occur after successful installation upon customer acceptance of the system at SAT. | ||
New system sales do not meet the requirements for over time revenue recognition because our customers do not simultaneously receive and consume the benefits provided by our performance, or control the asset throughout any stage of our production process, or the systems are considered to have alternative use. | ||
Used systems | We have no repurchase commitments in our general sales terms and conditions; however, we occasionally repurchase systems that we previously manufactured and sold, in order to refurbish and resell the system to a different customer. This repurchase decision is mainly driven by market demand expressed by other customers. | |
Transfer of control of a used system, and recognition of revenue, follow the same logic as for our ‘New systems’. |
SUSTAINABILITY | ASML Annual Report 2024 | 343 |
Goods or services | Nature, timing of satisfying the performance obligations and significant payment terms | |
Field upgrades and options (system enhancements) | Field upgrades and options mainly relate to goods and services that are delivered for systems already installed in the customer factories. Certain upgrades require significant installation efforts, enhancing an asset the customer controls, and therefore resulting in transfer of control over the period of installation. The method of measuring progress is based on what best depicts the satisfaction of our obligation in transferring control. This is generally based on either the cost incurred method, which is estimated using labor hours, or the value transferred method, which is estimated using system performance measurements. For the options and other upgrades for which the customer receives and consumes the benefit at the moment of delivery, the transfer of control and recognition of revenue will occur upon delivery. | |
As long as we are not able to make a reliable estimate of the total efforts needed to complete the upgrade, we only recognize revenue to cover costs incurred. Margin will be realized at the earlier of us being able to make a reliable estimate or completion of the upgrade. | ||
New product introduction | If the installation of new products is determined not to be a separate performance obligation or if there is not a sufficient established history of acceptance on FAT, a new product is considered to be a “new product introduction". | |
Transfer of control and revenue recognition for new product introductions occurs after successful installation and customer acceptance at SAT. Once there is an established history of successful installation and customer acceptance, revenue will be recognized consistent with other systems and goods after transfer of control. | ||
Installation | Installation is provided within the selling price of a system. Installation is considered to be distinct if it does not significantly modify the system being purchased and the customer or a third party could be capable of performing the installation themselves, if desired. Transfer of control takes place over the period of installation from delivery through SAT, measured on a straight-line basis, as our performance is satisfied evenly over this period of time. Installation is not considered to be distinct when recognition of revenue related to a system occurs upon customer acceptance of the system at SAT after installation is complete. | |
Warranties | We provide standard warranty coverage on our systems for and non-consumable parts necessary to repair our systems during these warranty periods. These standard warranties cannot be purchased and do not provide a service in addition to the general assurance the system will perform as promised. As a result, no revenue is allocated to these standard warranties. | |
Both the extended and enhanced warranties on our systems are accounted for as a separate performance obligation, with transfer of control taking place over the warranty period, measured on a straight-line basis, as this is a stand-ready obligation. |
Goods or services | Nature, timing of satisfying the performance obligations and significant payment terms | |
Time-based licenses and related services | Time-based licenses relate to software licenses and the related services which are sold for a period of time. The licenses and the related services are not considered to be individually distinct, as the support services are integral to the customer’s ability to continue to use the software license in the rapidly changing technological environment. The transfer of control takes place over the license term, measured on a straight-line basis, as our performance is satisfied evenly over this period of time. Payments are generally made in installments throughout the license term. | |
Application projects | Application projects are node transition and consulting projects which at times may be provided as free service within a volume purchase agreement. Measuring satisfaction of this performance obligation is performed through an input method based on the labor hours expended relative to the estimated total labor hours, as this best depicts the transfer of control of these kind of services. | |
Service contracts | Service contracts are entered into with our customers to support our systems used in their ongoing operations during the systems life cycle, typically in the form of full-service agreements, limited manpower agreements, other labor agreements, parts availability or parts usage agreements. These services are for a specified period of time and typically have a fixed price. Control transfers over this period of time, measured on a straight-line basis, as these are stand-ready obligations. For service contracts where the price is not fixed, the transaction price has a variable component that is based on the performance of the system. | |
Billable parts and labor | Billable labor represents maintenance services to our systems installed in the customer’s factories while in operation, through purchase orders from our customer. Control over these services is transferred to the customer upon receipt of customer sign-off. | |
Billable parts represent spare parts including optical components relating to our systems installed in the customer’s factories while in operation, through purchase orders from our customer. | ||
Billable parts can be: | ||
•Sold as direct spare parts, for which control transfers point in time upon delivery; or | ||
•Sold as part of maintenance services, where control transfers point in time upon receipt of customer sign-off. | ||
Field projects (relocations) | Field projects represent mainly relocation services. Measuring satisfaction of this performance obligation is performed through an input method based on the labor hours expended relative to the estimated total labor hours, as this best depicts the transfer of control of our service. | |
OnPulse maintenance | OnPulse maintenance services are provided over a specified period of time on our light source systems. Payment is determined by the number of pulses counted from each light source system, which is variable. Invoicing is monthly based on the pulses counted. Revenue is recognized in line with invoicing using the practical expedient in ASC 606-10-55-18. |
SUSTAINABILITY | ASML Annual Report 2024 | 344 |
Year ended December 31 | 2022 | 2023 | 2024 | |||
in units | in € millions | in units | in € millions | in units | in € millions | |
EXE | ||||||
NXE | ||||||
ArF immersion | ||||||
ArF dry | ||||||
KrF | ||||||
I-line | ||||||
Metrology & Inspection | ||||||
Total | ||||||
Year ended December 31 | 2022 | 2023 | 2024 | |||
in units | in € millions | in units | in € millions | in units | in € millions | |
Logic | ||||||
Memory | ||||||
Total | ||||||
Year ended December 31 (€, in millions) | 2023 | 2024 | |||
Contract assets | Contract liabilities | Contract assets | Contract liabilities | ||
Balance at beginning of the year | |||||
Transferred from contract assets to accounts receivables | ( | — | ( | — | |
Revenue recognized during the year ending in contract assets | — | — | |||
Revenue recognized that was included in contract liabilities | — | ( | — | ( | |
Changes as a result of cumulative catch-up adjustments arising from changes in estimates | — | ( | — | ( | |
Remaining performance obligations for which considerations have been received, or for which we have an unconditional right to consideration | — | — | |||
Transfer between contract assets and liabilities | |||||
Other | — | ( | — | ( | |
Total | |||||
SUSTAINABILITY | ASML Annual Report 2024 | 345 |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
New systems | ||||
Used systems | ||||
Net system sales |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |||
Total net sales | Long-lived assets | Total net sales | Long-lived assets | Total net sales | Long-lived assets | |
Japan | ||||||
South Korea | ||||||
Singapore | ||||||
Taiwan | ||||||
China | ||||||
Rest of Asia | ||||||
Netherlands | ||||||
EMEA | ||||||
United States | ||||||
Total | ||||||
SUSTAINABILITY | ASML Annual Report 2024 | 346 |
Year ended December 31 (€, in millions) | 2023 | 2024 | |
Deposits with financial institutions, governments and government-related bodies | |||
Investments in money market funds | |||
Bank accounts | |||
Cash and cash equivalents | |||
Deposits with financial institutions, governments and government-related bodies | |||
Short-term investments |
Year ended December 31 (€, in millions) | 2023 | 2024 | |
Accounts receivable, gross | |||
Allowance for credit losses | |||
Accounts receivable, net |
SUSTAINABILITY | ASML Annual Report 2024 | 347 |
Year ended December 31 (€, in millions) | 2023 | 2024 | |
Finance receivables, gross | |||
Unearned interest | |||
Finance receivables, net | |||
Current portion of finance receivables, gross | |||
Current portion of unearned interest | |||
Non-current portion of finance receivables, net |
(€, in millions) | Amount |
2025 | |
2026 | |
2027 | |
2028 | |
2029 | |
Thereafter | |
Finance receivables, gross |
Year ended December 31 (€, in millions) | 2023 | 2024 | |
Raw materials | |||
Work-in-process | |||
Finished products | |||
Inventories, gross | |||
Inventory reserves | ( | ( | |
Inventories, net |
SUSTAINABILITY | ASML Annual Report 2024 | 348 |
Year ended December 31 (€, in millions) | 2023 | 2024 | |
Balance at beginning of year | ( | ( | |
Additions for the year | ( | ( | |
Effect of changes in exchange rates | ( | ||
Utilization of the reserve | |||
Balance at end of year | ( | ( |
Year ended December 31 (€, in millions) | 2023 | 2024 | |
Advance payments to Carl Zeiss SMT GmbH1 | |||
Prepaid expenses | |||
Derivative financial instruments2 | |||
VAT receivable | |||
Other assets | |||
Other current assets | |||
Advance payments to Carl Zeiss SMT GmbH1 | |||
Prepaid expenses | |||
Derivative financial instruments2 | |||
Compensation plan assets | |||
Other assets | |||
Other non-current assets |
SUSTAINABILITY | ASML Annual Report 2024 | 349 |
SUSTAINABILITY | ASML Annual Report 2024 | 350 |
Category | Estimated useful life |
Brands | |
Intellectual property | |
Developed technology | |
Customer relationships | |
Other |
SUSTAINABILITY | ASML Annual Report 2024 | 351 |
€, in millions | Brands | Intellectual property | Developed technology | Customer relationships | Other | Total |
Cost | ||||||
Balance at January 1, 2023 | ||||||
Additions | ||||||
Disposals | ( | ( | ||||
Effect of changes in exchange rates | ( | ( | ||||
Balance at December 31, 2023 | ||||||
Additions | ||||||
Disposals | ( | ( | ||||
Effect of changes in exchange rates | ( | ( | ||||
Balance at December 31, 2024 | ||||||
Accumulated amortization | ||||||
Balance at January 1, 2023 | ||||||
Amortization | ||||||
Impairment charges | ||||||
Disposals | ( | ( | ||||
Effect of changes in exchange rates | ( | ( | ||||
Balance at December 31, 2023 | ||||||
Amortization | ||||||
Impairment charges | ||||||
Disposals | ( | ( | ||||
Effect of changes in exchange rates | ||||||
Balance at December 31, 2024 | ||||||
Carrying amount | ||||||
December 31, 2023 | ||||||
December 31, 2024 |
SUSTAINABILITY | ASML Annual Report 2024 | 352 |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Cost of sales | ||||
R&D costs | ||||
SG&A | ||||
Total amortization |
€, in millions | Amount |
2025 | |
2026 | |
2027 | |
2028 | |
2029 | |
Thereafter | |
Total |
Category | Estimated useful life |
Buildings | |
Machinery and equipment | |
Leasehold improvements | |
Furniture, fixtures and other |
SUSTAINABILITY | ASML Annual Report 2024 | 353 |
€, in millions | Land and buildings | Machinery and equipment | Leasehold improvements | Furniture, fixtures and other | Total |
Cost | |||||
Balance at January 1, 2023 | |||||
Additions | |||||
Disposals | ( | ( | ( | ( | ( |
Net non-cash movements to/from Inventories | ( | ( | |||
Effect of changes in exchange rates | ( | ( | ( | ( | ( |
Balance at December 31, 2023 | |||||
Additions | |||||
Disposals | ( | ( | ( | ( | ( |
Net non-cash movements to/from Inventories | ( | ( | |||
Effect of changes in exchange rates | ( | ( | |||
Balance at December 31, 2024 | |||||
Accumulated depreciation and impairment | |||||
Balance at January 1, 2023 | |||||
Depreciation | |||||
Impairment charges | |||||
Disposals | ( | ( | ( | ( | ( |
Net non-cash movements to/from Inventories | ( | ( | |||
Effect of changes in exchange rates | ( | ( | ( | ( | ( |
Balance at December 31, 2023 | |||||
Depreciation | |||||
Impairment charges | |||||
Disposals | ( | ( | ( | ||
Net non-cash movements to/from Inventories | ( | ( | |||
Effect of changes in exchange rates | |||||
Balance at December 31, 2024 | |||||
Carrying amount | |||||
December 31, 2023 | |||||
December 31, 2024 |
SUSTAINABILITY | ASML Annual Report 2024 | 354 |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Cost of sales | ||||
R&D costs | ||||
SG&A | ||||
Total depreciation |
Year ended December 31 (€, in millions) | 2023 | 2024 | |
Properties | |||
Cars | |||
Warehouses | |||
Other | |||
Right-of-use assets |
SUSTAINABILITY | ASML Annual Report 2024 | 355 |
Year ended December 31 (€, in millions) | 2023 | 2024 | |
Current | |||
Non-current | |||
Lease liabilities |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Properties | ||||
Cars | ||||
Warehouses | ||||
Other | ||||
Lease expenses |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Total cash flows |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Weighted average remaining lease term (months) | ||||
Weighted average discount rate (%) |
Year ended December 31 (€, in millions) | 2023 | 2024 | |
Costs to be paid1 | |||
Personnel-related items | |||
Derivative financial instruments2 | |||
Lease liabilities3 | |||
Provisions | |||
Standard warranty reserve | |||
Refund liability | |||
Other | |||
Accrued and other liabilities | |||
Less: non-current portion of accrued and other liabilities | |||
Current portion of accrued and other liabilities |
SUSTAINABILITY | ASML Annual Report 2024 | 356 |
Year ended December 31 (€, in millions) | 2023 | 2024 | |
Balance at beginning of year | |||
Additions for the year | |||
Utilization of the reserve | ( | ( | |
Effect of exchange rates | ( | ||
Balance at end of year |
Year ended December 31 (€, in millions) | 2023 | 2024 | |
€ interest annually payable on July 7th | |||
€ 2027 interest annually payable on May 28th | |||
€ 2030 interest annually payable on February 25th | |||
€ interest annually payable on May 7th | |||
€ interest annually payable on May 17th | |||
€ 2025 interest annually payable on December 6th | |||
Debt acquired from Berliner Glas (ASML Berlin GmbH) | |||
Other | |||
Long-term debt | |||
Less: current portion of long-term debt | |||
Non-current portion of long-term debt |
SUSTAINABILITY | ASML Annual Report 2024 | 357 |
€, in millions | Amount |
2025 | |
2026 | |
2027 | |
2028 | |
2029 | |
Thereafter | |
Total debt maturities |
Year ended December 31 (€, in millions) | 2023 | 2024 | |
Amortized cost amount | |||
Fair value interest rate swaps1 | ( | ( | |
Carrying amount |
Year ended December 31 (€, in millions) | 2023 | 2024 | |
Principal amount | |||
Carrying amount | |||
Fair value1 |
SUSTAINABILITY | ASML Annual Report 2024 | 358 |
Payments due by period (€, in billions) | Total | 1 year | 2 years | 3 years | 4 years | 5 years | >5 years |
Long-term debt obligations, including interest1 | |||||||
Lease obligations2 | |||||||
Purchase obligations | |||||||
Total contractual obligations |
SUSTAINABILITY | ASML Annual Report 2024 | 359 |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Wages and salaries | ||||
Social security expenses | ||||
Pension and retirement expenses | ||||
Share-based payments | ||||
Personnel expenses |
Average number of payroll employees in FTEs | 2022 | 2023 | 2024 | |
Netherlands | ||||
Worldwide (including Netherlands) |
Year ended December 31 (in FTE) | 2022 | 2023 | 2024 | |
Customer Support and Sales | ||||
Manufacturing and Supply Chain Management | ||||
Strategic Supply Management | ||||
General and Administrative | ||||
Research and Development | ||||
Total | ||||
Less: Temporary employees | ||||
Payroll employees |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Board of Management | ||||
Former Board of Management1 | ||||
Other employees | ||||
Total STI bonus expenses |
SUSTAINABILITY | ASML Annual Report 2024 | 360 |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Pension plan based on multi-employer union plan | ||||
Pension plans based on defined contribution and other plans | ||||
Pension and retirement expenses |
SUSTAINABILITY | ASML Annual Report 2024 | 361 |
LTI performance plan criteria | Market/Non-market element | Weight |
Relative TSR | Market | |
Strategic value drivers | Non-market | |
Technology Leadership Index | Non-market | |
ESG measures | Non-market | |
Total |
Year ended December 31 | 2022 | 2023 | 2024 |
Share price in € at grant date | |||
Expected volatility ASML | |||
Average volatility of the peer group (market practice) | |||
Vesting period | |||
Dividend yield | |||
Risk free interest rate (Eurozone) | |||
Risk free interest rate (U.S.) |
SUSTAINABILITY | ASML Annual Report 2024 | 362 |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 |
Incurred expenses | |||
Expected expenses of conditionally granted plans in future periods | |||
Weighted average period for recognizing these expected expenses | |||
Recognized income tax benefit (excluding excess income tax benefits) |
EUR-denominated | USD-denominated | |||||||
Year ended December 31 | 2022 | 2023 | 2024 | 2022 | 2023 | 2024 | ||
Total fair value of shares vested during the year (in millions) | ||||||||
Weighted average fair value of shares granted | ||||||||
EUR-denominated | USD-denominated | |||
Number of shares | Weighted average fair value at grant date | Number of shares | Weighted average fair value at grant date | |
Conditional shares outstanding at January 1, 2024 | ||||
Granted | ||||
Vested | ( | ( | ||
Forfeited | ( | ( | ||
Conditional shares outstanding at December 31, 2024 | ||||
EUR-denominated | USD-denominated | |||||||
Year ended December 31 | 2022 | 2023 | 2024 | 2022 | 2023 | 2024 | ||
Weighted average share price at stock option exercise | ||||||||
Aggregate intrinsic value of exercised stock options (in millions) | ||||||||
Weighted average remaining contractual term of exercisable options (in years) | ||||||||
Aggregate intrinsic value of exercisable stock options (in millions) | ||||||||
Aggregate intrinsic value of outstanding stock options (in millions) | ||||||||
SUSTAINABILITY | ASML Annual Report 2024 | 363 |
EUR-denominated | USD-denominated | |||
Number of options | Weighted average exercise price per ordinary share (in €) | Number of options | Weighted average exercise price per ordinary share (in $) | |
Outstanding, January 1, 2024 | ||||
Granted1 | ||||
Exercised | ( | ( | ||
Forfeited | ||||
Expired | ( | ( | ||
Outstanding, December 31, 2024 | ||||
Exercisable, December 31, 2024 | ||||
EUR-denominated | USD-denominated | ||||
Range of exercise prices (in €) | Number of outstanding options | Weighted average remaining contractual life of outstanding (years) | Range of exercise prices (in $) | Number of outstanding options | Weighted average remaining contractual life of outstanding (years) |
Total | Total | ||||
SUSTAINABILITY | ASML Annual Report 2024 | 364 |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Netherlands | ||||
Foreign | ||||
Income before income taxes | ||||
Income tax (expense) / benefit current | ( | ( | ( | |
Income tax (expense) / benefit deferred | ( | ( | ||
Income tax (expense) / benefit Netherlands | ( | ( | ( | |
Income tax (expense) / benefit current | ( | ( | ( | |
Income tax (expense) / benefit deferred | ( | |||
Income tax (expense) / benefit Foreign | ( | ( | ( | |
Total income tax (expense) / benefit current | ( | ( | ( | |
Total income tax (expense) / benefit deferred | ||||
Total income tax (expense) / benefit | ( | ( | ( |
SUSTAINABILITY | ASML Annual Report 2024 | 365 |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Current year tax (expense) / benefit | ( | ( | ( | |
Prior year tax (expense) / benefit | ( | ( | ||
Total current tax (expense) / benefit | ( | ( | ( |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Changes to recognition of operating losses and tax credits | ( | ( | ||
Prior year tax (expense) / benefit | ( | |||
Tax rate changes | ( | |||
Origination and reversal of temporary differences, operating losses and tax credits | ( | |||
Total deferred tax (expense) / benefit |
Year ended December 31 (€, in millions)3 | 2024 |
Top-up tax expense based on local QDMTT1 | ( |
Top-up tax expense based on IIR2 | ( |
Global minimum tax (expense) / benefit | ( |
Year ended December 31 (€, in millions) | 2022 | %1 | 2023 | %1 | 2024 | %1 | |
Income before income taxes | |||||||
Income tax expense based on ASML’s domestic rate | ( | ( | ( | ||||
Effects of tax rates in foreign jurisdictions | ( | ( | ( | ||||
Adjustments in respect of tax-exempt income | |||||||
Adjustments in respect of tax incentives | ( | ( | ( | ||||
Adjustments in respect of prior years’ current taxes | ( | ( | ( | ||||
Adjustments in respect of prior years’ deferred taxes | ( | ( | ( | ||||
Movements in the liability for unrecognized tax benefits | ( | ( | ( | ||||
Global Minimum Tax | ( | ||||||
Change in valuation allowance | ( | ( | |||||
Equity method investments | ( | ( | ( | ||||
Effect of change in tax rates | ( | ( | |||||
Other (credits) and non-tax deductible items | ( | ( | |||||
Income tax expense | ( | ( | ( |
SUSTAINABILITY | ASML Annual Report 2024 | 366 |
SUSTAINABILITY | ASML Annual Report 2024 | 367 |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Liability for unrecognized tax benefits | ( | ( | ( | |
Deferred tax assets | ||||
Deferred tax liabilities | ( | ( | ( | |
Deferred and other tax assets (liabilities) |
SUSTAINABILITY | ASML Annual Report 2024 | 368 |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Balance as at January 1 | ( | ( | ( | |
Gross increases – tax positions in prior period | ( | ( | ( | |
Gross decreases – tax positions in prior period | ||||
Gross increases – tax positions in current period | ( | ( | ( | |
Settlements | ||||
Lapse of statute of limitations | ||||
Effect of changes in exchange rates | ( | ( | ||
Total liability for unrecognized tax benefits | ( | ( | ( | |
Balance of accrued interest and penalties | ( | ( | ( | |
Total liabilities for unrecognized tax benefits including interest and penalties | ( | ( | ( |
Country | Years |
Netherlands | 2021 – 2024 |
US | 2018 – 2024 |
Taiwan | 2019 – 2024 |
South Korea | 2019 – 2024 |
China | 2014 – 2024 |
SUSTAINABILITY | ASML Annual Report 2024 | 369 |
Deferred taxes (€, in millions) | January 1, 2024 | Credits and other | Consolidated Statements of Operations | Income tax recognized in Other Comprehensive Income | Effect of changes in exchange rates | December 31, 2024 | |
Deferred tax assets: | |||||||
Capitalized R&D costs | — | ( | — | ||||
Goodwill | — | ||||||
R&D and other tax credit carry forwards | ( | — | |||||
Inventories | — | — | |||||
Contract liabilities | — | — | |||||
Accrued and other liabilities | — | ( | — | ||||
Operating loss carry forwards | — | ( | — | — | |||
Property, plant and equipment | — | ( | — | ( | |||
Lease liabilities | — | ( | — | ||||
Other intangible assets | — | ( | — | — | |||
Share-based payments | — | — | |||||
Other temporary differences | — | ( | |||||
Total deferred tax assets, gross | ( | ||||||
Valuation allowance1 | ( | — | ( | — | ( | ( | |
Total deferred tax assets, net | ( | ||||||
Deferred tax liabilities: | |||||||
Other intangible assets | ( | — | — | ( | ( | ||
Goodwill | ( | — | ( | — | — | ( | |
Inventories | ( | ||||||
Right-of-use assets | ( | — | — | ( | ( | ||
Property, plant and equipment | ( | — | ( | — | ( | ||
Accrued and other liabilities | ( | — | ( | ||||
Contract liabilities | ( | — | — | — | |||
Long-term debt | ( | — | — | — | ( | ||
Other temporary differences | ( | — | ( | ( | |||
Total deferred tax liabilities | ( | ( | ( | ||||
Net deferred tax assets (liabilities) | ( | ||||||
Classified as: | |||||||
Deferred tax assets – non-current | |||||||
Deferred tax liabilities – non-current | ( | ( | |||||
Net deferred tax assets (liabilities) |
SUSTAINABILITY | ASML Annual Report 2024 | 370 |
Deferred taxes (€, in millions) | January 1, 2023 | Credits and other | Consolidated Statements of Operations | Effect of changes in exchange rates | December 31, 2023 | |
Deferred tax assets: | ||||||
Capitalized R&D costs | — | ( | ( | |||
Goodwill | — | — | ||||
R&D and other tax credit carry forwards | ( | ( | ||||
Inventories | — | ( | ||||
Contract liabilities | — | ( | ||||
Accrued and other liabilities1 | — | ( | ||||
Operating loss carry forwards | — | ( | ||||
Property, plant and equipment | — | ( | ||||
Lease liabilities | — | ( | ||||
Other intangible assets | — | ( | — | |||
Share-based payments | — | ( | ||||
Other temporary differences | — | ( | ||||
Total deferred tax assets, gross | ( | ( | ||||
Valuation allowance2 | ( | — | ( | |||
Total deferred tax assets, net | ( | ( | ||||
Deferred tax liabilities: | ||||||
Other intangible assets | ( | — | ( | |||
Goodwill | ( | — | ( | — | ( | |
Inventories | — | ( | ( | |||
Right-of-use assets | ( | — | ( | ( | ||
Property, plant and equipment | ( | — | ( | ( | ||
Accrued and other liabilities | — | ( | — | ( | ||
Contract liabilities | ( | — | ( | ( | ||
Long-term debt | ( | — | ( | — | ( | |
Other temporary differences | ( | — | ( | ( | ||
Total deferred tax liabilities | ( | ( | ( | |||
Net deferred tax assets (liabilities) | ( | ( | ||||
Classified as: | ||||||
Deferred tax assets – non-current | ||||||
Deferred tax liabilities – non-current | ( | ( | ||||
Net deferred tax assets (liabilities) |
SUSTAINABILITY | ASML Annual Report 2024 | 371 |
Type of shares | Number of shares | Nominal value | Votes per share |
Cumulative preference shares | € | ||
Ordinary shares | € |
Year ended December 31 | 2022 | 2023 | 2024 | |
Issued ordinary shares with nominal value of € | ||||
Issued ordinary treasury shares with nominal value of € | ||||
Total issued ordinary shares with nominal value of € |
SUSTAINABILITY | ASML Annual Report 2024 | 372 |
SUSTAINABILITY | ASML Annual Report 2024 | 373 |
Period | Total number of shares purchased | Average price paid per Share (€) | Total number of shares purchased under programs | Maximum value of shares that may yet be purchased (€ millions) |
January 1 – 31, 2024 | ||||
February 1 – 29, 2024 | ||||
March 1 – 31, 2024 | ||||
April 1 – 30, 2024 | ||||
May 1 – 31, 2024 | ||||
June 1 – 30, 2024 | ||||
July 1 – 31, 2024 | ||||
August 1 – 31, 2024 | ||||
September 1 – 30, 2024 | ||||
October 1 – 31, 2024 | ||||
November 1 – 30, 2024 | ||||
December 1 – 31, 2024 | ||||
Total |
SUSTAINABILITY | ASML Annual Report 2024 | 374 |
Year ended December 31 (€, in millions, except per share data) | 2022 | 2023 | 2024 | |
Net income | ||||
Weighted average number of shares outstanding | ||||
Basic net income per ordinary share | ||||
Weighted average number of shares outstanding | ||||
Plus shares applicable to options and conditional shares | ||||
Diluted weighted average number of shares | ||||
Diluted net income per ordinary share |
SUSTAINABILITY | ASML Annual Report 2024 | 375 |
Year ended December 31 (€, in millions) | 2023 | 2024 | |||
Impact on net income | Impact on equity | Impact on net income | Impact on equity | ||
US dollar | |||||
Japanese yen | ( | ( | ( | ( | |
Taiwanese dollar | ( | ||||
Other currencies | ( | ( | |||
Total | ( | ( | |||
Year ended December 31 (in billions) | 2023 | 2024 | |
US dollar (USD) | |||
Japanese yen (JPY) | |||
Taiwanese dollar (TWD) | |||
South Korean won (KRW) | |||
Chinese yuan (CNY) |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Purchase transactions | ( | |||
Net of taxes | ( | |||
Sales transactions | ||||
Net of taxes |
SUSTAINABILITY | ASML Annual Report 2024 | 376 |
Year ended December 31 (€, in millions) | 2023 | 2024 | |||
Impact on net income | Impact on equity | Impact on net income | Impact on equity | ||
Effect of a | |||||
SUSTAINABILITY | ASML Annual Report 2024 | 377 |
Year ended December 31 (€, in billions) | 2023 | 2024 |
Confirmed obligations outstanding at the beginning of the year | ||
Invoices confirmed during the year | ||
Confirmed invoices paid during the year | ||
Confirmed obligations outstanding at the end of the year |
SUSTAINABILITY | ASML Annual Report 2024 | 378 |
Year ended December 31 (€, in millions) | 2023 | 2024 | |||
Notional amount | Fair value | Notional amount | Fair value | ||
Forward foreign exchange contracts | ( | ||||
Interest rate swaps | ( | ( | |||
Year ended December 31 (€, in millions) | 2023 | 2024 | |||
Assets | Liabilities | Assets | Liabilities | ||
Interest rate swaps – fair value hedges | |||||
Forward foreign exchange contracts – cash flow hedges | |||||
Forward foreign exchange contracts – no hedge accounting | |||||
Total | |||||
Less non-current portion: | |||||
Interest rate swaps – fair value hedges | |||||
Total non-current portion | |||||
Total current portion | |||||
SUSTAINABILITY | ASML Annual Report 2024 | 379 |
Year ended December 31, 2024 (€, in millions) | Level 1 | Level 2 | Level 3 | Total | |
Assets measured at fair value | |||||
Derivative financial instruments1 | |||||
Money market funds2 | |||||
Short-term investments3 | |||||
Total | |||||
Liabilities measured at fair value | |||||
Derivative financial instruments1 | |||||
Assets and liabilities for which fair values are disclosed | |||||
Loan receivable | |||||
Long-term debt4 |
Year ended December 31, 2023 (€, in millions) | Level 1 | Level 2 | Level 3 | Total | |
Assets measured at fair value | |||||
Derivative financial instruments1 | |||||
Money market funds2 | |||||
Short-term investments3 | |||||
Total | |||||
Liabilities measured at fair value | |||||
Derivative financial instruments1 | |||||
Assets and liabilities for which fair values are disclosed | |||||
Loan receivable | |||||
Long-term debt4 |
SUSTAINABILITY | ASML Annual Report 2024 | 380 |
SUSTAINABILITY | ASML Annual Report 2024 | 381 |
Year ended December 31 (€, in millions) | 2023 | 2024 | Maximum exposure to loss | |
Advance payments included in Other assets | ||||
Loan receivable | ||||
Investment agreement for | ||||
Accounts receivable | ||||
Accounts payable | ||||
Cost to be paid included in Accrued and other liabilities |
Year ended December 31 (€, in millions) | 2022 | 2023 | 2024 | |
Total purchases |
SUSTAINABILITY | ASML Annual Report 2024 | 382 |

SUSTAINABILITY | ASML Annual Report 2024 | 383 |
Principal accountant fees and services | ||
Property, plant and equipment | ||
Dutch and US taxation | ||
Financing policy | ||
Government regulation | ||
Offer and listing details | ||
Exchange controls | ||
Documents on display | ||
Controls and procedures | ||
Financial calendar and investor relations | ||
ASML contact information | ||
Change in Registrant’s Certifying Accountant | ||
Reference table 20-F | ||
Definitions | ||
Signatures | ||
Exhibit index |
SUSTAINABILITY | ASML Annual Report 2024 | 384 |
Year ended December 31 | 2023 | 2024 | |||||
(€, in thousands) | KPMG Accountants N.V. | KPMG Network | Total | KPMG Accountants N.V. | KPMG Network | Total | |
Audit fees | 3,509 | 1,152 | 4,661 | 3,857 | 1,188 | 5,045 | |
Audit-related fees | 196 | — | 196 | 812 | 13 | 825 | |
Tax fees | — | — | — | — | — | — | |
All other fees | 28 | 11 | 39 | 85 | 2 | 87 | |
Principal accountant fees | 3,733 | 1,163 | 4,896 | 4,754 | 1,203 | 5,957 | |
SUSTAINABILITY | ASML Annual Report 2024 | 385 |
SUSTAINABILITY | ASML Annual Report 2024 | 386 |
SUSTAINABILITY | ASML Annual Report 2024 | 387 |
SUSTAINABILITY | ASML Annual Report 2024 | 388 |
SUSTAINABILITY | ASML Annual Report 2024 | 389 |
SUSTAINABILITY | ASML Annual Report 2024 | 390 |
SUSTAINABILITY | ASML Annual Report 2024 | 391 |
Year ended December 31 (€, in millions) | 2023 | 2024 |
Deposits with financial institutions, governments and government-related bodies | 1,348.7 | 4,850.4 |
Investments in money market funds | 3,167.4 | 6,379.2 |
Bank accounts | 2,488.6 | 1,506.3 |
Cash and cash equivalents | 7,004.7 | 12,735.9 |
Deposits with financial institutions, governments and government-related bodies | 5.4 | 5.4 |
Short-term investments | 5.4 | 5.4 |

SUSTAINABILITY | ASML Annual Report 2024 | 392 |

Cumulative cash returns (Cash return is cumulative share buyback and dividend paid) |

SUSTAINABILITY | ASML Annual Report 2024 | 393 |
SUSTAINABILITY | ASML Annual Report 2024 | 394 |
SUSTAINABILITY | ASML Annual Report 2024 | 395 |
SUSTAINABILITY | ASML Annual Report 2024 | 396 |
SUSTAINABILITY | ASML Annual Report 2024 | 397 |
SUSTAINABILITY | ASML Annual Report 2024 | 398 |
SUSTAINABILITY | ASML Annual Report 2024 | 399 |
SUSTAINABILITY | ASML Annual Report 2024 | 400 |
SUSTAINABILITY | ASML Annual Report 2024 | 401 |
Item | Form 20-F caption | Location in this document | Page |
Part I | |||
1 | Identity of Directors, Senior Management and Advisers | Not applicable | |
2 | Offer Statistics and Expected Timetable | Not applicable | |
3 | Key information | ||
B. Capitalization and Indebtedness | Not applicable | ||
C. Reasons for the Offer and Use of Proceeds | Not applicable | ||
D. Risk Factors | Risk - Risk factors | ||
4 | Information on the Company | ||
A. History and Development of the Company | Cover page | 1 | |
At a glance | |||
Appendix - Property, plant and equipment | |||
Appendix - Documents on display | |||
Appendix - ASML contact information | |||
B. Business Overview | At a glance | ||
Our marketplace | |||
Note 2 Revenue from contracts with customers | |||
Note 3 Segment disclosure | |||
Appendix - Government regulation | |||
C. Organizational Structure | Corporate governance – Compliance with Corporate governance requirements – Corporate information | ||
D. Property, Plant and Equipment | Note 13 Property, plant and equipment, net | ||
Appendix - Property, plant and equipment | |||
4A | Unresolved Staff Comments | Not applicable | |
5 | Operating and Financial Review and Prospects | ||
A. Operating Results | Financial performance - Performance KPIs | ||
B. Liquidity and Capital Resources | Financial performance - Performance KPIs | ||
Appendix - Financing policy | |||
Consolidated statements of cash flows | |||
Note 4 Cash and cash equivalents and short-term investments | |||
Item | Form 20-F caption | Location in this document | Page |
Note 16 Long-term debt and interest and other costs | |||
Note 17 Commitments and contingencies | |||
Note 25 Financial risk management | |||
C. Research and Development, Patents and Licenses, etc. | How we innovate | ||
Financial performance – Research and development costs | |||
Innovation ecosystem | |||
Information Security - Intellectual Property protection | |||
D. Trend Information | Long-term growth opportunities | ||
Risk - Risk factors | |||
E. Critical Accounting Estimates | Consolidated financial statements - Notes to the Consolidated financial statements - Note 1 General information / summary of general accounting policies | ||
6 | Directors, Senior Management and Employees | ||
A. Directors and Senior Management | Corporate governance | ||
B. Compensation | Remuneration Report | ||
C. Board Practices | Corporate governance | ||
Corporate governance – Supervisory Board report – Supervisory Board committees | |||
D. Employees | Note 18 Personnel expenses and employee information | ||
E. Share Ownership | Corporate governance – AGM and share capital – Major shareholders | ||
Remuneration Report - Board of Management remuneration | |||
Note 20 Share-based compensation | |||
F. Disclosure of a Registrant’s Action to Recover Erroneously Awarded Compensation | Not applicable | ||
7 | Major Shareholders and Related Party Transactions | ||
A. Major Shareholders | Corporate governance – AGM and share capital – Major shareholders | ||
B. Related Party Transactions | Note 26 Related parties and variable interest entities | ||
SUSTAINABILITY | ASML Annual Report 2024 | 402 |
Item | Form 20-F caption | Location in this document | Page |
C. Interests of Experts & Counsel | Not applicable | ||
8 | Financial Information | ||
A. Consolidated Statements and Other Financial Information | Consolidated financial statements | ||
B. Significant Changes | Long-term growth opportunities | ||
Notes to the Consolidated financial statements | |||
9 | The Offer and Listing | ||
A. Offer and Listing Details | Appendix - Offer and listing details | ||
B. Plan of Distribution | Not applicable | ||
C. Markets | Appendix - Offer and listing details | ||
D. Selling Shareholders | Not applicable | ||
E. Dilution | Not applicable | ||
F. Expenses of the Issue | Not applicable | ||
10 | Additional Information | ||
A. Share Capital | Not applicable | ||
B. Memorandum and Articles of Association | Corporate governance | ||
C. Material Contracts | None | ||
D. Exchange Controls | Appendix - Exchange controls | ||
E. Taxation | Appendix - Dutch and US taxation | ||
F. Dividends and Paying Agents | Not applicable | ||
G. Statement by Experts | Not applicable | ||
H. Documents on Display | Appendix - Documents on display | ||
I. Subsidiary Information | Not applicable | ||
J. Annual Report to Security Holders | Not applicable | ||
11 | Quantitative and Qualitative Disclosures About Market Risk | Note 16 Long-term debt and interest and other costs | |
Note 25 Financial risk management | |||
12 | Description of Securities Other Than Equity Securities | Appendix - Offer and listing details | |
Part II | |||
13 | Defaults, Dividend Arrearages and Delinquencies | None | |
14 | Material Modifications to the Rights of Security Holders and Use of Proceeds | None |
Item | Form 20-F caption | Location in this document | Page |
15 | Controls and Procedures | Appendix - Controls and procedures | |
16A | Audit Committee Financial Expert | Supervisory Board report – Supervisory Board committees – Audit Committee | |
16B | Code of Ethics | Governance – ESG integrated governance – Business ethics and Code of Conduct | |
16C | Principal Accountant Fees and Services | Appendix - Principal accountant fees and services | |
16D | Exemptions from the Listing Standards for Audit Committees | Not applicable | |
16E | Purchases of Equity Securities by the Issuer and Affiliated Purchasers | Note 22 Shareholders’ equity | |
16F | Change in Registrant’s Certifying Accountant | Appendix - Change in Registrant’s Certifying Accountant | |
16G | Corporate Governance | Corporate governance – Compliance with Corporate governance requirements – US listing requirements | |
16H | Mine Safety Disclosure | Not applicable | |
16I | Disclosure Regarding Foreign Jurisdictions that Prevent Inspections | Not applicable | |
16J | Insider Trading Policies | Not applicable | |
16K | Cybersecurity | Risk - Risk factors | |
Corporate governance – Information security | |||
Part III | |||
17 | Financial Statements | Not applicable | |
18 | Financial Statements | Consolidated financial statements | |
19 | Exhibits | Exhibit index |
SUSTAINABILITY | ASML Annual Report 2024 | 403 |
Name | Description | |
0–9 | ||
3TG | Tin, tantalum, tungsten and gold | |
A | ||
Affected communities | People or groups of people living or working in areas in which ASML has operations and in areas affected by ASML’s value chain. | |
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AFM | The Dutch Authority for the Financial Markets (Autoriteit Financiële Markten) | |
AGM | Annual General Meeting | |
AI | Artificial intelligence | |
Applied Materials Inc. | Semiconductor equipment company | |
ARCNL | Advanced Research Center for Nanolithography | |
ArF | Argon fluoride | |
ArFi | Argon fluoride immersion | |
ASC | Accounting Standards Codification | |
ASC 606 | Accounting Standards Codification revenue recognition | |
ASC 740 | Accounting Standards Codification provision for income taxes | |
ASML | ASML Holding NV and/or any of its subsidiaries and associates | |
ASML Preference Shares Foundation | Stichting Preferente Aandelen ASML | |
ATP throughput | Throughput of the measured system (in wph) according to the acceptance test protocol. | |
B | ||
BEPS | Base erosion and profit shifting | |
Big data | Extremely large data sets that may be analyzed computationally to reveal patterns, trends and associations. | |
BoM | ASML's Board of Management | |
Bradley Curve | Illustrates the relationship between accidents and corporate culture. | |
Brainport Eindhoven | A technology region in the south of the Netherlands comprising companies, educational institutions and governmental organizations. | |
BREEAM | Building Research Establishment Environmental Assessment Method | |
Brion | Brion Technologies, Inc. | |
C | ||
CAGR | Compound annual growth rate |
Name | Description | |
Canon | Canon Kabushiki Kaisha | |
Capex | Capital expenditures, defined as additions in property, plant and equipment plus additions in intangible assets plus additions in right-of-use assets (operating and finance). | |
Capital resources | Financial, manufactured, intellectual, human, social and relationship, and natural elements employed to produce goods and services. | |
Carl Zeiss SMT | Carl Zeiss SMT GmbH | |
Cash conversion rate | An economic statistic in controlling that represents the relationship between cash flow and net profit. | |
CD | Critical dimension | |
CDP | The Carbon Disclosure Project | |
CEO | Chief Executive Officer | |
CFO | Chief Financial Officer | |
CHIPS and Science Act | The Creating Helpful Incentives to Produce Semiconductors and Science Act of 2022 (CHIPS Act), signed into law in August 2022, designed to boost US competitiveness, innovation and national security. | |
CISO | Chief Information Security Officer | |
CIT | Corporate income tax | |
CLA | Collective labor agreement | |
Cleanroom | The central part of a wafer fab where wafers are processed and the environment is carefully controlled to eliminate dust and other contaminants. | |
CMOS | Complementary metal–oxide semiconductor | |
CO2(e) | Carbon dioxide (equivalent) | |
Code | The Dutch Corporate Governance Code | |
Code of Conduct | Code of ethics and conduct | |
Collective Bargaining Agreement (CBA) | A written agreement that defines the terms and conditions of employment for ASML employees and regulates relationship between ASML, ASML employees, trade unions and duly elected employee representatives. | |
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Company | ASML Holding NV | |
Computational lithography | The use of powerful algorithms and computer modeling of the manufacturing process to optimize reticle patterns by intentionally deforming them to compensate for physical and chemical effects that occur during lithography and patterning. | |
COO | Chief Operations Officer | |
COSO | Committee of Sponsoring Organizations of the Treadway Commission | |
COVID-19 | Coronavirus disease 2019 |
SUSTAINABILITY | ASML Annual Report 2024 | 404 |
Name | Description | |
CPP | ASML’s Community Partnership Program | |
CRMC | Capital Research & Management Company | |
CSPO | Chief Strategic Sourcing & Procurement Officer | |
CSRD | Corporate Sustainability Reporting Directive | |
Cymer | Cymer Inc., Cymer LLC and its subsidiaries | |
D | ||
DDR5 | The 5th generation of double data rate synchronous dynamic random access memory | |
D&E | Development and engineering | |
DEFRA | A comprehensive set of GHG emission factors from the UK Government Department for Environment, Food & Rural Affairs, Department for Energy Security and Net Zero and Department for Business, Energy & Industrial Strategy | |
Deloitte | Deloitte Accountants BV | |
Diversity | The variety of people considering for example gender, neurodiversity, nationality, sexual orientation, people with disabilities and under-represented minorities. | |
D&I | Diversity and inclusion | |
DRAM | Dynamic random-access memory | |
DUV | A lithography technology that uses deep ultraviolet (DUV) light | |
E | ||
E-beam | Electron beam | |
EBIT | Earnings before interest and taxes | |
EHS | Environment, health and safety | |
EHS Competence Center | A group within ASML that defines EHS standards, gathers best practices and helps managers implement them. | |
EMEA | Europe, the Middle East and Africa | |
Employee | Those individuals in an employment relationship with ASML according to national law or practice. Employees in terms of ESRS reporting comprise total payroll employees for financial statement reporting. | |
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Employee turnover | Employees who leave ASML voluntarily or due to dismissal, retirement or death in service, thereby excluding termination by way of reaching the end of agreed contact duration. | |
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EMS | Environmental management system | |
EPE | Edge placement error | |
EPS | Earnings per share |
Name | Description | |
ERM | Enterprise risk management | |
ERP | Enterprise resource planning | |
eScan | ASML’s e-beam wafer inspection system family for targeted in-line defect detection. | |
ESG | Environmental, social and governance | |
ESRS | European Sustainability Reporting Standards | |
ETR | Effective tax rate | |
EU | European Union | |
EU-IFRS | IFRS Accounting Standards as endorsed by the European Union | |
Euribor | Euro Interbank Offered Rate | |
Eurobond | A bond denominated in euros | |
Euroclear Nederland | The Dutch Central Securities Depository (Nederlands Centraal Instituut voor Giraal Effectenverkeer BV). | |
Euronext Amsterdam | Euronext Amsterdam NV | |
EUV | A lithography technology that uses extreme ultraviolet (EUV) light with a wavelength of 13.5 nm – this is the cutting-edge of lithography and provides the highest resolution possible. | |
EVP | Executive Vice President | |
Exchange Act | US Securities Exchange Act of 1934 | |
EXE – EUV 0.55 NA | ASML’s second TWINSCAN platform for EUV lithography, also referred to as EUV 0.55 NA or High NA EUV. | |
F | ||
Fab | Semiconductor fabrication plant | |
FAQ | Frequently asked questions | |
Fast shipment | A fast shipment process skips some of the testing in our factory and provides our customers with earlier access to wafer output capacity. When customer acceptance at FAT is not proven, this leads to a deferral of revenue recognition until SAT. | |
FAT | Factory acceptance test | |
FDII | Foreign-derived intangible income | |
Feature | The elements that make up the pattern for a given layer of a microchip | |
F-Gas | Fluorinated gases (F-gases) is a commonly used word for a group of gases that contain fluorine. | |
Fitch | A leading provider of credit ratings, commentary and research for global capital markets | |
Flash | A type of non-volatile memory used for storing and transferring information | |
Foundry | A contract manufacturer of logic chips |
SUSTAINABILITY | ASML Annual Report 2024 | 405 |
Name | Description | |
Fraunhofer | Applied research organization in Germany | |
FTE | Full-time equivalent | |
G | ||
G-SEED | Green Standard for Energy and Environmental Design (South Korea) | |
GAAP | Generally accepted accounting principles | |
GDP | Gross domestic product | |
Gemba Walk | The Gemba Walk is an opportunity for staff to stand back from their day-to-day tasks to walk the floor of their workplace to identify wasteful activities. | |
GHG | Greenhouse gas | |
GHG neutrality | We define GHG neutrality as having our remaining emissions, after ASML’s efforts to reach our GHG emission reduction targets, compensated by the same amount of tonnes (metric tons) of carbon credits that are verified against recognized quality standards. | |
GPU | Graphics processing unit | |
GRI | Global Reporting Initiative | |
GRI standards | GRI sustainability reporting standards | |
H | ||
High-bandwidth Memory | Type of computer memory designed to provide both high-bandwidth and low-power consumption. | |
HMI | The brand name for ASML’s range of electron beam (e-beam) wafer inspection and metrology systems. | |
Holistic lithography | Our approach to optimizing the entire microchip printing process and enabling affordable scaling in chip technology by integrating lithography systems with computational modeling and wafer metrology and inspection solutions to analyze and control the manufacturing process in real time. | |
Horizon Europe Program | A public-private partnership that facilitates collaboration and strengthens the impact of research and innovation in developing, supporting and implementing EU policies while tackling global challenges. | |
HR&O | Human Resources and Organization | |
HTPCW | High-temperature process cooling water | |
I | ||
IBM | Installed base management | |
IC | Integrated circuit | |
ICT | Information and communication technology | |
ID2PPAC | Integration of processes and modules for the 2 nm node meeting power performance area and cost requirements. |
Name | Description | |
IDM | Integrated device manufacturer | |
IEA | International Energy Agency | |
IFRS | International financial reporting standards | |
i-line | Light with a wavelength of 365 nm, generated by mercury vapor lamps and used in some lithography systems. | |
ILO | International Labor Organization | |
Imaging | The transfer of a pattern onto the photoresist on a wafer using light. | |
imec | Interuniversitair Micro-Elektronica Centrum | |
Immersion lithography | A lithography technique that uses a pool of ultrapure water between the lens and the wafer to increase the lens’s numerical aperture (ability to collect and focus light). This improves both the resolution and depth of focus for the lithography system. | |
Inclusion | Creating a safe and trusting environment where everyone feels empowered to speak up and make a difference and feels accepted for who they are and what they bring to the table. | |
Inclusion score | The overall score related to the questions included in the employment engagement survey that specifically relate to ‘inclusion’. | |
Industrial site | Industrial buildings and offices combined at one location | |
Intel | Intel Corporation | |
Internal Control – Integrated Framework 2013 | Criteria issued by the Committee of Sponsoring Organizations of the Treadway Commission | |
Internet of things (IoT) | A network of physical objects embedded with sensors, actuators, electronics and software that allow the objects to collect and exchange data. | |
IP | Intellectual property | |
IPCC | Intergovernmental Panel on Climate Change | |
IPR | Intellectual property rights | |
IRA | Inflation Reduction Act of 2022 | |
I-REC | International renewable energy certificate | |
IRS | Internal Revenue Service of the United States | |
ISO | International Organization for Standardization | |
ITM | Integrated Talent Management | |
J | ||
JG13+ | Job grade 13 and higher | |
JP Morgan Chase | US-based holder of our New York share register |
SUSTAINABILITY | ASML Annual Report 2024 | 406 |
Name | Description | |
K | ||
KLA-Tencor | KLA-Tencor Corporation | |
KPI | Key performance indicator | |
KPMG | KPMG Accountants N.V. | |
K-Reach | Act on the Registration and Evaluation of Chemicals in South Korea | |
KrF | Krypton fluoride | |
kt | Kilotonne or 1,000 tonnes (1 tonne = unit of mass equal to 1,000 kilograms) | |
kWh | Kilowatt-hour | |
L | ||
LED | Light-emitting diode | |
LEED | Leadership in Energy and Environmental Design | |
LEP | Lifetime Extension Package | |
LGBTQIA+ | Lesbian, gay, bisexual, transgender, queer, intersex, asexual and other identities | |
Lithography | Lithography, or photolithography, is the process in microchip manufacturing that uses light to pattern parts on a silicon wafer. | |
Logic | Integrated devices such as microprocessors, microcontrollers and graphics processing units. Also refers to companies that manufacture such devices. | |
LTI | Long-term incentive | |
Living wage | A wage that provides for the satisfaction of the needs of the employee and his/her family in the light of national economic and social conditions. | |
M | ||
Management Report | The sections Strategic report, Corporate governance, Supervisory Board report and Sustainability statements together form the Management Report. | |
Memory | Microchips, such as NAND Flash and DRAM, that store information. Also refers to companies that manufacture such chips. | |
Metalektro | Multi-employer union plan is managed by PME (Stichting Pensioenfonds van de Metalektro). | |
Metrology | The science of measurement on pattern quality before and during high-volume chip manufacturing. | |
Minimum wage | A national or sub-national lowest wage level established by legislation or collective bargaining. | |
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mm | Millimeter (one thousandth of a meter) | |
MNP | Make Next Platform | |
Moody's | An American credit rating agency that provides corporate ratings. |
Name | Description | |
Mt | Megatonne, a metric unit equivalent to 1 million (106) tonnes, or 1 billion (109) kilograms | |
MW | Megawatt, a metric unit equivalent to one million (106) watt | |
myEHS system | ASML’s health and safety management system | |
N | ||
N1-conversion | A category of 'non-employee' in temporary role (maximum of 12 months) through placement agency, to move into a 'permanent employee' position. | |
NA | Numerical aperture | |
NACE | Statistical Classification of Economic Activities in the European Community | |
NAND | A binary logical operator that gives an output when it receives one or no input; a composite of ‘NOT AND’. | |
Nasdaq | Nasdaq Stock Market LLC | |
NEa | Dutch Emissions Authority (Nederlandse Emissieautoriteit) | |
Net bookings | Net bookings include all system sales orders and inflation related adjustments, for which written authorizations have been accepted. | |
Net-zero target | Setting a net-zero target at the level of an undertaking aligned with meeting societal climate goals means, according to the ESRS: i. achieving a scale of value chain emissions reductions consistent with the abatement required to reach global net-zero in 1.5˚C pathways; and ii. neutralizing the impact of any residual emissions (after approximately 90–95% of GHG emission reduction with the possibility for justified sectoral variations in line with a recognized sectoral pathway) by permanently removing an equivalent volume of CO2. | |
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NGO | Non-governmental organization | |
NIIT | Net investment income tax | |
Nikon | Nikon Corporation | |
NL | The Netherlands | |
nm | Nanometer (one billionth of a meter) | |
Node | A stepping stone in the chipmaking industry’s roadmap for smaller features and more advanced microchips, describes and differentiates generations of semiconductor manufacturing technologies and the chips made with them. Nodes with ‘smaller sizes’ refer to more advanced technologies. | |
Non-employees | Includes both individual contractors supplying labor to ASML (‘self-employed people’) and workers provided by ASML primarily engaged in ‘employment activities’ (NACE Code N78). | |
Non-GAAP | A measure of a company’s historical or future financial performance, financial position or cash flows that are not calculated or presented in accordance with the GAAP. | |
NPR | Non-product-related |
SUSTAINABILITY | ASML Annual Report 2024 | 407 |
Name | Description | |
NV | Naamloze vennootschap, referred to as NV | |
NXE – EUV 0.33 NA | ASML’s first TWINSCAN platform for EUV lithography with a numerical aperture of 0.33 that provides 13 nm resolution to support advanced Logic and Memory chip production, also referred to as EUV 0.33 NA. | |
NXT | An enhanced version of the original TWINSCAN system platform offering significantly improved overlay and productivity. | |
O | ||
OCI | Other comprehensive income | |
OECD | Organisation for Economic Co-operation and Development | |
Other worker | Individuals providing services connected to ASML operations or core activities not meeting the definition of ‘employee’ or ‘non-employee’. | |
Overlay | The layer-to-layer alignment of chip structures | |
Own workforce | Aggregate of 'Employees' and 'Non-employees’ | |
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P | ||
PAS | Philips Automatic Stepper – ASML’s first lithography platform that uses a single stage. | |
Pattern fidelity | A holistic measure of how well the desired pattern is reproduced on the wafer | |
Pattern fidelity control | A holistic approach to controlling the whole process of manufacturing advanced microchips in high volumes that aims to improve overall yields. It draws data from production equipment and computational lithography tools, analyzing it with techniques such as machine learning to provide real-time feedback. | |
Patterning | The process of creating a pattern in a surface to build microchips | |
PCAOB | Public Company Accounting Oversight Board | |
PEP | Productivity Enhancement Package | |
Performance and career development reviews | As part of the ASML Develop and perform cycle, performance and career development reviews refer to the annual evaluations, taking into account the employees’ performance and peer reviews that result in a final overall rating provided by the employees’ direct superior. | |
Permanent employees | Permanent employees are those individuals with long-term employment contracts with ASML wherein there is no established termination date. | |
PFAS | Perfluoroalkyl chemicals | |
PGP | Product generation process | |
Philips | Health technology company, headquartered in the Netherlands | |
PHLX Index | Semiconductor sector index | |
PIs | Performance indicators |
Name | Description | |
PME | Bedrijfstakpensioenfonds Metalektro | |
PR | Product-related | |
Preference shares foundation | Stichting Preferente Aandelen ASML | |
Preference share option | An option to acquire cumulative preference shares in our capital | |
PwC | PricewaterhouseCoopers Accountants NV | |
Q | ||
Q&As | Questions and answers | |
R | ||
R&D | Research and development | |
RBA | Responsible Business Alliance | |
REACH | Registration, evaluation, authorization and restriction of chemicals | |
REC | Renewable Energy Certificate | |
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Recordable work- related injuries | Work-related injury that results in any of the following: (i) death, days away from work, restricted work or transfer to another job, medical treatment beyond first aid, or loss of consciousness; or (ii) significant injury diagnosed by a physician or other licensed healthcare professional, even if it does not result in death, days away from work, restricted work or job transfer, medical treatment beyond first aid or loss of consciousness. | |
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Recoverable amount | The greater out of an asset’s fair value less costs to sell and its value in use | |
Remuneration Policy | The remuneration policy applicable to the Board of Management of ASML Holding NV | |
Reticle | A plate containing the pattern of features to be transferred to the wafer for each exposure | |
ROAIC | Return on average invested capital | |
RoHS | Restriction of hazardous substances | |
S | ||
Standard & Poor's | A stock index of the United States that, due to its broad composition, gives a reliable picture of developments in the American stock market. | |
SAQ | Self-assessment questionnaire | |
Sarbanes-Oxley Act | The Sarbanes-Oxley Act of 2002 | |
SAT | Site acceptance test | |
SB | ASML’s Supervisory Board | |
SBTi | Science-Based Targets initiative |
SUSTAINABILITY | ASML Annual Report 2024 | 408 |
Name | Description | |
SCC | Semiconductor Climate Consortium | |
Scope 1 CO2e emissions | Direct carbon dioxide emissions from resources an organization owns or controls | |
Scope 2 CO2e emissions | Indirect carbon dioxide emissions due to the energy an organization consumes | |
Scope 3 CO2e emissions | All other indirect carbon dioxide emissions that occur in an organization’s value chain | |
Scope 3 CO2e emissions intensity | All other indirect carbon dioxide emissions that occur in an organization’s value chain expressed as a percentage of revenue or gross profit. | |
SDGs | United Nations' Sustainable Development Goals | |
SEC | The United States Securities and Exchange Commission | |
SEMI | Semiconductor Equipment and Materials International | |
SEMI S2 | SEMI S2 – Safety Guideline, Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment, a set of performance-based EHS considerations for semiconductor manufacturing equipment. | |
SEMI S23 | SEMI S23 – Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment, guidelines for collecting, analyzing and reporting energy-consuming semiconductor manufacturing equipment utility data. | |
SG&A | Selling, general and administrative expenses | |
Shrink | The process of developing smaller transistors for more advanced chips. | |
Significant employment country | Operating countries in which ASML has 50 or more employees representing at least 10% of its total number of employees. | |
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Significant employment region | Operating regions in which ASML has 50 or more employees representing at least 10% of its total number of employees. | |
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SNEP | System Node Extension Package | |
SOC | Security Operations Center | |
Social dialogue | Communication and exchanges between or among ASML, its organizations, representatives of governments and workers’ representatives, on issues of common interest relating to economic and social policy. | |
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SSD | Solid-state drive | |
SS&P | Strategic sourcing and procurement | |
Star level | Startups accelerated by Eindhoven Startup Alliance / HighTechXL that show a multiple of investment of above 10 times. | |
STEM | Science, technology, engineering and mathematics |
Name | Description | |
STI | Short-term incentive | |
STR | Stichting Technology Rating, a non-profit organization | |
T | ||
T-REC | Taiwan Renewable Energy Certificate | |
TCC | Total Cash Compensation | |
TCFD | Task Force on Climate-related Financial Disclosures | |
Technical competence | The capabilities and spread of technical expertise among our people, and the extent to which they are embedded in our processes and operations. | |
Temporary employees | Temporary employees are those individuals with a fixed-term agreement with ASML wherein the duration of the contract is agreed upon prior to its commencement. | |
Thales NL | Dutch branch of the international Thales Group | |
Throughput | The number of wafers a system can process per hour | |
Tier 1 (2, 3) supplier | Tier 1 suppliers are direct suppliers, whereas Tier 2, 3 and beyond refer to suppliers of our suppliers. | |
TJ | Terajoule (one trillion joules) | |
TNO | Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek (Netherlands Organisation for Applied Scientific Research) | |
Top management | Top management within ASML has been defined as senior leadership (job grade 13) and higher excluding the Supervisory Board. | |
Training hours | Hours of internal and external learning completed by employees and registered on ASML learning platforms. | |
Transistor | A semiconductor device that is the fundamental building block of microchips | |
TSCA | Toxic Substances Control Act | |
TSMC | Taiwan Semiconductor Manufacturing Company Ltd. | |
TSR | Total shareholder return | |
TU/e | Technische Universiteit Eindhoven | |
TWINSCAN | ASML’s unique lithography system platform, with two complete wafer stages to allow one wafer to be mapped while another is being exposed, thereby enabling higher accuracy and throughput. | |
U | ||
UNGP | United Nations Guiding Principles on Business and Human Rights | |
US | United States | |
US GAAP | Generally accepted accounting principles in the United States of America |
SUSTAINABILITY | ASML Annual Report 2024 | 409 |
Name | Description | |
V | ||
Vanderlande | A material handling and logistics automation company based in the Netherlands | |
VAT | Value-added tax | |
VER(s) | Voluntary emission reduction (certificates) | |
VIE | Variable interest entity | |
VLSI | VLSI Research Inc. | |
VNO-NCW | The Confederation of Netherlands Industry and Employers | |
VOC | Volatile organic compound | |
VP | Vice president | |
VPA | Volume purchase agreement | |
W | ||
WACC | Weighted average cost of capital | |
Wafer inspection | The process of locating and analyzing individual chip defects on a wafer | |
Wafer metrology | The process of measuring the quality of patterns on a wafer | |
Waste intensity | The total waste in millions of kilograms (excluding construction waste) divided by revenue (in millions of euros). | |
Wavelength | The distance between two peaks of a wave such as light. The shorter the wavelength of light used in a lithography system, the smaller the features the system can resolve. | |
Website | asml.com | |
Works Council | Works Council of ASML Netherlands BV | |
wph | Wafers per hour | |
X | ||
XT | ASML’s second TWINSCAN platform for DUV lithography, with two complete wafer stages to allow one wafer to be mapped while another is being exposed, thereby enabling higher accuracy and throughput. | |
Y | ||
YieldStar | ASML’s optical diffraction-based wafer metrology platform | |
Z | ||
ZEISS | Carl Zeiss AG |
SUSTAINABILITY | ASML Annual Report 2024 | 410 |
TCFD Report | 411 |
Exhibit No. | Description | |
1.1 | ||
2.1 | ||
4.1 | ||
4.2 | ||
4.3 | ||
4.4 | ||
4.5 | ||
4.6 | ||
4.7 | 10.15, Carl Zeiss AG (Incorporated by reference to the Registrant’s Annual Report on Form 20-F for the year ended December 31, 2019) 3 | |
4.8 | December 31, 2022) | |
8.1 | ||
12.1 | ||
13.1 |
Exhibit No. | Description | |
15.1 | ||
15.2 | ||
19.1 | ASML Insider Trading Rules (incorporated by reference to the Registrant’s Annual Report on Form 20-F for the year ended December 31, 2023) | |
97.1 | Clawback Policy (incorporated by reference to the Registrant’s Annual Report on Form 20-F for the year ended December 31, 2023) | |
101.INS | XBRL Instance Document 2 | |
101.SCH | XBRL Taxonomy Extension Schema Document 2 | |
101.CAL | XBRL Taxonomy Extension Calculation Linkbase Document 2 | |
101.DEF | XBRL Taxonomy Extension Definition Linkbase Document 2 | |
101.LAB | XBRL Taxonomy Extension Label Linkbase Document 2 | |
101.PRE | XBRL Taxonomy Extension Presentation Linkbase Document 2 | |
104 | Cover Page Interactive Data File (formatted as inline XBRL and contained in Exhibit 101) 2 |